CN102182899A - Large-stroke three-translation orthogonal decoupling-type precise micromotion platform and control method thereof - Google Patents

Abstract

A large-stroke three-translation orthogonal decoupling precision micro-motion platform and a control method thereof, which belong to a three-translation micro-motion platform and a square control method thereof. The laser displacement sensor of the precision micro-motion platform system is connected to the input end of the central control unit, the laser displacement sensor is located outside the precision micro-motion platform, the displacement detection baffle is installed on the precision micro-motion platform, and the laser displacement sensor is connected to the displacement detection baffle Corresponding; the output terminal of the central control unit is connected with the input terminal of the driver power supply, and the multiple output terminals of the driver power supply are connected with each micro-displacement driver, and the micro-displacement driver is installed in the precision micro-motion platform. The precision micro-motion platform adopts a symmetrical structure, which effectively avoids coupling and "temperature drift effect" in the direction of motion, and has a simple and compact structure, high positioning accuracy, and can achieve a working range of 1mm×1mm×50um, which can be widely used in biomedical engineering , optical fiber docking and other fields that require fine operation and processing.

Description

Large-stroke three-translation orthogonal decoupling precision micro-motion platform and its control method

technical field

The invention relates to a three-translational micro-motion platform and a square control method thereof, in particular to a large-stroke three-translation orthogonal decoupling precision micro-motion platform and a control method thereof.

Background technique

Precision positioning technology is one of the key technologies of modern advanced manufacturing technology, and it is widely used in ultra-precision machining, micromanipulation, biomedical engineering and other fields that require fine manipulation. As one of the key equipment, the precision micro-motion platform plays an extremely important role in the precision positioning system.

In 1962, Ellis, a foreign scholar, proposed to use a parallel mechanism as the mechanism form of the piezoelectric ceramic micro-manipulator, and carried out related experiments in microsurgery and biotechnology. Hara and Hemini studied planar three-degree-of-freedom and six-degree-of-freedom micro-motion platforms. In China, Tsinghua University, Beijing University of Aeronautics and Astronautics, Harbin Institute of Technology and other relevant units have conducted relevant research on micro-operation platform technology. Professor Sun Lining of Harbin Institute of Technology disclosed a "six-degree-of-freedom large-stroke, high-precision flexible parallel robot" in the patent document with the publication number CN 1562579A; The patent documents disclose "three-degree-of-freedom three-axis structure decoupled parallel micro-robot", "four-degree-of-freedom four-axis structure decoupled parallel micro-robot", "five-degree-of-freedom five-axis structure decoupled parallel micro-robot", "Six degrees of freedom parallel decoupling structure micro-manipulator". Zhang Yanfei of Shandong University of Technology disclosed a "three-platform orthogonal decoupling parallel micro-motion platform" in the patent document with the publication number CN100999080A.

Although many scholars at home and abroad have conducted research on precision micro-motion platform technology, most of these achievements and technologies have considered the requirements of precision, and insufficient consideration has been given to the range of motion and stiffness of the entire platform. In addition, some mechanisms are too complicated, while others Motion decoupling is difficult; in terms of displacement detection methods, grating sensors, capacitive sensors or laser interferometers are currently used for measurement, but these detection methods are mostly limited by installation space or have strict requirements for the environment.

Contents of the invention

The purpose of the present invention is to provide a large-stroke three-translation orthogonal decoupling precision micro-motion platform and its control method, to solve the problem that the precision micro-motion platform is mostly measured by grating sensors, capacitive sensors or laser interferometers, but these detection methods Most of them are limited by the installation space or have strict requirements on the environment.

The purpose of the present invention is achieved in that the precision micro-motion platform system includes a precision micro-motion platform, a micro-displacement driver, a driver power supply, a central control unit, a laser displacement sensor and a displacement detection baffle, and the input of the laser displacement sensor and the central control unit The laser displacement sensor is located outside the precision micro-motion platform, the displacement detection baffle is installed on the precision micro-motion platform, and the laser displacement sensor corresponds to the displacement detection baffle; the output terminal of the central control unit is connected to the input terminal of the drive power supply, The multi-channel output terminals of the driver power supply are connected with each micro-displacement driver, and the micro-displacement driver is installed in the precision micro-motion platform.

The precision micro-motion platform includes a stage, an XY two-dimensional base platform, a fixed platform, a bridge-type micro-displacement amplification mechanism and a flexible branch chain, and the XY two-dimensional base platform is connected with a stage, and the stage It is a Z-axis platform, and there are X-axis and Y-axis fixed platforms and a bridge-type micro-displacement amplification mechanism connected to the four sides of the XY two-dimensional base platform; the micro-displacement driver has X-axis and Y-axis micro-displacement drivers, X The micro-displacement drivers of the axis and the Y-axis are respectively installed in the bridge-type micro-displacement amplification mechanism of the X-axis or the Y-axis. The side of the base platform and the flexible branch chain form the parallel four-bar guiding mechanism of the X-axis and the Y-axis, and the micro-displacement driver, the fixed platform and the bridge-type micro-displacement amplification mechanism are located in the parallel four-bar mechanism.

The control method of the platform system is as follows: the central control unit (27) converts the preset displacement of the stage (13) into a corresponding voltage signal and sends it to the driver power supply (26), and the driver power supply (26) responds to the received voltage signal The signal is amplified, and then drives the XY two-dimensional base platform (1) and the stage (13), so as to realize the three-degree-of-freedom translational movement of the stage along the X, Y, and Z axes; at the same time, the XY two-dimensional The X-axis laser displacement sensor (5), Y-axis laser displacement sensor (22) in the axial direction of the base platform (1) and the Z-axis laser displacement sensor (14) above the stage (13) will collect precision micro The position information of the moving platform is collected, and the collected position information is fed back to the central control unit (27). The central control unit (27) processes the position information and further controls the drive power supply (26), thereby realizing closed-loop control.

Beneficial effects: the large-stroke three-translation orthogonal decoupling precision micro-motion platform system of the present invention includes a central control unit, a driver power supply, a laser displacement sensor, and a precision micro-motion platform capable of realizing three-translation functions; wherein the stage passes through Z The axis flexible mechanism is arranged on the XY two-dimensional base platform, and the XY two-dimensional base platform is connected to four fixed platforms through four flexible branch chains, and a bridge-type micro-displacement amplification mechanism is integrated in each flexible branch chain. And a micro-displacement driver is embedded in the bridge-type micro-displacement amplification mechanism; X-axis laser displacement sensors, Y-axis laser displacement sensors and corresponding X-axis displacement sensors are respectively arranged in the axial direction of the XY two-dimensional base platform. The detection baffle and the Y-axis displacement detection baffle are provided with a Z-axis laser displacement sensor above the stage. The XY two-dimensional base platform and the four flexible branch chains are arranged symmetrically. Each flexible branch chain is also a symmetrical structure, and integrates a bridge-type micro-displacement amplification mechanism. The XY two-dimensional base platform has dual drives in the X-axis and Y-axis motion directions. The XY two-dimensional base platform, the X-axis front flexible branch chain, and the X-axis rear flexible branch chain constitute a parallel four-bar guide mechanism for the Y-axis. The XY two-dimensional base platform, the Y-axis front flexible branch chain, and the Y-axis rear flexible branch chain A parallel four-bar guide mechanism constituting the X-axis. It solves the problem that the precision micro-motion platform is mostly measured by grating sensors, capacitive sensors or laser interferometers, but these detection methods are often limited by installation space or have strict requirements on the environment, and achieve the purpose of the present invention.

Advantages: (1) The XY two-dimensional base platform and flexible branch chain are arranged in a fully symmetrical mechanism, and a flexible guiding mechanism based on parallel four rods is respectively constructed in the X-axis and Y-axis movement directions, and the stage is arranged in the XY two-dimensional On the base platform, a fully decoupled three-degree-of-freedom translation can be realized; (2) The bridge-type micro-displacement amplification mechanism can significantly increase the output displacement of the piezoelectric ceramic driver, and at the same time, the X-axis and Y-axis directions are adopted The form of double drive greatly expands the working stroke of the micro-motion platform; (3) The whole platform is connected to the fixed platform through multiple flexible branch chains, which effectively improves the stiffness and bearing capacity of the whole platform; (4) Precision micro-motion The platform adopts a symmetrical structure, which effectively avoids coupling and "temperature drift effect" in the direction of motion, and has a simple and compact structure, high positioning accuracy, and can achieve a working range of 1mm×1mm×50um, which can be widely used in biomedical engineering and optical fiber docking And other fields that require fine operation and processing.

Description of drawings

Fig. 1 is a structural diagram of the present invention.

Fig. 2 is a block diagram of the control method of the present invention.

In the figure, 1. XY two-dimensional base platform; 2. X-axis displacement detection baffle; 3. X-axis front displacement driver; 4. X-axis front fixed platform; 5. X-axis laser displacement sensor; 6. X-axis front Bridge-type micro-displacement amplification mechanism; 7. X-axis front flexible branch chain; 8. Z-axis flexible mechanism; 9. Y-axis rear flexible branch chain; 10. Y-axis rear displacement driver; 11. Y-axis rear fixed platform; 12. Y-axis rear bridge micro-displacement amplification mechanism; 13. Stage; 14. Z-axis laser displacement sensor; 15. X-axis rear bridge micro-displacement amplification mechanism; 16. X-axis rear displacement driver; 17. X-axis rear fixation Platform; 18. X-axis rear flexible branch chain; 19. Y-axis front displacement driver; 20. Y-axis front bridge micro-displacement amplification mechanism; 21. Y-axis front flexible branch chain; 22. Y-axis laser displacement sensor; 23. Y-axis front fixed platform; 24. Y-axis displacement detection baffle, 25. X-axis main displacement driver; 26. Driver power supply; 27. Central control unit.

Detailed ways

Embodiment 1: The precision micro-motion platform system includes a precision micro-motion platform, a micro-displacement driver, a driver power supply, a central control unit, a laser displacement sensor and a displacement detection baffle, the laser displacement sensor is connected to the input end of the central control unit, and the laser displacement The sensor is located outside the precision micro-motion platform, and the displacement detection baffle is installed on the precision micro-motion platform. The laser displacement sensor corresponds to the displacement detection baffle; the output terminal of the central control unit is connected to the input terminal of the drive power supply, and the multi-channel drive power supply The output end is connected with each micro-displacement driver, and the micro-displacement driver is installed in the precise micro-motion platform.

The precision micro-motion platform includes a stage, an XY two-dimensional base platform, a fixed platform, a bridge-type micro-displacement amplification mechanism, and a flexible branch chain. The XY two-dimensional base platform is connected with a stage, and the stage It is a Z-axis platform, and there are X-axis and Y-axis fixed platforms and a bridge-type micro-displacement amplification mechanism connected to the four sides of the XY two-dimensional base platform; the micro-displacement driver has X-axis and Y-axis micro-displacement drivers, X The micro-displacement drivers of the axis and the Y-axis are respectively installed in the bridge-type micro-displacement amplification mechanism of the X-axis or the Y-axis. The side of the base platform and the flexible branch chain form the parallel four-bar guiding mechanism of the X-axis and the Y-axis, and the micro-displacement driver, the fixed platform and the bridge-type micro-displacement amplification mechanism are located in the parallel four-bar mechanism.

The control method of the platform system is as follows: the central control unit 27 converts the preset displacement of the stage 13 into a corresponding voltage signal and sends it to the driver power supply 26, and the driver power supply 26 amplifies the received voltage signal, and then drives the XY two three-dimensional base platform 1 and object stage 13, so as to realize the three-degree-of-freedom translational movement of the object stage along the X, Y and Z axis directions; The sensor 5, the Y-direction laser displacement sensor 22 and the Z-direction laser displacement sensor 14 arranged above the stage 13 will collect the position information of the precision micro-motion platform, and feed back the collected position information to the central control unit 27, and the central control The unit 27 processes the position information and further controls the driver power supply 26, thereby realizing closed-loop control.

The large-stroke three-translation orthogonal decoupling precision micro-motion platform system of the present invention includes a central control unit 27, a driver power supply 26, a laser displacement sensor, and a precision micro-motion platform capable of realizing three-translation functions; wherein the stage 13 passes through Z The axis flexible mechanism 8 is arranged on the XY two-dimensional base platform 1, and the XY two-dimensional base platform 1 is respectively connected with four fixed platforms through four flexible branch chains, each of which integrates a bridge micro-displacement Amplifying mechanism, and a micro-displacement driver is embedded in the bridge-type micro-displacement amplifying mechanism; X-axis laser displacement sensor 5, Y-axis laser displacement sensor 22 and X-axis laser displacement sensor 22 are respectively arranged in the axial direction of XY two-dimensional base platform 1 The axial displacement detection baffle 2 and the Y-axis displacement detection baffle 24 are provided with a Z-axis laser displacement sensor 14 directly above the stage 13 .

The XY two-dimensional base platform 1 is arranged symmetrically with the four flexible branch chains. Each flexible branch chain is also a symmetrical structure, and integrates a bridge-type micro-displacement amplification mechanism. The XY two-dimensional base platform 1 is dual-driven in both the X-axis and Y-axis motion directions. The XY two-dimensional base platform 1, the X-axis front flexible branch chain 7, and the X-axis rear flexible branch chain 18 constitute a parallel four-bar guide mechanism for the Y-axis. The XY two-dimensional base platform 1 and the Y-axis front flexible branch chain 21, Y The flexible branch chain 9 behind the axis constitutes the parallel four-bar guide mechanism of the X axis.

Large-stroke three-translation orthogonal decoupling precision micro-motion platform, including central control unit 27, driver power supply 26, X-axis laser displacement sensor 5, Y-axis laser displacement sensor 14, Z-axis laser displacement sensor 22, stage 13, XY two-dimensional base platform 1, Z-axis flexible mechanism 8, four flexible branch chains connected between XY two-dimensional base platform 1 and the fixed platform, etc. The stage 13 is arranged on the XY two-dimensional base platform 1 through the Z-axis flexible mechanism 8, and the XY two-dimensional base platform 1 passes through the X-axis front flexible branch chain 7, the X-axis rear flexible branch chain 18, and the Y-axis front flexible branch chain 1. The branch chain 21 and the Y-axis rear flexible branch chain 9 are respectively connected with the X-axis front fixed platform 4, the X-axis rear fixed platform 17, the Y-axis front fixed platform 23, and the Y-axis rear fixed platform 11, and the X-axis front bridge micro-displacement amplification Mechanism 6, X-axis rear bridge micro-displacement amplification mechanism 15, Y-axis front bridge micro-displacement amplification mechanism 20, Y-axis rear bridge micro-displacement amplification mechanism 12 are respectively integrated in the X-axis front flexible branch chain 7, X-axis rear flexible Branch chain 18, Y-axis front flexible branch chain 21, and Y-axis rear flexible branch chain 9 are embedded with X-axis front micro-displacement driver 3, X-axis rear micro-displacement driver 16, Y-axis front micro-displacement driver 19, Y-axis rear micro-displacement drive 10. The XY two-dimensional base platform 1 is fully symmetrically arranged with the X-axis front flexible branch chain 7 , the X-axis rear flexible branch chain 18 , the Y-axis front flexible branch chain 21 , and the Y-axis rear flexible branch chain 9 . Meanwhile, the X-axis front flexible branch chain 7 , the X-axis rear flexible branch chain 18 , the Y-axis front flexible branch chain 21 , and the Y-axis rear flexible branch chain 9 themselves are all symmetrical structures. The XY two-dimensional base platform 1 is dual-driven in the X-axis and Y-axis directions.

The precision micro-movement platform of the present invention is an integrated structure, the object stage 13, the XY two-dimensional base platform 1, the flexible branch chain and the fixed platform are all integrated, and the XY two-dimensional base platform 1 and the X-axis front flexible branch chain 7. The X-axis rear flexible branch chain 18 constitutes a parallel four-bar guide mechanism along the Y-axis direction. The XY two-dimensional base platform 1, the Y-axis front flexible branch chain 21, and the Y-axis rear flexible branch chain 9 constitute a parallel four-bar guide mechanism along the X-axis direction. Parallel four-bar guiding mechanism. The X-axis front micro-displacement driver 3 and the X-axis rear micro-displacement driver 16 respectively drive the X-axis front flexible branch chain 7 and the X-axis rear through the X-axis front bridge micro-displacement amplification mechanism 6 and the X-axis rear bridge micro-displacement amplification mechanism 15. The flexible branch chain 18 realizes the translation of the precision micro-motion platform along the X-axis direction; the Y-axis front micro-displacement driver 19, the Y-axis rear micro-displacement driver 10 through the Y-axis front bridge micro-displacement amplification mechanism 20, and the Y-axis rear bridge type The micro-displacement amplification mechanism 12 respectively drives the Y-axis front flexible branch chain 21 and the Y-axis rear flexible branch chain 9 to realize the translation of the precision micro-motion platform along the Y-axis direction; the piezoelectric ceramic driver 25 drives the Z-axis flexible mechanism 8 to realize The translational movement of the stage 13 along the Z axis and the combined drive in the three-dimensional direction can enable the stage 13 to move within a space range of 1mm×1mm×50um.

In Fig. 2, a closed-loop feedback control system is composed of a central control unit 27, a drive system and a displacement detection system. The drive system includes a drive power supply 26 and displacement drivers in three coordinate directions. The displacement detection system includes laser displacement sensors and detection baffles along the three coordinate directions. The displacement sensor can be LK-G30 laser displacement sensor, X-axis and Y-axis The laser displacement sensors in the direction are arranged in the axial direction, and the distance from the detection baffle is 10±2cm, and the displacement sensor in the Z-axis direction is arranged directly above the stage 13 10±2cm; when working, first turn on The central control unit 27, the central control unit 27 converts the preset displacements of the stage 13 along the three coordinate directions into corresponding voltage signals and sends them to the driver power supply 26, and the driver power supply 26 amplifies the received voltage signals, And respectively drive the X-direction, Y-direction and Z-direction displacement drivers in the precision micro-motion platform to realize the three-degree-of-freedom translation motion of the stage 13 along the X, Y and Z-axis directions; at the same time, the X-axis laser displacement sensor 5, Y The axis laser displacement sensor 22 and the Z axis laser displacement sensor 14 respectively collect the position information of the precision micro-motion platform, and feed back the measured position information to the central control unit 27, and the central control unit 27 calculates and compares the position information, and then obtains The voltage value required for further control of the precision micro-motion platform is output, and then sent to the driver power supply 26, thereby realizing closed-loop control.

Claims (3)

1. A large-stroke three-translation orthogonal decoupling precision micro-motion platform, characterized in that: the precision micro-motion platform system includes a precision micro-motion platform, a micro-displacement driver, a driver power supply, a central control unit, a laser displacement sensor and a displacement The detection baffle, the laser displacement sensor is connected to the input end of the central control unit, the laser displacement sensor is located outside the precision micro-motion platform, the displacement detection baffle is installed on the precision micro-motion platform, and the laser displacement sensor corresponds to the displacement detection baffle; The output end of the control unit is connected with the input end of the driver power supply, and the multiple output ends of the driver power supply are connected with each micro-displacement driver, and the micro-displacement driver is installed in the precision micro-motion platform. 2. The large-stroke three-translation orthogonal decoupling precision micro-motion platform according to claim 1, characterized in that: the precision micro-motion platform includes a stage, an XY two-dimensional base platform, a fixed platform, a bridge Type micro-displacement amplification mechanism and flexible branch chain, the stage is connected to the XY two-dimensional base platform, the object stage is a Z-axis platform, and the four sides of the XY two-dimensional base platform are connected with fixed X-axis and Y-axis Platform and bridge-type micro-displacement amplification mechanism; the micro-displacement driver has X-axis and Y-axis micro-displacement drivers, and the X-axis and Y-axis micro-displacement drivers are respectively installed on the bridge-type micro-displacement amplification mechanism of X-axis or Y-axis Among them, the X-axis and Y-axis bridge-type micro-displacement amplification mechanisms are respectively connected to the X-axis or Y-axis fixed platform, and the sides of the XY two-dimensional base platform and the flexible branch chain form a parallel four-bar guide mechanism for the X-axis and Y-axis. The displacement driver, the fixed platform and the bridge-type micro-displacement amplification mechanism are located in the parallel four-bar mechanism. 3. A control method of a large-stroke three-translation orthogonal decoupling precision micro-motion platform, characterized in that: the control method of the platform system is: the central control unit converts the preset displacement of the stage into a corresponding voltage The signal is sent to the driver power supply, and the driver power supply amplifies the received voltage signal, and then drives the XY two-dimensional base platform and the stage to realize the three-degree-of-freedom translational movement of the stage along the X, Y and Z axes; At the same time, the X-axis laser displacement sensor, the Y-axis laser displacement sensor and the Z-axis laser displacement sensor installed on the XY two-dimensional base platform axis direction will collect the position information of the precision micro-motion platform, and The collected position information is fed back to the central control unit, and the central control unit processes the position information and further controls the driver power supply, thereby realizing closed-loop control.

Images