CN1302260C - 位置测量装置 - Google Patents
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- H03—ELECTRONIC CIRCUITRY
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Abstract
用本发明给出一种位置测量装置,在这种情况,一个有序伪随机代码(C)的每个码元(C1,C2,C3)由两个在测量方向X上彼此相继的分区(A,B)组成,该两个分区有互补特性。一个码元(C1,C2,C3)的二进制信息(B1,B2,B3)是通过比较两个分区(A,B)的扫描信号(S)得到的。通过这种比较也可检验位置测量装置正确的运行方式。
Description
技术领域
本发明涉及确定绝对位置的一种位置测量装置以及绝对位置测量的一种方法。
背景技术
在很多领域,使用绝对位置测量装置日益增多,在这种情况由一个代码轨迹(Kodespur)用在测量方向一个接一个排列的码元推导出绝对位置信息。码元是以伪随机的分布规定的,致使一定数量相继的码元各形成一个位模式。在扫描装置相对于代码轨迹移动一个单一码元时,就已经形成一个新的位模式,且在整个要确定的绝对测量范围内有一序列不同的位模式供使用。
一个这类的有序代码被称作为链码或伪随机码。
出版物“Absolute position measurement using optical detectionof coded patterns”,作者J.T.M.Stevenson und J.R.Jordan发表在Journal of Physics E/Scientific Instruments 21(1988),No.12中,在1140至1145页提出,每个码元由具有互补光学特性的两个分区的一个规定序列组成。
在出版物中指出了GB 2 126 444A。在那里,在一个这类Manchester(曼彻斯特)编码时为了产生二进制信息,推荐将代码范围的模拟扫描信号与一个规定的触发阈比较并与此有关产生一个二进制信息0或1。
这个与一个固定规定的触发阈的比较有缺点,即在模拟扫描信号中的起伏能导致错误地产生二进制信息。
发明内容
因此本发明的任务在于,创造一种具有高可靠性或高操作安全性的绝对位置测量装置,用这种装置就有可能尽可能无错误地产生绝对位置。
该任务通过以下技术方案来解决。
根据本发明的位置测量装置,具有:一个由一序列在测量方向X相继排列的码元组成的一个代码,每个码元各由两个互补的和在测量方向X彼此相继排列的分区组成;一个扫描装置,具有多个探测元件,用于扫描多个码元和用于在被扫描码元的每个分区之内形成至少一个扫描信号;一个分析处理单元,具有一个比较装置,它每次使一个码元分区的扫描信号互相比较并与比较结果有关为码元形成一个二进制信息。
此外,本发明的任务还在于,给出确定一个绝对位置的一种方法,用该方法使一个尽可能无错误产生二进制信息和从而绝对位置成为可能。
该任务通过以下技术方案来解决。
根据本发明的用于绝对位置测量的方法,具有下列方法步骤:扫描由一序列在测量方向X相继排列的码元组成的一个代码,码元各由两个互补的和在测量方向X彼此相继排列的分区组成;在被扫描码元的每个分区之内产生至少一个扫描信号;将码元的分区扫描信号相互进行比较;和,由所述比较形成一个二进制信息。
本发明还包括基于上述技术方案的扩展方案。
附图说明
本发明用附图详细阐述,示出的有:
图1一种位置测量装置的示意图;
图2误差检验的原理;
图3按照图2用于误差检验的信号
图4用一个增量轨迹产生控制信号的一种位置测量装置;
图5a增量轨迹的模拟扫描信号;
图5b按照图5a来自模拟扫描信号的控制信号;
图6a位置测量装置的第一扫描位置;
图6b位置测量装置的第二扫描位置;
图6c位置测量装置的第三扫描位置和
图6d位置测量装置的第四扫描位置。
具体实施方式
在图1中,示意示出的是一个按照本发明设计的位置测量装置。该位置测量装置按照光学扫描原理工作,在这个原理中以透光法扫描代码C。一个扫描装置AE用于扫描代码C,它布置在沿测量方向X可相对于代码C移动。
代码C由在测量方向X一个接一个排列的相同长度的码元C1,C2,C3的序列组成。每个码元C1,C2,C3又由两个相同长度的、在测量方向X并列直接连接排列的分区A和B组成,它们是互补的。这里互补意味着,它们具有相反特性,即在光学扫描原理时是透明的和不透明的或在反射光扫描时是反射的或不反射的。
有序的代码C由有一个光源L的扫描装置AE扫描,光源的光经过一个准直仪透镜K照射多个彼此相继的码元C1,C2,C3。代码C与位置有关地将光进行调制,致使在代码C的后面形成一个与位置有关的光分布,并由扫描装置AE的一个探测装置D来收集。
探测装置D是一个行传感器,具有一个在测量方向X排列的探测器元件D1至D11的序列。在每个相对位置单义地至少分配一个探测器元件D1至D11给码元C1,C2,C3的每个分区A,B,使在探测装置D的每个相对位置面对代码C从每个分区A,B得到一个扫描信号S1A至S3A。将这些扫描信号S1A至S3A输送给一个分析处理单元AW,它将一个码元C1,C2,C3的两个分区C1A,C1B;C2A,C2B;C2A,C2B;C3A,C3B的两个扫描信号S1A,S1B;S2A,S2B;S3A,S3B各相互进行比较,通过这种比较为每个码元C1,C2,C3产生一个数字数值或一个位B1,B2,B3。多个数字数值B1,B2,B3的序列得出一个定义绝对位置的代码字CW。在探测装置D相对于代码C移动一个码元C1,C2,C3的宽度或长度时,产生一个新的代码字CW,并经过绝对要测量的测量范围形成一些不同的代码字CW。
图1示出代码C相对于扫描装置AE的一个瞬时位置。探测器元件D1至D11是以代码C的一个分区C1A至C3B的半个宽度的距离彼此相继排列的。借此,确保在每个位置单义地给一个分区C1A至C3B至少分配一个探测器元件D1至D11,且不扫描两个分区C1A至C3B之间的接头。在示出的位置中,探测器元件D1扫描分区C1A,探测器元件D3扫描分区C1B。探测器元件D1,D3收集光分布,并与光强度有关产生一个与光强度成正比的模拟扫描信号S1A,S1B。因为两个分区C1A和C1B形成互补,扫描信号S1A和S1B的强度也就是相互反转的,也就是信号电平就相互远离。
该信号距离被充分地用来产生二进制信息B1,此时要检验码元C1的两个扫描信号S1A,S1B哪个较大。该检验能通过求商或求差进行。在实施例中,利用求差,为此按照图1用一个触发组件T1作为比较装置。如果S1A小于S1B,则触发组件T1产生B1=0,如果S1A大于S1B,则产生B1=1。以同样方式,通过扫描码元C2,C3和用触发组件T2,T3的比较各码元C2,C3分区C2A,C2B;C3A,C3B的模拟扫描信号S2A,S2B;S3A,S3B,得到二进制信息B2和B3。
给互补形成的分区A,B的第一序列分配第一数字数值,给互补形成的分区A,B的第二序列分配第二数字数值。在例中,将值0分配给序列不透明-透明(opak→transparent)和将值1分配给序列透明-不透明(transparent→opak)。
因为每个码元C1,C2,C3的两个分区A和B是互补的,所以扫描信号S的信噪比很大。光源L光强度的改变,以同等程度影响两个分区A和B的扫描信号S。
基于一个码元C1,C2,C3各两个分区A,B的互补布置,必须在位置测量装置正确运行方式时,通过扫描这些分区A,B各产生模拟扫描信号S,它们的差超过一个预先规定的值。通过观察该差值,就可能有个良好的误差检验。该误差检验的基础是,能这样去考虑即在误差值低于一个预先规定的数值时,二进制信息B1,B2,B3不可靠,因此要为这个二进制信息B1,B2,B3,产生一个误差信号F1。
产生误差信号F1的原理,示于图2中。将码元C1的模拟扫描信号S1A和S1B输送给一个误差检验装置P。误差检验装置P通过求差(S1A-S1B)比较S1A和S1B并检验,是否差值超过或没超过一个预先规定的比较值V。如果差值(S1A-S1B)没超过预先规定的比较值V,则输出一个误差信号F1。在图3中示出了这些信号关系。
每个码元C1,C2,C3的两个分区A,B在测量方向X相继直接并排的排列有个优点,即能将探测元件D1至D11以一个微小的距离并排地排列在测量方向X,因而位置测量装置对探测装置D面对代码C的偏转,即对Moire’起伏是不敏感的。此外对污染的干扰的灵敏度小,因为能这样去考虑,即一个码元C1,C2,C3的两个分区A,B受的是相同的影响。
在图1中探测元件D1和D2的例子上很容易看出,在代码C向左移动一个分区A,B的长度时,探测元件D1扫描分区C1B和探测元件D3扫描分区C2A,即两个码元C1,C2的分区。触发组件T1就不能提供分配给一个码元C1,C2,C3的二进制信息B1,B2,B3。后面要阐述措施,用这些描施确保为了产生代码字应用正确的探测元件D1至D11,即探测元件D1至D11各扫描一个单一码元C1,C2,C3的分区。
为此,用图4至6说明一个优选的措施。与代码C平行,按照图4用相当于一个码元C1,C2,C3长度的周期长度的一个周期性刻度排列一个增量轨迹(Inkrementalspur)R。将增量轨迹R以已知的方式,由在测量方向X至少两个相互错位1/4刻度周期的探测元件DR1、DR2,为产生两个相互相位差为90°的模拟扫描信号SR1,SR2去扫描。将这些模拟扫描信号SR1,SR2以熟悉的方式内插,并将内插的位置值与代码字组合,因此通过高分辨的增量测量使粗略的绝对位置测量精细化了。
通过增量测量,将每个码元C1,C2,C3的长度内插。通过内插值有可能以简单方式对一个码元C1,C2,C3的右和左分区进行区分。为了区分分区A和B,一个4次内插,即一个单次触发模拟扫描信号SR1,SR2就足够。以这样的方式从数字信号E1,E2得到的位组合,单义地规定了分区A,B的顺序,它用作为确定探测元件D1至D11的控制信号,由探测元件可产生一个正确的代码字CW。于是数字信号E1,E2规定,哪些扫描信号S要相互比较,并且从哪些扫描信号S能得到代码字CW的数字数值B1,B2,B3。
为了进一步阐述该方法,在图6a至6d中示出了代码C对探测单元D的四个不同位置P1,P2,P3,P4。探测元件D1至D11在测量方向X以相当于一个分区A,B半个长度的距离排列,且每两个以相当于一个分区A,B长度的相互距离排列的探测元件D1至D11是以差值连接。
在图6a中示出了位置P1,此时从增量轨迹R得到信息E1=0和E2=0。码元C1的位B1通过探测元件D4和D6的求差,即形成(D4-D6)。在按照图6b的位置P2处,E1=0和E2=1,使得通过一个控制装置M选出探测元件D3和D5。在按照图6c的位置P3处,E1=1和E2=1,使得由控制装置M为了求差选出探测元件D2和D4。在按照图6d的位置P4处,E1=1和E2=0,使得选出探测元件D1和D3。
为了形成代码字CW的其它位,以相同的方式确定出正确的探测元件。如果,例如为了形成位B1选出探测元件D1和D3,则如图1所示,探测元件D5和D7用于形成位B2以及探测元件D9和D11用于形成位B3。图1中只示出了在这个瞬时位置应用的触发组件T1,T2,T3。
确定正确探测元件D1至D11或正确模拟扫描信号S的另一个可能性在于,将所有以一个分区A,B长度为距离相互相距的探测元件D1至D11相互进行比较。在一个码元C1,C2,C3的距离中,有探测器对D1,D3和D5,D7-在图6d中示出的瞬时位置P4的例子上-,按照愿望它们各扫描一个码元C1,C2分区A,B的差。其它探测器对D3,D5扫描两个彼此相继码元C1,C2的彼此相继分区B,A,从而用图2中阐述的误差检验装置P产生一个误差信号F1。为了确定正确的探测元件D1至D11,寻找出现最少误差信号F的探测器组D1,D3;D5,D7。为了实施该第二种可能的措施,具体要求下面的排列或下列的方法步骤:
-探测元件D1至D11在测量方向X以相当于一个分区A,B的半个长度距离排列;
-探测元件D1至D11用相互距离相当于一个分区A,B长度形成第一组(在图6a至6d中偶数编号的探测元件D2,D4,D6,D8,D10);
-探测元件D1至D11用相互距离相当于一个分区A,B长度形成第二组(在图6a至6d中奇数编号的探测元件D1,D3,D5,D7,D9);
-第一组的探测元件D2,D4,D6,D8,D10跟第二组的探测元件D1,D3,D5,D7,D9相比错位一个分区A,B的半个长度;
-一个组的直接彼此相继的探测元件各以差值连接;
-为了形成代码字CW,由两个组在一个扫描区中对应于一个码元C1,C2,C3的长度应用探测元件对的比较结果,其序列产生的误差F最少,按照图6d也就是序列(D1-D3)=B1,(D5-D7)=B2等等。
每一个码元C1,C2,C3的两个分区A,B能是可光学扫描形成的,此时一个分区A对于扫描光是透明或反射形成的,另一个分区B是不透明的或不反射形成的。但是本发明并不局限于光学扫描原理。
绝对位置测量装置,能用于线性或旋转运动的测量,此时代码C是在活动物体之一上,探测装置AE放在另外要测量的物体上。代码C此时能直接放在要测量的物体上或放在一个刻度尺上,它然后又与要测量的物体耦连。
在这种情况,要测量的物体能是一个机床或一个坐标测量机床的工作台和滑轨或一个电动机的转子和定子。
Claims (15)
1.位置测量装置,具有:
-一个由一序列在测量方向X相继排列的码元(C1,C2,C3)组成的一个代码(C),每个码元(C1,C2,C3)各由两个互补的和在测量方向X彼此相继排列的分区(A,B)组成;
-一个扫描装置(AE),具有多个探测元件(D1至D11),用于扫描多个码元(C1,C2,C3)和用于在被扫描码元(C1,C2 C3)的每个分区(A,B)之内形成至少一个扫描信号(S);
-一个分析处理单元(AW),具有一个比较装置(T1,T2,T3),它每次使一个码元(C1,C2,C3)分区(A,B)的扫描信号(S)互相比较并与比较结果有关为码元(C1,C2,C3)形成一个二进制信息(B1,B2,B3)。
2.如权利要求1的位置测量装置,
其中比较装置(T1,T2,T3)是用于形成一个码元(C1,C2,C3)两个分区(A,B)的模拟扫描信号(S)之差的一种装置。
3.如权利要求1或2的位置测量装置,
其中由彼此相继的分区(A,B)的扫描信号(S)是各输送给一个比较装置(T1,T2,T3),分析处理单元(AW)有一个控制装置(M),它是为了确保将二进制信息(B1,B2,B3)各由一个码元(C1,C2,C3)的两个分区(A,B)形成而设计的。
4.如权利要求3的位置测量装置,
其中一个轨迹(R)平行于代码(C)排列,它的信息(E1,E2)是输送给控制装置(M)的,并在这种情况基于该信息(E1,E2)为了形成二进制信息(B1,B2,B3)选出一个码元(C1,C2,C3)的彼此相继的分区(A,B)的扫描信号(S)。
5.如权利要求4的位置测量装置,
其中信息轨迹(R)是一个周期性的增量刻度。
6.如权利要求1的位置测量装置,
其中分析处理单元(AW)有一个误差检验装置(P),它是为了使一个码元(C1,C2,C3)分区(A,B)的扫描信号(S)之差与一个标定差进行比较和在低于标定差时输出一个误差信号(F1)而设计的。
7.如权利要求1的位置测量装置,
其中一个码元(C1,C2,C3)的两个分区(A,B)具有互补光学特性。
8.如权利要求1的位置测量装置,
其中探测元件(D1至D11)在测量方向X以相当于一个分区(A,B)半个长度的距离排列,且各两个以相当于一个分区(A,B)长度的相互距离排列的探测元件(D1至D11)以差值连接。
9.用于绝对位置测量的方法,具有下列方法步骤:
-扫描由一序列在测量方向X相继排列的码元(C1,C2,C3)组成的一个代码(C),码元各由两个互补的和在测量方向X彼此相继排列的分区(A,B)组成;
-在被扫描码元(C1,C2,C3)的每个分区(A,B)之内产生至少一个扫描信号(S);
-将码元(C1,C2,C3)的分区(A,B)扫描信号(S)相互进行比较;和
-由所述比较形成一个二进制信息(B1,B2,B3)。
10.如权利要求9的方法,
其中比较是分区(A,B)模拟扫描信号(S)的求差。
11.如权利要求9的方法,
其中对码元(C1,C2,C3)的区分(A,B)的扫描信号(S)进行相互比较的方法步骤通过以下方式进行:
-比较各直接彼此相继的分区(A,B)的扫描信号(S)并选择各通过扫描一个代码字(C1,C2,C3)分区(A,B)形成的扫描信号(S)。
12.如权利要求11的方法,
其中选择是通过一个控制信号(E1,E2)进行,该信号是通过扫描一个信息轨迹(R)得到的。
13.如权利要求9的方法,
其中形成一个码元(C1,C2,C3)的分区(A,B)扫描信号(S)之差,将该差值与一个标定差值比较并在低于标定差值时形成一个误差信号(F1)。
14.如权利要求9的方法,
其中探测元件(D1至D11)在测量方向X以相当于一个分区(A,B)半个长度的距离排列,且各由两个以相当于一个分区(A,B)长度的相互距离排列的探测元件(D1至D11)以差值连接。
15.如权利要求14的方法,
其中将差值各与一个标定差值比较并在低于标定差值时形成一个误差信号(F1),将通过求差值得到的探测元件对的二进制信息(B1,B2,B3),为了形成代码字CW在一个扫描区中根据一个码元(C1,C2,C3)的长度选出,其得到的二进制信息(B1,B2,B3)的序列产生误差(F)最少。
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DE10201496A DE10201496A1 (de) | 2002-01-17 | 2002-01-17 | Maßstab und Positionsmesseinrichtung zur absoluten Positionsbestimmung |
DE10201496.5 | 2002-01-17 | ||
DE10244235.5 | 2002-09-23 | ||
DE10244235A DE10244235A1 (de) | 2002-09-23 | 2002-09-23 | Positionsmesseinrichtung |
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CN1302260C true CN1302260C (zh) | 2007-02-28 |
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EP (1) | EP1468254B1 (zh) |
JP (1) | JP4044524B2 (zh) |
CN (1) | CN1302260C (zh) |
AT (1) | ATE300725T1 (zh) |
DE (1) | DE50203793D1 (zh) |
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DE10244547B4 (de) * | 2002-09-25 | 2010-11-11 | Dr. Johannes Heidenhain Gmbh | Verfahren und Positionsmesseinrichtung zur Bestimmung einer absoluten Position |
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JP4782553B2 (ja) * | 2005-11-28 | 2011-09-28 | オークマ株式会社 | アブソリュート位置検出装置 |
DE102006007184A1 (de) * | 2006-02-15 | 2007-08-16 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
JP4953653B2 (ja) * | 2006-02-15 | 2012-06-13 | 株式会社ミツトヨ | 光電式エンコーダ |
JP4890190B2 (ja) * | 2006-10-10 | 2012-03-07 | 浜松ホトニクス株式会社 | エンコーダ |
JP4976823B2 (ja) * | 2006-11-15 | 2012-07-18 | 株式会社ミツトヨ | 光学式エンコーダ |
DE102007018748A1 (de) * | 2007-04-20 | 2008-10-23 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
JP5112779B2 (ja) * | 2007-08-03 | 2013-01-09 | 株式会社ミツトヨ | 絶対位置測定装置 |
DE102007045362A1 (de) | 2007-09-22 | 2009-04-02 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
DE102007061287A1 (de) * | 2007-12-19 | 2009-06-25 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung und Verfahren zur absoluten Positionsbestimmung |
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JP2005515418A (ja) | 2005-05-26 |
EP1468254B1 (de) | 2005-07-27 |
DE50203793D1 (de) | 2005-09-01 |
CN1615428A (zh) | 2005-05-11 |
JP4044524B2 (ja) | 2008-02-06 |
US7013575B2 (en) | 2006-03-21 |
US20050072016A1 (en) | 2005-04-07 |
EP1468254A1 (de) | 2004-10-20 |
ES2244823T3 (es) | 2005-12-16 |
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