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DE3577481D1 - Messfuehlersystem. - Google Patents

Messfuehlersystem.

Info

Publication number
DE3577481D1
DE3577481D1 DE8585111439T DE3577481T DE3577481D1 DE 3577481 D1 DE3577481 D1 DE 3577481D1 DE 8585111439 T DE8585111439 T DE 8585111439T DE 3577481 T DE3577481 T DE 3577481T DE 3577481 D1 DE3577481 D1 DE 3577481D1
Authority
DE
Germany
Prior art keywords
measuring probe
probe system
measuring
probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8585111439T
Other languages
English (en)
Inventor
Joseph Richard Cavaliere
Lawrence Edward Lafave
Irving Feinberg
Charles John Kraus
Alfred Mack
Edward Hubert Valentine
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE3577481D1 publication Critical patent/DE3577481D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
    • G01R1/07378—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate adapter, e.g. space transformers

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
DE8585111439T 1984-09-21 1985-09-10 Messfuehlersystem. Expired - Fee Related DE3577481D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US65298184A 1984-09-21 1984-09-21

Publications (1)

Publication Number Publication Date
DE3577481D1 true DE3577481D1 (de) 1990-06-07

Family

ID=24619010

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8585111439T Expired - Fee Related DE3577481D1 (de) 1984-09-21 1985-09-10 Messfuehlersystem.

Country Status (3)

Country Link
EP (1) EP0180013B1 (de)
JP (1) JPS6180067A (de)
DE (1) DE3577481D1 (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63228635A (ja) * 1987-03-18 1988-09-22 Hitachi Ltd プロ−ブ検査装置
US4912399A (en) * 1987-06-09 1990-03-27 Tektronix, Inc. Multiple lead probe for integrated circuits in wafer form
JPH0810246B2 (ja) * 1988-01-18 1996-01-31 株式会社日立製作所 半導体ｌｓｉ検査装置用プローブヘッドの製造方法
JPH07244116A (ja) * 1994-03-07 1995-09-19 Hitachi Chem Co Ltd 半導体特性測定用治具とその製造法並びにその使用方法
US5546012A (en) * 1994-04-15 1996-08-13 International Business Machines Corporation Probe card assembly having a ceramic probe card
US5534784A (en) * 1994-05-02 1996-07-09 Motorola, Inc. Method for probing a semiconductor wafer
SE504286C2 (sv) * 1994-06-17 1996-12-23 Reinhold Strandberg Adapter för användning vid en apparat för testning av kretskort
DE19507127A1 (de) * 1995-03-01 1996-09-12 Test Plus Electronic Gmbh Adaptersystem für Baugruppen-Platinen, zu verwenden in einer Prüfeinrichtung
DE10057456A1 (de) * 2000-11-20 2002-05-23 Test Plus Electronic Gmbh Anordnung zum Verbinden von Testnadeln eines Testadapters mit einer Prüfeinrichtung
US6551126B1 (en) * 2001-03-13 2003-04-22 3M Innovative Properties Company High bandwidth probe assembly
DE102004027887B4 (de) * 2004-05-28 2010-07-29 Feinmetall Gmbh Prüfeinrichtung zur elektrischen Prüfung eines Prüflings
US7368928B2 (en) 2006-08-29 2008-05-06 Mjc Probe Incorporation Vertical type high frequency probe card
CN101710659B (zh) * 2009-12-11 2011-07-27 安拓锐高新测试技术（苏州）有限公司 一种电抗可控芯片测试插座
CN102692528B (zh) * 2011-03-24 2015-05-13 旺矽科技股份有限公司 悬臂式探针卡
KR101442354B1 (ko) 2012-12-21 2014-09-17 삼성전기주식회사 예비 공간 변환기 및 이를 이용하여 제조된 공간 변환기, 그리고 상기 공간 변환기를 구비하는 반도체 소자 검사 장치
KR101431915B1 (ko) * 2012-12-21 2014-08-26 삼성전기주식회사 예비 공간 변환기 및 이를 이용하여 제조된 공간 변환기, 그리고 상기 공간 변환기를 구비하는 반도체 소자 검사 장치
JP6691762B2 (ja) 2015-11-03 2020-05-13 日本特殊陶業株式会社 検査用配線基板
IT201700021397A1 (it) * 2017-02-24 2018-08-24 Technoprobe Spa Testa di misura con migliorate proprietà in frequenza
JP7039259B2 (ja) 2017-11-16 2022-03-22 株式会社ヨコオ プローブヘッド
TW202035995A (zh) * 2019-03-18 2020-10-01 旺矽科技股份有限公司 探針裝置
WO2020220012A1 (en) * 2019-04-26 2020-10-29 Formfactor, Inc. Probe on carrier architecture for vertical probe arrays
KR20210121701A (ko) * 2020-03-31 2021-10-08 (주)포인트엔지니어링 프로브 헤드 및 이를 구비하는 프로브 카드
CN113035380B (zh) * 2021-02-25 2024-01-26 安徽理工大学 一种用于磁约束核聚变装置的弹出式偏滤器探针系统

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3382437A (en) * 1964-11-30 1968-05-07 Texas Instruments Inc Network testing apparatus including means for automatically making test connections
US3911361A (en) * 1974-06-28 1975-10-07 Ibm Coaxial array space transformer
US3806801A (en) * 1972-12-26 1974-04-23 Ibm Probe contactor having buckling beam probes
US4357062A (en) * 1979-12-10 1982-11-02 John Fluke Mfg. Co., Inc. Universal circuit board test fixture

Also Published As

Publication number Publication date
EP0180013A1 (de) 1986-05-07
JPS6180067A (ja) 1986-04-23
EP0180013B1 (de) 1990-05-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee