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DE602007005184D1 - Kodierer - Google Patents

Kodierer

Info

Publication number
DE602007005184D1
DE602007005184D1 DE602007005184T DE602007005184T DE602007005184D1 DE 602007005184 D1 DE602007005184 D1 DE 602007005184D1 DE 602007005184 T DE602007005184 T DE 602007005184T DE 602007005184 T DE602007005184 T DE 602007005184T DE 602007005184 D1 DE602007005184 D1 DE 602007005184D1
Authority
DE
Germany
Prior art keywords
light
incident
optical path
path length
phase difference
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602007005184T
Other languages
English (en)
Inventor
Susumu Makinouchi
Toru Imai
Akihiro Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp, Nippon Kogaku KK filed Critical Nikon Corp
Publication of DE602007005184D1 publication Critical patent/DE602007005184D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Valve Device For Special Equipments (AREA)
  • Amplifiers (AREA)
DE602007005184T 2006-05-19 2007-05-16 Kodierer Active DE602007005184D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006139658 2006-05-19
JP2007020632A JP4924884B2 (ja) 2006-05-19 2007-01-31 エンコーダ

Publications (1)

Publication Number Publication Date
DE602007005184D1 true DE602007005184D1 (de) 2010-04-22

Family

ID=38610770

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602007005184T Active DE602007005184D1 (de) 2006-05-19 2007-05-16 Kodierer

Country Status (4)

Country Link
EP (1) EP1865292B1 (de)
JP (1) JP4924884B2 (de)
AT (1) ATE460646T1 (de)
DE (1) DE602007005184D1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009044542A1 (ja) * 2007-10-05 2009-04-09 Nikon Corporation エンコーダ
CN102197286B (zh) 2008-10-23 2014-09-03 株式会社尼康 编码器
CN102308187B (zh) * 2009-02-06 2015-03-04 株式会社尼康 编码器
JP2011053142A (ja) * 2009-09-03 2011-03-17 Nikon Corp 波長検出装置、圧力検出装置、除振装置、および露光装置
JP6479309B2 (ja) * 2012-08-20 2019-03-06 Dmg森精機株式会社 スケール装置、位置情報生成方法及び多軸ステージ装置
JP6199596B2 (ja) * 2012-12-17 2017-09-20 株式会社ミツトヨ 光学エンコーダ用の照明部
DE102013203713A1 (de) * 2013-03-05 2014-02-13 Carl Zeiss Smt Gmbh Inkrementalgeber und Lithographievorrichtung
DE102015203188A1 (de) * 2015-02-23 2016-08-25 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
JP7252809B2 (ja) * 2019-03-28 2023-04-05 株式会社ミツトヨ 光電式エンコーダおよび光電式エンコーダにおける演算方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2736583C2 (de) * 1977-08-13 1985-11-07 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar Verfahren und Einrichtungen zur Gewinnung von gegeneinander phasenverschobenen Steuersignalen für einen Vor-Rückwärtszähler
JP3034899B2 (ja) * 1990-04-09 2000-04-17 日本電信電話株式会社 エンコーダ
JP4938926B2 (ja) * 2000-10-10 2012-05-23 株式会社ミツトヨ 光学式エンコーダ
JP4337415B2 (ja) * 2003-06-10 2009-09-30 株式会社ニコン エンコーダ
JP4506271B2 (ja) 2004-05-13 2010-07-21 株式会社ニコン 光電式エンコーダ
JP2005326232A (ja) 2004-05-13 2005-11-24 Sendai Nikon:Kk 光電式エンコーダ

Also Published As

Publication number Publication date
JP2007333722A (ja) 2007-12-27
JP4924884B2 (ja) 2012-04-25
ATE460646T1 (de) 2010-03-15
EP1865292B1 (de) 2010-03-10
EP1865292A1 (de) 2007-12-12

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition