CN1306247C - Macro/micro driven large travel high-speed nano-precision plane positioning system - Google Patents
Macro/micro driven large travel high-speed nano-precision plane positioning system Download PDFInfo
- Publication number
- CN1306247C CN1306247C CNB2005100102862A CN200510010286A CN1306247C CN 1306247 C CN1306247 C CN 1306247C CN B2005100102862 A CNB2005100102862 A CN B2005100102862A CN 200510010286 A CN200510010286 A CN 200510010286A CN 1306247 C CN1306247 C CN 1306247C
- Authority
- CN
- China
- Prior art keywords
- axis
- grand
- micromotion platform
- fixed
- macro
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000919 ceramic Substances 0.000 claims abstract description 36
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 26
- 230000001105 regulatory effect Effects 0.000 claims description 24
- 230000003287 optical effect Effects 0.000 claims description 18
- 230000003139 buffering effect Effects 0.000 claims description 8
- 230000001133 acceleration Effects 0.000 abstract description 7
- 230000007547 defect Effects 0.000 abstract 1
- 230000009977 dual effect Effects 0.000 abstract 1
- 238000005096 rolling process Methods 0.000 abstract 1
- 230000033001 locomotion Effects 0.000 description 9
- 239000000203 mixture Substances 0.000 description 6
- 230000011664 signaling Effects 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
Images
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The present invention discloses a macro/micro dual driven large travel high-speed nanometer-level precision plane positioning system, which relates to a plane positioning system. The purpose of the present invention is to solve the problems that the stroke, the speed/the acceleration and the precision of the existing high-speed high precision positioning system have respective defects and component parts are independent. An X axis flexible hinge 17 is arranged between an X axis micromotion platform 19 and an X axis macromotion platform 16 of the present invention, an X axis piezoelectric ceramic 18 is arranged in the X axis micromotion platform 19, and a cushioning hinge 29 is arranged between an inner guide plate 28 and an outer guide plate 30. One end of a Y axis piezoelectric ceramic 24 is connected with a Y axis micromotion platform 23, and two bearings 34 are respectively connected with the inner guide plate 28 and the outer guide plate 30 on a Y axis macro/micromotion platform 8 in a rolling mode. The system of the present invention meets requirements of centimeter-level moving range and high speed and high acceleration, and reaches to the nanometer-level positioning precision. The working range of the present invention is 25mm*25mm; the resolution is 10 nm; the repeated positioning precision is between-20 nm and +20 nm; the maxim speeds of X axis and Y axis are separately at 50 m/s2 and 100 m/s2.
Description
Technical field:
The present invention relates to a kind of plane positioning system.
Background technology:
Fields such as integrated circuit (IC) encapsulation, MEMS (micro electro mechanical system) (MEMS) manufacturing are urgent day by day to the needs of big stroke (cm level), high-speed (m/s level) and high precision (μ m to nm level) positioning system.But the problem that exists is at present: 1, the plane positioning system of traditional cascaded structure XY worktable mode, because upper platform is as the operating load of basic unit's platform, increased the movement inertia of basic unit's platform greatly, limited the speed and the acceleration of total system, system works efficient is low.2, the plane positioning system of existing parallel-connection structure XY worktable mode, only adopt single driving elements such as electric rotating machine+ball-screw, linear electric motors or voice coil motor, though can reach the range of movement of big stroke, its precision only can satisfy micron or submicron order requirement.3, the bearing accuracy of microdrive such as piezoelectric ceramics can reach nanoscale, but stroke is little, can only reach tens microns to microns up to a hundred; The motion platform that piezo-electric motor drives, though can realize big stroke, high-resolution exercise performance, its movement velocity is low.
Summary of the invention:
The objective of the invention is respectively has deficiency and problem independently separately for overcoming existing high-speed, high precision positioning system in stroke, speed/acceleration and precision, and the plane positioning system of the large travel high-speed nano-precision that a kind of macro/micro drives is provided.The present invention has the advantages that range is big, precision is high, can measure under high-speed condition.The present invention by X-axis linear voice coil motor (mover/stator) 1, X-axis motor base 2, X-axis guide rail 3, X-axis bilinear grating 4, X-axis grand/micromotion platform 5, Y-axis guide rail 6, Y-axis carrying platform 7, Y-axis be grand/micromotion platform 8, XY decoupler shaft guide rail 9, XY decoupler shaft mechanism 10, y-axis motor pedestal 11, Y-axis linear voice coil motor (mover/stator) 12, workbench 13, Y-axis bilinear grating 14 and pedestal 15 form; The stator of X-axis linear voice coil motor 1 is fixed on the X-axis motor base 2, X-axis motor base 2 is fixed on the pedestal 15, the stator of Y-axis linear voice coil motor 12 is fixed on the y-axis motor pedestal 11, y-axis motor pedestal 11 is fixed on the pedestal 15, the mover of X-axis linear voice coil motor 1 is grand with X-axis/and micromotion platform 5 fixedlys connected, the mover of Y-axis linear voice coil motor 12 is fixedlyed connected with an end of XY decoupler shaft mechanism 10, X-axis guide rail 3 and XY decoupler shaft guide rail 9 are separately fixed on the pedestal 15, X-axis is grand/and the lower end and the X-axis guide rail 3 of micromotion platform 5 be slidingly connected, the lower end of XY decoupler shaft mechanism 10 and XY decoupler shaft guide rail 9 are slidingly connected, the downside of Y-axis carrying platform 7 is grand with X-axis/and the upside of micromotion platform 5 fixedlys connected, Y-axis guide rail 6 is fixed on the upside of Y-axis carrying platform 7, Y-axis is grand/and the downside and the Y-axis guide rail 6 of micromotion platform 8 be slidingly connected, the upside of workbench 13 is fixed on Y-axis grand/micromotion platform 8, Y-axis is grand/and an end of micromotion platform 8 fixedlys connected with the other end of XY decoupler shaft mechanism 10, on the pedestal 15 in X-axis bilinear grating 4 is fixed on X-axis grand/micromotion platform 5 outsides, Y-axis bilinear grating 14 is fixed on the Y-axis carrying platform 7 of X-axis linear voice coil motor 1 one sides; X-axis is grand/and micromotion platform 5 is by X-axis macro-moving stage 16, X-axis flexible hinge 17, X-axis piezoelectric ceramics 18, X-axis micromotion platform 19, X-axis holding screw 20 and X-axis lock-screw 21 are formed, X-axis micromotion platform 19 is arranged on the centre of X-axis macro-moving stage 16, be provided with X-axis flexible hinge 17 between X-axis micromotion platform 19 and the X-axis macro-moving stage 16, X-axis piezoelectric ceramics 18 is arranged in the X-axis micromotion platform 19, one end of X-axis piezoelectric ceramics 18 is connected with X-axis micromotion platform 19, the other end of X-axis piezoelectric ceramics 18 and be arranged between the lock-screw 21 on the X-axis macro-moving stage 16 and be provided with holding screw 20, X-axis micromotion platform 19 is fixedlyed connected with Y-axis carrying platform 7; Y-axis is grand/and micromotion platform 8 is by Y-axis macro-moving stage 22, Y-axis micromotion platform 23, Y-axis piezoelectric ceramics 24, Y-axis holding screw 25, Y-axis lock-screw 26, Y-axis flexible hinge 27, interior guide plate 28, buffering hinge 29 and outer guide plate 30 are formed, one end of Y-axis macro-moving stage 22 is fixed with interior guide plate 28, be fixed with buffering hinge 29 between interior guide plate 28 and the outer guide plate 30, Y-axis micromotion platform 23 is arranged in the Y-axis macro-moving stage 22, be provided with Y-axis flexible hinge 27 between Y-axis micromotion platform 23 and the Y-axis macro-moving stage 22, Y-axis piezoelectric ceramics 24 is arranged in the Y-axis micromotion platform 23, one end of Y-axis piezoelectric ceramics 24 is connected with Y-axis micromotion platform 23, the other end of Y-axis piezoelectric ceramics 24 and be arranged between the Y-axis lock-screw 26 on the Y-axis macro-moving stage 22 and be provided with Y-axis holding screw 25, workbench 13 is fixed on the Y-axis micromotion platform 23; XY decoupler shaft mechanism 10 is by XY decoupler shaft pull bar 31, spring 32, regulating arm 33, two bearings 34, stationary shaft 35, movable axis 36, regulate arm axle 37 and securing cover plate 38 compositions, one end of securing cover plate 38 is fixed on the XY decoupler shaft pull bar 31, the lower end of regulating arm axle 37 is fixed on the XY decoupler shaft pull bar 31, the upper end of regulating arm axle 37 is fixed on the securing cover plate 38, one end of regulating arm 33 is arranged on to be regulated on the arm axle 37, be provided with spring 32 between the other end of regulating arm 33 and the XY decoupler shaft pull bar 31, stationary shaft 35 is fixed between XY decoupler shaft pull bar 31 and the securing cover plate 38, movable axis 36 is fixed on the regulating arm 33, two bearings 34 are separately fixed on stationary shaft 35 and the movable axis 36, two bearings 34 are grand with Y-axis respectively/and interior guide plate 28 on the micromotion platform 8 rolls with outer guide plate 30 and is connected, and XY decoupler shaft pull bar 31 is fixedlyed connected with the mover of Y-axis linear voice coil motor 12; X-axis bilinear grating 4 by X-axis grand/low-light grid 39, X-axis Optical grating base 40 and the grand grating 41 of X-axis form, X-axis is grand/low-light grid 39 are fixed on the upper end of X-axis Optical grating base 40, the grand grating 41 of X-axis is fixed on the downside in the X-axis Optical grating base 40; Y-axis bilinear grating 14 by Y-axis Optical grating base 42, Y-axis grand/low-light grid 43 and the grand grating 44 of Y-axis form, Y-axis is grand/low-light grid 43 are fixed on the top in the Y-axis Optical grating base 42, the grand grating 44 of Y-axis is fixed on the bottom in the Y-axis Optical grating base 42.The invention has the beneficial effects as follows: adopt linear voice coil motor directly to drive macro-moving stage, shortcomings such as the inertia of having avoided adopting the ball-screw transmission link to bring is big, backhaul gap and insufficient rigidity.It is affixed with piezoelectric ceramics and micromotion platform to apply pretightning force, makes the micromotion platform gapless linear move.Because the spring in the XY decoupler shaft mechanism has certain pretightning force, make and to remain tight the contact between the guide plate and two bearings at work, guaranteed the rigidity of Y direction simultaneously, and the buffering hinge with certain flexibility slows down the impact of worktable high frequency motion to the directions X of guide rail, thereby has realized the no gap decoupling zero of plane Descartes's worktable.Adopt the good linear voice coil motor of mechanical characteristic as grand driver, piezoelectric ceramics is installed as microdrive in the micromotion platform on macro-moving stage, the positioning error of high frequency dynamic compensating system; Accurate linear grating adopts the double-counting mode to feed back the position signalling of grand/micromotion platform output terminal, realizes the Full Closed-loop Position control of positioning system.Thereby system had both satisfied the requirement of range of movement with high speed, the high acceleration of centimetre-sized, had reached nano level bearing accuracy again.Working range of the present invention is 25mm * 25mm, and resolution is 10nm, and repetitive positioning accuracy is ± 20nm that X-axis and Y-axis peak acceleration are respectively 50m/s
2And 100m/s
2
Description of drawings:
Fig. 1 is an one-piece construction synoptic diagram of the present invention, Fig. 2 be X-axis grand/structural representation of micromotion platform 5, Fig. 3 be Y-axis grand/structural representation of micromotion platform 8, Fig. 4 is the structural representation of XY decoupler shaft mechanism 10, Fig. 5 is the structural representation of X-axis bilinear grating 4, Fig. 6 is the structural representation of Y-axis bilinear grating 14, Fig. 7 be the A of Fig. 4 to view, Fig. 8 is the B-B cut-open view of Fig. 7.
Embodiment:
Embodiment one: (referring to the present embodiment of Fig. 1-Fig. 6) by X-axis linear voice coil motor (mover/stator) 1, X-axis motor base 2, X-axis guide rail 3, X-axis bilinear grating 4, X-axis is grand/micromotion platform 5, Y-axis guide rail 6, Y-axis carrying platform 7, Y-axis is grand/micromotion platform 8, XY decoupler shaft guide rail 9, XY decoupler shaft mechanism 10, y-axis motor pedestal 11, Y-axis linear voice coil motor (mover/stator) 12, workbench 13, Y-axis bilinear grating 14 and pedestal 15 are formed, the stator of X-axis linear voice coil motor 1 is fixed on the X-axis motor base 2, X-axis motor base 2 is fixed on the pedestal 15, the stator of Y-axis linear voice coil motor 12 is fixed on the y-axis motor pedestal 11, y-axis motor pedestal 11 is fixed on the pedestal 15, the mover of X-axis linear voice coil motor 1 is grand with X-axis/and micromotion platform 5 fixedlys connected, the mover of Y-axis linear voice coil motor 12 is fixedlyed connected with an end of XY decoupler shaft mechanism 10, X-axis guide rail 3 and XY decoupler shaft guide rail 9 are separately fixed on the pedestal 15, X-axis is grand/and the lower end and the X-axis guide rail 3 of micromotion platform 5 be slidingly connected, the lower end of XY decoupler shaft mechanism 10 and XY decoupler shaft guide rail 9 are slidingly connected, the downside of Y-axis carrying platform 7 is grand with X-axis/and the upside of micromotion platform 5 fixedlys connected, Y-axis guide rail 6 is fixed on the upside of Y-axis carrying platform 7, Y-axis is grand/and the downside and the Y-axis guide rail 6 of micromotion platform 8 be slidingly connected, the upside of workbench 13 is fixed on Y-axis grand/micromotion platform 8, Y-axis is grand/and an end of micromotion platform 8 fixedlys connected with the other end of XY decoupler shaft mechanism 10, on the pedestal 15 in X-axis bilinear grating 4 is fixed on X-axis grand/micromotion platform 5 outsides, Y-axis bilinear grating 14 is fixed on the Y-axis carrying platform 7 of X-axis linear voice coil motor 1 one sides; X-axis is grand/and micromotion platform 5 is by X-axis macro-moving stage 16, X-axis flexible hinge 17, X-axis piezoelectric ceramics 18, X-axis micromotion platform 19, X-axis holding screw 20 and X-axis lock-screw 21 are formed, X-axis micromotion platform 19 is arranged on the centre of X-axis macro-moving stage 16, be provided with X-axis flexible hinge 17 between X-axis micromotion platform 19 and the X-axis macro-moving stage 16, X-axis piezoelectric ceramics 18 is arranged in the X-axis micromotion platform 19, one end of X-axis piezoelectric ceramics 18 is connected with X-axis micromotion platform 19, the other end of X-axis piezoelectric ceramics 18 and be arranged between the lock-screw 21 on the X-axis macro-moving stage 16 and be provided with holding screw 20, X-axis micromotion platform 19 is fixedlyed connected with Y-axis carrying platform 7; Y-axis is grand/and micromotion platform 8 is by Y-axis macro-moving stage 22, Y-axis micromotion platform 23, Y-axis piezoelectric ceramics 24, Y-axis holding screw 25, Y-axis lock-screw 26, Y-axis flexible hinge 27, interior guide plate 28, buffering hinge 29 and outer guide plate 30 are formed, one end of Y-axis macro-moving stage 22 is fixed with interior guide plate 28, be fixed with buffering hinge 29 between interior guide plate 28 and the outer guide plate 30, Y-axis micromotion platform 23 is arranged in the Y-axis macro-moving stage 22, be provided with Y-axis flexible hinge 27 between Y-axis micromotion platform 23 and the Y-axis macro-moving stage 22, Y-axis piezoelectric ceramics 24 is arranged in the Y-axis micromotion platform 23, one end of Y-axis piezoelectric ceramics 24 is connected with Y-axis micromotion platform 23, the other end of Y-axis piezoelectric ceramics 24 and be arranged between the Y-axis lock-screw 26 on the Y-axis macro-moving stage 22 and be provided with Y-axis holding screw 25, workbench 13 is fixed on the Y-axis micromotion platform 23; XY decoupler shaft mechanism 10 is by XY decoupler shaft pull bar 31, spring 32, regulating arm 33, two bearings 34, stationary shaft 35, movable axis 36, regulate arm axle 37 and securing cover plate 38 compositions, one end of securing cover plate 38 is fixed on the XY decoupler shaft pull bar 31, the lower end of regulating arm axle 37 is fixed on the XY decoupler shaft pull bar 31, the upper end of regulating arm axle 37 is fixed on the securing cover plate 38, one end of regulating arm 33 is arranged on to be regulated on the arm axle 37, be provided with spring 32 between the other end of regulating arm 33 and the XY decoupler shaft pull bar 31, stationary shaft 35 is fixed between XY decoupler shaft pull bar 31 and the securing cover plate 38, movable axis 36 is fixed on the regulating arm 33, two bearings 34 are separately fixed on stationary shaft 35 and the movable axis 36, two bearings 34 are grand with Y-axis respectively/and interior guide plate 28 on the micromotion platform 8 rolls with outer guide plate 30 and is connected, and XY decoupler shaft pull bar 31 is fixedlyed connected with the mover of Y-axis linear voice coil motor 12; X-axis bilinear grating 4 by X-axis grand/low-light grid 39, X-axis Optical grating base 40 and the grand grating 41 of X-axis form, X-axis is grand/low-light grid 39 are fixed on the upper end of X-axis Optical grating base 40, the grand grating 41 of X-axis is fixed on the downside in the X-axis Optical grating base 40; Y-axis bilinear grating 14 by Y-axis Optical grating base 42, Y-axis grand/low-light grid 43 and the grand grating 44 of Y-axis form, Y-axis is grand/low-light grid 43 are fixed on the top in the Y-axis Optical grating base 42, the grand grating 44 of Y-axis is fixed on the bottom in the Y-axis Optical grating base 42.
Embodiment two: the termination of the X-axis piezoelectric ceramics 18 that is connected with X-axis micromotion platform 19 in (referring to Fig. 2) present embodiment is a spheroidal 51.Other composition is identical with embodiment one with annexation.
Embodiment three: the termination of the Y-axis piezoelectric ceramics 24 that is connected with Y-axis micromotion platform 23 in (referring to Fig. 3) present embodiment is a spheroidal 52.Other composition is identical with embodiment one with annexation.
Embodiment four: be simple beam structure between stationary shaft 35 and XY decoupler shaft pull bar 31 and the securing cover plate 38 in (referring to Fig. 7, Fig. 8) present embodiment, other composition is identical with embodiment one with annexation.
Embodiment five: be simple beam structure between movable axis 36 and the regulating arm 33 in (referring to Fig. 7, Fig. 8) present embodiment.Other composition is identical with embodiment one with annexation.
Principle of work: X-axis linear voice coil motor 1 and Y-axis linear voice coil motor 12 are as grand driver, and generation electromagnetic force in energising back promotes its mover and drives X-axis macro-moving stage 16 and grand the moving of XY decoupler shaft pull bar 31 generations respectively; The X-axis piezoelectric ceramics 18 and the Y-axis piezoelectric ceramics 24 that are integrated in X-axis macro-moving stage 16 and the Y-axis macro-moving stage 22 drive X-axis micromotion platform 19 and the 23 generation fine motions of Y-axis micromotion platform respectively as microdrive; Because the pretension of spring 32, eliminated the radial play of two bearings 34, guaranteed the rigidity of Y direction simultaneously, the buffering hinge 29 with certain flexibility slows down the impact of worktable high frequency motion to Y-axis guide rail 6 and XY decoupler shaft guide rail 9, thereby has realized the mobile decoupling of X, Y direction; Grand grating 41 of X-axis and the grand grating 44 of Y-axis detect the grand moving position signalling of X-axis macro-moving stage 16 and Y-axis macro-moving stage 22 output terminals respectively, and X-axis is grand/low-light grid 39 and Y-axis be grand/and low-light grid 43 detect the grand/fine motion position signalling of Y-axis carrying platform 7 and workbench 13 output terminals respectively.Macro-moving stage realize the big stroke of system, at a high speed, high acceleration micron order precision location, when entering the micromotion platform impulse stroke, start piezoelectric ceramics, with the positioning error of high frequency dynamic compensating system, realize nano level resolution and bearing accuracy.
Claims (5)
1, the plane positioning system of the large travel high-speed nano-precision that drives of a kind of macro/micro, it by X-axis linear voice coil motor (1), X-axis motor base (2), X-axis guide rail (3), X-axis bilinear grating (4), X-axis grand/micromotion platform (5), Y-axis guide rail (6), Y-axis carrying platform (7), Y-axis be grand/micromotion platform (8), XY decoupler shaft guide rail (9), XY decoupler shaft mechanism (10), y-axis motor pedestal (11), Y-axis linear voice coil motor (12), workbench (13), Y-axis bilinear grating (14) and pedestal (15) form; The stator of X-axis linear voice coil motor (1) is fixed on the X-axis motor base (2), X-axis motor base (2) is fixed on the pedestal (15), the stator of Y-axis linear voice coil motor (12) is fixed on the y-axis motor pedestal (11), y-axis motor pedestal (11) is fixed on the pedestal (15), the mover of X-axis linear voice coil motor (1) is grand with X-axis/and micromotion platform (5) fixedlys connected, the mover of Y-axis linear voice coil motor (12) is fixedlyed connected with an end of XY decoupler shaft mechanism (10), X-axis guide rail (3) and XY decoupler shaft guide rail (9) are separately fixed on the pedestal (15), X-axis is grand/and the lower end and the X-axis guide rail (3) of micromotion platform (5) be slidingly connected, the lower end of XY decoupler shaft mechanism (10) and XY decoupler shaft guide rail (9) are slidingly connected, the downside of Y-axis carrying platform (7) is grand with X-axis/and the upside of micromotion platform (5) fixedlys connected, Y-axis guide rail (6) is fixed on the upside of Y-axis carrying platform (7), Y-axis is grand/and the downside and the Y-axis guide rail (6) of micromotion platform (8) be slidingly connected, the upside of workbench (13) is fixed on Y-axis grand/micromotion platform (8), Y-axis is grand/and an end of micromotion platform (8) fixedlys connected with the other end of XY decoupler shaft mechanism (10), that X-axis bilinear grating (4) is fixed on X-axis is grand/pedestal (15) in micromotion platform (5) outside on, Y-axis bilinear grating (14) is fixed on the Y-axis carrying platform (7) of X-axis linear voice coil motor (1) one side; It is characterized in that X-axis grand/micromotion platform (5) is by X-axis macro-moving stage (16), X-axis flexible hinge (17), X-axis piezoelectric ceramics (18), X-axis micromotion platform (19), X-axis holding screw (20) and X-axis lock-screw (21) are formed, X-axis micromotion platform (19) is arranged on the centre of X-axis macro-moving stage (16), be provided with X-axis flexible hinge (17) between X-axis micromotion platform (19) and the X-axis macro-moving stage (16), X-axis piezoelectric ceramics (18) is arranged in the X-axis micromotion platform (19), one end of X-axis piezoelectric ceramics (18) is connected with X-axis micromotion platform (19), the other end of X-axis piezoelectric ceramics (18) and be arranged between the lock-screw (21) on the X-axis macro-moving stage (16) and be provided with holding screw (20), X-axis micromotion platform (19) is fixedlyed connected with Y-axis carrying platform (7); Y-axis is grand/and micromotion platform (8) is by Y-axis macro-moving stage (22), Y-axis micromotion platform (23), Y-axis piezoelectric ceramics (24), Y-axis holding screw (25), Y-axis lock-screw (26), Y-axis flexible hinge (27), interior guide plate (28), buffering hinge (29) and outer guide plate (30) are formed, one end of Y-axis macro-moving stage (22) is fixed with interior guide plate (28), be fixed with buffering hinge (29) between interior guide plate (28) and the outer guide plate (30), Y-axis micromotion platform (23) is arranged in the Y-axis macro-moving stage (22), be provided with Y-axis flexible hinge (27) between Y-axis micromotion platform (23) and the Y-axis macro-moving stage (22), Y-axis piezoelectric ceramics (24) is arranged in the Y-axis micromotion platform (23), one end of Y-axis piezoelectric ceramics (24) is connected with Y-axis micromotion platform (23), the other end of Y-axis piezoelectric ceramics (24) and be arranged between the Y-axis lock-screw (26) on the Y-axis macro-moving stage (22) and be provided with Y-axis holding screw (25), workbench (13) is fixed on the Y-axis micromotion platform (23); XY decoupler shaft mechanism (10) is by XY decoupler shaft pull bar (31), spring (32), regulating arm (33), two bearings (34), stationary shaft (35), movable axis (36), regulating arm axle (37) and securing cover plate (38) forms, one end of securing cover plate (38) is fixed on the XY decoupler shaft pull bar (31), the lower end of regulating arm axle (37) is fixed on the XY decoupler shaft pull bar (31), the upper end of regulating arm axle (37) is fixed on the securing cover plate (38), one end of regulating arm (33) is arranged on to be regulated on the arm axle (37), be provided with spring (32) between the other end of regulating arm (33) and the XY decoupler shaft pull bar (31), stationary shaft (35) is fixed between XY decoupler shaft pull bar (31) and the securing cover plate (38), movable axis (36) is fixed on the regulating arm (33), two bearings (34) are separately fixed on stationary shaft (35) and the movable axis (36), two bearings (34) interior guide plate (28) on/micromotion platform grand with Y-axis (8) respectively roll with outer guide plate (30) and are connected, and XY decoupler shaft pull bar (31) is fixedlyed connected with the mover of Y-axis linear voice coil motor (12); X-axis bilinear grating (4) by X-axis grand/low-light grid (39), X-axis Optical grating base (40) and the grand grating of X-axis (41) form, X-axis is grand/and low-light grid (39) are fixed on the upper end of X-axis Optical grating base (40), the grand grating of X-axis (41) be fixed in the X-axis Optical grating base (40) downside Y-axis bilinear grating (14) by Y-axis Optical grating base (42), Y-axis grand/low-light grid (43) and the grand grating of Y-axis (44) form, Y-axis is grand/and low-light grid (43) are fixed on the top in the Y-axis Optical grating base (42), and the grand grating of Y-axis (44) is fixed on the bottom in the Y-axis Optical grating base (42).
2, the plane positioning system of the large travel high-speed nano-precision that drives of macro/micro according to claim 1 is characterized in that the termination of the X-axis piezoelectric ceramics (18) that is connected with X-axis micromotion platform (19) is spheroidal (51).
3, the plane positioning system of the large travel high-speed nano-precision that drives of macro/micro according to claim 1 is characterized in that the termination of the Y-axis piezoelectric ceramics (24) that is connected with Y-axis micromotion platform (23) is spheroidal (52).
4, the plane positioning system of the large travel high-speed nano-precision of macro/micro driving according to claim 1 is characterized in that being between stationary shaft (35) and XY decoupler shaft pull bar (31) and the securing cover plate (38) simple beam structure.
5, the plane positioning system of the large travel high-speed nano-precision of macro/micro driving according to claim 1 is characterized in that being between movable axis (36) and the regulating arm (33) simple beam structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100102862A CN1306247C (en) | 2005-08-26 | 2005-08-26 | Macro/micro driven large travel high-speed nano-precision plane positioning system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100102862A CN1306247C (en) | 2005-08-26 | 2005-08-26 | Macro/micro driven large travel high-speed nano-precision plane positioning system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1731081A CN1731081A (en) | 2006-02-08 |
| CN1306247C true CN1306247C (en) | 2007-03-21 |
Family
ID=35963478
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005100102862A Active CN1306247C (en) | 2005-08-26 | 2005-08-26 | Macro/micro driven large travel high-speed nano-precision plane positioning system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1306247C (en) |
Families Citing this family (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102245348B (en) * | 2008-10-09 | 2015-08-12 | 纽卡斯尔创新有限公司 | Navigation system and method |
| CN101820203B (en) * | 2010-01-26 | 2012-02-08 | 南通大学 | Combined drive semi-closed loop precision positioning system |
| CN101947747A (en) * | 2010-08-26 | 2011-01-19 | 天津大学 | Machine-tool error compensation device and numerically-controlled machine tool comprising same |
| CN102096133B (en) * | 2010-12-27 | 2012-07-18 | 北京航空航天大学 | Adjustable nano grating, nano grating accelerometer and processing method of adjustable nano grating or nano grating accelerometer |
| CN102182899A (en) * | 2011-03-07 | 2011-09-14 | 中国矿业大学 | Large-stroke three-translation orthogonal decoupling-type precise micromotion platform and control method thereof |
| CN102615542A (en) * | 2012-04-10 | 2012-08-01 | 吉林大学 | Long-travel two-axis linear fast tool servo device |
| CN102629122B (en) * | 2012-04-17 | 2014-08-27 | 中国科学院光电技术研究所 | Large-stroke high-speed dual-drive nano positioning system |
| CN103021473B (en) * | 2012-12-07 | 2015-05-13 | 山东大学 | Direct drive type motion decoupling high-accuracy servo platform |
| CN103018880B (en) * | 2012-12-19 | 2014-12-17 | 哈尔滨工业大学 | Rotary-motion-oriented reed type linear micro-driving mechanism |
| CN103318839B (en) * | 2013-03-01 | 2015-12-16 | 广东工业大学 | The grand microfluidic platform of high-speed, high precision based on piezoelectric ceramics and changing method |
| CN103170845B (en) * | 2013-03-01 | 2015-06-03 | 广东工业大学 | Accuracy compensation method of coaxial macro-micro composite linear motion platform device |
| CN103219049B (en) * | 2013-03-04 | 2015-04-29 | 东莞华中科技大学制造工程研究院 | Precise positioning one-dimensional platform |
| CN103252761B (en) * | 2013-04-28 | 2015-11-11 | 合肥工业大学 | There is the Long Distances two-dimensional nano work system of angle compensation function |
| CN104269191B (en) * | 2014-09-19 | 2016-03-23 | 南京工程学院 | The parallel institution that Hydrauservo System and piezoelectric ceramic actuator drive jointly |
| CN104656682B (en) * | 2014-12-30 | 2017-07-14 | 中国科学院长春光学精密机械与物理研究所 | A kind of grand micro- two-stage drive precision positioning mechanism |
| CN104731052B (en) * | 2015-01-21 | 2018-02-13 | 佛山市智海星空科技有限公司 | A kind of mobile platform control system, method and mobile platform control device |
| CN105353502A (en) * | 2015-12-11 | 2016-02-24 | 海德星科技（厦门）有限公司 | Hybrid motor driven automatic control microscope object carrying platform |
| CN105716497A (en) * | 2016-01-16 | 2016-06-29 | 长春北方化工灌装设备有限公司 | Method for testing repeated positioning accuracy of machine |
| CN105666158A (en) * | 2016-03-15 | 2016-06-15 | 安徽机电职业技术学院 | Worktable with electric adjusting device |
| CN107240422B (en) * | 2017-06-20 | 2019-09-10 | 南京工程学院 | A kind of Pneumatic precision positioning mechanism of piezoelectric micromotor bit shift compensation |
| CN109239068B (en) * | 2018-09-13 | 2021-04-16 | 山东大学 | Visual detection device and method for macro-micro motion platform |
| CN110133820B (en) * | 2019-05-17 | 2021-03-05 | 中国科学院国家天文台南京天文光学技术研究所 | Nanometer-scale precision displacement actuator of large-scale spliced mirror surface optical telescope |
| CN115055983A (en) * | 2022-07-26 | 2022-09-16 | 安徽理工大学 | Coaxial integrated macro-micro composite driving X-Y workbench oriented to high-speed precise positioning and control method thereof |
| CN116884886B (en) * | 2023-09-06 | 2023-11-24 | 北京华卓精科科技股份有限公司 | Precise force position output device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4859896A (en) * | 1986-07-04 | 1989-08-22 | Ernst Leitz Wetzlar Gmbh | Piezoelectric precision positioning device |
| US5903085A (en) * | 1997-06-18 | 1999-05-11 | Phase Metrics, Inc. | Piezoelectric nanopositioner |
| CN1387021A (en) * | 2002-06-21 | 2002-12-25 | 华中科技大学 | Bench with 2D displacement |
-
2005
- 2005-08-26 CN CNB2005100102862A patent/CN1306247C/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4859896A (en) * | 1986-07-04 | 1989-08-22 | Ernst Leitz Wetzlar Gmbh | Piezoelectric precision positioning device |
| US5903085A (en) * | 1997-06-18 | 1999-05-11 | Phase Metrics, Inc. | Piezoelectric nanopositioner |
| CN1387021A (en) * | 2002-06-21 | 2002-12-25 | 华中科技大学 | Bench with 2D displacement |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1731081A (en) | 2006-02-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN1306247C (en) | Macro/micro driven large travel high-speed nano-precision plane positioning system | |
| CN101118377B (en) | Air pressure semi-suspending two freedom degree common basal surface movement workstation | |
| CN101197197B (en) | Large moving range macro-micro dual drive locating platform | |
| CN103557412A (en) | Bipolar two-dimensional fully flexible high-precision servo platform | |
| CN102189413B (en) | Ultra-precise workbench | |
| CN1326670C (en) | H type air floating workbench with synchronization driving of bilateral linear motor | |
| CN101900952B (en) | Mask aligner mask platform adopting magnetic suspension technology | |
| CN103021473B (en) | Direct drive type motion decoupling high-accuracy servo platform | |
| US8599361B2 (en) | Nanometer-precision six-degree-of-freedom magnetic suspension micro-motion table and application thereof | |
| CN107994806B (en) | Precision piezoelectric stick-slip turntable and its driving method | |
| CN101290808B (en) | 3 freedom degrees ultra-precise micro displacement workbench | |
| CN103225728A (en) | Two-dimensional parallel micromotion platform driven by piezoceramic | |
| CN201134045Y (en) | Double-shaft moving platform | |
| CN110370229A (en) | Novel macro micro- combination platform based on rigid parallel institution and compliant parallel mechanism | |
| CN101158815A (en) | Air-float magnetic controlled precision movement platform | |
| CN101924450A (en) | A kind of fixed voice coil motor direct drive type X-Y micro-vibration platform | |
| CN101567223A (en) | Pneumatic semi-suspension two-freedom co-baseplane motion workbench with high speed and large stroke | |
| CN1214892C (en) | Magnetic suspension method for guide rail with ultra precise and micro displacement | |
| CN202438847U (en) | Coaxial macro-micro compound linear motion platform device | |
| CN1963374A (en) | Large range motion, high speed and precision orientation apparatus of two coordinate axes | |
| CN101000807A (en) | Precision positioning desk based on planar motor and super-magnetostrictive drive | |
| CN201000769Y (en) | Precision positioning flat base based on plane electric motor and ultra-magnetostriction driver | |
| CN110524500B (en) | Magnetic suspension guide rail motion platform | |
| EP1246350A2 (en) | Linear driving device | |
| CN209578822U (en) | Coupled Rigid-flexible platform and motion platform with frictional rigidity switching device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: HARBIN INSTITUTE OF TECHNOLOGY INTERNATIONAL UNIVE Free format text: FORMER OWNER: HARBIN INSTITUTE OF TECHNOLOGY Effective date: 20091023 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20091023 Address after: No. 434, postal street, Nangang District, Heilongjiang, Harbin Patentee after: Harbin Institute of Technology National University Science Park Development Co.,Ltd. Address before: No. 92 West straight street, Nangang District, Heilongjiang, Harbin Patentee before: Harbin Institute of Technology |
|
| ASS | Succession or assignment of patent right |
Owner name: CHANGZHOU MINGSEAL ROBOTIC TECHNOLOGY CO., LTD. Free format text: FORMER OWNER: HARBIN INSTITUTE OF TECHNOLOGY STATE UNIVERSITY SCIENCE AND TECHNOLOGY PARK DEVELOPMENT CO., LTD. Effective date: 20100108 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20100108 Address after: No. 4, building 2, science and Technology Park, Changzhou science and Education City, No. 801 middle Wu Road, Jiangsu, Changzhou, 2410 Patentee after: CHANGZHOU MINGSEAL ROBOTIC TECHNOLOGY Co.,Ltd. Address before: No. 434, postal street, Nangang District, Heilongjiang, Harbin Patentee before: Harbin Institute of Technology National University Science Park Development Co.,Ltd. |
|
| C56 | Change in the name or address of the patentee |
Owner name: CHANGZHOU MINGSEAL ROBOT TECHNOLOGY CO., LTD. Free format text: FORMER NAME: CHANGZHOU MINGSEAL ROBOTIC TECHNOLOGY CO., LTD. |
|
| CP03 | Change of name, title or address |
Address after: 213164 science and technology building, Harbin Science and Technology City, Changzhou, 18 middle Wu Road, Jiangsu, Changzhou Patentee after: CHANGZHOU MINGSEAL ROBOT TECHNOLOGY Co.,Ltd. Address before: 213164, No. 4, building 2, science and Technology Park, Changzhou science and Education City, No. 801 middle Wu Road, Jiangsu, Changzhou, 2410 Patentee before: CHANGZHOU MINGSEAL ROBOTIC TECHNOLOGY Co.,Ltd. |
|
| TR01 | Transfer of patent right |
Effective date of registration: 20241016 Address after: No. 18-69, Changwu Middle Road, Wujin District, Changzhou City, Jiangsu Province, 213,000 Patentee after: Jiangsu Jicui Zhongyi Technology Industry Development Co.,Ltd. Country or region after: China Address before: 213164 Mingsai science and technology building, Harbin Institute of technology, Changzhou science and Education City, No. 18, middle Changwu Road, Changzhou City, Jiangsu Province Patentee before: CHANGZHOU MINGSEAL ROBOT TECHNOLOGY Co.,Ltd. Country or region before: China |