CN206991773U - A kind of micro displacement amplifier and nanometer positioning device - Google Patents
A kind of micro displacement amplifier and nanometer positioning device Download PDFInfo
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- CN206991773U CN206991773U CN201720114882.3U CN201720114882U CN206991773U CN 206991773 U CN206991773 U CN 206991773U CN 201720114882 U CN201720114882 U CN 201720114882U CN 206991773 U CN206991773 U CN 206991773U
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- lever
- flexible hinge
- micro displacement
- displacement amplifier
- stage casing
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Abstract
The utility model discloses a kind of micro displacement amplifier, including input platform and firm banking, the homonymy of input platform is symmetrically connected with a pair of input connecting rods, head end of the other end of two input connecting rods respectively with the first lever and the second lever is connected, the stage casing of first lever and the second lever is connected by two side positions of flexible hinge and firm banking respectively, the tail end of first lever and the second lever is connected by flexible hinge with the stage casing of the 3rd lever and the 4th lever respectively, the head end of 3rd lever and the 4th lever is connected by the both sides top of flexible hinge and firm banking respectively, the tail end of 3rd lever and the 4th lever is connected by flexible hinge with a pair of output connecting rods respectively, the equal positional symmetry of the other end of two output levers is connected with output stage.This micro displacement amplifier, efficiently solves the existing small low precision of nanometer positioning device stroke, it is complicated the problem of.The invention also discloses a kind of nanometer positioning device.
Description
Technical field
Precision processing technology field is the utility model is related to, more specifically to a kind of micro displacement amplifier, is further related to
A kind of nanometer positioning device.
Background technology
At present, realizing the main stream approach of the big stroke high position precision of motion platform has two kinds：One kind is to use grand micro- two-stage
Workbench, grand dynamic platform realize that big stroke, micropositioner realize final positioning precision.The main thought of this kind of locating platform design is
Two kinds of motor is combined, DC motor control mechanism grand movement, Piezoelectric Ceramics Excitation device ensures eventually
Hold the high accuracy of actuator.This mode overcomes the drawbacks of traditional micro-manipulating robot working space is small, but overall driving
System architecture is complicated, volume is big, cost is high, can not minimize.
Another kind is the individual layer work being combined into accurate displacement inputting apparatus such as piezoelectric ceramic actuator and linkage
Realize that large-stroke nanometer positions as platform, although simple in construction, the rigidity in the elastic hinge direction of motion makes displacement input dress
Put the actual elongation inputted and be less than nominal elongation, if the impulse stroke of mini positioning platform is reached requirement, it is necessary to
Increase the length of displacement inputting apparatus, but the length of the displacement inputting apparatus of piezoelectric ceramic actuator class is again flat by micro- positioning
The limitation of platform structural compactness.
Also, often stroke is small for the high nanometer positioning device of existing precision, it is impossible to which meet big stroke in actual tests will
Ask；And be significantly improved in terms of machining accuracy, but it is difficult to the Ultra-precision Turning of microminiature labyrinth.Specifically such as
Under：Stroke is small, and the scope that can be worked is small；Rigidity is small, is easily influenceed by extraneous uncertain factor so as to which precision is unable to reach；
Structure is relative complex, and process and assemble error increases.
In summary, the existing small low precision of nanometer positioning device stroke how is efficiently solved, complex structure and other problems,
It is current those skilled in the art's urgent problem.
Utility model content
In view of this, first purpose of the present utility model is to provide a kind of micro displacement amplifier, micro-displacement amplification
The structure design of device can efficiently solve the existing small low precision of nanometer positioning device stroke, complex structure and other problems, this reality
It is to provide a kind of nanometer positioning device including above-mentioned micro displacement amplifier with second new purpose.
In order to reach above-mentioned first purpose, the utility model provides following technical scheme：
A kind of micro displacement amplifier, including input platform and firm banking for being connected with motion input device, it is described
The homonymy of input platform is symmetrically connected with a pair of input connecting rods, the other ends of two input connecting rods respectively with the first lever
And second lever head end connection, the stage casing of first lever and the second lever passes through flexible hinge and the fixed bottom respectively
The two side positions connection of seat, the tail end of first lever and the second lever pass through flexible hinge and the 3rd lever and the 4th respectively
The stage casing connection of lever, the head end of the 3rd lever and the 4th lever pass through the two of flexible hinge and the firm banking respectively
Side top is connected, and the tail end of the 3rd lever and the 4th lever is connected by flexible hinge with a pair of output connecting rods respectively, and two
The equal positional symmetry of the other end of output lever described in root is connected with output stage.
Preferably, in above-mentioned micro displacement amplifier, flexible hinge is passed through between the input platform and the input connecting rod
Chain link, connected between the input connecting rod and the first lever and the second lever by flexible hinge.
Preferably, in above-mentioned micro displacement amplifier, flexible hinge is passed through between the output stage and the output connecting rod
Chain link.
Preferably, in above-mentioned micro displacement amplifier, the distance between the head end of first lever and stage casing are less than its tail
The distance between end and stage casing；The distance between the head end of second lever and stage casing be less than between its tail end and stage casing away from
From.
Preferably, in above-mentioned micro displacement amplifier, the distance between the head end of the 3rd lever and stage casing are less than its tail
The distance between end and stage casing；The distance between the head end of 4th lever and stage casing be less than between its tail end and stage casing away from
From.
Preferably, in above-mentioned micro displacement amplifier, flexible hinge, institute between the input lever and the input platform
State input the lever flexible hinge between first lever and the second lever, first lever and the second lever point respectively
Flexible hinge, first lever, the second lever, the 3rd lever and the 4th not between the 3rd lever and the 4th lever
Flexible hinge of the lever each between the firm banking is circular arc type flexible hinge.
Preferably, in above-mentioned micro displacement amplifier, flexible hinge, institute between the output lever and the output stage
It is rounding angle-style flexible hinge to state flexible lever of the output lever respectively between the 3rd lever and the 4th lever.
Preferably, in above-mentioned micro displacement amplifier, the firm banking is specially c-type framework, the both ends of the c-type framework
Inner side be connected respectively with first lever and the second lever, the summit at the both ends of the c-type framework is respectively with the described 3rd
Lever and the connection of the 4th lever.
Micro displacement amplifier provided by the utility model, including the input platform for being connected with motion input device and solid
Determine base, the homonymy of the input platform is symmetrically connected with a pair of input connecting rods, the other end point of two input connecting rods
Head end not with the first lever and the second lever is connected, and the stage casing of first lever and the second lever passes through flexible hinge respectively
It is connected with two side positions of the firm banking, the tail end of first lever and the second lever passes through flexible hinge and respectively
The stage casing of three levers and the 4th lever connects, the head end of the 3rd lever and the 4th lever respectively by flexible hinge with it is described
The both sides top connection of firm banking, the tail end of the 3rd lever and the 4th lever are exported by flexible hinge and a pair respectively
Connecting rod is connected, and the equal positional symmetry of the other end of two output levers is connected with output stage.This micro displacement amplifier,
Including two pairs of symmetrically arranged two groups of differential type levers, the stroke of amplification is improved, between lever and lever and lever and base
Between be connected by flexible hinge, flexible hinge and lever position itself and size accurately in the case of, Ke Yishi
The more accurate amplification of existing displacement；And this design structure is concise, the space occupied compared with the prior art in design compared with
Small, design uses symmetrical structure, and integral rigidity is higher, can be with relatively stable and accurate output displacement；In view of flexible hinge
The design feature of itself, micro displacement amplifier integrally casting can be avoided installation complexity and be possible to rigging error
Situation.In summary, this micro displacement amplifier provided by the utility model can efficiently solve existing nanometer positioning dress
Put the small low precision of stroke, it is complicated the problem of.
In order to reach above-mentioned second purpose, the utility model additionally provides a kind of nanometer positioning device, the nanometer positioning
Device includes any of the above-described kind of micro displacement amplifier.Because above-mentioned micro displacement amplifier has above-mentioned technique effect, having should
The nanometer positioning device of micro displacement amplifier should also have corresponding technique effect.
Preferably, in above-mentioned nanometer positioning device, in addition to bottom plate and piezoelectric ceramic actuator, the firm banking and institute
State bottom plate installation to fix, the piezoelectricity fixed with bottom plate installation is additionally provided between the input platform and the firm banking
Ceramic driver.
Brief description of the drawings
, below will be to embodiment in order to illustrate more clearly of the utility model embodiment or technical scheme of the prior art
Or the required accompanying drawing used is briefly described in description of the prior art, it should be apparent that, drawings in the following description are only
It is some embodiments of the utility model, for those of ordinary skill in the art, is not paying the premise of creative work
Under, other accompanying drawings can also be obtained according to these accompanying drawings.
Fig. 1 is the structural representation for the micro displacement amplifier that the utility model embodiment provides.
Marked in accompanying drawing as follows：
Input platform 1, output stage 2, input connecting rod 3, the first lever 4, the second lever 5, the 3rd lever 6, the 4th lever
7th, connecting rod 8, firm banking 9, flexible hinge 10 are exported.
Embodiment
The utility model embodiment discloses a kind of micro displacement amplifier, small to solve existing nanometer positioning device stroke
Low precision, it is complicated the problem of.
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the embodiment of the utility model is carried out
Clearly and completely describing, it is clear that described embodiment is only the utility model part of the embodiment, rather than whole
Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are not under the premise of creative work is made
The every other embodiment obtained, belong to the scope of the utility model protection.
Referring to Fig. 1, Fig. 1 is the structural representation for the micro displacement amplifier that the utility model embodiment provides.
The micro displacement amplifier that embodiment of the present utility model provides, including the input for being connected with motion input device
Platform 1 and firm banking 9, the homonymy of the input platform 1 are symmetrically connected with a pair of input connecting rods 3, and two inputs connect
Head end of the other end of bar 3 respectively with the first lever 4 and the second lever 5 is connected, in the lever 5 of the first lever 4 and second
Section is connected by flexible hinge 10 with two side positions of the firm banking 9 respectively, the lever 5 of the first lever 4 and second
Tail end is connected by flexible hinge 10 with the stage casing of the 3rd lever 6 and the 4th lever 7 respectively, the 3rd lever 6 and the 4th thick stick
The head end of bar 7 is connected by flexible hinge 10 with the both sides top of the firm banking 9 respectively, the 3rd lever 6 and the 4th
The tail end of lever 7 is connected by flexible hinge 10 with a pair of output connecting rods 8 respectively, the equal position of the other end of two output levers
Put and be symmetrically connected with output stage 2.
This micro displacement amplifier that this city embodiment provides, including two pairs of symmetrically arranged two groups of differential type levers, are carried
The high stroke of amplification, symmetrical design can effectively eliminate lateral additional displacement, the Longitudinal data displacement of reducing mechanism itself
Error, improve the precision of displacement equations；Combination between this lever can reduce the lever number needed for displacement equations
Amount, it is that larger displacement equations can be achieved using two pairs of levers, so also reducing the space occupied by device；Lever and thick stick
It is connected between bar and between lever and base by flexible hinge, in flexible hinge and lever position itself and size essence
In the case of standard, it is possible to achieve the more accurate amplification of displacement；And this design structure is concise, the space occupied is relatively existing
Have that the design in technology is smaller, design uses symmetrical structure, and integral rigidity is higher, can be with relatively stable and accurate carry-out bit
Move；In view of the design feature of flexible hinge in itself, micro displacement amplifier integrally casting can be avoided that installation is complicated and have can
There can be the situation of rigging error.In summary, this micro displacement amplifier provided by the utility model can efficiently solve existing
Some small low precisions of nanometer positioning device stroke, it is complicated the problem of.
For further optimization above-mentioned technical proposal, preferable on the basis of above-described embodiment, above-mentioned micro displacement amplifier
In, connected between the input platform 1 and the input connecting rod 3 by flexible hinge 10, the input thick stick of connecting rod 3 and first
Connected between the lever 5 of bar 4 and second by flexible hinge 10.
In the technical scheme that the present embodiment provides, further flexible hinge is respectively provided between input platform and input connecting rod
Connection, input between connecting rod and the first lever and the second lever and be respectively provided with flexible hinge connection, make the attachment structure of flexible hinge
Applied to more tie point positions in micro displacement amplifier, the effect for making accurate displacement amplify is more preferable, and further simplifies
Overall assembling.
For further optimization above-mentioned technical proposal, preferable on the basis of above-described embodiment, above-mentioned micro displacement amplifier
In, connected between the output stage 2 and the output connecting rod 8 by flexible hinge 10.
In the technical scheme that the present embodiment provides, further pass through flexible hinge between output stage and output connecting rod
Connection, make the attachment structure of flexible hinge be applied to more tie point positions in micro displacement amplifier, make accurate displacement amplify
Effect it is more preferable, and further simplify overall assembling.
For further optimization above-mentioned technical proposal, preferable on the basis of above-described embodiment, above-mentioned micro displacement amplifier
In, the distance between the head end of first lever 4 and stage casing are less than the distance between its tail end and stage casing；Second lever
The distance between 5 head end and stage casing are less than the distance between its tail end and stage casing.
In the technical scheme that the present embodiment provides, the design of use is to make the output end of the first lever and the second lever relative
Input has the longer arm of force, that is to say, that in the case where input displacement is limited, using the teaching of the invention it is possible to provide bigger and accurately
Output displacement, it can effectively increase displacement equations distance.
For further optimization above-mentioned technical proposal, preferable on the basis of above-described embodiment, above-mentioned micro displacement amplifier
In, the distance between the head end of the 3rd lever 6 and stage casing are less than the distance between its tail end and stage casing；4th lever
The distance between 7 head end and stage casing are less than the distance between its tail end and stage casing.
In the technical scheme that the present embodiment provides, the design of use is to make the output end of the 3rd lever and the 4th lever relative
Input has the longer arm of force, that is to say, that in the case where input displacement is limited, using the teaching of the invention it is possible to provide bigger and accurately
Output displacement, it can effectively increase displacement equations distance.
For further optimization above-mentioned technical proposal, preferable on the basis of above-described embodiment, above-mentioned micro displacement amplifier
In, it is described input lever and it is described input platform 1 between flexible hinge 10, it is described input lever respectively with first lever
4 and second flexible hinge 10 between lever 5, the lever 5 of first lever 4 and second respectively with the 3rd lever 6 and
Flexible hinge 10, first lever 4, the second lever 5, the 3rd lever 6 and the 4th lever 7 between four levers 7 are each and institute
It is circular arc type flexible hinge to state the flexible hinge 10 between firm banking 9.
Wherein, the design of circular arc type flexible hinge to be hinged both ends use in excessive position circular arc, hinge
The structure of two opposing arcs is presented in itself, and it has in flexible hinge, and motion transmitting accuracy is high, the less spy of slewing area
The application site of each flexible hinge gone out given in the suitable the present embodiment of point.
For further optimization above-mentioned technical proposal, preferable on the basis of above-described embodiment, above-mentioned micro displacement amplifier
In, flexible hinge 10, the output lever between the output lever and the output stage 2 respectively with the 3rd lever
6 and the 4th flexible lever between lever 7 be rounding angle-style flexible hinge.
Itd is proposed in the present embodiment this flexible hinge tool have concurrently circular arc type flexible hinge motion transmitting accuracy and and
There is opposing arcs type flexible hinge bigger motion to transmit scope, be adapted to the application of the technical program.
For further optimization above-mentioned technical proposal, preferable on the basis of above-described embodiment, above-mentioned micro displacement amplifier
In, the firm banking 9 is specially c-type framework, the inner side at the both ends of the c-type framework respectively with first lever 4 and the
Two levers 5 are connected, and the summit at the both ends of the c-type framework is connected with the 3rd lever 6 and the 4th lever 7 respectively.
Based on the micro displacement amplifier provided in above-described embodiment, the utility model additionally provides a kind of nanometer positioning dress
Put, the nanometer positioning device includes any one micro displacement amplifier in above-described embodiment.Because the nanometer positioning device uses
Micro displacement amplifier in above-described embodiment, so the beneficial effect of the nanometer positioning device refer to above-described embodiment.
For further optimization above-mentioned technical proposal, preferable on the basis of above-described embodiment, above-mentioned nanometer positioning device
In, in addition to bottom plate and piezoelectric ceramic actuator, the firm banking 9 are fixed with bottom plate installation, the input platform 1 with
The piezoelectric ceramic actuator fixed with bottom plate installation is additionally provided between the firm banking 9.
Each embodiment is described by the way of progressive in this specification, what each embodiment stressed be and other
The difference of embodiment, between each embodiment identical similar portion mutually referring to.
The foregoing description of the disclosed embodiments, professional and technical personnel in the field are enable to realize or new using this practicality
Type.A variety of modifications to these embodiments will be apparent for those skilled in the art, determine herein
The General Principle of justice can be realized in other embodiments in the case where not departing from spirit or scope of the present utility model.Cause
This, the utility model is not intended to be limited to the embodiments shown herein, and is to fit to and principles disclosed herein
The most wide scope consistent with features of novelty.
Claims (10)
1. a kind of micro displacement amplifier, it is characterised in that including for the input platform being connected with motion input device and fixation
Base, the homonymy of the input platform are symmetrically connected with a pair of input connecting rods, the other end difference of two input connecting rods
Be connected with the head end of the first lever and the second lever, the stage casing of first lever and the second lever respectively by flexible hinge with
The two side positions connection of the firm banking, the tail end of first lever and the second lever pass through flexible hinge and the 3rd respectively
The stage casing of lever and the 4th lever connects, the head end of the 3rd lever and the 4th lever respectively by flexible hinge with it is described solid
Determine the both sides top connection of base, the tail end of the 3rd lever and the 4th lever is connected by flexible hinge and a pair of output respectively
Bar is connected, and the equal positional symmetry of the other end of two output levers is connected with output stage.
2. micro displacement amplifier according to claim 1, it is characterised in that it is described input platform with it is described input connecting rod it
Between connected by flexible hinge, it is described input connecting rod and the first lever and the second lever between connected by flexible hinge.
3. micro displacement amplifier according to claim 2, it is characterised in that the output stage with it is described output connecting rod it
Between connected by flexible hinge.
4. micro displacement amplifier according to claim 3, it is characterised in that between the head end of first lever and stage casing
Distance be less than the distance between its tail end and stage casing；The distance between the head end of second lever and stage casing are less than its tail end
The distance between stage casing.
5. micro displacement amplifier according to claim 4, it is characterised in that between the head end of the 3rd lever and stage casing
Distance be less than the distance between its tail end and stage casing；The distance between the head end of 4th lever and stage casing are less than its tail end
The distance between stage casing.
6. micro displacement amplifier according to claim 5, it is characterised in that it is described input lever with it is described input platform it
Between flexible hinge, input the lever flexible hinge between first lever and the second lever, described first respectively
Lever and the second lever flexible hinge between the 3rd lever and the 4th lever, first lever, the second thick stick respectively
The flexible hinge of bar, the 3rd lever and the 4th lever each between the firm banking is circular arc type flexible hinge.
7. micro displacement amplifier according to claim 6, it is characterised in that the output lever and the output stage it
Between flexible lever respectively between the 3rd lever and the 4th lever of flexible hinge, the output lever be rounding
Type flexible hinge.
8. micro displacement amplifier according to claim 7, it is characterised in that the firm banking is specially c-type framework, institute
The inner side for stating the both ends of c-type framework is connected with first lever and the second lever respectively, the summit at the both ends of the c-type framework
It is connected respectively with the 3rd lever and the 4th lever.
9. a kind of nanometer positioning device, it is characterised in that including the micro displacement amplifier as described in claim any one of 1-8.
10. nanometer positioning device according to claim 9, it is characterised in that also including bottom plate and piezoelectric ceramic actuator,
The firm banking is fixed with bottom plate installation, is additionally provided with and the bottom between the input platform and the firm banking
The fixed piezoelectric ceramic actuator of plate installation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720114882.3U CN206991773U (en) | 2017-02-07 | 2017-02-07 | A kind of micro displacement amplifier and nanometer positioning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720114882.3U CN206991773U (en) | 2017-02-07 | 2017-02-07 | A kind of micro displacement amplifier and nanometer positioning device |
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| Publication Number | Publication Date |
|---|---|
| CN206991773U true CN206991773U (en) | 2018-02-09 |
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ID=61422587
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720114882.3U Expired - Fee Related CN206991773U (en) | 2017-02-07 | 2017-02-07 | A kind of micro displacement amplifier and nanometer positioning device |
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| Country | Link |
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| CN (1) | CN206991773U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106782674A (en) * | 2017-02-07 | 2017-05-31 | 广东工业大学 | A kind of micro displacement amplifier and nanometer positioning device |
| CN108453492A (en) * | 2018-03-30 | 2018-08-28 | 天津大学 | A kind of big stroke pressing mechanism for micro-nano delineation |
-
2017
- 2017-02-07 CN CN201720114882.3U patent/CN206991773U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106782674A (en) * | 2017-02-07 | 2017-05-31 | 广东工业大学 | A kind of micro displacement amplifier and nanometer positioning device |
| CN108453492A (en) * | 2018-03-30 | 2018-08-28 | 天津大学 | A kind of big stroke pressing mechanism for micro-nano delineation |
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| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180209 Termination date: 20190207 |