CN221526627U - Combustion device for silane gas treatment - Google Patents
Combustion device for silane gas treatment Download PDFInfo
- Publication number
- CN221526627U CN221526627U CN202323052460.2U CN202323052460U CN221526627U CN 221526627 U CN221526627 U CN 221526627U CN 202323052460 U CN202323052460 U CN 202323052460U CN 221526627 U CN221526627 U CN 221526627U
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- Prior art keywords
- bevel gear
- rack
- installation
- mounting
- combustion
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- 238000002485 combustion reaction Methods 0.000 title claims abstract description 47
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 title claims abstract description 29
- 229910000077 silane Inorganic materials 0.000 title claims abstract description 28
- 238000009434 installation Methods 0.000 claims abstract description 55
- 238000007789 sealing Methods 0.000 claims abstract description 31
- 238000007790 scraping Methods 0.000 claims description 15
- 230000002457 bidirectional effect Effects 0.000 claims description 10
- 238000009826 distribution Methods 0.000 claims description 10
- 238000000151 deposition Methods 0.000 claims 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 30
- 239000000428 dust Substances 0.000 abstract description 19
- 238000003860 storage Methods 0.000 abstract description 18
- 238000000034 method Methods 0.000 abstract description 11
- 239000000377 silicon dioxide Substances 0.000 abstract description 10
- 235000012239 silicon dioxide Nutrition 0.000 abstract description 9
- 239000007789 gas Substances 0.000 description 17
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- -1 silicon hydrogen compounds Chemical class 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000009841 combustion method Methods 0.000 description 1
- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Silicon Compounds (AREA)
Abstract
The utility model discloses a combustion device for silane gas treatment, which comprises a combustion tank and a base, wherein a storage tank is arranged above the base, an installation box is arranged between the combustion tank and the storage tank, a bearing plate is arranged in the installation box, first installation shafts are arranged on two sides of the bearing plate, two groups of the first installation shafts are symmetrically distributed, the bearing plate is rotationally connected with the installation box through the first installation shafts, a first rack is arranged in the installation box and is in sliding connection with the installation box, the bearing plate is arranged to primarily collect silicon dioxide dust generated in the combustion process of the silane gas in the combustion tank, and the sealing performance of the combustion tank is still maintained when the silicon dioxide dust is uniformly cleaned through the arrangement of two groups of sealing rings and the like, so that the normal treatment process of the silane gas in the sealing pipe is not influenced, and the working efficiency is improved.
Description
Technical Field
The utility model relates to the technical field of silane gas treatment, in particular to a combustion device for silane gas treatment.
Background
Silane, i.e., a compound of silicon and hydrogen, is a generic term for a series of compounds including monosilane, disilane and some higher silicon hydrogen compounds, and silane gas is an indispensable material in the photovoltaic production process because it is the most effective way to attach silicon molecules to the surface of a battery, and besides the photovoltaic industry, many manufacturing factories need silane gas such as flat panel displays, semiconductors and even coated glass manufacturing factories, which are decomposed usually by a combustion method, which is a method of burning silane off gas into silicon dioxide and water vapor at high temperature, in order to safely treat the silane gas.
In the prior art, silane gas is contacted with input compressed air or supplemented air in a combustion device to cause spontaneous combustion or oxidation reaction, a large amount of silica dust generated after the reaction is settled to the bottom of a combustion tank to be gathered under the action of gravity, and the existing combustion device needs staff to clean the silica powder accumulated at the bottom periodically and manually, so that more manpower is required to be input, and equipment is required to be stopped in the cleaning process, so that the working efficiency is reduced.
Disclosure of utility model
The present utility model is directed to a combustion device for treating silane gas, which solves the problems set forth in the background art.
In order to achieve the above purpose, the present utility model provides the following technical solutions: the utility model provides a silane is burner for gas treatment, includes combustion tank and base, the base top is equipped with the storage tank, be equipped with the installation case between combustion tank and the storage tank, be equipped with the joint board in the installation case, it is equipped with first installation axle to accept the board both sides, the quantity of first installation axle is provided with two sets of, two sets of first installation axle is symmetric distribution, it is connected with the installation case rotation to accept the board through first installation axle, be equipped with first rack in the installation case, first rack and installation case sliding connection, be equipped with first cylinder in the installation case, first rack right-hand member is connected with the piston rod output of first cylinder, the right side first gear has been cup jointed on the first installation axle, first rack and first gear engagement are connected.
As a further preferable mode of the technical scheme, sealing rings are arranged on two sides of the bearing plate, two groups of sealing rings are arranged, the sealing rings are symmetrically distributed, sliding blocks are arranged on the sealing rings, two groups of sliding blocks are symmetrically distributed, a bidirectional screw rod is arranged in the mounting box, and a first motor is arranged in the mounting box.
As a further preferable mode of the technical scheme, the sealing ring is in sliding connection with the mounting box through the sliding block, two ends of the bidirectional screw rod penetrate through the mounting box and are in rotary connection with the mounting box respectively, the bidirectional screw rod penetrates through the left sliding block and is in threaded connection with the sliding block, and the upper end of the bidirectional screw rod is connected with the output end of the first motor.
As a further preferred of this technical scheme, be equipped with the mounting panel in the storage tank, the mounting panel both sides are equipped with the second installation axle, the quantity of second installation axle is provided with two sets of, two sets of the second installation axle is the symmetric distribution, the mounting panel rotates with the storage tank through the second installation axle and is connected, the storage tank left side is provided with the discharge gate, the discharge gate corresponds the setting with the mounting panel, be equipped with the second rack in the storage tank, second rack and storage tank sliding connection, be equipped with the second cylinder in the storage tank, the second rack right-hand member is connected with the piston rod output of second cylinder, and the right side cup joint the second gear on the second installation axle, second rack and second gear engagement are connected.
As the further preferred of this technical scheme, be equipped with installation tube and installation pole on the mounting panel, the installation pole runs through the installation tube and rotates with the installation tube through the bearing and be connected, installation tube and installation pole are all rotated with the mounting panel through the bearing and are connected, be equipped with first strip of scraping on the installation tube, be equipped with the second on the installation pole and scrape the strip, first strip of scraping and second are scraped strip below and are all laminated with the mounting panel surface, the mounting panel below is equipped with the fixed box.
As a further preferable mode of the technical scheme, a third bevel gear is arranged in the fixed box, a second motor is arranged in the fixed box, the third bevel gear is connected with the output end of the second motor through a rotating shaft, a first bevel gear is sleeved on the mounting pipe, a second bevel gear is sleeved on the mounting rod, the first bevel gear and the second bevel gear are symmetrically distributed relative to the third bevel gear, and the first bevel gear and the second bevel gear are both meshed and connected with the third bevel gear.
The utility model provides a combustion device for silane gas treatment, which has the following beneficial effects:
(1) According to the utility model, the bearing plate is arranged to primarily collect silica dust generated in the combustion process of the silane gas in the combustion tank, and the sealing performance of the combustion tank is still maintained when the silica dust is uniformly cleaned by arranging two groups of sealing rings and the like, so that the normal treatment process of the silane gas in the sealing pipe is not influenced, and the working efficiency is improved; when piling up more silica dust on the board that holds, open first motor and drive two-way lead screw rotation, the cooperation slider makes two sets of sealing washer upwards move simultaneously, and start first cylinder, drive first rack slip, cooperation first gear makes and holds the board upset, thereby make the dust that holds on the board fall on the mounting panel, this in-process makes the combustion jar still keep sealed not influencing the normal work in the combustion jar under the mounting panel effect, will hold board and two sets of sealing washer and resume the original form before collecting the dust on the mounting panel afterwards, thereby keep the normal work in the combustion jar at the in-process of collecting the dust.
(2) According to the utility model, the automatic discharge of the silicon dioxide powder is realized by arranging the mounting plate, the first scraping strip, the second scraping strip and the like, so that the manpower input is reduced, and the working efficiency is improved; after all dust is poured on the mounting plate and the original position is restored by the bearing plate, the second cylinder is started to drive the second rack to rotate, the mounting plate is inclined by a certain angle to be aligned with the discharge hole under the action of the second gear, the second motor is started to drive the third bevel gear to rotate, the first bevel gear and the second bevel gear synchronously rotate reversely under the drive of the third bevel gear, so that the mounting tube and the mounting rod are driven to rotate reversely, and the first scraping strip and the second scraping strip push the silicon dioxide dust on the mounting plate to the discharge hole simultaneously, so that the automatic cleaning of the silicon dioxide powder is realized.
Drawings
FIG. 1 is a schematic overall structure of the present utility model;
FIG. 2 is a schematic view of the structure of the combustion can of the present utility model;
FIG. 3 is a schematic view of a bearing plate according to the present utility model;
FIG. 4 is a schematic view of the structure of the storage tank of the present utility model;
FIG. 5 is a schematic view of the structure of the mounting plate of the present utility model;
FIG. 6 is an enlarged view of the structure of FIG. 5-A in accordance with the present utility model;
In the figure: 1. a combustion tank; 2. a storage tank; 3. a mounting box; 4. a base; 5. a receiving plate; 6. a first mounting shaft; 7. a first gear; 8. a first rack; 9. a first cylinder; 10. a seal ring; 11. a slide block; 12. a bidirectional screw; 13. a first motor; 14. a mounting plate; 15. a second mounting shaft; 16. a second gear; 17. a second rack; 18. a second cylinder; 19. installing a pipe; 20. a mounting rod; 21. a first scraping strip; 22. a second scraping strip; 23. a first bevel gear; 24. a second bevel gear; 25. a third bevel gear; 26. a second motor; 27. a discharge port; 28. and fixing the box.
Detailed Description
The technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model.
The utility model provides the technical scheme that: as shown in fig. 1, fig. 2 and fig. 3, in this embodiment, a combustion device for silane gas treatment, including combustion tank 1 and base 4, the base 4 top is equipped with and deposits jar 2, be equipped with install bin 3 between combustion tank 1 and the jar 2, be equipped with in the install bin 3 and accept board 5, it is equipped with first installation axle 6 to accept board 5 both sides, the quantity of first installation axle 6 is provided with two sets of, two sets of first installation axles 6 are symmetric distribution, it is rotationally connected with install bin 3 through first installation axle 6 to accept board 5, be equipped with first rack 8 in the install bin 3, first rack 8 and install bin 3 sliding connection, be equipped with first cylinder 9 in the install bin 3, first rack 8 right-hand member is connected with the piston rod output of first cylinder 9, first rack 8 has cup jointed first gear 7 on the first installation axle 6 in the right side, first rack 8 and first gear 7 meshing are connected, it is provided with sealing washer 10 to accept board 5 both sides, the quantity of sealing washer 10 is provided with two sets of sealing washer 10, two sets of sealing washer 10 are symmetric distribution, be equipped with slider 11 on sealing washer 10, the quantity of slider 11 is provided with slider 11, the slider 11 sets are provided with slider 11 and two sets of slider 11 are symmetric distribution, be equipped with two sets of slider 11 and two-way connection lead screw 11 are installed through the two-way connection 3, two-way lead screw 11 and two-way lead screw 11 are connected with the two-way lead screw 3.
The silicon dioxide dust generated in the combustion process of the silane gas in the combustion tank 1 is primarily collected through the arrangement of the bearing plate 5, and the tightness of the combustion tank 1 is still maintained when the silicon dioxide dust is uniformly cleaned through the arrangement of the two groups of sealing rings 10 and the like, so that the normal treatment process of the silane gas in the sealing pipe is not influenced, and the working efficiency is improved; when more silica dust is accumulated on the bearing plate 5, the first motor 13 is started to drive the bidirectional screw rod to rotate, the two groups of sealing rings 10 are simultaneously moved upwards in cooperation with the sliding block 11, the first cylinder 9 is started to drive the first rack 8 to slide, the bearing plate 5 is turned over in cooperation with the first gear 7, so that the dust on the bearing plate 5 falls on the mounting plate 14, the combustion tank 1 still keeps sealing under the action of the mounting plate 14 in the process, the normal work in the combustion tank 1 is not influenced, and then the bearing plate 5 and the two groups of sealing rings 10 are restored to the original state before dust on the mounting plate 14 is collected, so that the normal work in the combustion tank 1 is maintained in the dust collecting process.
As shown in fig. 4, fig. 5 and fig. 6, the mounting plate 14 is arranged in the storage tank 2, the second mounting shafts 15 are arranged at two sides of the mounting plate 14, two groups of second mounting shafts 15 are symmetrically distributed, the mounting plate 14 is rotationally connected with the storage tank 2 through the second mounting shafts 15, a discharge hole 27 is arranged at the left side of the storage tank 2, the discharge hole 27 is correspondingly arranged with the mounting plate 14, a second rack 17 is arranged in the storage tank 2, the second rack 17 is slidably connected with the storage tank 2, a second cylinder 18 is arranged in the storage tank 2, the right end of the second rack 17 is connected with the output end of a piston rod of the second cylinder 18, a second gear 16 is sleeved on the right side second mounting shaft 15, the second rack 17 is meshed with the second gear 16, a mounting tube 19 and a mounting rod 20 are arranged on the mounting plate 14, the mounting rod 20 penetrates through the mounting tube 19 and is rotationally connected with the mounting tube 19 through a bearing, the mounting tube 19 is rotationally connected with the mounting plate 14 through the bearing, a first scraping bar 21 is arranged on the mounting tube 19, a second scraping bar 22 is arranged on the mounting rod 20, a second conical gear 22 is slidably connected with the mounting plate 22 is arranged on the mounting tube 19, a conical gear 25 is fixedly sleeved on the mounting rod 20, a conical gear 25 is fixedly connected with a conical gear box 25, a conical gear 25 is fixedly connected with a conical gear 25, and a conical gear 25 is fixedly arranged at the lower end of the conical gear 25, and a conical gear 25 is fixedly connected with a conical gear 25, and a motor is fixedly connected with a conical gear 25.
The automatic discharge of the silicon dioxide powder is realized by arranging the mounting plate 14, the first scraping strip 21, the second scraping strip 22 and the like, so that the manpower input is reduced, and the working efficiency is improved; after all the dust is poured on the mounting plate 14 by the bearing plate 5 and is restored to the original position, the second cylinder 18 is started to drive the second rack 17 to rotate, the mounting plate 14 is inclined by a certain angle to be aligned with the discharge hole 27 under the action of the second gear 16, the second motor 26 is started to drive the third bevel gear 25 to rotate, the first bevel gear 23 and the second bevel gear 24 are driven by the third bevel gear 25 to synchronously rotate reversely, so that the mounting tube 19 and the mounting rod 20 are driven to rotate reversely, and the first scraping bar 21 and the second scraping bar 22 push the silicon dioxide dust on the mounting plate 14 to the discharge hole 27 simultaneously, so that the silicon dioxide dust is cleaned automatically.
The utility model provides a combustion device for silane gas treatment, which has the following specific working principle: when more silica dust is accumulated on the bearing plate 5, the first motor 13 is started to drive the bidirectional screw rod to rotate, the two groups of sealing rings 10 are simultaneously moved upwards in cooperation with the sliding block 11, the first cylinder 9 is started to drive the first rack 8 to slide, the bearing plate 5 is turned over in cooperation with the first gear 7, therefore, dust on the bearing plate 5 falls on the mounting plate 14, the combustion tank 1 still keeps sealing without affecting the normal operation in the combustion tank 1 under the action of the mounting plate 14 in the process, then the bearing plate 5 and the two groups of sealing rings 10 are restored to the original state before dust on the mounting plate 14 is collected, the normal operation in the combustion tank 1 is maintained in the process of collecting dust, after all the dust is poured on the mounting plate 14 by the bearing plate 5 and the original position is restored, the second cylinder 18 is started to drive the second rack 17 to rotate, the mounting plate 14 is inclined by a certain angle to be aligned with the discharge port 27 under the action of the second gear 16, the second motor 26 is started to drive the third bevel gear 25 to rotate, the first bevel gear 23 and the second bevel gear 24 are reversely rotated synchronously under the drive of the third bevel gear 25, and then the mounting plate 19 and the second bevel gear 20 are reversely rotated under the drive the third bevel gear 25 to automatically rotate the mounting plate 20 and the first bevel gear 21 and the second bevel gear 21 to clean the silica dust 22 on the mounting plate 14, and the discharge port 22 is simultaneously cleaned by the silicon dioxide on the mounting plate and the mounting plate 27.
Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.
Claims (6)
1. The utility model provides a silane gas handles and uses burner, includes combustion tank (1) and base (4), its characterized in that: the utility model discloses a combustion engine, including base (4) and combustion tank, base (4) top is equipped with and deposits jar (2), be equipped with install bin (3) between combustion tank (1) and depositing jar (2), be equipped with in install bin (3) and hold board (5), it is equipped with first installation axle (6) to accept board (5) both sides, the quantity of first installation axle (6) is provided with two sets of, two sets of first installation axle (6) are symmetric distribution, it is connected with install bin (3) rotation through first installation axle (6) to accept board (5), be equipped with first rack (8) in install bin (3), first rack (8) and install bin (3) sliding connection, be equipped with first cylinder (9) in install bin (3), first rack (8) right-hand member is connected with the piston rod output of first cylinder (9), the right side first gear (7) has been cup jointed on first installation axle (6), first rack (8) are connected with first gear (7) meshing.
2. The combustion device for silane gas processing according to claim 1, wherein: the bearing plate (5) both sides are equipped with sealing washer (10), the quantity of sealing washer (10) is provided with two sets ofly, two sets ofly sealing washer (10) are symmetric distribution, be equipped with slider (11) on sealing washer (10), the quantity of slider (11) is provided with two sets ofly, two sets ofly slider (11) are symmetric distribution, be equipped with two-way lead screw in install bin (3), be equipped with first motor (13) in install bin (3).
3. The combustion device for silane gas processing according to claim 2, wherein: the sealing ring (10) is in sliding connection with the mounting box (3) through the sliding block (11), two ends of the bidirectional screw rod penetrate through the mounting box (3) and are in rotary connection with the mounting box (3) respectively, the bidirectional screw rod penetrates through the left sliding block (11) and is in threaded connection with the sliding block (11), and the upper end of the bidirectional screw rod is connected with the output end of the first motor (13).
4. The combustion device for silane gas processing according to claim 1, wherein: be equipped with mounting panel (14) in depositing jar (2), mounting panel (14) both sides are equipped with second installation axle (15), the quantity of second installation axle (15) is provided with two sets of, two sets of second installation axle (15) are symmetric distribution, mounting panel (14) are rotated through second installation axle (15) and are connected with depositing jar (2), depositing jar (2) left side is provided with discharge gate (27), discharge gate (27) correspond the setting with mounting panel (14), be equipped with second rack (17) in depositing jar (2), second rack (17) and depositing jar (2) sliding connection, be equipped with second cylinder (18) in depositing jar (2), second rack (17) right-hand member is connected with the piston rod output of second cylinder (18), the right side second is cup jointed second gear (16) on second installation axle (15), second rack (17) are connected with second gear (16) meshing.
5. The combustion device for silane gas processing according to claim 4, wherein: be equipped with mounting tube (19) and installation pole (20) on mounting panel (14), installation pole (20) run through mounting tube (19) and rotate through bearing and mounting tube (19) and be connected, all be connected with mounting panel (14) rotation through bearing with installation pole (20) installation tube (19), be equipped with first strip (21) of scraping on mounting tube (19), be equipped with second strip (22) on installation pole (20), first strip (21) and second strip (22) below all are laminated with mounting panel (14) surface, mounting panel (14) below is equipped with fixed box (28).
6. The combustion device for silane gas processing according to claim 5, wherein: be equipped with third bevel gear (25) in fixed case (28), be equipped with second motor (26) in fixed case (28), third bevel gear (25) are connected through the output of pivot and second motor (26), first bevel gear (23) have been cup jointed on installation pipe (19), second bevel gear (24) have been cup jointed on installation pole (20), first bevel gear (23) and second bevel gear (24) are symmetric distribution about third bevel gear (25), first bevel gear (23) and second bevel gear (24) all are connected with third bevel gear (25) meshing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202323052460.2U CN221526627U (en) | 2023-11-13 | 2023-11-13 | Combustion device for silane gas treatment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202323052460.2U CN221526627U (en) | 2023-11-13 | 2023-11-13 | Combustion device for silane gas treatment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN221526627U true CN221526627U (en) | 2024-08-13 |
Family
ID=92205922
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202323052460.2U Active CN221526627U (en) | 2023-11-13 | 2023-11-13 | Combustion device for silane gas treatment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN221526627U (en) |
-
2023
- 2023-11-13 CN CN202323052460.2U patent/CN221526627U/en active Active
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