CN2681083Y - Fiber bundle displacement transducer - Google Patents
Fiber bundle displacement transducer Download PDFInfo
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- CN2681083Y CN2681083Y CN 200420017241 CN200420017241U CN2681083Y CN 2681083 Y CN2681083 Y CN 2681083Y CN 200420017241 CN200420017241 CN 200420017241 CN 200420017241 U CN200420017241 U CN 200420017241U CN 2681083 Y CN2681083 Y CN 2681083Y
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- displacement
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- fibre bundle
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- 239000000835 fiber Substances 0.000 title claims abstract description 49
- 238000006073 displacement reaction Methods 0.000 title claims abstract description 30
- 230000003287 optical effect Effects 0.000 claims abstract description 34
- 239000000523 sample Substances 0.000 claims abstract description 24
- 239000013307 optical fiber Substances 0.000 claims abstract description 21
- 238000011896 sensitive detection Methods 0.000 claims description 8
- 238000001514 detection method Methods 0.000 claims description 5
- 230000003321 amplification Effects 0.000 claims description 3
- 238000001914 filtration Methods 0.000 claims description 3
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 3
- 230000008676 import Effects 0.000 claims description 2
- 238000005259 measurement Methods 0.000 abstract description 10
- 230000005540 biological transmission Effects 0.000 abstract description 3
- 238000005516 engineering process Methods 0.000 description 9
- 238000000034 method Methods 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- 238000002310 reflectometry Methods 0.000 description 3
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000004556 laser interferometry Methods 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000003760 hair shine Effects 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
- 230000004304 visual acuity Effects 0.000 description 1
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- Length Measuring Devices By Optical Means (AREA)
Abstract
本实用新型公开了一种光纤束位移传感器，其光纤束探头由多模光纤紧密集束而成，探头后部分为三支，一支用于发射，两支用于接收，光纤束在探头前端面排列为同轴随机型。光发射器发出载波调制光经发射光纤束照射到位移反射面，随位移量变化的反射光经两路接收光纤束返回到两光接收器，光接收器将光信号变为电信号，经各自的锁定放大电路放大、解调和滤波，最后一起输入除法器，将得到的比值作为位移信号。本实用新型除具有抗电磁干扰、高精度、宽频响、低成本、结构简单和体积小的优点外，还具有测量结果与环境光干扰、光源波动、被测体表面反射率和光纤传输损耗无关的特点，特别适于微小位移的非接触式精密测量，还可应用于振动、厚度和压力的测量。
The utility model discloses an optical fiber bundle displacement sensor. The optical fiber bundle probe is tightly bundled by multi-mode optical fibers. The rear part of the probe is divided into three, one for transmitting and two for receiving. The optical fiber bundle is on the front end of the probe. Arrangement is coaxial random type. The optical transmitter emits carrier-modulated light and irradiates the displacement reflection surface through the transmitting fiber bundle, and the reflected light that changes with the displacement returns to the two optical receivers through the two receiving fiber bundles. The locked-in amplifier circuit amplifies, demodulates and filters, and finally inputs the divider together, and uses the obtained ratio as a displacement signal. In addition to the advantages of anti-electromagnetic interference, high precision, wide frequency response, low cost, simple structure and small size, the utility model also has the advantages that the measurement results are independent of ambient light interference, light source fluctuations, surface reflectance of the measured body and optical fiber transmission loss. It is especially suitable for non-contact precision measurement of small displacement, and can also be applied to the measurement of vibration, thickness and pressure.
Description
Technical field
The utility model belongs to the displacement measurement technical field, is specifically related to a kind of fibre bundle displacement transducer.This sensor can carry out high accuracy non-contact to micro-displacement, also can be applicable to vibrate, the measurement of thickness and pressure.
Background technology
The high precision non-contact displacement measurement is the key of micro-nano technology, micro electro mechanical system (MEMS) technology and accurate control technique, and its realization technology mainly comprises Electric Measurement Technology and optical measuring technique.Electric Measurement Technology has electric vortex type and condenser type, and its disadvantage is to be subjected to electromagnetic interference (EMI), and this had both influenced the precision of measuring, and had limited its range of application again.Optical measuring technique mainly comprises laser interferometry, depth of focus Detection Techniques and fiber reflection technology.Laser interferometry has high resolving power, but its precision and stability depend on optical wavelength.The depth of focus Detection Techniques relate to complicated lens and prism combination, and structure is complicated.And the fiber reflection technology is to obtain high-resolution straightforward procedure.
Have anti-electromagnetic interference (EMI), high precision, wideband is loud, low-cost, simple in structure and volume is little advantage based on the fiber reflection formula sensor of intensity modulation.Its fibre-optical probe is made up of launching fiber and reception optical fiber.Light shines the measured body surface through launching fiber, and reflected light enters optical receiver through reception optical fiber and becomes and the proportional electric signal of receiving light power.The reflective light intensity that receives changes with the variation of the distance between fibre-optical probe end face and measured body reflecting surface.So signal of sensor just becomes the direct measured value of measured body displacement.In order to improve sensor performance, probe adopts fibre bundle usually.
But, this sensitivity that has influenced sensor based on the displacement measurement technology of absolute light intensity greatly.Typical this sensor is found in United States Patent (USP) U.S.3327584, U.S.3940608, U.S.4247764 and U.S.4694160.Its drawback is mainly reflected in following several respects:
1. the reflective light intensity that receives of optical receiver is subjected to the interference of environment parasitic light inevitably.
2. different measured bodies has surface of different nature, and their reflectivity has nothing in common with each other, and the displacement curve that the fiber reflection formula is measured also has nothing in common with each other, and this just needs frequent check sensor.
3. the light intensity of light source can not remain constantly, and the fluctuation of power supply can cause the fluctuation of light source, and long-time back light intensity can descend to some extent.This also needs verification or increases extra light equalizing network to guarantee the substantially constant of emission light intensity.
To the bending of optical fiber, move or stretching etc. can make the loss of optical fiber change, thereby cause fibre to bring out penetrating the fluctuation of light intensity.
Summary of the invention
The purpose of this utility model is to overcome above-mentioned weak point, a kind of fibre bundle displacement transducer is provided, be not subjected to the influence of ambient light interference, light source fluctuation, measured body surface reflectivity and fiber transmission attenuation during this sensor measurement, can increase the range of linearity and improve sensitivity, realize high accuracy non-contact micro-displacement.
A kind of fibre bundle displacement transducer that the utility model provides is characterized in that: this displacement transducer comprises carrier wave generation circuit, light source driving circuit, optical transmitting set, optical probe beam, two optical receivers, two lock-up amplifier circuits and divider.Lock-up amplifier circuit comprises ac amplifier circuit, bandwidth-limited circuit, phase-sensitive detection circuit and the low-pass filter circuit that links to each other successively.Optical probe beam is formed by the tight boundling of multimode optical fiber, and the probe rear portion is divided into three, and one is the launching fiber bundle, and two are respectively stochastic pattern reception fibre bundle and coaxial type reception fibre bundle in addition.On the probe front end face, it is the disc of inner ring that launching fiber bundle and stochastic pattern receive the fibre bundle random alignment, and coaxial type receives the annular that fibre bundle is arranged as the outer ring.The carrier signal that carrier wave generation circuit produces fixed frequency outputs to light source driving circuit and two phase-sensitive detection circuits respectively, described carrier signal drives optical transmitting set by light source driving circuit and sends carrier modulation light, shine the displacement reflecting surface through described launching fiber bundle, the reflected light that changes with displacement turns back to two optical receivers through described two-way reception fibre bundle.Optical receiver becomes electric signal with light signal, successively behind separately ac amplifier circuit and bandwidth-limited circuit amplification and filtering, the phase-sensitive detection circuit of importing separately with described carrier signal carries out accurate detection, low-pass filter circuit by separately obtains stochastic pattern received signal and coaxial type received signal again, these two amplitude demodulation signals are imported divider together, and its ratio is as the displacement signal of measuring.
Optical fiber arrangements forms such as the optical probe beam that the utility model adopts and two-beam type, two concentric round or semicircle stochastic patterns are compared, and the coaxial following type has littler probe diameter, the bigger range of linearity and the sensitivity of Geng Gao, and it is almost nil to measure initial distance.The utility model has been eliminated the influence of external interference signals such as surround lighting by light is carried out carrier modulation and demodulation.By division arithmetic, eliminated the influence of light source fluctuation, reflecting surface reflectivity and fiber transmission attenuation to the binary channels received signal.Simultaneously, also increase the range of linearity, improved sensitivity.
Description of drawings
Fig. 1 is a structure principle chart of the present utility model;
Fig. 2 is that the A of optical probe beam end face is to view;
Fig. 3 is the structural drawing of lock-up amplifier circuit.
Embodiment
Describe embodiment of the present utility model in detail below in conjunction with accompanying drawing.
As shown in drawings, optical probe beam 9 of the present utility model is formed by the some tight boundlings of identical multimode optical fiber.The probe rear portion is divided into three, and one is the launching fiber bundle, and two are the reception fibre bundle in addition, on the probe front end face, fibre bundle is arranged as the coaxial following type, and promptly the launching fiber bundle receives the disc that the fibre bundle random alignment becomes inner ring with one, and reception optical fiber wherein is called stochastic pattern and receives optical fiber 12; Another receives the annular that fibre bundle is arranged in the outer ring, and reception optical fiber wherein is called coaxial type and receives optical fiber 13.Optical probe beam 9 adopts launching fiber 11, the stochastic pattern of varying number to receive optical fiber 12 and coaxial type receives optical fiber 13, can obtain the displacement transducer of different ranges.
The carrier signal that carrier wave generation circuit 5 produces fixed frequency outputs to light source driving circuit 4 and two phase-sensitive detection circuits 16 respectively, 16 ', described carrier signal drives optical transmitting set 3 by light source driving circuit 4 and sends carrier modulation light, shine displacement reflecting surface 10 through described launching fiber bundle, the reflected light that changes with displacement turns back to two optical receivers 1 through described two-way reception fibre bundle, 2, optical receiver 1,2 become electric signal with light signal, successively through separately ac amplifier circuit 14,14 ' and bandwidth-limited circuit 15, after 15 ' amplification and the filtering, import separately phase-sensitive detection circuit 16 with described carrier signal, 16 ' carries out accurate detection, pass through low-pass filter circuit 17 separately again, 17 ' obtains stochastic pattern received signal and coaxial type received signal, these two amplitude demodulation signals are imported divider 8 together, and its ratio is as the displacement signal of measuring.
A specific embodiment is as follows: optical probe beam 9 is made up of 390 identical glass optical fibers, and every optical fiber is the multimode step change type, numerical aperture 0.63, diameter 50 μ m, cladding thickness 1.5 μ m.On the probe front end face, inner ring is closely arranged at random by 65 launching fibers 11 and 65 root receiving fibers 12 and is formed, and the outer ring is by 260 root receiving fibers, 13 coaxial tight encirclement inner rings, and skin overlaps the inflexible thin stainless-steel tube 14 of the preceding paragraph.At the probe rear portion, the launching fiber bundle is coupled to optical transmitting set 3, and the stochastic pattern of inner ring receives fiber bundle coupling to optical receiver 1, and the coaxial type of outer ring receives fiber bundle coupling to optical receiver 2.Light transmits and receives device and all adopts the Agilent module, and optical transmitting set is HFBR-1527, and two optical receivers are selected HFBR-2526 for use.
Claims (1)
1, a kind of fibre bundle displacement transducer is characterized in that: this displacement transducer comprises carrier wave generation circuit (5), light source driving circuit (4), optical transmitting set (3), optical probe beam (9), two optical receivers (1,2), two lock-up amplifier circuits (6,7) and divider (8); Lock-up amplifier circuit (6,7) comprises ac amplifier circuit (14), bandwidth-limited circuit (15), phase-sensitive detection circuit (16) and the low-pass filter circuit (17) that links to each other successively; Optical probe beam (9) is formed by the tight boundling of multimode optical fiber, the probe rear portion is divided into three, one is launching fiber bundle (11), two are respectively stochastic pattern reception fibre bundle (12) and coaxial type reception fibre bundle (13) in addition, on the probe front end face, it is the disc of inner ring that launching fiber bundle (11) and stochastic pattern receive fibre bundle (12) random alignment, and coaxial type receives the annular that fibre bundle (13) is arranged as the outer ring; The carrier signal that carrier wave generation circuit (5) produces fixed frequency outputs to light source driving circuit (4) and two phase-sensitive detection circuits (16 respectively, 16 '), described carrier signal drives optical transmitting set (3) by light source driving circuit (4) and sends carrier modulation light, shine displacement reflecting surface (10) through described launching fiber bundle, the reflected light that changes with displacement turns back to two optical receivers (1 through described two-way reception fibre bundle, 2), optical receiver (1,2) light signal is become electric signal, successively through separately ac amplifier circuit (14,14 ') and bandwidth-limited circuit (15,15 ') after amplification and the filtering, import separately phase-sensitive detection circuit (16 with described carrier signal, 16 ') carry out accurate detection, pass through low-pass filter circuit (17 separately again, 17 ') obtain stochastic pattern received signal and coaxial type received signal, these two amplitude demodulation signals are imported divider (8) together, and its ratio is as the displacement signal of measuring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200420017241 CN2681083Y (en) | 2004-02-24 | 2004-02-24 | Fiber bundle displacement transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200420017241 CN2681083Y (en) | 2004-02-24 | 2004-02-24 | Fiber bundle displacement transducer |
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| Publication Number | Publication Date |
|---|---|
| CN2681083Y true CN2681083Y (en) | 2005-02-23 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 200420017241 Expired - Fee Related CN2681083Y (en) | 2004-02-24 | 2004-02-24 | Fiber bundle displacement transducer |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103091336A (en) * | 2013-02-05 | 2013-05-08 | 济南大学 | Optical fiber sensor system for detecting defect on surface of steel ball |
| CN104390987A (en) * | 2014-12-16 | 2015-03-04 | 济南大学 | Novel optical fiber sensor for detecting surface defects of steel balls and detection method |
| CN106197289A (en) * | 2016-08-15 | 2016-12-07 | 桂林创研科技有限公司 | Optical fiber length measuring system |
| CN107084753A (en) * | 2017-04-07 | 2017-08-22 | 广东精点数据科技股份有限公司 | A kind of ratio based on DSP removes formula optical fiber high accuracy frequency measurement sensor |
| CN110044268A (en) * | 2019-03-19 | 2019-07-23 | 天津大学前沿技术研究院有限公司 | Shield tunnel seam based on fiber reflection principle, which is opened, monitors system with faulting of slab ends |
-
2004
- 2004-02-24 CN CN 200420017241 patent/CN2681083Y/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103091336A (en) * | 2013-02-05 | 2013-05-08 | 济南大学 | Optical fiber sensor system for detecting defect on surface of steel ball |
| CN104390987A (en) * | 2014-12-16 | 2015-03-04 | 济南大学 | Novel optical fiber sensor for detecting surface defects of steel balls and detection method |
| CN106197289A (en) * | 2016-08-15 | 2016-12-07 | 桂林创研科技有限公司 | Optical fiber length measuring system |
| CN107084753A (en) * | 2017-04-07 | 2017-08-22 | 广东精点数据科技股份有限公司 | A kind of ratio based on DSP removes formula optical fiber high accuracy frequency measurement sensor |
| CN110044268A (en) * | 2019-03-19 | 2019-07-23 | 天津大学前沿技术研究院有限公司 | Shield tunnel seam based on fiber reflection principle, which is opened, monitors system with faulting of slab ends |
| CN110044268B (en) * | 2019-03-19 | 2021-08-31 | 天津大学前沿技术研究院有限公司 | Shield tunnel joint opening and slab staggering monitoring system based on optical fiber reflection principle |
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Legal Events
| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |