Nothing Special   »   [go: up one dir, main page]

DE60208328D1 - Fingerabdrucksensor - Google Patents

Fingerabdrucksensor

Info

Publication number
DE60208328D1
DE60208328D1 DE60208328T DE60208328T DE60208328D1 DE 60208328 D1 DE60208328 D1 DE 60208328D1 DE 60208328 T DE60208328 T DE 60208328T DE 60208328 T DE60208328 T DE 60208328T DE 60208328 D1 DE60208328 D1 DE 60208328D1
Authority
DE
Germany
Prior art keywords
fingerprint sensor
fingerprint
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60208328T
Other languages
English (en)
Other versions
DE60208328T2 (de
Inventor
Akira Okada
Hideharu Sakoda
Michio Hayakawa
Fumihiko Taniguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Semiconductor Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Application granted granted Critical
Publication of DE60208328D1 publication Critical patent/DE60208328D1/de
Publication of DE60208328T2 publication Critical patent/DE60208328T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06VIMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V40/00Recognition of biometric, human-related or animal-related patterns in image or video data
    • G06V40/10Human or animal bodies, e.g. vehicle occupants or pedestrians; Body parts, e.g. hands
    • G06V40/12Fingerprints or palmprints
    • G06V40/13Sensors therefor
    • G06V40/1306Sensors therefor non-optical, e.g. ultrasonic or capacitive sensing
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321Disposition
    • H01L2224/32151Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32225Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/44Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001Core members of the connector
    • H01L2224/45099Material
    • H01L2224/451Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45138Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/45144Gold (Au) as principal constituent
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48225Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/48227Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73265Layer and wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation
    • H01L2924/1815Shape

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Human Computer Interaction (AREA)
  • Multimedia (AREA)
  • Theoretical Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Image Input (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
DE60208328T 2002-02-20 2002-10-30 Fingerabdrucksensor Expired - Lifetime DE60208328T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002043708A JP3766034B2 (ja) 2002-02-20 2002-02-20 指紋センサ装置及びその製造方法
JP2002043708 2002-02-20

Publications (2)

Publication Number Publication Date
DE60208328D1 true DE60208328D1 (de) 2006-02-02
DE60208328T2 DE60208328T2 (de) 2006-07-20

Family

ID=27655269

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60208328T Expired - Lifetime DE60208328T2 (de) 2002-02-20 2002-10-30 Fingerabdrucksensor

Country Status (7)

Country Link
US (1) US7192798B2 (de)
EP (1) EP1339009B1 (de)
JP (1) JP3766034B2 (de)
KR (2) KR100833554B1 (de)
CN (1) CN1202566C (de)
DE (1) DE60208328T2 (de)
TW (1) TWI222034B (de)

Families Citing this family (45)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6653723B2 (en) * 2002-03-09 2003-11-25 Fujitsu Limited System for providing an open-cavity low profile encapsulated semiconductor package
FR2839570B1 (fr) * 2002-05-07 2004-09-17 Atmel Grenoble Sa Procede de fabrication de capteur d'empreinte digitale et capteur correspondant
JP3614840B2 (ja) * 2002-11-28 2005-01-26 沖電気工業株式会社 半導体装置
WO2004053931A2 (en) * 2002-12-09 2004-06-24 Advanced Interconnect Technologies Limited Package having exposed integrated circuit device
JP4241457B2 (ja) * 2003-06-26 2009-03-18 富士ゼロックス株式会社 レンズ付き発光素子の製造方法
US20050136851A1 (en) 2003-12-19 2005-06-23 Fujitsu Limited Information processing unit
JP2005346271A (ja) * 2004-06-01 2005-12-15 Fujitsu Ltd 指紋センサーパッケージ
CN103559477B (zh) * 2004-11-03 2017-06-13 笔一公司 用于触针或钢笔的手指引导装置
JP4731191B2 (ja) 2005-03-28 2011-07-20 富士通セミコンダクター株式会社 半導体装置及び半導体装置の製造方法
WO2007047748A1 (en) * 2005-10-18 2007-04-26 Authentec, Inc. Finger sensor including enhanced esd protection and associated methods
WO2007099594A1 (ja) * 2006-02-28 2007-09-07 Fujitsu Limited 指紋読み取りセンサユニット
TWI313501B (en) * 2006-03-22 2009-08-11 Ind Tech Res Inst A process for manufacture plastic package of mems devices and the structure for the same
JP4757071B2 (ja) 2006-03-27 2011-08-24 富士通株式会社 指紋認証装置および情報処理装置
US7632698B2 (en) * 2006-05-16 2009-12-15 Freescale Semiconductor, Inc. Integrated circuit encapsulation and method therefor
KR100792670B1 (ko) 2006-06-13 2008-01-09 주식회사 애트랩 반도체 장치 및 접촉센서 장치
US7566966B2 (en) * 2007-09-05 2009-07-28 Stats Chippac Ltd. Integrated circuit package-on-package system with anti-mold flash feature
US8183675B2 (en) * 2007-11-29 2012-05-22 Stats Chippac Ltd. Integrated circuit package-on-package system with anti-mold flash feature
JP2009267272A (ja) * 2008-04-29 2009-11-12 New Japan Radio Co Ltd 半導体中空パッケージ及びその製造方法
TW200950017A (en) * 2008-05-19 2009-12-01 Lightuning Tech Inc Sensing apparatus with packaging material as sensing protection layer and method of manufacturing the same
US7898072B2 (en) * 2008-07-11 2011-03-01 Stats Chippac Ltd. Package stacking system with mold contamination prevention
JP2013156066A (ja) * 2012-01-27 2013-08-15 Wacom Co Ltd 静電容量方式圧力センシング半導体デバイス
JP5892595B2 (ja) 2012-02-06 2016-03-23 株式会社ワコム 位置指示器
US9030440B2 (en) 2012-05-18 2015-05-12 Apple Inc. Capacitive sensor packaging
US8912051B1 (en) * 2012-08-01 2014-12-16 Amkor Technology, Inc. Method for controlling molding compound geometry around a semiconductor die
KR101482989B1 (ko) * 2012-11-20 2015-01-26 크루셜텍 (주) 지문센서 모듈, 이를 구비한 휴대용 전자기기 및 그 제조방법
CN204808363U (zh) 2012-11-20 2015-11-25 韩国科泰高科株式会社 指纹传感器模块、具有此的便携式电子设备
JP5916637B2 (ja) * 2013-01-11 2016-05-11 日立オートモティブシステムズ株式会社 流量センサおよびその製造方法
KR101298636B1 (ko) 2013-07-05 2013-08-20 (주)드림텍 지문인식센서면과 코팅층의 밀착력 및 차폐 강화를 위한 지문인식 홈키 제조방법 및 지문인식 홈키 구조
US10296773B2 (en) 2013-09-09 2019-05-21 Apple Inc. Capacitive sensing array having electrical isolation
US9697409B2 (en) * 2013-09-10 2017-07-04 Apple Inc. Biometric sensor stack structure
US20150296622A1 (en) * 2014-04-11 2015-10-15 Apple Inc. Flexible Printed Circuit With Semiconductor Strain Gauge
CN104051367A (zh) * 2014-07-01 2014-09-17 苏州晶方半导体科技股份有限公司 指纹识别芯片封装结构和封装方法
CN104538379A (zh) * 2014-12-31 2015-04-22 华天科技(西安)有限公司 一种基于局部塑封工艺的指纹设计封装结构及其制备方法
CN104851853A (zh) * 2015-05-19 2015-08-19 苏州晶方半导体科技股份有限公司 指纹识别芯片的封装结构及封装方法
CN106767628B (zh) 2015-12-18 2019-04-19 深圳市汇顶科技股份有限公司 一种指纹传感器保护层的厚度检测方法及系统
JP6086166B1 (ja) * 2016-02-05 2017-03-01 第一精工株式会社 樹脂封止用金型、樹脂封止装置及び樹脂封止方法
TWI575620B (zh) * 2016-03-10 2017-03-21 南茂科技股份有限公司 指紋辨識晶片封裝結構的製作方法及製作設備
TWI614695B (zh) * 2017-07-03 2018-02-11 敦泰電子有限公司 具指紋辨識之高屏佔比顯示裝置
CN110077657B (zh) * 2018-01-26 2021-03-09 致伸科技股份有限公司 指纹辨识模块包装方法
CN111886623B (zh) * 2018-05-01 2024-05-07 株式会社村田制作所 电子设备以及搭载了该电子设备的指纹认证装置
CN109037169B (zh) * 2018-07-06 2020-10-23 昆山丘钛微电子科技有限公司 封装模具、封装结构、封装方法和摄像头模组
EP3770802B1 (de) * 2019-05-29 2023-11-15 Shenzhen Goodix Technology Co., Ltd. Fingerabdruckerkennungsvorrichtung und elektronische vorrichtung
KR102163694B1 (ko) * 2019-06-21 2020-10-08 시그네틱스 주식회사 지문인식센서 패키지
JP2022155336A (ja) 2021-03-30 2022-10-13 ミツミ電機株式会社 検出装置及び検出装置の製造方法
KR20230056474A (ko) 2021-10-20 2023-04-27 삼성전자주식회사 지문 센서 패키지 및 센서 패키지

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3330975A1 (de) * 1983-08-27 1985-03-21 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Verfahren und anordnung zur kapselung eines halbleiterbauelementes
JPH04258176A (ja) * 1991-02-12 1992-09-14 Mitsubishi Electric Corp 半導体圧力センサ
KR960009089B1 (ko) * 1993-03-04 1996-07-10 문정환 패키지 성형용 금형 및 그 금형을 이용한 플라스틱 고체촬상소자 패키지 제조방법 및 패키지
KR970005706B1 (ko) * 1994-01-24 1997-04-19 금성일렉트론 주식회사 고체촬상소자 및 그 제조방법
KR970005706A (ko) * 1995-07-19 1997-02-19 한승준 증발기에서 잔류하는 수분 제거용 송풍기를 구비한 자동차의 공기 조화기
JP4024335B2 (ja) * 1996-01-26 2007-12-19 ハリス コーポレイション 集積回路のダイを露出させる開口部を有する集積回路装置とその製造方法
FR2749955B1 (fr) * 1996-06-14 1998-09-11 Thomson Csf Systeme de lecture d'empreintes digitales
GB9725571D0 (en) * 1997-12-04 1998-02-04 Philips Electronics Nv Electronic apparatus comprising fingerprint sensing devices
US6331452B1 (en) * 1999-04-12 2001-12-18 Verdicom, Inc. Method of fabricating integrated circuit package with opening allowing access to die
US6603191B2 (en) * 2000-05-18 2003-08-05 Casio Computer Co., Ltd. Semiconductor device and method of manufacturing the same
JP2003058872A (ja) * 2001-08-21 2003-02-28 Sony Corp 指紋検出装置、その製造方法及び成膜装置
US6815262B2 (en) * 2002-07-22 2004-11-09 Stmicroelectronics, Inc. Apparatus and method for attaching an integrated circuit sensor to a substrate

Also Published As

Publication number Publication date
TWI222034B (en) 2004-10-11
JP3766034B2 (ja) 2006-04-12
KR20030069782A (ko) 2003-08-27
CN1440060A (zh) 2003-09-03
CN1202566C (zh) 2005-05-18
EP1339009A2 (de) 2003-08-27
US20030156743A1 (en) 2003-08-21
KR100805291B1 (ko) 2008-02-20
US7192798B2 (en) 2007-03-20
JP2003235830A (ja) 2003-08-26
TW200303491A (en) 2003-09-01
KR20070121623A (ko) 2007-12-27
KR100833554B1 (ko) 2008-05-29
DE60208328T2 (de) 2006-07-20
EP1339009A3 (de) 2003-10-15
EP1339009B1 (de) 2005-12-28

Similar Documents

Publication Publication Date Title
DE60208328D1 (de) Fingerabdrucksensor
DE60327418D1 (de) Lagesensor
DE60336282D1 (de) Kapazitiver Positionssensor
DE60330609D1 (de) Mechanischer Deformationsgradsensor
DE50214737D1 (de) Sensor-anordnung
DK1549242T3 (da) Implanterbar sensor
DE60221353D1 (de) Radarsensor
DE10230910B8 (de) Kapazitive Sensoranordnung
DK1343007T3 (da) Elektrokemisk sensor
DE602004017911D1 (de) Fingerabdruck-sensor-element
DE602004016424D1 (de) Umweltsensor
DE10362129B8 (de) Hochzuverlässiger Drehmomentsensor
DE60308867D1 (de) Infrarotsensorbaustein
DE60332694D1 (de) Näherungssensor
DE60228639D1 (de) Kapazitiver Sensor
DE50309063D1 (de) Kraftsensor
DE50308293D1 (de) Bildgeber
DE50205967D1 (de) Sensoranordnung
DE50311591D1 (de) Optischer sensor
DE60336077D1 (de) Optischer sensor
ATA16882004A (de) Sensor
DE50212957D1 (de) Drucksensor
DE10322017B8 (de) Sensoreinheit
DE50310686D1 (de) Temperaturfühler
NO20045350D0 (no) Sensor

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: FUJITSU MICROELECTRONICS LTD., TOKYO, JP

8327 Change in the person/name/address of the patent owner

Owner name: FUJITSU SEMICONDUCTOR LTD., YOKOHAMA, KANAGAWA, JP

8328 Change in the person/name/address of the agent

Representative=s name: SEEGER SEEGER LINDNER PARTNERSCHAFT PATENTANWAELTE