IT1066543B - SPRAYING APPARATUS - Google Patents

SPRAYING APPARATUS

Info

Publication number: IT1066543B
Authority: IT; Italy
Prior art keywords: spraying apparatus; spraying
Prior art date: 1975-12-17

Application number

IT51804/76A

Other languages

Italian (it)

Original Assignee

Coulter Information Systems

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1975-12-17

Filing date

1976-10-19

Publication date

1985-03-12

1975-12-17 Priority claimed from US05/641,481 external-priority patent/US4014779A/en

1976-10-19 Application filed by Coulter Information Systems filed Critical Coulter Information Systems

1985-03-12 Application granted granted Critical

1985-03-12 Publication of IT1066543B publication Critical patent/IT1066543B/en

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32733—Means for moving the material to be treated
- H01J37/32752—Means for moving the material to be treated for moving the material across the discharge
- H01J37/32761—Continuous moving
- H01J37/3277—Continuous moving of continuous material
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3438—Electrodes other than cathode

Landscapes

Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Physics & Mathematics (AREA)
Plasma & Fusion (AREA)
Analytical Chemistry (AREA)
Materials Engineering (AREA)
Chemical Kinetics & Catalysis (AREA)
Mechanical Engineering (AREA)
Metallurgy (AREA)
Organic Chemistry (AREA)
Physical Vapour Deposition (AREA)
Electrostatic Spraying Apparatus (AREA)
Physical Or Chemical Processes And Apparatus (AREA)

IT51804/76A 1975-12-17 1976-10-19 SPRAYING APPARATUS IT1066543B (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
US05/641,481 US4014779A (en)	1974-11-01	1975-12-17	Sputtering apparatus

Publications (1)

Publication Number	Publication Date
IT1066543B true IT1066543B (en)	1985-03-12

Family

ID=24572585

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
IT51804/76A IT1066543B (en)	1975-12-17	1976-10-19	SPRAYING APPARATUS

Country Status (17)

Country	Link
JP (1)	JPS6035429B2 (en)
AT (1)	AT344501B (en)
AU (1)	AU511961B2 (en)
BE (1)	BE847413A (en)
CA (1)	CA1077437A (en)
CH (1)	CH617965A5 (en)
DD (1)	DD127637A5 (en)
DE (1)	DE2647149C2 (en)
DK (1)	DK149926C (en)
FR (1)	FR2335615A1 (en)
GB (1)	GB1503301A (en)
IL (1)	IL50722A (en)
IT (1)	IT1066543B (en)
LU (1)	LU76026A1 (en)
MX (1)	MX145314A (en)
NL (1)	NL7611563A (en)
SE (1)	SE429108B (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4151059A (en) *	1977-12-27	1979-04-24	Coulter Stork U.S.A., Inc.	Method and apparatus for sputtering multiple cylinders simultaneously
FR2527233A1 (en) *	1982-05-24	1983-11-25	Asu Composants Sa	Plant for depositing coating on substrate - with removable walls for introducing substrates and target
US4417968A (en) *	1983-03-21	1983-11-29	Shatterproof Glass Corporation	Magnetron cathode sputtering apparatus
FR2548589B1 (en) *	1983-07-07	1987-02-20	Aerospatiale	METHOD AND DEVICE FOR METALLIC IMPREGNATION OF A SUBSTRATE IN THE FORM OF A PATCH OF FIBERS CONDUCTING ELECTRIC CURRENT
US4443318A (en) *	1983-08-17	1984-04-17	Shatterproof Glass Corporation	Cathodic sputtering apparatus
EP0157991A1 (en) *	1984-04-10	1985-10-16	INTERPATENT ANSTALT (INDELEC Abteilung)	Apparatus for the continuous and selective metallization of parts, especially for electronics
JPS6162117A (en) *	1984-09-03	1986-03-31	Brother Ind Ltd	Keyboard
FR2940321B1 (en) *	2008-12-19	2011-12-23	Carewave Shielding Technologies	VACUUM DEPOSITION MACHINE ON SUBSTRATE OF THIN LAYER MATERIALS BY CATHODIC SPRAYING.
JP5969953B2 (en) *	2013-05-31	2016-08-17	株式会社神戸製鋼所	Deposition equipment

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
NL136984C (en) *	1964-06-04
DE2115590A1 (en) *	1971-03-31	1972-10-05	Leybold Heraeus Gmbh & Co Kg	Cathode sputtering device - has cathode with projecting rim
US3829373A (en) *	1973-01-12	1974-08-13	Coulter Information Systems	Thin film deposition apparatus using segmented target means
US3905887A (en) *	1973-01-12	1975-09-16	Coulter Information Systems	Thin film deposition method using segmented plasma

1976
- 1976-10-18 MX MX166694A patent/MX145314A/en unknown
- 1976-10-19 SE SE7611581A patent/SE429108B/en unknown
- 1976-10-19 FR FR7631399A patent/FR2335615A1/en active Granted
- 1976-10-19 IL IL50722A patent/IL50722A/en unknown
- 1976-10-19 NL NL7611563A patent/NL7611563A/en not_active Application Discontinuation
- 1976-10-19 CH CH1321176A patent/CH617965A5/en not_active IP Right Cessation
- 1976-10-19 BE BE171612A patent/BE847413A/en not_active IP Right Cessation
- 1976-10-19 LU LU76026A patent/LU76026A1/xx unknown
- 1976-10-19 AT AT776076A patent/AT344501B/en not_active IP Right Cessation
- 1976-10-19 DE DE2647149A patent/DE2647149C2/en not_active Expired
- 1976-10-19 GB GB43369/76A patent/GB1503301A/en not_active Expired
- 1976-10-19 CA CA263,664A patent/CA1077437A/en not_active Expired
- 1976-10-19 DK DK469976A patent/DK149926C/en not_active IP Right Cessation
- 1976-10-19 IT IT51804/76A patent/IT1066543B/en active
- 1976-10-19 JP JP51125438A patent/JPS6035429B2/en not_active Expired
- 1976-10-22 DD DD195409A patent/DD127637A5/xx unknown
- 1976-12-16 AU AU20598/76A patent/AU511961B2/en not_active Expired

Also Published As

Publication number	Publication date
MX145314A (en)	1982-01-27
AU511961B2 (en)	1980-09-18
BE847413A (en)	1977-04-19
AU2059876A (en)	1978-06-22
GB1503301A (en)	1978-03-08
FR2335615B1 (en)	1981-12-04
DD127637A5 (en)	1977-10-05
IL50722A (en)	1979-05-31
JPS6035429B2 (en)	1985-08-14
JPS5275669A (en)	1977-06-24
CH617965A5 (en)	1980-06-30
FR2335615A1 (en)	1977-07-15
DK469976A (en)	1977-06-18
LU76026A1 (en)	1978-05-16
DE2647149C2 (en)	1983-08-25
IL50722A0 (en)	1976-12-31
CA1077437A (en)	1980-05-13
SE429108B (en)	1983-08-15
DE2647149A1 (en)	1977-06-30
SE7611581L (en)	1977-06-18
NL7611563A (en)	1977-06-21
DK149926C (en)	1987-09-28
AT344501B (en)	1978-07-25
ATA776076A (en)	1977-11-15
DK149926B (en)	1986-10-27

Publication	Publication Date	Title
SE7605208L (en)	1976-12-21	SPRAY DEVICE
IT1063489B (en)	1985-02-11	ALARM APPARATUS
DK268276A (en)	1976-12-17	PIPETTERING APPARATUS
SE7609135L (en)	1977-02-28	DISTRIBUTION APPARATUS
FR2302617A1 (en)	1976-09-24	DI
BR7608511A (en)	1977-12-20	SPRAYING DEVICE
BR7606423A (en)	1977-06-14	SPRAYING MILL
IT1056752B (en)	1982-02-20	GRAMMOPHONE APPARATUS
FR2300480A1 (en)	1976-09-03	DI
BE844720A (en)	1977-01-31	SPRAYER
IT1067169B (en)	1985-03-12	RADIOGONIOMETRIC EQUIPMENT
FR2300604A1 (en)	1976-09-10	DI
DK146199C (en)	1983-12-27	VAESKEUD DELIVERY APPARATUS
AT376149B (en)	1984-10-10	SPRAYING UNIT
IT1066543B (en)	1985-03-12	SPRAYING APPARATUS
IT1058970B (en)	1982-05-10	NOZZLE SPARGITALCO
BE844297A (en)	1977-01-19	OPKLAPBARE HUISHOUDSTOEL MET TRAPTREDEN
IT1058871B (en)	1982-05-10	SWITCHING APPARATUS
FR2300345A1 (en)	1976-09-03	APPA
IT1066655B (en)	1985-03-12	PROCEDURE FOR DEPURING CAPROLATTAME
TR19024A (en)	1978-03-01	PAINTING PROCEDURE
SE7603118L (en)	1976-09-13	COATING DEVICE
IT1061925B (en)	1983-04-30	ELECTRORADIOGRAPHIC APPARATUS
FR2329361A1 (en)	1977-05-27	ATOMIZER
FR2300972A1 (en)	1976-09-10	DI