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DE69003175D1 - Verfahren und Vorrichtung zur Plasmaaussenabscheidung von hydroxylionenfreier Silika. - Google Patents

Verfahren und Vorrichtung zur Plasmaaussenabscheidung von hydroxylionenfreier Silika.

Info

Publication number
DE69003175D1
DE69003175D1 DE90110603T DE69003175T DE69003175D1 DE 69003175 D1 DE69003175 D1 DE 69003175D1 DE 90110603 T DE90110603 T DE 90110603T DE 69003175 T DE69003175 T DE 69003175T DE 69003175 D1 DE69003175 D1 DE 69003175D1
Authority
DE
Germany
Prior art keywords
hydroxyl
ion
plasma deposition
free silica
silica
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE90110603T
Other languages
English (en)
Other versions
DE69003175T2 (de
Inventor
Sergent Christian Le
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Lucent SAS
Original Assignee
Alcatel Alsthom Compagnie Generale dElectricite
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel Alsthom Compagnie Generale dElectricite filed Critical Alcatel Alsthom Compagnie Generale dElectricite
Application granted granted Critical
Publication of DE69003175D1 publication Critical patent/DE69003175D1/de
Publication of DE69003175T2 publication Critical patent/DE69003175T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • C03B37/0142—Reactant deposition burners
    • C03B37/01426—Plasma deposition burners or torches
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/02—Pure silica glass, e.g. pure fused quartz
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/08—Doped silica-based glasses doped with boron or fluorine or other refractive index decreasing dopant
    • C03B2201/12—Doped silica-based glasses doped with boron or fluorine or other refractive index decreasing dopant doped with fluorine
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/80—Feeding the burner or the burner-heated deposition site
    • C03B2207/81—Constructional details of the feed line, e.g. heating, insulation, material, manifolds, filters

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Silicon Compounds (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
  • Surface Treatment Of Glass (AREA)
  • Glass Melting And Manufacturing (AREA)
DE90110603T 1989-06-05 1990-06-05 Verfahren und Vorrichtung zur Plasmaaussenabscheidung von hydroxylionenfreier Silika. Expired - Lifetime DE69003175T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8907391A FR2647778B1 (fr) 1989-06-05 1989-06-05 Procede et dispositif de depot externe par plasma de silice exempte d'ions hydroxyles

Publications (2)

Publication Number Publication Date
DE69003175D1 true DE69003175D1 (de) 1993-10-14
DE69003175T2 DE69003175T2 (de) 1994-01-05

Family

ID=9382362

Family Applications (1)

Application Number Title Priority Date Filing Date
DE90110603T Expired - Lifetime DE69003175T2 (de) 1989-06-05 1990-06-05 Verfahren und Vorrichtung zur Plasmaaussenabscheidung von hydroxylionenfreier Silika.

Country Status (5)

Country Link
US (1) US5194714A (de)
EP (1) EP0401742B1 (de)
JP (1) JPH0328140A (de)
DE (1) DE69003175T2 (de)
FR (1) FR2647778B1 (de)

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US6253580B1 (en) 1997-12-19 2001-07-03 Fibercore, Inc. Method of making a tubular member for optical fiber production using plasma outside vapor deposition
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US6041623A (en) * 1998-08-27 2000-03-28 Lucent Technologies Inc. Process for fabricating article comprising refractory dielectric body
FR2790753B1 (fr) 1999-03-08 2001-06-08 Cit Alcatel Procede de fabrication d'une preforme de fibre optique avec depot externe de silice eventuellement dopee
FR2795715B1 (fr) * 1999-07-01 2002-03-15 Cit Alcatel Procede pour le glacage de la surface externe d'une preforme de fibre optique et installation de production de preformes mettant en oeuvre ce procede
IT1308786B1 (it) * 1999-07-05 2002-01-10 Cselt Centro Studi Lab Telecom Procedimento e apparecchiatura per la formazione di strati piani disilice vetrosa mediante l'uso di una torcia a plasma ad accoppiamento
US20020005051A1 (en) * 2000-04-28 2002-01-17 Brown John T. Substantially dry, silica-containing soot, fused silica and optical fiber soot preforms, apparatus, methods and burners for manufacturing same
DE10035951C2 (de) * 2000-07-21 2002-06-27 Heraeus Quarzglas Verfahren zur Herstellung eines Bauteils für die Herstellung optischer Fasern, sowie Verwendung des Bauteils
FR2812288B1 (fr) * 2000-07-31 2003-01-31 Cit Alcatel Procede et dispositif de fabrication d'une preforme de fibre optique
US6748768B2 (en) 2000-12-15 2004-06-15 Corning Incorporated Apparatus and method of doping silica with fluorine during laydown
US20050120752A1 (en) * 2001-04-11 2005-06-09 Brown John T. Substantially dry, silica-containing soot, fused silica and optical fiber soot preforms, apparatus, methods and burners for manufacturing same
US20030027055A1 (en) * 2001-08-01 2003-02-06 Ball Laura J. Method and feedstock for making photomask material
US20030027054A1 (en) * 2001-08-01 2003-02-06 Ball Laura J. Method for making photomask material by plasma induction
US20030070452A1 (en) * 2001-10-12 2003-04-17 Alcatel Process for online spheroidization of quartz and silica particles
FR2847893B1 (fr) 2002-12-02 2006-05-05 Cit Alcatel Procede et dispositif de recharge par plasma d'une preforme pour fibre optique, a oxydes d'azote reduits
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US20060272174A1 (en) * 2005-05-20 2006-12-07 Klaus Hartig Deposition chamber desiccation systems and methods of use thereof
FR2895396B1 (fr) * 2005-12-23 2008-02-22 Draka Comteq France Procede de fabrication d'une preforme de fibre optique
FR2914298B1 (fr) * 2007-03-27 2010-03-12 Draka Comteq France Procede et equipement de fabrication d'une preforme de fibre optique.
US8153925B2 (en) * 2007-12-19 2012-04-10 Illinois Tool Works Inc. Heat exchanger and moisture removal for a plasma cutting system
JP5380018B2 (ja) 2008-09-03 2014-01-08 株式会社フジクラ 光ファイバ母材の製造方法
JP4926164B2 (ja) * 2008-12-26 2012-05-09 信越化学工業株式会社 高周波誘導熱プラズマトーチを用いた光ファイバプリフォームの製造方法及び装置
JP4926165B2 (ja) * 2008-12-26 2012-05-09 信越化学工業株式会社 高周波誘導熱プラズマトーチを用いた光ファイバプリフォームの製造方法及び装置
DE102009011961A1 (de) * 2009-03-10 2010-09-16 Advanced Nuclear Fuels Gmbh Absaugvorrichtung für Gase oder Rauch, insbesondere Schweißrauch, Schweißanlage sowie zugehöriges Verfahren
FR2946436B1 (fr) 2009-06-05 2011-12-09 Draka Comteq France Fibre optique multimode a tres large bande passante avec une interface coeur-gaine optimisee
JP5190966B2 (ja) * 2009-07-27 2013-04-24 信越化学工業株式会社 高周波誘導熱プラズマトーチを用いた光ファイバプリフォームの製造方法
FR2953030B1 (fr) 2009-11-25 2011-11-18 Draka Comteq France Fibre optique multimode a tres large bande passante avec une interface coeur-gaine optimisee
FR2953606B1 (fr) 2009-12-03 2012-04-27 Draka Comteq France Fibre optique multimode a large bande passante et a faibles pertes par courbure
US9014525B2 (en) 2009-09-09 2015-04-21 Draka Comteq, B.V. Trench-assisted multimode optical fiber
FR2953029B1 (fr) 2009-11-25 2011-11-18 Draka Comteq France Fibre optique multimode a tres large bande passante avec une interface coeur-gaine optimisee
FR2949870B1 (fr) 2009-09-09 2011-12-16 Draka Compteq France Fibre optique multimode presentant des pertes en courbure ameliorees
FR2957153B1 (fr) * 2010-03-02 2012-08-10 Draka Comteq France Fibre optique multimode a large bande passante et a faibles pertes par courbure
FR2953605B1 (fr) 2009-12-03 2011-12-16 Draka Comteq France Fibre optique multimode a large bande passante et a faibles pertes par courbure
FR2950156B1 (fr) * 2009-09-17 2011-11-18 Draka Comteq France Fibre optique multimode
EP3399357A1 (de) * 2010-02-01 2018-11-07 Draka Comteq B.V. Dispersionsverschobene optische faser ungleich null mit kurzer abschnittswellenlänge
DK2352047T3 (da) * 2010-02-01 2019-11-11 Draka Comteq Bv Ikke-nul dispersionsskiftet optisk fiber med et stort effektivt areal
EP2369379B1 (de) * 2010-03-17 2015-05-06 Draka Comteq B.V. Optische Monomodefaser mit reduzierten Biegeverlusten
FR2962230B1 (fr) 2010-07-02 2012-07-27 Draka Comteq France Fibre optique monomode
FR2966256B1 (fr) 2010-10-18 2012-11-16 Draka Comteq France Fibre optique multimode insensible aux pertes par
FR2971061B1 (fr) 2011-01-31 2013-02-08 Draka Comteq France Fibre optique a large bande passante et a faibles pertes par courbure
EP2482106B1 (de) 2011-01-31 2014-06-04 Draka Comteq B.V. Multimodusfaser
EP2495589A1 (de) 2011-03-04 2012-09-05 Draka Comteq B.V. Seltene-Erden dotierte Verstärkungsglasfaser für kompakte Vorrichtungen und Herstellungsverfahren dafür
EP2503368A1 (de) 2011-03-24 2012-09-26 Draka Comteq B.V. Multimodus-Glasfaser mit verbesserter Biegefestigkeit
EP2506044A1 (de) 2011-03-29 2012-10-03 Draka Comteq B.V. Multimodus-Glasfaser
EP2518546B1 (de) 2011-04-27 2018-06-20 Draka Comteq B.V. Strahlungsgresistente multimodale optische Faser mit hoher Bandbreite
DK2541292T3 (en) 2011-07-01 2014-12-01 Draka Comteq Bv A multimode optical fiber
WO2013160714A1 (en) 2012-04-27 2013-10-31 Draka Comteq Bv Hybrid single and multimode optical fiber for a home network
CN102705205B (zh) * 2012-05-28 2015-12-23 深圳百时得能源环保科技有限公司 一种空气压缩系统的预处理及变流量装置
NL2014519B1 (en) 2015-03-25 2017-01-25 Draka Comteq Bv A rotary feed-through for mounting a rotating substrate tube in a lathe, a CVD lathe and a corresponding method using the CVD lathe.
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Also Published As

Publication number Publication date
DE69003175T2 (de) 1994-01-05
JPH0328140A (ja) 1991-02-06
EP0401742B1 (de) 1993-09-08
FR2647778B1 (fr) 1992-11-20
FR2647778A1 (fr) 1990-12-07
US5194714A (en) 1993-03-16
EP0401742A1 (de) 1990-12-12

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: ALCATEL, PARIS, FR

8327 Change in the person/name/address of the patent owner

Owner name: ALCATEL LUCENT, PARIS, FR