CN113466495A - Ultralow-temperature high-vacuum atomic force microscope system - Google Patents
Ultralow-temperature high-vacuum atomic force microscope system Download PDFInfo
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- CN113466495A CN113466495A CN202110955834.8A CN202110955834A CN113466495A CN 113466495 A CN113466495 A CN 113466495A CN 202110955834 A CN202110955834 A CN 202110955834A CN 113466495 A CN113466495 A CN 113466495A
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- 230000003287 optical effect Effects 0.000 claims abstract description 33
- 239000013307 optical fiber Substances 0.000 claims abstract description 17
- 239000000919 ceramic Substances 0.000 claims description 85
- 239000000523 sample Substances 0.000 claims description 39
- 229910000639 Spring steel Inorganic materials 0.000 claims description 19
- 239000003292 glue Substances 0.000 claims description 19
- 239000011521 glass Substances 0.000 claims description 13
- 238000012360 testing method Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000004377 microelectronic Methods 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000011946 reduction process Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/261—Details
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Abstract
The invention relates to an ultralow-temperature high-vacuum atomic force microscope system which comprises an integrated optical fiber optical lever system, a Z-axis lifting platform, and a support internally provided with an X-axis moving platform, a Y-axis moving platform and a 15-micron scanner. A vacuum low-temperature linear motion motor is arranged between the support and the Z-axis lifting platform; one side of the Z-axis lifting platform is provided with an optical lever support frame, the other side of the Z-axis lifting platform is provided with a Z-axis vacuum low-temperature motor movement limiter, and the bottom of the Z-axis vacuum low-temperature motor movement limiter is connected with the support; the optical lever support frame is connected with the integrated optical fiber optical lever system; the X-axis moving platform is provided with the Y-axis moving platform, and the Y-axis moving platform is provided with the 15 micron scanner. The invention has the characteristics of low noise, large sample platform and multi-scale field combination.
Description
Technical Field
The invention relates to the field of ultra-high vacuum and ultra-low temperature physical property measurement, in particular to an ultra-low temperature high vacuum atomic force microscope system.
Background
With the continuous development of science and technology, people test the appearance and various physical properties (such as friction force, adhesion force and elastic modulus) of materials in ultra-low temperature and ultra-high vacuum environments more and more widely. In the current stage, the surface appearance test under the conditions of low temperature and high vacuum generally only has a small-volume scanning tunnel microscope or a horizontal small-volume atomic force microscope, but the scanning tunnel microscope can only detect surface tunneling current so as to obtain the surface appearance of a sample, and the small-volume horizontal atomic force microscope can only realize the test under the environment of 10K due to the design of a sample table. Sample testing under multiple conditions (optical, electric and magnetic environments) under multiple-scale conditions cannot be realized due to the volume of the sample stage, and particularly combined testing of a large-scale sample stage and a multi-field environment cannot be performed in an extremely low-temperature environment below 4.2K.
Disclosure of Invention
The invention aims to solve the technical problem of providing an ultralow-temperature high-vacuum atomic force microscope system with low noise and a large sample platform.
In order to solve the above problems, the present invention provides an ultra-low temperature high vacuum atomic force microscope system, which is characterized in that: the system comprises an integrated optical fiber optical lever system, a Z-axis lifting platform and a support internally provided with an X-axis moving platform, a Y-axis moving platform and a 15 micron scanner; a vacuum low-temperature linear motion motor is arranged between the support and the Z-axis lifting platform; one side of the Z-axis lifting platform is provided with an optical lever support frame, the other side of the Z-axis lifting platform is provided with a Z-axis vacuum low-temperature motor movement limiter, and the bottom of the Z-axis vacuum low-temperature motor movement limiter is connected with the support; the optical lever support frame is connected with the integrated optical fiber optical lever system; the X-axis moving platform is provided with the Y-axis moving platform, and the Y-axis moving platform is provided with the 15 micron scanner.
The integrated optical fiber optical lever system comprises a mobile station and a group of brackets symmetrically arranged on the mobile station; a probe clamp holder is arranged on one side of the mobile station; two ends of the mobile station are respectively provided with a piezoelectric vibration motor I; and the front ends of the brackets are respectively provided with a piezoelectric vibration motor II, the top ends of the brackets are respectively provided with a piezoelectric vibration motor III, and the bottoms of the brackets are connected with the optical lever supporting frame.
A sliding block is arranged at the center of the mobile station, a dovetail groove is arranged at one side of the mobile station, and a probe holder is inserted in the dovetail groove; the sliding block with piezoelectricity vibrations motor I links to each other.
The support is composed of a bottom plate, a left side face back plate, a right side face back plate and a rear wire inlet plate provided with a wire inlet hole; the bottom plate is provided with a slide rail, and the slide rail is provided with an X-axis moving platform; one end of the X-axis moving platform penetrates through a through slot hole in the right side face back plate and is connected with a piezoelectric vibration motor IV; the lower part of the right side face back plate is provided with a through slot hole, and two ends of the top surface of the right side face back plate are respectively provided with a sliding groove; the left side back plate is connected with the Z-axis vacuum low-temperature motor movement limiter.
The Z-axis vacuum low-temperature motor movement limiter consists of a limit movement switch shaft and a limit fixed switch shaft which are connected together through an elastic connecting sheet; the limiting movable switch shaft is connected with the Z-axis lifting platform; and the limit fixed switch shaft is connected with the left side back plate.
The bottom of the vacuum low-temperature linear motion motor is fixed on the bottom plate of the support, and the top of the vacuum low-temperature linear motion motor is connected with the Z-axis lifting platform.
The Z-axis lifting platform comprises an upper bracket, a lower bracket, a right side bracket and a left side bracket; the upper bracket is connected with the rear parts of a group of brackets in the integrated optical fiber optical lever system, and the bottom of the upper bracket is respectively connected with the right side bracket and the left side bracket; the top of the lower bracket is respectively connected with the right bracket and the left bracket; two lifting nuts are arranged on the right side support and fall into a sliding groove of a back plate on the right side surface of the support; one side of the right side bracket is connected with the optical lever support frame; and the left bracket is contacted with the top of a movement shaft of the vacuum low-temperature linear movement motor.
The 15-micrometer scanner comprises a fixed plate, an XY-axis pushing fixed plate, an X-axis high-vacuum compatible piezoelectric ceramic stack, a Y-axis high-vacuum compatible piezoelectric ceramic stack, a Z-axis sample supporting circular table and a sample holder, wherein the fixed plate is arranged on the Y-axis moving table; an X-axis piezoelectric ceramic pushing cup is fixedly connected to the X-axis reverse direction of the XY-axis pushing fixing plate through a spring steel bar I and is connected with the X-axis high-vacuum compatible piezoelectric ceramic stack through glue I; the rear end of the X-axis high-vacuum compatible piezoelectric ceramic stack is connected with an X-axis piezoelectric ceramic fixing cup through a glue II, and the X-axis piezoelectric ceramic fixing cup is fixed on the fixing plate through a spring steel bar II; a Y-axis piezoelectric ceramic pushing cup is fixedly connected to the Y-axis direction of the XY-axis pushing fixing plate through a spring steel bar III, and is connected with the Y-axis high-vacuum compatible piezoelectric ceramic stack through glue III; the rear end of the Y-axis high-vacuum compatible piezoelectric ceramic stack is connected with a Y-axis piezoelectric ceramic fixing cup through glue IV, and the Y-axis piezoelectric ceramic fixing cup is fixed on the fixing plate through a spring steel bar IV; the fixed plate is connected with a Z-axis piezoelectric ceramic fixed cup through a spring steel bar V, the Z-axis piezoelectric ceramic fixed cup is connected with the XY-axis pushing fixed plate through a spring steel bar VI, and the top of the Z-axis piezoelectric ceramic fixed cup is connected with the Z-axis high-vacuum compatible piezoelectric ceramic stack; the Z-axis high-vacuum compatible piezoelectric ceramic stack is connected with a Z-axis piezoelectric ceramic pushing cup through a glue V, and the Z-axis piezoelectric ceramic pushing cup is connected with the Z-axis sample supporting circular table through a glue VI; and a heat-insulating glass column is arranged on the Z-axis sample supporting circular truncated cone and is connected with a sample holder.
The X-axis mobile station is connected with the Y-axis mobile station through a slide rail.
And the front end of the Y-axis moving platform is provided with a piezoelectric vibration motor V.
Compared with the prior art, the invention has the following advantages:
1. two lifting nuts are arranged on a right bracket of a Z-axis lifting platform and fall into a sliding groove of a back plate on the right side surface of a support; one side of the right bracket is connected with the optical lever support frame; the left bracket is contacted with the top of a moving shaft of the vacuum low-temperature linear motion motor. The structure uses three-point support to form a minimum mechanical structure loop, thereby achieving the purposes of reducing external noise and improving resolution.
2. The 15-micron scanner disclosed by the invention uses an independent high-vacuum compatible piezoelectric ceramic stack, a Y-axis piezoelectric ceramic fixing cup and a Z-axis piezoelectric ceramic fixing cup, and ensures the independence and orthogonality of XYZ three axes in a mode of combining a fixing cup structure and a movable plate; while facilitating future maintenance and replacement.
3. The 15-micrometer scanner adopts a triple structure design of a Z-axis sample supporting circular table, a heat-insulating glass column and a sample holder, and can place and fix an ultralow-temperature oxygen-free copper whip between heat-insulating glass and a sample table. The appearance of the heat insulation glass can be changed, and the best heat insulation effect can be achieved by adjusting the contact area between the heat insulation glass and the copper braid (the contact area is the smallest by using the glass column as point contact).
4. The X-axis moving table and the Y-axis moving table are arranged in the vacuum chamber, each moving table is connected with a piezoelectric vibration motor, and the piezoelectric vibration motors drive XY one-dimensional linear movement, so that the movement of an experimental sample in the vacuum chamber is realized.
5. The XYZ three-axis separation structure can enable an atomic force sample to have a larger motion range and a larger platform area when scanning is carried out in a high vacuum environment, and further enable the sample to be used together with a large sample platform and a multi-scale field.
6. According to the invention, the heat-insulating glass column is arranged on the Z-axis sample supporting circular table, so that the best heat-insulating effect can be obtained in the extreme temperature reduction process, and the heat-insulating glass column is suitable for 1.5K and 10K-9And testing the extremely low temperature environment below Pa.
Drawings
The following describes embodiments of the present invention in further detail with reference to the accompanying drawings.
Fig. 1 is an assembly schematic of the present invention.
FIG. 2 is a schematic view of the Z-axis elevating platform of the present invention.
Fig. 3 is a schematic diagram of a mobile station in the present invention.
FIG. 4 is a schematic diagram of a Z-axis vacuum cryogenic motor movement limiter of the present invention.
FIG. 5 is a schematic view of an optical lever support of the present invention.
Fig. 6 is a schematic diagram of a 15 micron scanner according to the present invention.
Fig. 7 is an assembly view of the present invention.
FIG. 8 is a top view of an X/Y/Z-axis piezoceramic mounting cup or X/Y-axis piezoceramic push cup of the present invention.
FIG. 9 is a scanning schematic of the present invention.
In the figure: 1-vacuum low-temperature linear motion motor; 2-an integrated fiber optic lever system; 201-mobile station; 2011-slider; 2012-dovetail groove; 202-a scaffold; 3-right side back plate; 4-a bottom plate; 5-a rear wire inlet plate; 6-optical lever support; 7-15 micron scanner; 701-fixing plate; 702-Y axis high vacuum compatible piezoelectric ceramic stacks; 703-X axis high vacuum compatible piezoelectric ceramic stack; 704-Y-axis piezoelectric ceramic fixing cup; 705-X axis piezoelectric ceramic fixing cup; 706-XY axis pushing the fixing plate; 707-Z axis piezoelectric ceramic fixing cup; 708-Z axis piezoelectric ceramic pusher cup; 709-Z axis high vacuum compatible piezoelectric ceramic stack; 7010-Z axis sample support round; 7011-insulating glass column; 7012-sample holder; 7013-Y-axis piezoelectric ceramic push cup; 7014-X-axis piezoelectric ceramic push cup; 8-Z axis lifting platform; 801-upper support; 802-lower support; 803-right side support; 804-left side bracket; a 9-Z-axis vacuum low-temperature motor movement limiter; 901-limit mobile switch shaft; 902-limit fixed switch shaft; 10-a probe holder; 111-piezoelectric vibration motor I; 112-piezoelectric vibration motor II; 113-piezoelectric vibration motor III; 114-piezoelectric vibration motor IV; 115-piezoelectric vibrating motor V; 12-X axis motion stage; 13-Y axis moving stage; 14-left side back panel; 151-cup body I; 152-threaded hole.
Detailed Description
As shown in fig. 1 to 7, an ultra-low temperature high vacuum atomic force microscope system includes an integrated optical fiber optical lever system 2, a Z-axis lifting platform 8, and a support with an X-axis moving stage 12, a Y-axis moving stage 13, and a 15 μm scanner 7 inside.
A vacuum low-temperature linear motion motor 1 is arranged between the support and the Z-axis lifting platform 8; one side of the Z-axis lifting platform 8 is provided with an optical lever support frame 6, the other side is provided with a Z-axis vacuum low-temperature motor movement limiter 9, and the bottom of the Z-axis vacuum low-temperature motor movement limiter is connected with the support; the optical lever support frame 6 is connected with the integrated optical fiber optical lever system 2; the X-axis moving stage 12 is provided with a Y-axis moving stage 13, and the Y-axis moving stage 13 is provided with a 15-micron scanner 7.
Wherein: the integrated optical fiber lever system 2 comprises a mobile station 201 and a group of brackets 202 symmetrically arranged on the mobile station 201; a probe holder 10 is arranged on one side of the mobile station 201; two ends of the mobile station 201 are respectively provided with a piezoelectric vibration motor I111; the front ends of the group of brackets 202 are respectively provided with a piezoelectric vibration motor II 112, the top ends of the brackets are respectively provided with a piezoelectric vibration motor III 113, and the bottom parts of the brackets are connected with the optical lever support frame 6.
A slide block 2011 is arranged at the center of the mobile station 201, a dovetail groove 2012 is arranged at one side of the mobile station, and the probe holder 10 is inserted into the dovetail groove 2012; the slider 2011 is connected to the piezoelectric vibration motor i 111.
The support is composed of a bottom plate 4, a left side back plate 14, a right side back plate 3 and a rear wire inlet plate 5 provided with a wire inlet hole; a sliding rail is arranged on the bottom plate 4, and an X-axis moving table 12 is arranged on the sliding rail; one end of the X-axis mobile station 12 is connected with a piezoelectric vibration motor IV 114 through a through slot hole on the right side back plate 3; the lower part of the right side face back plate 3 is provided with a through slot hole, and two ends of the top surface of the right side face back plate are respectively provided with a sliding groove; the left side back plate 14 is connected with the Z-axis vacuum low-temperature motor movement limiter 9.
The Z-axis vacuum low-temperature motor moving limiter 9 consists of a limiting moving switch shaft 901 and a limiting fixed switch shaft 902 which are connected together through an elastic connecting sheet; the limit moving switch shaft 901 is connected with the Z-axis lifting platform 8; the limit fixed switch shaft 902 is connected to the left side back plate 14.
The bottom of the vacuum low-temperature linear motion motor 1 is fixed on a bottom plate 4 of the support, and the top of the vacuum low-temperature linear motion motor is connected with a Z-axis lifting platform 8. The vacuum low temperature linear motion motor 1 was model D35.1 UHV, manufactured by arrhend Microelectronics, inc (Arun Microelectronics).
The Z-axis lifting platform 8 comprises an upper bracket 801, a lower bracket 802, a right bracket 803 and a left bracket 804; the upper bracket 801 is connected with the rear part of one group of brackets 202 in the integrated optical fiber optical lever system 2, and the bottom of the upper bracket 801 is respectively connected with the right bracket 803 and the left bracket 804; the top of the lower bracket 802 is connected with a right bracket 803 and a left bracket 804 respectively; two lifting nuts are arranged on the right bracket 803 and fall into the sliding groove of the right side back plate 3 of the support; one side of the right bracket 803 is connected with the optical lever support frame 6; the left bracket 804 is in contact with the top of the moving shaft of the vacuum low-temperature linear motion motor 1.
The 15-micron scanner 7 is an XYZ three-axis piezoelectric ceramic scanner and comprises a fixing plate 701, an XY axis pushing fixing plate 706, an X axis high vacuum compatible piezoelectric ceramic stack 703, a Y axis high vacuum compatible piezoelectric ceramic stack 702, a Z axis high vacuum compatible piezoelectric ceramic stack 709, a Z axis sample supporting circular table 7010 and a sample holder 7012 which are arranged on a Y axis moving table 13; an X-axis piezoelectric ceramic pushing cup 7014 is fixedly connected with the X-axis pushing fixing plate 706 in the opposite direction of the X axis through a spring steel bar I, and the X-axis piezoelectric ceramic pushing cup 7014 is connected with an X-axis high-vacuum compatible piezoelectric ceramic stack 703 through glue I; the rear end of the X-axis high-vacuum compatible piezoelectric ceramic stack 703 is connected with an X-axis piezoelectric ceramic fixing cup 705 through a glue II, and the X-axis piezoelectric ceramic fixing cup 705 is fixed on the fixing plate 701 through a spring steel bar II; a Y-axis piezoelectric ceramic pushing cup 7013 is fixedly connected to the Y-axis direction of the XY-axis pushing fixing plate 706 through a spring steel bar III, and the Y-axis piezoelectric ceramic pushing cup 7013 is connected with the Y-axis high-vacuum compatible piezoelectric ceramic stack 702 through glue III; the rear end of the Y-axis high-vacuum compatible piezoelectric ceramic stack 702 is connected with a Y-axis piezoelectric ceramic fixing cup 704 through glue IV, and the Y-axis piezoelectric ceramic fixing cup 704 is fixed on the fixing plate 701 through a spring steel bar IV; the fixing plate 701 is connected with a Z-axis piezoelectric ceramic fixing cup 707 through a spring steel bar V, the Z-axis piezoelectric ceramic fixing cup 707 is fixedly connected with an XY-axis pushing fixing plate 706 through a spring steel bar VI, and the top of the Z-axis piezoelectric ceramic fixing cup 707 is connected with a Z-axis high-vacuum compatible piezoelectric ceramic stack 709; the Z-axis high vacuum compatible piezoceramic stack 709 is connected with a Z-axis piezoceramic push cup 708 through a glue v, and the Z-axis piezoceramic push cup 708 is connected with a Z-axis sample support circular truncated cone 7010 through a glue vi; a heat-insulating glass column 7011 is arranged on the Z-axis sample supporting circular truncated cone 7010, and the heat-insulating glass column 7011 is connected with a sample holder 7012.
The structures of an X-axis piezoelectric ceramic fixing cup 705, a Y-axis piezoelectric ceramic fixing cup 704, a Z-axis piezoelectric ceramic fixing cup 707, an X-axis piezoelectric ceramic pushing cup 7014 and a Y-axis piezoelectric ceramic pushing cup 7013 are all shown in figure 8, and the shape of the cup body I151 is square. A threaded hole 152 is formed in each cup body I151, and a spring steel bar is correspondingly installed on each threaded hole.
The cup body II of the Z-axis piezoceramic driving cup 708 is also square in structure but has no threaded hole.
The materials of the X-axis high vacuum compatible piezoelectric ceramic stack 703, the Y-axis high vacuum compatible piezoelectric ceramic stack 702 and the Z-axis high vacuum compatible piezoelectric ceramic stack 709 are all piezoelectric ceramic materials, and can perform telescopic motion under the action of voltage. The fixed plate 701 is fixed to the tail ends of the X-axis high-vacuum compatible piezoelectric ceramic stack 703 and the Y-axis high-vacuum compatible piezoelectric ceramic stack 702, and a Z-axis piezoelectric ceramic fixed cup 707 and a Z-axis high-vacuum compatible piezoelectric ceramic stack 709 connected to the XY-axis pushing and fixing plate 706 can be pushed to move under the action of voltage.
The X-axis moving stage 12 is connected to the Y-axis moving stage 13 by a slide rail.
The front end of the Y-axis moving table 13 is provided with a piezoelectric vibration motor V115.
The model of each piezoelectric vibration motor is UHV Picocotor, and the manufacturer is NeWPORT.
The model of each high vacuum compatible piezoceramic stack is P-883, and the manufacturer is Puai nanometer displacement technology Inc. (Physik Instrument). The maximum moving range of P-883 at 150V is 17um, and the moving range can be 15um under a general conservative estimation.
The glue model is ultra-high vacuum seal 953001 (torr seal 953001), and the manufacturer is Agilent.
According to the requirements of high vacuum, the 6061 alloy which is baked at high temperature and is made of low-exhaust material is selected to ensure that the material can be used in high vacuum environment.
When the integrated optical fiber optical lever system works, the integrated optical fiber optical lever system 2 is arranged in an atomic force microscope probe, the light path is adjusted through the piezoelectric vibration motor I111 and the piezoelectric vibration motor II 112, the Z-axis lifting platform 8 is lowered through the vacuum low-temperature linear motion motor 1, and mechanical feedback is generated between the integrated optical fiber optical lever system 2 and the 15-micrometer scanner 7. Then, scanning is performed using the X-axis hvcu stack 703 and the Y-axis hvcu stack 702 (see fig. 9), while the Z-axis hvcu stack 709 ensures constant contact force through feedback.
Claims (10)
1. The utility model provides an ultra-low temperature high vacuum atomic force microscope system which characterized in that: the system comprises an integrated optical fiber optical lever system (2), a Z-axis lifting platform (8) and a support internally provided with an X-axis moving platform (12), a Y-axis moving platform (13) and a 15 micron scanner (7); a vacuum low-temperature linear motion motor (1) is arranged between the support and the Z-axis lifting platform (8); one side of the Z-axis lifting platform (8) is provided with an optical lever support frame (6), the other side of the Z-axis lifting platform is provided with a Z-axis vacuum low-temperature motor movement limiter (9), and the bottom of the Z-axis vacuum low-temperature motor movement limiter is connected with the support; the optical lever support frame (6) is connected with the integrated optical fiber optical lever system (2); the X-axis moving platform (12) is provided with the Y-axis moving platform (13), and the Y-axis moving platform (13) is provided with the 15 micron scanner (7).
2. An ultra-low temperature high vacuum atomic force microscope system as claimed in claim 1, wherein: the integrated optical fiber optical lever system (2) comprises a mobile station (201) and a group of brackets (202) symmetrically arranged on the mobile station (201); a probe clamp (10) is arranged on one side of the mobile station (201); two ends of the mobile platform (201) are respectively provided with a piezoelectric vibration motor I (111); the front ends of the brackets (202) are respectively provided with a piezoelectric vibration motor II (112), the top ends of the brackets are respectively provided with a piezoelectric vibration motor III (113), and the bottoms of the brackets are connected with the optical lever support frame (6).
3. An ultra-low temperature high vacuum atomic force microscope system as claimed in claim 2 wherein: a sliding block (2011) is arranged at the center of the moving table (201), a dovetail groove (2012) is arranged at one side of the moving table, and a probe holder (10) is inserted into the dovetail groove (2012); the sliding block (2011) is connected with the piezoelectric vibration motor I (111).
4. An ultra-low temperature high vacuum atomic force microscope system as claimed in claim 1, wherein: the support is composed of a bottom plate (4), a left side back plate (14), a right side back plate (3) and a rear wire inlet plate (5) provided with a wire inlet hole; a sliding rail is arranged on the bottom plate (4), and an X-axis moving table (12) is arranged on the sliding rail; one end of the X-axis moving platform (12) penetrates through a through slot hole on the right side face back plate (3) and is connected with a piezoelectric vibration motor IV (114); the lower part of the right side back plate (3) is provided with a through slot hole, and two ends of the top surface of the right side back plate are respectively provided with a sliding groove; the left side back plate (14) is connected with the Z-axis vacuum low-temperature motor movement limiter (9).
5. An ultra-low temperature high vacuum atomic force microscope system as claimed in claim 1, wherein: the Z-axis vacuum low-temperature motor moving limiter (9) consists of a limiting moving switch shaft (901) and a limiting fixed switch shaft (902) which are connected together through an elastic connecting sheet; the limit moving switch shaft (901) is connected with the Z-axis lifting platform (8); the limit fixed switch shaft (902) is connected with the left side back plate (14).
6. An ultra-low temperature high vacuum atomic force microscope system as claimed in claim 1, wherein: the bottom of the vacuum low-temperature linear motion motor (1) is fixed on the bottom plate (4) of the support, and the top of the vacuum low-temperature linear motion motor is connected with the Z-axis lifting platform (8).
7. An ultra-low temperature high vacuum atomic force microscope system as claimed in claim 1, wherein: the Z-axis lifting platform (8) comprises an upper support (801), a lower support (802), a right support (803) and a left support (804); the upper bracket (801) is connected with the rear part of one group of brackets (202) in the integrated optical fiber optical lever system (2), and the bottom of the upper bracket (801) is respectively connected with the right bracket (803) and the left bracket (804); the top of the lower bracket (802) is respectively connected with the right bracket (803) and the left bracket (804); two lifting nuts are arranged on the right side support (803), and fall into a sliding groove of the right side back plate (3) of the support; one side of the right side bracket (803) is connected with the optical lever support frame (6); the left bracket (804) is in contact with the top of a movement shaft of the vacuum low-temperature linear movement motor (1).
8. An ultra-low temperature high vacuum atomic force microscope system as claimed in claim 1, wherein: the 15-micrometer scanner (7) comprises a fixing plate (701), an XY-axis pushing fixing plate (706), an X-axis high-vacuum compatible piezoelectric ceramic stack (703), a Y-axis high-vacuum compatible piezoelectric ceramic stack (702), a Z-axis high-vacuum compatible piezoelectric ceramic stack (709), a Z-axis sample supporting circular table (7010) and a sample holder (7012), wherein the fixing plate (701), the XY-axis pushing fixing plate (706) are installed on the Y-axis moving table (13); an X-axis piezoelectric ceramic pushing cup (7014) is fixedly connected to the X-axis direction of the XY-axis pushing fixing plate (706) through a spring steel bar I, and the X-axis piezoelectric ceramic pushing cup (7014) is connected with the X-axis high-vacuum compatible piezoelectric ceramic stack (703) through glue I; the rear end of the X-axis high-vacuum compatible piezoelectric ceramic stack (703) is connected with an X-axis piezoelectric ceramic fixing cup (705) through a glue II, and the X-axis piezoelectric ceramic fixing cup (705) is fixed on the fixing plate (701) through a spring steel bar II; a Y-axis piezoelectric ceramic pushing cup (7013) is fixedly connected to the Y-axis direction of the XY-axis pushing fixing plate (706) through a spring steel bar III, and the Y-axis piezoelectric ceramic pushing cup (7013) is connected with the Y-axis high-vacuum compatible piezoelectric ceramic stack (702) through glue III; the rear end of the Y-axis high-vacuum compatible piezoelectric ceramic stack (702) is connected with a Y-axis piezoelectric ceramic fixing cup (704) through glue IV, and the Y-axis piezoelectric ceramic fixing cup (704) is fixed on the fixing plate (701) through a spring steel bar IV; the fixed plate (701) is connected with a Z-axis piezoelectric ceramic fixed cup (707) through a spring steel bar V, the Z-axis piezoelectric ceramic fixed cup (707) is connected with the XY-axis pushing fixed plate (706) through a spring steel bar VI, and the top of the Z-axis piezoelectric ceramic fixed cup is connected with the Z-axis high-vacuum compatible piezoelectric ceramic stack (709); the Z-axis high-vacuum compatible piezoelectric ceramic stack (709) is connected with a Z-axis piezoelectric ceramic pushing cup (708) through a glue V, and the Z-axis piezoelectric ceramic pushing cup (708) is connected with the Z-axis sample supporting circular table (7010) through a glue VI; and a heat-insulating glass column (7011) is arranged on the Z-axis sample supporting circular truncated cone (7010), and the heat-insulating glass column (7011) is connected with a sample holder (7012).
9. An ultra-low temperature high vacuum atomic force microscope system as claimed in claim 1, wherein: the X-axis moving platform (12) is connected with the Y-axis moving platform (13) through a sliding rail.
10. An ultra-low temperature high vacuum atomic force microscope system as claimed in claim 1, wherein: the front end of the Y-axis moving table (13) is provided with a piezoelectric vibration motor V (115).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110955834.8A CN113466495A (en) | 2021-08-19 | 2021-08-19 | Ultralow-temperature high-vacuum atomic force microscope system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN202110955834.8A CN113466495A (en) | 2021-08-19 | 2021-08-19 | Ultralow-temperature high-vacuum atomic force microscope system |
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