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CN203339985U - Novel looper type bionic crawling piezoelectric precise driving platform - Google Patents

Novel looper type bionic crawling piezoelectric precise driving platform Download PDF

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Publication number
CN203339985U
CN203339985U CN2013203112565U CN201320311256U CN203339985U CN 203339985 U CN203339985 U CN 203339985U CN 2013203112565 U CN2013203112565 U CN 2013203112565U CN 201320311256 U CN201320311256 U CN 201320311256U CN 203339985 U CN203339985 U CN 203339985U
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China
Prior art keywords
flexible hinge
piezoelectric
piezoelectric stack
precision
clamper
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Expired - Lifetime
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CN2013203112565U
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Chinese (zh)
Inventor
赵宏伟
邵明坤
李建平
杨倚寒
程虹丙
张霖
刘宏达
佟达
高景
董晓龙
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Jilin University
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Jilin University
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Abstract

The utility model relates to a novel looper type bionic crawling piezoelectric precise driving platform, which can be applied for a microminiature walking robot, ultra-precision process, a micro-electro-mechanical system and other important scientific and engineering fields. The novel looper type bionic crawling piezoelectric precise driving platform comprises a mover subunit, a fixer unit and a work bench. The mover unit comprises a flexible hinge, precision clamping piezoelectric stacks, a precision driving piezoelectric stack, etc. The flexible hinge employs integral process as follows: numerical control milling - linear cutting - heat treatment - precision grinding, no assembling is required. The clamping and driving portions of the flexible hinge respectively employ an ''elliptic'' bridge type displacement amplification mechanism, the end portion of the flexible hinge is provided with pre-tightening mechanisms of the piezoelectric stacks. A ''looper'' like crawling movement is realized by controlling the clamping piezoelectric stacks in the mover unit and by driving the control time sequence of the piezoelectric stacks. The fixer unit comprises a guide rail and a pedestal, and the guide rail is fixedly connected with the pedestal. The output terminal of the work bench is provided with a screwed hole to be connected with the mover unit through a screw. The novel looper type bionic crawling piezoelectric precise driving platform is advantageous in that the structure is compact, the stroke is large, work is stable and reliable, costs are low, effect is shown quickly, benefits are high, etc.

Description

Novel Inchworm type simulating crawling Precision Piezoelectric drives platform
Technical field
The utility model relates to the important Scientific Engineering fields such as microminiature walking robot, ultraprecise processing, MEMS (micro electro mechanical system), and particularly a kind of novel Inchworm type simulating crawling Precision Piezoelectric drives platform.Bionics principle based on the nature inchworm motion, adopt piezoelectric stack to drive and the flexible hinge guiding is amplified, and realizes the large stroke precision motion of Nano grade.
Background technology
Along with scientific and technical fast development, especially in ultraprecise microfabrication and measuring technique, MEMS (micro electro mechanical system), miniature walking robot, the precision optics engineering, aeronautical and space technology, semiconductor is manufactured, many hard-core technologies such as modern medicine and bio-genetics field, and that traditional driver is limited by its volume is large, resolution is low, the fatal shortcoming such as low precision can't meet the demand in hard-core technology field, therefore the demand to high performance accurate straight line Driving technique is more strong, various countries research-on-research personnel also go all out to study the micrometric displacement precision driver of superior performance.Wherein piezoelectric actuator has the size shape compactness, inertia is little, frequency response is fast, output loading greatly, not affected by magnetic fields, be easy to control, drive resolution in characteristics such as nanoscales; And flexible hinge has the machinery-free friction, gapless, autokinesis advantages of higher; Adopt piezoelectric stack to carry out the precision driver compact conformation of clamper and driving, flexible hinge guiding and displacement amplification, there is nano level positioning precision.Wherein the mode of creeping of the precision linear actuator of piezoelectric based on wriggle principle natural imitation ungraduated ruler earwig based on piezoelectric actuator, by the accumulation to the small step pitch displacement of piezoelectric stack, can realize half step distance, the infinity of theoretical stroke, high-resolution accurate bidirectional step motion.Driver in the past often exist physical dimension bigger than normal, drive resolution low, repeatable poor, be difficult to the shortcoming such as process and assemble.Therefore, design a kind of nano grade positioning precision and repetitive positioning accuracy function admirable, and clamper is reliable and stable, drive position stably Inchworm type creeping force down accurate bionic movement platform and extremely be necessary.
Summary of the invention
The purpose of this utility model is to provide a kind of novel Inchworm type simulating crawling Precision Piezoelectric to drive platform, has solved the problems referred to above that prior art exists.Bionics based on the nature inchworm motion, the Motion Resolution rate is at Nano grade, and stroke can be infinity.By controlling the control sequential of piezoelectric stack in mover, realize bionic movement when mover is creeped along the similar looper of fixed guide, thereby drive the precise motion of workbench.
Above-mentioned purpose of the present utility model is achieved through the following technical solutions:
Novel Inchworm type simulating crawling Precision Piezoelectric drives platform, comprise mover unit, stator unit and workbench 6, described mover unit comprises flexible hinge 5, accurate clamper piezoelectric stack I, II 4,8, accurate piezoelectric stack 9, pretension screw 10 and the connection pretension screw 7 of driving, described stator unit comprises pedestal 1 and guide rail 3 two parts, described guide rail 3 is fixedly connected with pedestal 1 by sunk screw 2, clamper piezoelectric stack I, II 4,8 are placed in respectively the two ends of flexible hinge 5, and respectively by pretension screw 10 pretensions; Drive piezoelectric stack 9 to be connected with flexible hinge 5 by lock-screw 7, the top of described flexible hinge 5 is connected with workbench 6, clamper pawl and guide rail 3 interference fits, and what guaranteed to move in the mover motion process is reliable and stable; By controlling the control sequential of clamper piezoelectric stack I, II 4,8, driving piezoelectric stack 9, realize the looper crawling exercises.
Described flexible hinge 5 is symmetrical structure, and the integral mechanical structure one integrated mass has guaranteed the stable of clamper, driveability.
Described workbench 6 outputs have to connect uses screwed hole, is the type variable interface platform.
Described workbench 6 adopts the flexible hinge design with the earrings of flexible hinge 5 junctions, and becomes symmetrical expression to arrange, has offset and has driven piezoelectric stack 9 elongations and the impact of shortening workbench 6.
Described mover unit adopts flexible hinge 5 to lead and amplifies, machinery-free friction in transmission process, and gapless, autokinesis is high.
Described flexible hinge 5 adopts numerical control mill-integrated processing of line cutting-heat treatment-accurate grinding without assembling, has guaranteed accurate dimensional accuracy and the accuracy of form and position; Described flexible hinge 5 clampers, drive part all adopt " ellipse " bridge-type displacement amplifying mechanism, the effective travel of having amplified piezoelectric stack, make its clamper reliable and stable, drive step pitch to increase, apply more extensive;
There are clamper piezoelectric stack I, II 4,8 in described flexible hinge 5 ends and drive the pre-tightening mechanism of piezoelectric stack 9, by pretension screw 10, connection pretension screw 7 pretensions, avoid the damage to accurate clamper piezoelectric stack I, II 4,8 and driving piezoelectric stack 9 respectively;
Adopt flexible hinge to replace traditional kinematic pair, the machinery-free friction, gapless, autokinesis is high; By controlling the control sequential of clamper piezoelectric stack I in mover, II 4,8, driving piezoelectric stack 9, can realize similar " looper " crawling exercises, change the control sequential and also can change the direction of motion.Its Motion Resolution rate is at Nano grade, and stroke can be infinity.
The beneficial effects of the utility model are: can realize the accurate linear drives function of nanoscale, in motion process clamper steadily, reliable, drive efficiency high.Can be used for microminiature walking robot, ultraprecise driving and the fields such as processing, MEMS (micro electro mechanical system), purpose be to promote microminiature walking robot, ultraprecise processing the fine motion precision, reduce physical dimension, improve the inferior positions such as the bigger than normal and performance of complex structure, the size of legacy drive is unreliable simultaneously, have that compact conformation, theoretical stroke are infinitely great, the clamper process stabilization is reliable, cost is low, instant effect, benefit advantages of higher, micro-nano accurate drive with positioning field in be with a wide range of applications.
The accompanying drawing explanation
Accompanying drawing described herein is used to provide further understanding of the present utility model, forms the application's a part, and illustrative example of the present utility model and explanation thereof, for explaining the utility model, do not form improper restriction of the present utility model.
Fig. 1 is axle schematic side view of the present utility model;
Fig. 2 is schematic side view of the present utility model;
The axle side schematic diagram that Fig. 3 is mover of the present utility model unit;
The elevational schematic view that Fig. 4 is mover of the present utility model unit.
In figure: 1. pedestal; 2. sunk screw; 3. guide rail; 4. clamper piezoelectric stack I; 5. flexible hinge; 6. workbench; 7. lock-screw; 8. clamper piezoelectric stack II; 9. driving piezoelectric stack; 10. pretension screw.
Embodiment
Further illustrate detailed content of the present utility model and embodiment thereof below in conjunction with accompanying drawing.
Referring to shown in Fig. 1 to Fig. 4, novel Inchworm type simulating crawling Precision Piezoelectric of the present utility model drives platform, comprise mover unit, stator unit and workbench 6, described mover unit comprises flexible hinge 5, accurate clamper piezoelectric stack I, II 4,8, accurate piezoelectric stack 9, pretension screw 10 and the connection pretension screw 7 of driving, described stator unit comprises pedestal 1 and guide rail 3 two parts, described guide rail 3 is fixedly connected with pedestal 1 by sunk screw 2, clamper piezoelectric stack I, II 4,8 are placed in respectively the two ends of flexible hinge 5, and respectively by pretension screw 10 pretensions; Drive piezoelectric stack 9 to be connected with flexible hinge 5 by lock-screw 7, the top of described flexible hinge 5 is connected with workbench 6, clamper pawl and guide rail 3 interference fits, and what guaranteed to move in the mover motion process is reliable and stable; By controlling the control sequential of clamper piezoelectric stack I, II 4,8, driving piezoelectric stack 9, realize the looper crawling exercises.
Described flexible hinge 5 is symmetrical structure, and the integral mechanical structure one integrated mass has guaranteed the stable of clamper, driveability.
Described workbench 6 outputs have to connect uses screwed hole, is the type variable interface platform.
Described workbench 6 adopts the flexible hinge design with the earrings of flexible hinge 5 junctions, and becomes symmetrical expression to arrange, has offset and has driven piezoelectric stack 9 elongations and the impact of shortening workbench 6.
Described mover unit adopts flexible hinge 5 to lead and amplifies, machinery-free friction in transmission process, and gapless, autokinesis is high.
Described flexible hinge 5 adopts numerical control mill-integrated processing of line cutting-heat treatment-accurate grinding without assembling, has guaranteed accurate dimensional accuracy and the accuracy of form and position; Described flexible hinge 5 clampers, drive part all adopt " ellipse " bridge-type displacement amplifying mechanism, the effective travel of having amplified piezoelectric stack, make its clamper reliable and stable, drive step pitch to increase, apply more extensive;
There are clamper piezoelectric stack I, II 4,8 in described flexible hinge 5 ends and drive the pre-tightening mechanism of piezoelectric stack 9, by pretension screw 10, connection pretension screw 7 pretensions, avoid the damage to accurate clamper piezoelectric stack I, II 4,8 and driving piezoelectric stack 9 respectively;
Adopt flexible hinge to replace traditional kinematic pair, the machinery-free friction, gapless, autokinesis is high; By controlling the control sequential of clamper piezoelectric stack I in mover, II 4,8, driving piezoelectric stack 9, can realize similar " looper " crawling exercises, change the control sequential and also can change the direction of motion.Its Motion Resolution rate is at Nano grade, and stroke can be infinity.
Referring to shown in Fig. 1 to Fig. 4, specific works process of the present utility model is as follows:
The realization of Precision Piezoelectric bionic movement platform Inchworm type creeping motion, initial condition: the clamper piezoelectric stack I in the mover unit, II 4,8 and driving piezoelectric stack 9 are all not charged, system is in free state, because clamper pawl and the guide rail 3 of flexible hinge 5 is interference fits, the mover unit can stand on guide rail 3.The Inchworm type creeping process: one, clamper piezoelectric stack I 4 energising, drive flexible hinge 5 clamper pawl I and clamp tight guide rail 3, clamper piezoelectric stack II 8, drive piezoelectric stack 9 all not charged; Two, clamper piezoelectric stack I 4 keeps "on" position, drives piezoelectric stack 9 energisings, by " ellipse " bridge-type displacement amplifying mechanism, drives small displacement of movable workbench, and clamper piezoelectric stack II 8 is not charged; Three, 8 energisings of clamper piezoelectric stack II drive flexible hinge 5 clamper pawl II and clamp tight guide rail 3, and clamper piezoelectric stack I 4 is converted to not electriferous state by "on" position afterwards, drive piezoelectric stack 9 to keep energising; Four, clamper piezoelectric stack II 8 keeps "on" position, drives piezoelectric stack 9 to be converted to off-position by energising, and it is constant that clamper piezoelectric stack I 4 maintains the no power state; Five, clamper piezoelectric stack I, II 4,8 and driving piezoelectric stack 9 are all not charged, and system is replied initial condition.Repetitive process one to five, can realize that workbench 6 is along on guide rail 3 rectilinear directions, being similar to the precise motion that looper creeps.
The novel Inchworm type simulating crawling Precision Piezoelectric that the utility model relates to drives the motion of platform to carry out according to strict sequential logic, change piezoelectric stack and control sequential, to change the direction of motion, and due to the utility model adopted piezoelectric stack as drive source and flexible hinge as power transmitting elements, there is the size shape compactness, inertia is little, frequency response is fast, output loading is large, not affected by magnetic fields, generate heat little, the machinery-free friction, gapless, the autokinesis high, and can realize that clamper is reliable and stable, movement travel is large, the functions such as the accurate driving of nanoscale.
The foregoing is only preferred embodiment of the present utility model, be not limited to the utility model, for a person skilled in the art, the utility model can have various modifications and variations.All any modifications that the utility model is done, be equal to replacement, improvement etc., within all should being included in protection range of the present utility model.

Claims (4)

1. a novel Inchworm type simulating crawling Precision Piezoelectric drives platform, it is characterized in that: comprise mover unit, stator unit and workbench (6), described mover unit comprises flexible hinge (5), accurate clamper piezoelectric stack I, II (4,8), accurate piezoelectric stack (9), pretension screw (10) and the connection pretension screw (7) of driving, and described stator unit comprises pedestal (1) and guide rail (3) two parts; Described guide rail (3) is fixedly connected with pedestal (1) by sunk screw (2), and clamper piezoelectric stack I, II (4,8) are placed in respectively the two ends of flexible hinge (5), and respectively by pretension screw (10) pretension; Drive piezoelectric stack (9) to be connected with flexible hinge (5) by lock-screw (7), the top of described flexible hinge (5) is connected with workbench (6), clamper pawl and guide rail (3) interference fits; By controlling the control sequential of clamper piezoelectric stack I, II (4,8), driving piezoelectric stack (9), realize the looper crawling exercises.
2. novel Inchworm type simulating crawling Precision Piezoelectric according to claim 1 drives platform, and it is characterized in that: described flexible hinge (5) is symmetrical structure.
3. novel Inchworm type simulating crawling Precision Piezoelectric according to claim 1 drives platform, it is characterized in that: described workbench (6) output has to connect uses screwed hole, is the type variable interface platform.
4. novel Inchworm type simulating crawling Precision Piezoelectric according to claim 1 drives platform, it is characterized in that: described workbench (6) adopts the flexible hinge design with the earrings of flexible hinge (5) junction, and become symmetrical expression to arrange, offset driving piezoelectric stack (9) elongation and the impact of shortening workbench (6).
CN2013203112565U 2013-06-03 2013-06-03 Novel looper type bionic crawling piezoelectric precise driving platform Expired - Lifetime CN203339985U (en)

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Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104821738A (en) * 2015-05-13 2015-08-05 西安交通大学 Tree-climbing piezoelectric actuator and actuation method
CN105292290A (en) * 2015-11-10 2016-02-03 天津工业大学 Motion and control method for bionic inchworm robot
CN106092475A (en) * 2016-06-01 2016-11-09 中国工程物理研究院总体工程研究所 A kind of piezoelectric type vibration platform being applicable to broadband and high thrust
CN106370537A (en) * 2016-09-30 2017-02-01 吉林大学 Precise pressing-in driving unit based on piezoelectric fiber
CN109347363A (en) * 2018-11-16 2019-02-15 哈尔滨工业大学 A kind of creeping motion type flexible hinge combination piezoelectric actuator
CN110601593A (en) * 2019-09-27 2019-12-20 长春工业大学 Self-centering micro-nano piezoelectric linear driver with upper stator
CN111327228A (en) * 2020-04-08 2020-06-23 宁波奥克斯电气股份有限公司 Inchworm type piezoelectric linear driver
CN112803829A (en) * 2021-01-13 2021-05-14 吉林大学 Friction asymmetric inertia piezoelectric linear driving device and method
CN114915207A (en) * 2022-04-27 2022-08-16 华中科技大学 Piezoelectric driver and simulation method thereof
CN114915207B (en) * 2022-04-27 2024-11-19 华中科技大学 Piezoelectric driver and simulation method thereof

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104821738A (en) * 2015-05-13 2015-08-05 西安交通大学 Tree-climbing piezoelectric actuator and actuation method
CN105292290A (en) * 2015-11-10 2016-02-03 天津工业大学 Motion and control method for bionic inchworm robot
CN106092475A (en) * 2016-06-01 2016-11-09 中国工程物理研究院总体工程研究所 A kind of piezoelectric type vibration platform being applicable to broadband and high thrust
CN106092475B (en) * 2016-06-01 2018-10-12 中国工程物理研究院总体工程研究所 A kind of piezoelectric type vibration platform suitable for broadband and high thrust
CN106370537A (en) * 2016-09-30 2017-02-01 吉林大学 Precise pressing-in driving unit based on piezoelectric fiber
CN109347363A (en) * 2018-11-16 2019-02-15 哈尔滨工业大学 A kind of creeping motion type flexible hinge combination piezoelectric actuator
CN110601593A (en) * 2019-09-27 2019-12-20 长春工业大学 Self-centering micro-nano piezoelectric linear driver with upper stator
CN111327228A (en) * 2020-04-08 2020-06-23 宁波奥克斯电气股份有限公司 Inchworm type piezoelectric linear driver
CN112803829A (en) * 2021-01-13 2021-05-14 吉林大学 Friction asymmetric inertia piezoelectric linear driving device and method
CN114915207A (en) * 2022-04-27 2022-08-16 华中科技大学 Piezoelectric driver and simulation method thereof
CN114915207B (en) * 2022-04-27 2024-11-19 华中科技大学 Piezoelectric driver and simulation method thereof

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Granted publication date: 20131211