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CN207552434U - 一种用于太阳能电池的溅射镀膜装置 - Google Patents

一种用于太阳能电池的溅射镀膜装置 Download PDF

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CN207552434U
CN207552434U CN201721752635.2U CN201721752635U CN207552434U CN 207552434 U CN207552434 U CN 207552434U CN 201721752635 U CN201721752635 U CN 201721752635U CN 207552434 U CN207552434 U CN 207552434U
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blocking unit
substrate
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solar cells
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朱朋建
孙红霞
胡超
舒毅
潘登
陈凡
徐国军
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Hanwa Technology Co ltd
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Miasole Equipment Integration Fujian Co Ltd
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    • H01—ELECTRIC ELEMENTS
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Abstract

本实用新型公开了一种用于太阳能电池的溅射镀膜装置，包括：用于向衬底溅射的靶材；位于所述靶材与所述衬底之间的阻挡单元，所述阻挡单元在所述衬底上的正投影与所述靶材在所述衬底上的正投影部分重合。通过在靶材与衬底之间设置阻挡单元，可通过阻挡单元对靶材特定部位进行阻挡，使得被阻挡部位溅射到衬底上形成膜层的厚度得以降低，即通过灵活设置阻挡单元的位置，使得衬底上溅射形成的膜层厚度一致性较好，提高膜层的均匀性，从而满足产业化生产的实际需要。

Description

一种用于太阳能电池的溅射镀膜装置
技术领域
本实用新型涉及太阳能电池加工领域，尤其涉及一种用于太阳能电池的溅射镀膜装置。
背景技术
柔性衬底铜铟镓硒(CIGS)薄膜太阳能电池具有质量轻、抗辐射能力强、稳定性好等优势。其与卷对卷(roll to roll)技术相结合，适于大规模生产，可显著降低材料成本和制造成本。
窗口层既是CIGS太阳能电池异质结n型区的核心部分，又是电池功率输出的主要通道。窗口层即为溅射在衬底上的膜层，窗口层的均匀性对电池转换效率和产品良率尤为重要。在实际产业化生产过程中，由于靶材特性，溅射气体分布以及靶内磁场分布等原因，所制备的窗口层厚度均匀性不理想。通过在镀膜后的衬底上测量窗口层厚度，可以看到该膜层厚度中间部分偏厚，上下两边偏薄，均匀性偏差较大，不能满足产业化生产的实际需要。
实用新型内容
本实用新型的目的是提供一种用于太阳能电池的溅射镀膜装置，以解决现有技术中的问题，提高衬底上膜层的均匀度。
本实用新型提供了一种用于太阳能电池的溅射镀膜装置，所述用于太阳能电池的溅射镀膜装置包括：
用于向衬底溅射的靶材；
位于所述靶材与所述衬底之间的阻挡单元，所述阻挡单元在所述衬底上的正投影与所述靶材在所述衬底上的正投影部分重合。
作为优选，所述阻挡单元相对所述靶材固定，且所述阻挡单元在所述靶材上的正投影位于所述靶材的中部。
作为优选，所述阻挡单元的长度占所述靶材长度的50％-75％。
作为优选，所述靶材设置有四块，四块靶材沿着一字排列，所述阻挡单元设置在排列方向上位于末端的靶材处。
作为优选，所述用于太阳能电池的溅射镀膜装置还包括用于容纳所述靶材的靶仓。
作为优选，所述靶仓内设置有用于容纳所述靶材的容纳槽，所述靶仓靠近衬底的一侧设置有与所述容纳槽连通的开口。
作为优选，所述阻挡单元固定在所述靶仓设有所述开口的一侧，且所述阻挡单元覆盖在所述开口的中部。
作为优选，所述阻挡单元通过螺钉固定在所述靶仓上。
作为优选，所述阻挡单元的宽度大于等于所述开口的宽度，且所述阻挡单元的长度占所述开口长度的50％-75％。
作为优选，所述阻挡单元为挡板，所述挡板上设置有防腐蚀膜层。
本实用新型提供的用于太阳能电池的溅射镀膜装置，通过在靶材与衬底之间设置阻挡单元，可通过阻挡单元对靶材特定部位进行阻挡，使得被阻挡部位溅射到衬底上形成膜层的厚度得以降低，即通过灵活设置阻挡单元的位置，使得衬底上溅射形成的膜层厚度一致性较好，提高膜层的均匀性，从而满足产业化生产的实际需要。
附图说明
图1为本实用新型实施例提供的用于太阳能电池的溅射镀膜装置的俯视图；
图2为本实用新型又一实施例提供的用于太阳能电池的溅射镀膜装置的正视图。
附图标记说明：
1-靶材，2-阻挡单元，3-衬底，4-靶仓，5-螺钉。
具体实施方式
下面详细描述本实用新型的实施例，所述实施例的示例在附图中示出，其中自始至终相同或类似的标号表示相同或类似的元件或具有相同或类似功能的元件。下面通过参考附图描述的实施例是示例性的，仅用于解释本实用新型，而不能解释为对本实用新型的限制。
如图1所示，也可参见图2，本实用新型实施例提供了一种用于太阳能电池的溅射镀膜装置，所述用于太阳能电池的溅射镀膜装置包括：
用于向衬底3溅射的靶材1；
位于所述靶材1与所述衬底3之间的阻挡单元2，所述阻挡单元2在所述衬底3上的正投影与所述靶材1在所述衬底3上的正投影部分重合。
本实用新型提供的用于太阳能电池的溅射镀膜装置，通过在靶材1与衬底3之间设置阻挡单元2，可通过阻挡单元2对靶材1特定部位进行阻挡，使得被阻挡部位溅射到衬底3上形成膜层的厚度得以降低，即对原本衬底3上形成的膜层的较厚部位对应的靶材1上的部位，通过阻挡单元2进行阻挡，从而使得被阻挡部位与非阻挡部位在衬底3上溅射形成的膜层的厚度趋于一致。
本实用新型实施例可通过灵活设置阻挡单元2的位置，使得衬底3上溅射形成的膜层厚度一致性较好，提高膜层的均匀性，从而满足产业化生产的实际需要。
作为优选，所述阻挡单元2相对所述靶材1固定，且所述阻挡单元2在所述靶材1上的正投影位于所述靶材1的中部。作为优选，所述阻挡单元2靠近所述靶材1设置，且所述阻挡单元2与所述靶材1的中间部位正对。作为优选，所述阻挡单元2的长度占所述靶材1长度的50％-75％。
其中，本实用新型实施例中，将阻挡单元2靠近靶材1设置，也可以不靠近设置，而只是投影位于靶材1中部，目的是对靶材1中部进行阻挡即可；一般阻挡单元2的长度占靶材1长度的75％，即两端各余15％不进行阻挡，如此能够对衬底3上形成的膜层的中部位置(原本厚度较厚)进行重点阻挡，使得该部位膜层厚度得以降低，从而使膜层整体厚度均匀；而靶材1与阻挡单元2的形状不做限制，阻挡单元2只要能够进行部分阻挡即可。
作为优选，所述阻挡单元2也可靠近所述衬底3设置，且所述阻挡单元2与所述衬底3的中间部位正对。作为优选，所述阻挡单元2的长度占所述衬底3长度的50％-75％。同样道理，本实用新型实施例中，也可将阻挡单元2靠近衬底3设置，也能够起到使膜层整体厚度均匀的目的。
本实用新型实施例中，作为优选，所述靶材1设置有四块，四块靶材1沿着一字排列，所述阻挡单元2设置在排列方向上位于末端的靶材1处，作为优选，四块靶材1依次平行设置，所述阻挡单元2设置在第四块靶材1或者第一块靶材1处。对四块靶材1中的一块进行阻挡，一般即可使得溅射的膜层厚度均匀；当然，本领域技术人员可知，靶材1的数量、被阻挡靶材1的数量、以及阻挡单元2的数量均不限定，根据实际情况灵活设置。
作为优选，所述用于太阳能电池的溅射镀膜装置还包括用于容纳所述靶材1的靶仓4。作为优选，所述靶仓4内设置有用于容纳所述靶材1的容纳槽，所述容纳槽上靠近衬底3的一侧设置有与所述容纳槽连通的开口，所述靶材1穿过所述开口向衬底3溅射。作为优选，所述阻挡单元2固定在所述靶仓4设有所述开口的一侧，且所述阻挡单元2覆盖在所述开口的中部。作为优选，所述阻挡单元2通过螺钉5固定在所述靶仓4上。作为优选，所述阻挡单元2的宽度大于等于所述开口的宽度，且所述阻挡单元2的长度占所述开口长度的50％-75％。
其中，靶材1的形状多种，可为圆柱形或长方体形等等，对应的在靶仓4内设置形状一致的容纳槽，直接将靶材1插入即可；为了预留使靶材1能够直接溅射到衬底3的通道，因此在靶仓4上开设开口，开口一般位于靶材1与衬底3之间，开口的宽度要小于等于靶材1的宽度，防止靶材1从开口中漏出，而阻挡单元2的宽度大于等于所述开口的宽度，保证能够对靶材1的特定部位进行完整阻挡；靶仓4上对应位置设有销孔，可与螺钉5进行配合，用以固定阻挡单元2。
作为优选，所述阻挡单元2为挡板，所述挡板上设置有防腐蚀膜层。
其中，挡板为304奥氏体不锈钢，它具有极强的防锈、耐腐蚀性能，又有极佳的可塑性和韧性，便于加工制造。可根据实际需要改变挡板的大小和遮挡位置，实现衬底3上大面积均匀镀膜；防腐蚀层一般采用钛材料。
本申请实施例中，对设置阻挡单元2前后的情况分别进行测试，具体结果如下表：
表1设置阻挡单元前测试结果
表2设置阻挡单元后测试结果
经过研究发现，本实用新型能够显著提高衬底3上膜层的均匀性，其均匀性由90.44％提高到96.34％，可以满足产业化生产的实际需要。
以上依据图式所示的实施例详细说明了本实用新型的构造、特征及作用效果，以上所述仅为本实用新型的较佳实施例，但本实用新型不以图面所示限定实施范围，凡是依照本实用新型的构想所作的改变，或修改为等同变化的等效实施例，仍未超出说明书与图示所涵盖的精神时，均应在本实用新型的保护范围内。

Claims (10)

1.一种用于太阳能电池的溅射镀膜装置，其特征在于，所述用于太阳能电池的溅射镀膜装置包括：
用于向衬底溅射的靶材；
位于所述靶材与所述衬底之间的阻挡单元，所述阻挡单元在所述衬底上的正投影与所述靶材在所述衬底上的正投影部分重合。
2.根据权利要求1所述的用于太阳能电池的溅射镀膜装置，其特征在于，所述阻挡单元相对所述靶材固定，且所述阻挡单元在所述靶材上的正投影位于所述靶材的中部。
3.根据权利要求2所述的用于太阳能电池的溅射镀膜装置，其特征在于，所述阻挡单元的长度占所述靶材长度的50％-75％。
4.根据权利要求1所述的用于太阳能电池的溅射镀膜装置，其特征在于，所述靶材设置有四块，四块靶材沿着一字排列，所述阻挡单元设置在排列方向上位于末端的靶材处。
5.根据权利要求1所述的用于太阳能电池的溅射镀膜装置，其特征在于，所述用于太阳能电池的溅射镀膜装置还包括用于容纳所述靶材的靶仓。
6.根据权利要求5所述的用于太阳能电池的溅射镀膜装置，其特征在于，所述靶仓内设置有用于容纳所述靶材的容纳槽，所述靶仓靠近衬底的一侧设置有与所述容纳槽连通的开口。
7.根据权利要求6所述的用于太阳能电池的溅射镀膜装置，其特征在于，所述阻挡单元固定在所述靶仓设有所述开口的一侧，且所述阻挡单元覆盖在所述开口的中部。
8.根据权利要求7所述的用于太阳能电池的溅射镀膜装置，其特征在于，所述阻挡单元通过螺钉固定在所述靶仓上。
9.根据权利要求8所述的用于太阳能电池的溅射镀膜装置，其特征在于，所述阻挡单元的宽度大于等于所述开口的宽度，且所述阻挡单元的长度占所述开口长度的50％-75％。
10.根据权利要求1-9任一项所述的用于太阳能电池的溅射镀膜装置，其特征在于，所述阻挡单元为挡板，所述挡板上设置有防腐蚀膜层。
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