DD127637A5 - - Google Patents

Info

Publication number: DD127637A5
Authority: DD; German Democratic Republic

Application number

DD195409A

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1975-12-17

Filing date

1976-10-22

Publication date

1977-10-05

1975-12-17 Priority claimed from US05/641,481 external-priority patent/US4014779A/en

1976-10-22 Application filed filed Critical

1977-10-05 Publication of DD127637A5 publication Critical patent/DD127637A5/xx

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32733—Means for moving the material to be treated
- H01J37/32752—Means for moving the material to be treated for moving the material across the discharge
- H01J37/32761—Continuous moving
- H01J37/3277—Continuous moving of continuous material
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3438—Electrodes other than cathode

Landscapes

Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Physics & Mathematics (AREA)
Plasma & Fusion (AREA)
Analytical Chemistry (AREA)
Materials Engineering (AREA)
Chemical Kinetics & Catalysis (AREA)
Mechanical Engineering (AREA)
Metallurgy (AREA)
Organic Chemistry (AREA)
Physical Vapour Deposition (AREA)
Electrostatic Spraying Apparatus (AREA)
Physical Or Chemical Processes And Apparatus (AREA)

DD195409A 1975-12-17 1976-10-22 DD127637A5 (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
US05/641,481 US4014779A (en)	1974-11-01	1975-12-17	Sputtering apparatus

Publications (1)

Publication Number	Publication Date
DD127637A5 true DD127637A5 (en)	1977-10-05

Family

ID=24572585

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DD195409A DD127637A5 (en)	1975-12-17	1976-10-22

Country Status (17)

Country	Link
JP (1)	JPS6035429B2 (en)
AT (1)	AT344501B (en)
AU (1)	AU511961B2 (en)
BE (1)	BE847413A (en)
CA (1)	CA1077437A (en)
CH (1)	CH617965A5 (en)
DD (1)	DD127637A5 (en)
DE (1)	DE2647149C2 (en)
DK (1)	DK149926C (en)
FR (1)	FR2335615A1 (en)
GB (1)	GB1503301A (en)
IL (1)	IL50722A (en)
IT (1)	IT1066543B (en)
LU (1)	LU76026A1 (en)
MX (1)	MX145314A (en)
NL (1)	NL7611563A (en)
SE (1)	SE429108B (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4151059A (en) *	1977-12-27	1979-04-24	Coulter Stork U.S.A., Inc.	Method and apparatus for sputtering multiple cylinders simultaneously
FR2527233A1 (en) *	1982-05-24	1983-11-25	Asu Composants Sa	Plant for depositing coating on substrate - with removable walls for introducing substrates and target
US4417968A (en) *	1983-03-21	1983-11-29	Shatterproof Glass Corporation	Magnetron cathode sputtering apparatus
FR2548589B1 (en) *	1983-07-07	1987-02-20	Aerospatiale	METHOD AND DEVICE FOR METALLIC IMPREGNATION OF A SUBSTRATE IN THE FORM OF A PATCH OF FIBERS CONDUCTING ELECTRIC CURRENT
US4443318A (en) *	1983-08-17	1984-04-17	Shatterproof Glass Corporation	Cathodic sputtering apparatus
EP0157991A1 (en) *	1984-04-10	1985-10-16	INTERPATENT ANSTALT (INDELEC Abteilung)	Apparatus for the continuous and selective metallization of parts, especially for electronics
JPS6162117A (en) *	1984-09-03	1986-03-31	Brother Ind Ltd	Keyboard
FR2940321B1 (en) *	2008-12-19	2011-12-23	Carewave Shielding Technologies	VACUUM DEPOSITION MACHINE ON SUBSTRATE OF THIN LAYER MATERIALS BY CATHODIC SPRAYING.
JP5969953B2 (en) *	2013-05-31	2016-08-17	株式会社神戸製鋼所	Deposition equipment

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
NL136984C (en) *	1964-06-04
DE2115590A1 (en) *	1971-03-31	1972-10-05	Leybold Heraeus Gmbh & Co Kg	Cathode sputtering device - has cathode with projecting rim
US3829373A (en) *	1973-01-12	1974-08-13	Coulter Information Systems	Thin film deposition apparatus using segmented target means
US3905887A (en) *	1973-01-12	1975-09-16	Coulter Information Systems	Thin film deposition method using segmented plasma

1976
- 1976-10-18 MX MX166694A patent/MX145314A/en unknown
- 1976-10-19 SE SE7611581A patent/SE429108B/en unknown
- 1976-10-19 FR FR7631399A patent/FR2335615A1/en active Granted
- 1976-10-19 IL IL50722A patent/IL50722A/en unknown
- 1976-10-19 NL NL7611563A patent/NL7611563A/en not_active Application Discontinuation
- 1976-10-19 CH CH1321176A patent/CH617965A5/en not_active IP Right Cessation
- 1976-10-19 BE BE171612A patent/BE847413A/en not_active IP Right Cessation
- 1976-10-19 LU LU76026A patent/LU76026A1/xx unknown
- 1976-10-19 AT AT776076A patent/AT344501B/en not_active IP Right Cessation
- 1976-10-19 DE DE2647149A patent/DE2647149C2/en not_active Expired
- 1976-10-19 GB GB43369/76A patent/GB1503301A/en not_active Expired
- 1976-10-19 CA CA263,664A patent/CA1077437A/en not_active Expired
- 1976-10-19 DK DK469976A patent/DK149926C/en not_active IP Right Cessation
- 1976-10-19 IT IT51804/76A patent/IT1066543B/en active
- 1976-10-19 JP JP51125438A patent/JPS6035429B2/en not_active Expired
- 1976-10-22 DD DD195409A patent/DD127637A5/xx unknown
- 1976-12-16 AU AU20598/76A patent/AU511961B2/en not_active Expired

Also Published As

Publication number	Publication date
MX145314A (en)	1982-01-27
AU511961B2 (en)	1980-09-18
BE847413A (en)	1977-04-19
AU2059876A (en)	1978-06-22
GB1503301A (en)	1978-03-08
FR2335615B1 (en)	1981-12-04
IL50722A (en)	1979-05-31
JPS6035429B2 (en)	1985-08-14
JPS5275669A (en)	1977-06-24
IT1066543B (en)	1985-03-12
CH617965A5 (en)	1980-06-30
FR2335615A1 (en)	1977-07-15
DK469976A (en)	1977-06-18
LU76026A1 (en)	1978-05-16
DE2647149C2 (en)	1983-08-25
IL50722A0 (en)	1976-12-31
CA1077437A (en)	1980-05-13
SE429108B (en)	1983-08-15
DE2647149A1 (en)	1977-06-30
SE7611581L (en)	1977-06-18
NL7611563A (en)	1977-06-21
DK149926C (en)	1987-09-28
AT344501B (en)	1978-07-25
ATA776076A (en)	1977-11-15
DK149926B (en)	1986-10-27

Publication	Publication Date	Title
FR2335615B1 (en)	1981-12-04
CH601786A5 (en)	1978-07-14
CH604203A5 (en)	1978-08-31
BG22153A1 (en)	1977-02-20
BG22270A1 (en)	1977-02-20
BG22488A1 (en)	1977-04-20
BG22769A1 (en)	1977-04-20
BG23124A1 (en)	1977-07-12
BG23144A1 (en)	1977-07-12
CH575222A5 (en)	1976-05-14
CH582320A5 (en)	1976-11-30
CH584520A5 (en)	1977-02-15
CH585528A5 (en)	1977-03-15
CH586956A5 (en)	1977-04-15
CH587714A5 (en)	1977-05-13
CH588848A5 (en)	1977-06-15
CH588994A5 (en)	1977-06-30
CH589973A5 (en)	1977-07-29
CH590789A5 (en)	1977-08-31
CH591235A5 (en)	1977-09-15
CH591331A5 (en)	1977-09-15
CH591961A5 (en)	1977-10-14
CH591966A5 (en)	1977-10-14
CH592202A5 (en)	1977-10-14
CH592436A5 (en)	1977-10-31