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CN205485279U - A mixed wavelength light source system of UV -LED for exposure machine - Google Patents

A mixed wavelength light source system of UV -LED for exposure machine Download PDF

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Publication number
CN205485279U
CN205485279U CN201620260057.XU CN201620260057U CN205485279U CN 205485279 U CN205485279 U CN 205485279U CN 201620260057 U CN201620260057 U CN 201620260057U CN 205485279 U CN205485279 U CN 205485279U
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CN
China
Prior art keywords
led
exposure machine
cooling body
water inlet
fixed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201620260057.XU
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Chinese (zh)
Inventor
张文明
汤正光
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kunshan Zunchen Electronics Co ltd
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Kunshan Zunchen Electronics Co ltd
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Publication date
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Priority to CN201620260057.XU priority Critical patent/CN205485279U/en
Application granted granted Critical
Publication of CN205485279U publication Critical patent/CN205485279U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

The utility model discloses a UV of exposure machine the mixed wavelength light source system of LED, including glass pipe, UV LED lights board, rotary mechanism, electrically conductive mechanism, cooling body and erection bracing seat, the cooling body with rotary mechanism passes through gear drive and connects, the erection bracing seat is two and just is located respectively the both sides of cooling body, the cooling body turning position be in in the erection bracing seat, UV the LED lamp plate is fixed on the cooling body, the glass pipe is in through two fixed cover fixed connection of glass pipe on the cooling body, the glass shroud is established UV the LED lamp plate, the electrically conductive fixed mounting of mechanism is in on the cooling body, electrically conductive mechanism is located in the erection bracing seat, electrically conductive mechanism with UV LED lamp plate electric connection. This system can promote the product quality of exposure machine, reduces production cost, can reduce the power consumption of exposure machine, but the mechanism on the exposure machine just must not revised to direct substitution metal halogen exposure fluorescent tube.

Description

UV-LED mixed wavelengths light-source system for exposure machine
Technical field
This utility model relates to the light source field of exposure machine, is used in particular to one The UV-LED mixed wavelengths light-source system of exposure machine.
Background technology
The general exposure machine currently used exposure light source overwhelming majority is the most also using metal halogen Element exposure fluorescent tube, but the fluorescent tube of this type has following shortcoming: and 1 Acceptable life is only For 800-1000 hour, must often change fluorescent tube, and light decay rate reaches more than 30%, sternly Heavily have impact on production efficiency and the quality of production of exposure machine.2. power consumption is big, difficult point lamp, Efficiency is low, heat is high.3. after starting, arrive required ultraviolet work capacity intensity very Slowly (more than 15 minutes) and must be the brightest, unnecessary power loss be not only caused also to contract The short working life of metal halogen exposure lamp pipe.
Then have an advantages below relative to UV-LED light source: the life-span of 1.UV-LED lamp up to 20000-30000 hour, within optical attenuation degree only has 3%.The working method of 2.UV-LED Be can the only instant igniting when needs ultraviolet, decrease the time changing fluorescent tube.3. Low power consumption, equal illumination power consumption only needs the 20% of metal halogen exposure lamp pipe.
If so the metal halogen exposure lamp pipe light source that can be used by exposure machine as early as possible all changes Become UV-LED light source, product quality and efficiency can be obviously improved, and be substantially reduced production Expense.
Utility model content
The purpose of this utility model is the problem above overcoming prior art to exist, it is provided that one Plant the UV-LED mixed wavelengths light-source system for exposure machine, it is possible to promote the product of exposure machine Quality and efficiency, reduce producing cost, reduces the power consumption of exposure machine.
For realizing above-mentioned technical purpose, reach above-mentioned technique effect, this utility model by with Lower technical scheme realizes:
A kind of UV-LED mixed wavelengths light-source system for exposure machine, it is characterised in that: bag Include glass tubing, UV-LED lamp plate, rotating mechanism, conductive mechanism, cooling body and install Supporting seat, described cooling body is connected by gear drive with described rotating mechanism, described peace Dress supports seat and is two and lays respectively at the both sides of described cooling body, and described cooling body turns Moving and be positioned at described installation in support seat, described UV-LED lamp plate is fixed on described cooling body On, described glass tubing is fixedly connected on described cooling body by two glass tubing fixed covers, Described glass shroud sets residence and states UV-LED lamp plate, and described conductive mechanism is fixedly mounted on described On cooling body, described conductive mechanism is positioned at described installation and supports in seat, described conductive mechanism It is electrically connected with described UV-LED lamp plate.
As further improvement of the utility model, described cooling body include cool down spindle tube, Water inlet pipe and outlet pipe, described water inlet pipe and outlet pipe are fixedly connected on described cooling spindle tube Two ends and connect with described cooling spindle tube, also include water supply connector and water out adapter, institute State water supply connector and described water out adapter is respectively fixedly connected with at described water inlet pipe and outlet pipe End.
As further improvement of the utility model, said two glass tubing fixed cover is solid respectively Surely described cooling spindle tube and described water inlet pipe and the joining place of outlet pipe, described glass it are set in The two ends of glass pipe are respectively fixedly connected with on said two glass tubing fixed cover.
As further improvement of the utility model, described rotating mechanism include electro-motor, Fixed plate, the first ball bearing and first and second gear, described electro-motor is fixed on described In fixed plate, described first gear fixed cover is located in the rotating shaft of described electro-motor, described Second gear fixed cover is located on described water inlet pipe, and described first and second gear engages each other, The centre of described fixed plate offers through hole, and described first ball bearing is fixed on described through hole In, the head rotation of described water inlet pipe is located in described first ball bearing.
As further improvement of the utility model, if described UV-LED lamp plate includes dry circuit Plate and some UV-LED chipsets, described UV-LED chipset uniform intervals is fixed on described electricity On the plate of road, described circuit board is rectangle, and described circuit board mutually flexibly connects and retainer ring It is wound on the surface of described cooling spindle tube.
As further improvement of the utility model, described conductive mechanism includes two conducting rings, Said two is led fixed cover respectively and is located on described water inlet pipe and outlet pipe, described conducting ring with Described UV-LED lamp plate is electrically connected with.
As further improvement of the utility model, described installation supports in seat and is provided with for described The hole, location that conducting ring is placed, described installation supports in seat and is fixed with the second rolling bearing, institute State the second rolling bearing and be positioned at the described conducting ring side away from described glass tubing fixed cover, institute State water inlet pipe and outlet pipe rotates respectively and is located in described second rolling bearing, described water inlet Pipe and outlet pipe pass the most described installation and support seat.
As further improvement of the utility model, described cooling spindle tube is hexagonal tube, Described water inlet pipe and outlet pipe are round tube, described cooling main shaft and described water inlet pipe and go out Water pipe is one-body molded.
As further improvement of the utility model, described UV-LED chipset comprise five kinds Wave-length coverage, be respectively as follows: 365-370nm, 380-390nm, 390-410nm, 420-430nm, 430-450nm。
The beneficial effects of the utility model are: the utility model proposes for exposure machine UV-LED mixed wavelengths light-source system promotes the product quality of exposure machine, reduces exposure machine simultaneously Producing cost, it is possible to reduce exposure machine power consumption, can direct substitution metal halogen exposure Fluorescent tube and be not necessary to revise the mechanism on exposure machine.
Described above is only the general introduction of technical solutions of the utility model, in order to become apparent from Solve technological means of the present utility model, and can be practiced according to the content of description, below After preferred embodiment of the present utility model coordinating accompanying drawing to describe in detail such as.This utility model Detailed description of the invention be shown in detail in by following example and accompanying drawing thereof.
Accompanying drawing explanation
Accompanying drawing described herein is used for providing being further appreciated by of the present utility model, constitutes The part of the application, schematic description and description of the present utility model is used for explaining this Utility model, is not intended that improper restriction of the present utility model.In the accompanying drawings:
Fig. 1 is that this hair is in the structural representation of the UV-LED mixed wavelengths light-source system of exposure machine Figure;
What Fig. 2 was this utility model for the UV-LED mixed wavelengths light-source system of exposure machine is quick-fried Fried figure;
Fig. 3 is this utility model group for the UV-LED mixed wavelengths light-source system of exposure machine Vertical figure;
Fig. 4 is the structural representation of this utility model UV-LED lamp plate;
Fig. 5 is that this utility model works for the UV-LED mixed wavelengths light-source system of exposure machine Connection diagram;
Fig. 6 is the schematic diagram that existing metal halogen exposure lamp pipe is arranged in lamp box;
Fig. 7 is the schematic diagram that this utility model UV-LED fluorescent tube is arranged in lamp box.
Detailed description of the invention
Below with reference to the accompanying drawings and in conjunction with the embodiments, this utility model is described in detail.
Embodiment: a kind of UV-LED mixed wavelengths light-source system for exposure machine, including glass Glass pipe 1, UV-LED lamp plate 2, rotating mechanism 3, conductive mechanism 4, cooling body 5 and peace Dress supports seat 6, and described cooling body is connected by gear drive with described rotating mechanism, described Install and support seat and be two and lay respectively at the both sides of described cooling body, described cooling body Rotational positioning supports in seat described installation, and described UV-LED lamp plate is fixed on described cooler On structure, described glass tubing is fixedly connected on described cooler by two glass tubing fixed covers 7 On structure, described glass shroud sets residence and states UV-LED lamp plate, and described conductive mechanism fixedly mounts On described cooling body, described conductive mechanism is positioned at described installation and supports in seat, described in lead Motor structure is electrically connected with described UV-LED lamp plate.
Described cooling body includes cooling down spindle tube 51, water inlet pipe 52 and outlet pipe 53, described Water inlet pipe and outlet pipe are fixedly connected on the two ends of described cooling spindle tube and cool down master with described Central siphon connects, and also includes water supply connector 9 and water out adapter 10, described water supply connector and described Water out adapter is respectively fixedly connected with the end at described water inlet pipe and outlet pipe.
Said two glass tubing fixed cover fixed cover respectively is located at described cooling spindle tube with described Water inlet pipe and the joining place of outlet pipe, the two ends of described glass tubing are respectively fixedly connected with described On two glass tubing fixed covers.
Described rotating mechanism includes electro-motor 31, fixed plate the 32, first ball bearing 33 and First and second gear 34,35, described electro-motor is fixed in described fixed plate, and described One gear fixed cover is located in the rotating shaft of described electro-motor, and described second gear is fixed sheathed On described water inlet pipe, described first and second gear engages each other, the centre of described fixed plate Offering through hole, described first ball bearing is fixed in described through hole, described water inlet pipe Head rotation is located in described first ball bearing.
Described UV-LED lamp plate includes some circuit boards 21 and some UV-LED chipsets 22, Described UV-LED chipset uniform intervals is fixed on described circuit board, and described circuit board is for long Square, described circuit board mutually flexibly connects and is secure around the table of described cooling spindle tube On face.
Described conductive mechanism includes two conducting rings 41, and said two is led fixed cover respectively and is located at On described water inlet pipe and outlet pipe, described conducting ring is electrically connected with described UV-LED lamp plate.
Described installation in support seat is provided with the hole, location 61 placed for described conducting ring, described peace Dress supports in seat and is fixed with the second rolling bearing 8, and described second rolling bearing is positioned at described conduction Ring rotates respectively wear away from the side of described glass tubing fixed cover, described water inlet pipe and outlet pipe Being located in described second rolling bearing, described water inlet pipe and outlet pipe pass the most described installation and prop up Support seat.
Described cooling spindle tube is hexagonal tube, and described water inlet pipe and outlet pipe are round tube, Described cooling main shaft is one-body molded with described water inlet pipe and outlet pipe.Certainly cooling spindle tube is also It can be other polygonal tube.
Described UV-LED chipset comprise five kinds of wave-length coverages, be respectively as follows: 365-370nm, 380-390nm、390-410nm、420-430nm、430-450nm.And can be according to product Need to increase and decrease the chip of different wavelength range, such as: UV-LED chipset also can only comprise Tri-kinds of wave-length coverages of 365-370nm, 380-390nm, 390-410nm.
The operation principle of this UV-LED mixed wavelengths light-source system being used for exposure machine is: cooling Water-in and water-out interface in mechanism is connected to cold water equipment, makes the coolant in cooling spindle tube protect Hold circulation and be maintained under set temperature;
The first gear comprised by rotating mechanism, on the first rolling bearing and electro-motor Second gear combination is got up, and UV-LED lamp plate can be driven to rotate, i.e. when electro-motor starts Can mixing the UV-LED uniform light of five kinds of different wavelength range;
UV-LED lamp plate is installed on the cooling spindle tube surface of cooling body, when cooling is main In central siphon during logical full coolant, cooling spindle tube table of fitting completely due to the UV-LED lamp plate back side On body, make UV-LED lamp start lamp bright time can be rapidly by the heat band on UV-LED lamp plate lamp plate Walk;
Two conducting rings are respectively connecting to the positive and negative of UV-LED lamp plate and LED power supply Polar contact, makes when UV-LED lamp plate rotates, electric current by the connection by two conducting rings, Make UV-LED can keep the bright state of lamp;
Glass tubing is installed, UV-LED lamp plate can be protected;
Whole system, by comprising PLC and the circuit control unit of related electric control part, controls The unlatching of UV-LED lamp and closedown.
The mode of operation of this UV-LED mixed wavelengths light-source system being used for exposure machine comprises following Step:
One. cooling body connects cold water equipment;
Two. UV-LED lamp plate is connected UV-LED power supply unit;
Three. UV-LED lamp plate is connected PLC circuit control unit;
Four. start cold water equipment and make cooling body keep coolant to be in recurrent state;
Five. start UV-LED power supply unit and make UV-LED lamp plate light;
Six. start electro-motor and make UV-LED lamp plate rotate;
Seven. unlatching and the closedown of UV-LED lamp plate can be controlled through the I/O signal of PLC;
The UV-LED light of the different wavelength range that eight .UV-LED lamp plates are sent, via rotation Turn and the illumination promoting light assembled by lamp box reflector plate, be homogenously mixed together and expose to exposure region.
The foregoing is only preferred embodiment of the present utility model, be not limited to this Utility model, for a person skilled in the art, this utility model can have various more Change and change.All within spirit of the present utility model and principle, any amendment of being made, Equivalent, improvement etc., within should be included in protection domain of the present utility model.

Claims (9)

1. the UV-LED mixed wavelengths light-source system for exposure machine, it is characterised in that: Including glass tubing, UV-LED lamp plate, rotating mechanism, conductive mechanism, cooling body and peace Dress supports seat, and described cooling body is connected by gear drive with described rotating mechanism, described Install and support seat and be two and lay respectively at the both sides of described cooling body, described cooling body Rotational positioning supports in seat described installation, and described UV-LED lamp plate is fixed on described cooler On structure, described glass tubing is fixedly connected on described cooling body by two glass tubing fixed covers On, described glass shroud sets residence and states UV-LED lamp plate, and described conductive mechanism is fixedly mounted on On described cooling body, described conductive mechanism is positioned at described installation and supports in seat, described conduction Mechanism is electrically connected with described UV-LED lamp plate.
UV-LED mixed wavelengths light source system for exposure machine the most according to claim 1 System, it is characterised in that: described cooling body includes cooling down spindle tube, water inlet pipe and outlet pipe, Described water inlet pipe and outlet pipe are fixedly connected on the two ends of described cooling spindle tube cold with described But spindle tube connection, also includes water supply connector and water out adapter, described water supply connector and described Water out adapter is respectively fixedly connected with the end at described water inlet pipe and outlet pipe.
UV-LED mixed wavelengths light source system for exposure machine the most according to claim 2 System, it is characterised in that: said two glass tubing fixed cover fixed cover respectively is located at described cooling Spindle tube and described water inlet pipe and the joining place of outlet pipe, the two ends of described glass tubing are solid respectively Surely it is connected on said two glass tubing fixed cover.
UV-LED mixed wavelengths light source system for exposure machine the most according to claim 3 System, it is characterised in that: described rotating mechanism includes electro-motor, fixed plate, the first ball Bearing and first and second gear, described electro-motor is fixed in described fixed plate, and described One gear fixed cover is located in the rotating shaft of described electro-motor, and described second gear is fixed sheathed On described water inlet pipe, described first and second gear engages each other, the centre of described fixed plate Offering through hole, described first ball bearing is fixed in described through hole, described water inlet pipe Head rotation is located in described first ball bearing.
UV-LED mixed wavelengths light source system for exposure machine the most according to claim 4 System, it is characterised in that: described UV-LED lamp plate includes some circuit boards and some UV-LED Chipset, described UV-LED chipset uniform intervals is fixed on described circuit board, described electricity Road plate is rectangle, and it is main that described circuit board mutually flexibly connects and be secure around described cooling On the surface of central siphon.
UV-LED mixed wavelengths light source system for exposure machine the most according to claim 5 System, it is characterised in that: described conductive mechanism includes two conducting rings, and said two is led respectively Fixed cover is located on described water inlet pipe and outlet pipe, described conducting ring and described UV-LED lamp plate It is electrically connected with.
UV-LED mixed wavelengths light source for exposure machine the most according to claim 6 System, it is characterised in that: described installation in support seat is provided with for determining that described conducting ring is placed Hole, position, described installation supports in seat and is fixed with the second rolling bearing, described second rolling bearing It is positioned at the described conducting ring side away from described glass tubing fixed cover, described water inlet pipe and water outlet Pipe rotates respectively and is located in described second rolling bearing, and described water inlet pipe and outlet pipe pass The most described installation supports seat.
UV-LED mixed wavelengths light source system for exposure machine the most according to claim 7 System, it is characterised in that: described cooling spindle tube is hexagonal tube, described water inlet pipe and water outlet Pipe is round tube, and described cooling main shaft is one-body molded with described water inlet pipe and outlet pipe.
UV-LED mixed wavelengths light source system for exposure machine the most according to claim 8 System, it is characterised in that: described UV-LED chipset comprise five kinds of wave-length coverages, be respectively as follows: 365-370nm、380-390nm、390-410nm、420-430nm、430-450nm。
CN201620260057.XU 2016-03-30 2016-03-30 A mixed wavelength light source system of UV -LED for exposure machine Expired - Fee Related CN205485279U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201620260057.XU CN205485279U (en) 2016-03-30 2016-03-30 A mixed wavelength light source system of UV -LED for exposure machine

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Application Number Priority Date Filing Date Title
CN201620260057.XU CN205485279U (en) 2016-03-30 2016-03-30 A mixed wavelength light source system of UV -LED for exposure machine

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105629680A (en) * 2016-03-30 2016-06-01 昆山尊宸电子有限公司 UV-LED mixed wavelength light source system for exposure machine
CN106365468A (en) * 2016-10-09 2017-02-01 江苏通鼎光棒有限公司 Optical fiber coating ultraviolet (UV) light emitting diode (LED) curing device and optical fiber coating UV LED curing method
WO2020047147A1 (en) 2018-08-29 2020-03-05 Cleanbox Technology, Inc. Pivoting light carousel for use with cleaning and/or disinfecting cradle for virtual reality headsets

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105629680A (en) * 2016-03-30 2016-06-01 昆山尊宸电子有限公司 UV-LED mixed wavelength light source system for exposure machine
CN106365468A (en) * 2016-10-09 2017-02-01 江苏通鼎光棒有限公司 Optical fiber coating ultraviolet (UV) light emitting diode (LED) curing device and optical fiber coating UV LED curing method
WO2020047147A1 (en) 2018-08-29 2020-03-05 Cleanbox Technology, Inc. Pivoting light carousel for use with cleaning and/or disinfecting cradle for virtual reality headsets
EP3843911A4 (en) * 2018-08-29 2022-06-01 Cleanbox Technology, Inc. Pivoting light carousel for use with cleaning and/or disinfecting cradle for virtual reality headsets

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C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20160817

Termination date: 20190330

CF01 Termination of patent right due to non-payment of annual fee