DE3575016D1 - Mikrodimensionsmessapparat. - Google Patents

Mikrodimensionsmessapparat.

Info

Publication number: DE3575016D1
Authority: DE; Germany
Prior art keywords: microdimension; measuring apparatus; measuring; microdimension measuring
Prior art date: 1984-04-20
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

DE8585301847T

Other languages

English (en)

Inventor

Hiroo Fujita

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Citizen Watch Co Ltd

Original Assignee

Citizen Watch Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1984-04-20

Filing date

1985-03-15

Publication date

1990-02-01

1985-03-15 Application filed by Citizen Watch Co Ltd filed Critical Citizen Watch Co Ltd

1990-02-01 Application granted granted Critical

1990-02-01 Publication of DE3575016D1 publication Critical patent/DE3575016D1/de

2005-03-16 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Length Measuring Devices By Optical Means (AREA)

DE8585301847T 1984-04-20 1985-03-15 Mikrodimensionsmessapparat. Expired - Fee Related DE3575016D1 (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP7977284A JPS60224001A (ja)	1984-04-20	1984-04-20	微小寸法測定装置

Publications (1)

Publication Number	Publication Date
DE3575016D1 true DE3575016D1 (de)	1990-02-01

Family

ID=13699491

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE8585301847T Expired - Fee Related DE3575016D1 (de)	1984-04-20	1985-03-15	Mikrodimensionsmessapparat.

Country Status (3)

Country	Link
EP (1)	EP0159800B1 (de)
JP (1)	JPS60224001A (de)
DE (1)	DE3575016D1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS6358826A (ja) *	1986-08-29	1988-03-14	Toshiba Corp	位置検出方法
CN111189395A (zh) *	2018-11-14	2020-05-22	苏州能讯高能半导体有限公司	底切结构测量系统和底切结构测量方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3907439A (en) *	1973-08-14	1975-09-23	Zygo Corp	Edge-sensing with a scanning laser beam
FR2327513A1 (fr) *	1974-01-10	1977-05-06	Cilas	Dispositif pour determiner le profil d'une surface
US4125317A (en) *	1977-11-26	1978-11-14	United Technologies Corporation	Optical inspection system employing dual path pickup system with single spherical mirror
US4385837A (en) *	1978-05-22	1983-05-31	Irvine Optical Corporation	Apparatus and system for linewidth measurements
JPS5587904A (en) *	1978-12-29	1980-07-03	Ibm	Scanning type optical apparatus for micromeasurement
JPS5821505A (ja) *	1981-07-31	1983-02-08	Anritsu Corp	寸法測定装置
JPS58106415A (ja) *	1981-12-18	1983-06-24	Mitsutoyo Mfg Co Ltd	デジタル表示型測定器

1984
- 1984-04-20 JP JP7977284A patent/JPS60224001A/ja active Granted
1985
- 1985-03-15 EP EP19850301847 patent/EP0159800B1/de not_active Expired
- 1985-03-15 DE DE8585301847T patent/DE3575016D1/de not_active Expired - Fee Related

Also Published As

Publication number	Publication date
EP0159800A2 (de)	1985-10-30
EP0159800A3 (en)	1987-05-27
JPH0574762B2 (de)	1993-10-19
EP0159800B1 (de)	1989-12-27
JPS60224001A (ja)	1985-11-08

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Legal Events

Date	Code	Title	Description
1991-01-24	8364	No opposition during term of opposition
1999-04-08	8339	Ceased/non-payment of the annual fee