DE69841980D1 - Piezoelektrisches ventil - Google Patents

Piezoelektrisches ventil

Info

Publication number: DE69841980D1
Authority: DE; Germany
Prior art keywords: piezoelectric valve; piezoelectric; valve
Prior art date: 1997-12-12
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

DE69841980T

Other languages

English (en)

Inventor

Shinji Miyazoe

Makoto Ishikawa

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

SMC Corp

Original Assignee

SMC Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1997-12-12

Filing date

1998-12-11

Publication date

2010-12-16

1998-12-11 Application filed by SMC Corp filed Critical SMC Corp

2010-12-16 Application granted granted Critical

2010-12-16 Publication of DE69841980D1 publication Critical patent/DE69841980D1/de

2018-12-12 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
- F16K31/005—Piezoelectric benders
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K15/00—Check valves
- F16K15/18—Check valves with actuating mechanism; Combined check valves and actuated valves
- F16K15/182—Check valves with actuating mechanism; Combined check valves and actuated valves with actuating mechanism
- F16K15/1825—Check valves with actuating mechanism; Combined check valves and actuated valves with actuating mechanism for check valves with flexible valve members
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/877—With flow control means for branched passages
- Y10T137/87708—With common valve operator
- Y10T137/87716—For valve having a flexible diaphragm valving member
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/877—With flow control means for branched passages
- Y10T137/87877—Single inlet with multiple distinctly valved outlets

Landscapes

Engineering & Computer Science (AREA)
General Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
Electrically Driven Valve-Operating Means (AREA)
Fluid-Driven Valves (AREA)
Reciprocating Pumps (AREA)

DE69841980T 1997-12-12 1998-12-11 Piezoelektrisches ventil Expired - Lifetime DE69841980D1 (de)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
JP34334697		1997-12-12
JP989798		1998-01-21
PCT/JP1998/005623 WO1999031420A1 (en)	1997-12-12	1998-12-11	Piezoelectric valve

Publications (1)

Publication Number	Publication Date
DE69841980D1 true DE69841980D1 (de)	2010-12-16

Family

ID=26344712

Family Applications (2)

Application Number	Title	Priority Date	Filing Date
DE69841980T Expired - Lifetime DE69841980D1 (de)	1997-12-12	1998-12-11	Piezoelektrisches ventil
DE69841617T Expired - Lifetime DE69841617D1 (de)	1997-12-12	1998-12-11	Piezoelektrisches Ventil

Family Applications After (1)

Application Number	Title	Priority Date	Filing Date
DE69841617T Expired - Lifetime DE69841617D1 (de)	1997-12-12	1998-12-11	Piezoelektrisches Ventil

Country Status (8)

Country	Link
US (2)	US6189858B1 (de)
EP (2)	EP0961062B1 (de)
JP (2)	JP3496020B2 (de)
KR (1)	KR100352781B1 (de)
CN (1)	CN1129727C (de)
DE (2)	DE69841980D1 (de)
TW (1)	TW392048B (de)
WO (1)	WO1999031420A1 (de)

Families Citing this family (42)

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Publication number	Priority date	Publication date	Assignee	Title
DE19939477A1 (de) *	1999-08-20	2001-03-22	Bosch Gmbh Robert	Ventil zum Steuern von Flüssigkeiten
JP3845543B2 (ja)	1999-10-01	2006-11-15	日本碍子株式会社	圧電／電歪デバイス及びその製造方法
US6657364B1 (en) *	1999-10-01	2003-12-02	Ngk Insulators, Ltd.	Piezoelectric/electrostrictive device
JP3845544B2 (ja) *	1999-10-01	2006-11-15	日本碍子株式会社	圧電／電歪デバイス及びその製造方法
US7198250B2 (en) *	2000-09-18	2007-04-03	Par Technologies, Llc	Piezoelectric actuator and pump using same
US6340149B1 (en) *	2000-11-27	2002-01-22	Xerox Corporation	Tethered fluid valve apparatus
JP4822198B2 (ja) *	2001-02-21	2011-11-24	並木精密宝石株式会社	空気強制供給用アクチュエータ装置並びに空気強制供給型空気電池
DE10161888A1 (de)	2001-08-14	2003-02-27	Continental Teves Ag & Co Ohg	Piezoelektrisch betätigtes Fluidventil
DE10202996A1 (de) *	2002-01-26	2003-08-14	Eppendorf Ag	Piezoelektrisch steuerbare Mikrofluidaktorik
TW553734B (en) *	2002-11-18	2003-09-21	Rossmax Int Ltd	Air pressure adjustment device
US20060232166A1 (en) *	2005-04-13	2006-10-19	Par Technologies Llc	Stacked piezoelectric diaphragm members
US7594502B1 (en)	2005-12-07	2009-09-29	Anderson Joel A	Projectile loading, firing and warning system
JP4933936B2 (ja) *	2007-03-30	2012-05-16	株式会社フジキン	圧電素子駆動式制御弁
JP5119899B2 (ja) *	2007-12-13	2013-01-16	ソニー株式会社	燃料カートリッジ、燃料電池および発電方法
TW201011954A (en) *	2008-09-15	2010-03-16	Micro Base Technology Corp	Conduction wire structure applied to the inner of micro piezoelectric pump
KR20100085698A (ko) *	2009-01-21	2010-07-29	삼성전기주식회사	잉크젯 헤드
DE102009007317A1 (de) *	2009-02-03	2010-08-12	Continental Automotive Gmbh	Ventil
CN101555957B (zh) *	2009-05-22	2011-06-15	合肥美亚光电技术有限责任公司	一种压电陶瓷喷阀
JP5494658B2 (ja) *	2009-05-25	2014-05-21	株式会社村田製作所	バルブ、流体装置及び流体供給装置
TWI435196B (zh) *	2009-10-15	2014-04-21	Pivotal Systems Corp	氣體流量控制方法及裝置
US8388116B2 (en) *	2009-10-30	2013-03-05	Hewlett-Packard Development Company, L.P.	Printhead unit
KR101142430B1 (ko) *	2010-01-20	2012-05-08	포항공과대학교 산학협력단	마이크로 펌프 및 이의 작동 방법
JP5631631B2 (ja) *	2010-05-21	2014-11-26	株式会社サタケ	圧電式バルブ及び該圧電式バルブを利用する光学式粒状物選別機
US9400004B2 (en)	2010-11-29	2016-07-26	Pivotal Systems Corporation	Transient measurements of mass flow controllers
CN103443514B (zh) *	2011-02-10	2015-05-13	弗路德自动控制系统有限公司	具有密封球的电致动阀
JP5764049B2 (ja) *	2011-12-13	2015-08-12	株式会社サタケ	圧電式バルブ及び該圧電式バルブを利用した噴風手段を備える光学式粒状物選別機
ITTO20130447A1 (it) *	2013-05-31	2014-12-01	St Microelectronics Srl	Valvola microfluidica a membrana e procedimento per fabbricare una valvola microfluidica a membrana
JP2015170185A (ja) *	2014-03-07	2015-09-28	愛三工業株式会社	減圧弁及び圧力調整装置
JP1525031S (de) *	2014-08-07	2015-06-01
JP6304548B2 (ja) *	2014-09-16	2018-04-04	Smc株式会社	スナップ・フィット式バルブ
DE102014114212A1 (de) *	2014-09-30	2016-03-31	Bürkert Werke GmbH	Membranventil
KR101793225B1 (ko) *	2015-06-10	2017-11-03	한국과학기술연구원	곡면형 압전장치
CN107924199A (zh)	2015-07-10	2018-04-17	关键系统公司	用于气体流量控制的方法和设备
DE102016217435B4 (de) *	2016-09-13	2018-08-02	Albert-Ludwigs-Universität Freiburg	Fluidpumpe und Verfahren zum Betreiben einer Fluidpumpe
TWI689665B (zh) *	2017-09-15	2020-04-01	研能科技股份有限公司	氣體輸送裝置
TWI683960B (zh)	2017-09-15	2020-02-01	研能科技股份有限公司	氣體輸送裝置
TWI652408B (zh)	2017-09-15	2019-03-01	研能科技股份有限公司	氣體輸送裝置
TWI650483B (zh) *	2017-09-29	2019-02-11	研能科技股份有限公司	流體系統
TWI653394B (zh)	2017-09-29	2019-03-11	研能科技股份有限公司	流體系統
TWI654375B (zh)	2017-09-29	2019-03-21	研能科技股份有限公司	流體系統
TWI653395B (zh)	2017-09-29	2019-03-11	研能科技股份有限公司	流體系統
JP6937417B1 (ja) *	2020-10-07	2021-09-22	株式会社Taiyo	流体制御弁

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS6048643B2 (ja) *	1976-12-04	1985-10-29	アルバ−ト・フレデリツク・ハンセン	ダイヤフラムバルブ装置
JPS5843626Y2 (ja) *	1978-07-25	1983-10-03	アイシン精機株式会社	集積型バルブセツト装置
US4581624A (en) *	1984-03-01	1986-04-08	Allied Corporation	Microminiature semiconductor valve
JPS6228585A (ja) *	1985-07-30	1987-02-06	Hitachi Metals Ltd	圧電駆動式弁
JPS62224780A (ja) *	1986-03-26	1987-10-02	Hitachi Metals Ltd	圧電駆動式弁
DE3814150A1 (de) *	1988-04-27	1989-11-09	Draegerwerk Ag	Ventilanordnung aus mikrostrukturierten komponenten
US4903732A (en) *	1989-01-19	1990-02-27	A. K. Allen Company	Piezoelectric valve
JPH03223580A (ja) *	1990-01-25	1991-10-02	Mitsubishi Kasei Corp	圧電型弁装置
JP3223580B2 (ja) *	1992-05-29	2001-10-29	ソニー株式会社	画像作成装置
US5628411A (en) *	1994-12-01	1997-05-13	Sortex Limited	Valve devices for use in sorting apparatus ejectors
DE19526897A1 (de) *	1995-07-22	1997-01-23	Bosch Gmbh Robert	Mikroventil mit verbundenen Schichten und Verfahren zur Herstellung eines Mikroventils
JPH0979408A (ja) *	1995-09-19	1997-03-25	Samii:Kk	流量調節装置及びその製造方法
US5638862A (en) *	1995-10-20	1997-06-17	Vemco Corporation	Diaphragm valve
US5810325A (en) *	1996-06-25	1998-09-22	Bcam International, Inc.	Microvalve
US6086041A (en) *	1997-04-07	2000-07-11	Mccord Winn Textron Inc.	Multi-valve module having a ceramic piezoelectric actuator

1998
- 1998-12-11 DE DE69841980T patent/DE69841980D1/de not_active Expired - Lifetime
- 1998-12-11 KR KR1019997007463A patent/KR100352781B1/ko not_active IP Right Cessation
- 1998-12-11 EP EP19980959183 patent/EP0961062B1/de not_active Expired - Lifetime
- 1998-12-11 TW TW87120618A patent/TW392048B/zh not_active IP Right Cessation
- 1998-12-11 EP EP20040016708 patent/EP1510741B1/de not_active Expired - Lifetime
- 1998-12-11 CN CN98802496A patent/CN1129727C/zh not_active Expired - Fee Related
- 1998-12-11 WO PCT/JP1998/005623 patent/WO1999031420A1/ja active IP Right Grant
- 1998-12-11 JP JP53235199A patent/JP3496020B2/ja not_active Expired - Fee Related
- 1998-12-11 US US09/355,951 patent/US6189858B1/en not_active Expired - Lifetime
- 1998-12-11 DE DE69841617T patent/DE69841617D1/de not_active Expired - Lifetime
2000
- 2000-11-02 US US09/703,874 patent/US6267146B1/en not_active Expired - Fee Related
2003
- 2003-05-26 JP JP2003148330A patent/JP3900112B2/ja not_active Expired - Fee Related

Also Published As

Publication number	Publication date
EP0961062A1 (de)	1999-12-01
WO1999031420A1 (en)	1999-06-24
TW392048B (en)	2000-06-01
KR20000071173A (ko)	2000-11-25
JP3900112B2 (ja)	2007-04-04
KR100352781B1 (ko)	2002-09-16
US6189858B1 (en)	2001-02-20
DE69841617D1 (de)	2010-05-27
US6267146B1 (en)	2001-07-31
CN1129727C (zh)	2003-12-03
CN1247593A (zh)	2000-03-15
EP1510741A3 (de)	2007-07-18
EP1510741B1 (de)	2010-04-14
EP1510741A2 (de)	2005-03-02
JP2003329156A (ja)	2003-11-19
EP0961062A4 (de)	2006-01-04
JP3496020B2 (ja)	2004-02-09
EP0961062B1 (de)	2010-11-03

Publication	Publication Date	Title
DE69841980D1 (de)	2010-12-16	Piezoelektrisches ventil
DE69814854D1 (de)	2003-06-26	Ventil
DE59808479D1 (de)	2003-06-26	Ventil
DE59910370D1 (de)	2004-10-07	Piezoelektrisches Ventil
DE59808013D1 (de)	2003-05-28	Ventileinrichtung
DE69706342D1 (de)	2001-10-04	Ventil
DE59808582D1 (de)	2003-07-10	Ventil
DE59807983D1 (de)	2003-05-22	Schnellschaltendes ventil
DE69834941D1 (de)	2006-07-27	Sprechventilanordnung
DK1032783T3 (da)	2003-10-06	Ventilaktuator
DE69809017D1 (de)	2002-12-05	Ventil
DE69716007D1 (de)	2002-11-07	Knebelbetägtigtes Ventil
NO993705D0 (no)	1999-07-29	Ventil arrangement
DE59805609D1 (de)	2002-10-24	Wegeventil
DE59808091D1 (de)	2003-05-28	Ventilanordnung
DE59801426D1 (de)	2001-10-18	Ventilanordnung
DE59810706D1 (de)	2004-03-11	Ventil
DE59808971D1 (de)	2003-08-14	Ventil
DK0854243T3 (da)	2004-08-16	Forsænket ventil
DE69616822D1 (de)	2001-12-13	Ventil
DE59809755D1 (de)	2003-11-06	Ventil
DE69719379D1 (de)	2003-04-03	Ventil
DE59802949D1 (de)	2002-03-14	Ventil
DE69705699D1 (de)	2001-08-23	Ventil
DE59800655D1 (de)	2001-06-07	Ventilanordnung