DE60336282D1 - Kapazitiver Positionssensor - Google Patents
Kapazitiver PositionssensorInfo
- Publication number
- DE60336282D1 DE60336282D1 DE60336282T DE60336282T DE60336282D1 DE 60336282 D1 DE60336282 D1 DE 60336282D1 DE 60336282 T DE60336282 T DE 60336282T DE 60336282 T DE60336282 T DE 60336282T DE 60336282 D1 DE60336282 D1 DE 60336282D1
- Authority
- DE
- Germany
- Prior art keywords
- position sensor
- capacitive position
- capacitive
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
- G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
- G01D5/2412—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/043,970 US7142500B2 (en) | 2002-01-11 | 2002-01-11 | Sensor with varying capacitance based on relative position between objects |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE60336282D1 true DE60336282D1 (de) | 2011-04-21 |
Family
ID=21929857
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE60336282T Expired - Lifetime DE60336282D1 (de) | 2002-01-11 | 2003-01-10 | Kapazitiver Positionssensor |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US7142500B2 (de) |
| EP (1) | EP1327861B1 (de) |
| JP (1) | JP4143420B2 (de) |
| KR (1) | KR101012981B1 (de) |
| CN (1) | CN100425943C (de) |
| DE (1) | DE60336282D1 (de) |
| SG (1) | SG107623A1 (de) |
| TW (1) | TWI284195B (de) |
Families Citing this family (39)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7075317B2 (en) * | 2004-08-06 | 2006-07-11 | Waters Investment Limited | System and method for measurement of small-angle or small-displacement |
| KR100647724B1 (ko) * | 2004-10-28 | 2006-11-28 | 주식회사알에프윈도우 | 이동형 무선 사설교환장치 |
| US7343813B1 (en) * | 2005-02-15 | 2008-03-18 | Harrington Richard H | Multicapacitor sensor array |
| US7893697B2 (en) * | 2006-02-21 | 2011-02-22 | Cyberoptics Semiconductor, Inc. | Capacitive distance sensing in semiconductor processing tools |
| KR101259218B1 (ko) * | 2006-02-21 | 2013-04-29 | 싸이버옵틱스 쎄미콘덕터 인코퍼레이티드 | 반도체 처리 툴의 용량성 거리 감지 장치 및 방법 |
| US7808061B2 (en) * | 2006-07-28 | 2010-10-05 | Hewlett-Packard Development Company, L.P. | Multi-die apparatus including moveable portions |
| DE112007002309T5 (de) | 2006-09-29 | 2009-07-30 | Cyberoptics Semiconductor, Inc., Beaverton | Substratähnlicher Teilchensensor |
| US20080246493A1 (en) * | 2007-04-05 | 2008-10-09 | Gardner Delrae H | Semiconductor Processing System With Integrated Showerhead Distance Measuring Device |
| GB2448821A (en) * | 2007-04-24 | 2008-10-29 | Seiko Instr Inc | Differential capacitive proximity detector |
| JP2008292446A (ja) * | 2007-04-24 | 2008-12-04 | Seiko Instruments Inc | 近接検出装置及び近接検出方法 |
| US20090015268A1 (en) * | 2007-07-13 | 2009-01-15 | Gardner Delrae H | Device and method for compensating a capacitive sensor measurement for variations caused by environmental conditions in a semiconductor processing environment |
| US7570066B2 (en) * | 2007-11-01 | 2009-08-04 | Seagate Technology Llc | Simultaneous detection of in-plane and out-of-plane position displacement with capacitive sensors |
| US20090206846A1 (en) * | 2008-02-14 | 2009-08-20 | Sanchez Francisco J | Capacitor-based position sensor for vehicle |
| EP2112518A1 (de) * | 2008-04-25 | 2009-10-28 | ALSTOM Technology Ltd | Bürstenabnutzungsüberwacher |
| US7898266B2 (en) | 2008-06-04 | 2011-03-01 | Seagate Technology Llc | Probe with electrostatic actuation and capacitive sensor |
| JP5522961B2 (ja) * | 2009-03-17 | 2014-06-18 | オリンパス株式会社 | 慣性駆動アクチュエータのキャリブレーション方法及び慣性駆動アクチュエータ装置 |
| EP2409163A4 (de) | 2009-03-19 | 2012-08-29 | Hewlett Packard Development Co | Auf kapazität basierende dreiphasenerfassung |
| US8272266B2 (en) * | 2009-04-09 | 2012-09-25 | Hewlett-Packard Development Company, L.P. | Gyroscopes using surface electrodes |
| US9658053B2 (en) | 2010-03-09 | 2017-05-23 | Si-Ware Systems | Self calibration for mirror positioning in optical MEMS interferometers |
| US8656778B2 (en) | 2010-12-30 | 2014-02-25 | Rosemount Aerospace Inc. | In-plane capacitive mems accelerometer |
| JP5524170B2 (ja) * | 2011-12-09 | 2014-06-18 | 株式会社東芝 | 記憶装置 |
| US20130320466A1 (en) * | 2012-05-31 | 2013-12-05 | Analog Devices, Inc. | Package for Damping Inertial Sensor |
| US9250143B2 (en) * | 2012-09-19 | 2016-02-02 | College Park Industries, Inc. | Multicapacitor force/moment sensor arrays |
| WO2014117158A1 (en) * | 2013-01-28 | 2014-07-31 | Si-Ware Systems | Self calibration for mirror positioning in optical mems interferometers |
| US10267822B2 (en) * | 2013-01-31 | 2019-04-23 | Hewlett-Packard Development Company, L.P. | Sensor having particle barrier |
| KR102489065B1 (ko) * | 2013-03-15 | 2023-01-13 | 어플라이드 머티어리얼스, 인코포레이티드 | Ald 플래튼 서셉터의 위치 및 온도 모니터링 |
| CN104677390B (zh) * | 2013-11-26 | 2017-09-29 | 林立 | 电容式传感器及组合电容式位移测量传感系统 |
| CN104238573B (zh) * | 2014-08-21 | 2017-08-25 | 衡括流体动力实验室（北京）有限公司 | 动力提供装置及系统 |
| CN104268967A (zh) * | 2014-09-29 | 2015-01-07 | 深圳市爱普特微电子有限公司 | 基于电容式传感器的安全门禁方法和装置 |
| TWI575232B (zh) * | 2015-06-12 | 2017-03-21 | 財團法人工業技術研究院 | 感測裝置 |
| AU2016291849B2 (en) * | 2015-07-12 | 2021-09-23 | Patients Pending Ltd. | Cover for liquid delivery system with integrated plunger position sensing, and corresponding method |
| TWI577974B (zh) * | 2016-02-04 | 2017-04-11 | 台灣艾華電子工業股份有限公司 | 位置感測器及其可變式電容組件 |
| CN107462142B (zh) * | 2016-06-03 | 2019-09-17 | 清华大学 | 电容式接触型位移测量传感器及传感系统 |
| CN106705937B (zh) * | 2016-12-13 | 2019-11-15 | 国家电网公司 | 基于差分电容的电压杆塔倾斜监测系统及其方法 |
| CN109742998A (zh) * | 2018-12-24 | 2019-05-10 | 维沃移动通信有限公司 | 振动组件、马达控制方法及终端 |
| CN109916284A (zh) * | 2019-03-01 | 2019-06-21 | 维沃移动通信有限公司 | 一种位置检测方法及终端设备 |
| CN113116162B (zh) * | 2019-12-31 | 2023-10-03 | 浙江苏泊尔家电制造有限公司 | 烹饪器具和烹饪器具的控制方法 |
| CN112325756A (zh) * | 2020-09-04 | 2021-02-05 | 山东休普动力科技股份有限公司 | 自由活塞发动机动子位移传感器、动子识别系统及方法 |
| CN117674536B (zh) * | 2024-01-30 | 2024-06-04 | 基合半导体（宁波）有限公司 | 对焦马达、对焦马达的闭环控制方法及摄像设备 |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USRE34741E (en) * | 1986-04-04 | 1994-09-27 | Mitutoyo Corporation | Electrode structure for capacitance-type measurement transducers |
| US4879508A (en) * | 1986-04-04 | 1989-11-07 | Mitutoyo Corporation | Capacitance-type measuring device for absolute measurement of positions |
| CH670306A5 (de) * | 1986-11-13 | 1989-05-31 | Hans Ulrich Meyer | |
| US4893071A (en) * | 1988-05-24 | 1990-01-09 | American Telephone And Telegraph Company, At&T Bell Laboratories | Capacitive incremental position measurement and motion control |
| CH685214A5 (fr) * | 1991-10-15 | 1995-04-28 | Hans Ulrich Meyer | Capteur capacitif de position. |
| CN2117588U (zh) * | 1992-03-18 | 1992-09-30 | 水利部、能源部地质勘探机电研究所 | 平板电容式位移传感器 |
| US5418771A (en) * | 1993-02-25 | 1995-05-23 | Canon Kabushiki Kaisha | Information processing apparatus provided with surface aligning mechanism between probe head substrate and recording medium substrate |
| JP3625530B2 (ja) * | 1995-06-12 | 2005-03-02 | ヒューレット・パッカード・カンパニー | 位置検出装置及び位置検出方法 |
| US5708367A (en) * | 1995-07-10 | 1998-01-13 | Tousson; Eliahou | Digital position sensor |
| JPH1038508A (ja) * | 1996-07-22 | 1998-02-13 | Hewlett Packard Co <Hp> | 位置検出装置及び位置決め装置 |
| EP0836076B1 (de) * | 1996-10-11 | 2002-05-22 | Brown & Sharpe Tesa S.A. | Kapazitive Dimensionsmesseinrichtung |
| US5896232A (en) | 1997-08-07 | 1999-04-20 | International Business Machines Corporation | Highly efficient and compact frontlighting for polarization-based reflection light valves |
| US6868726B2 (en) * | 2000-01-20 | 2005-03-22 | Analog Devices Imi, Inc. | Position sensing with improved linearity |
| US6738336B2 (en) * | 2001-05-16 | 2004-05-18 | Hewlett-Packard Development Company, L.P. | Data storage device |
| US6504385B2 (en) | 2001-05-31 | 2003-01-07 | Hewlett-Pakcard Company | Three-axis motion sensor |
| US6509620B2 (en) * | 2001-05-31 | 2003-01-21 | Hewlett-Packard Company | Flexure coupling block for motion sensor |
| US6776042B2 (en) | 2002-01-25 | 2004-08-17 | Kinemetrics, Inc. | Micro-machined accelerometer |
-
2002
- 2002-01-11 US US10/043,970 patent/US7142500B2/en not_active Expired - Fee Related
- 2002-11-08 SG SG200206767A patent/SG107623A1/en unknown
- 2002-11-11 TW TW091133076A patent/TWI284195B/zh not_active IP Right Cessation
-
2003
- 2003-01-07 JP JP2003001388A patent/JP4143420B2/ja not_active Expired - Fee Related
- 2003-01-10 DE DE60336282T patent/DE60336282D1/de not_active Expired - Lifetime
- 2003-01-10 KR KR1020030001511A patent/KR101012981B1/ko not_active IP Right Cessation
- 2003-01-10 EP EP03250162A patent/EP1327861B1/de not_active Expired - Lifetime
- 2003-01-13 CN CNB031016022A patent/CN100425943C/zh not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2003214807A (ja) | 2003-07-30 |
| CN100425943C (zh) | 2008-10-15 |
| TW200301818A (en) | 2003-07-16 |
| KR20030061337A (ko) | 2003-07-18 |
| JP4143420B2 (ja) | 2008-09-03 |
| KR101012981B1 (ko) | 2011-02-10 |
| US7142500B2 (en) | 2006-11-28 |
| US20030133372A1 (en) | 2003-07-17 |
| SG107623A1 (en) | 2004-12-29 |
| TWI284195B (en) | 2007-07-21 |
| CN1497237A (zh) | 2004-05-19 |
| EP1327861A1 (de) | 2003-07-16 |
| EP1327861B1 (de) | 2011-03-09 |
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