CN214310591U - Three-dimensional micron moving platform for quantum diamond atomic force microscope - Google Patents
Three-dimensional micron moving platform for quantum diamond atomic force microscope Download PDFInfo
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- CN214310591U CN214310591U CN202120449099.9U CN202120449099U CN214310591U CN 214310591 U CN214310591 U CN 214310591U CN 202120449099 U CN202120449099 U CN 202120449099U CN 214310591 U CN214310591 U CN 214310591U
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- 229910003460 diamond Inorganic materials 0.000 title claims abstract description 22
- 239000010432 diamond Substances 0.000 title claims abstract description 22
- 239000000523 sample Substances 0.000 claims abstract description 77
- 238000009434 installation Methods 0.000 claims abstract description 9
- 239000000725 suspension Substances 0.000 claims description 5
- 238000000034 method Methods 0.000 description 7
- 238000006073 displacement reaction Methods 0.000 description 5
- 238000003384 imaging method Methods 0.000 description 4
- 230000005291 magnetic effect Effects 0.000 description 4
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000005381 magnetic domain Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
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Abstract
The utility model discloses a three-dimensional micron mobile station for quantum diamond atomic force microscope, including cavity mounting platform, cavity mounting platform is including being cavity roof and the cavity bottom plate of upper and lower rigidity, is provided with two dimension adjusting device between cavity roof and the cavity bottom plate, and two dimension adjusting device bottom is connected with the probe support of installation AFM probe, and the AFM probe is arranged in the cavity regional lower part of cavity mounting platform, and two dimension adjusting device drives the AFM probe through the probe support and moves in the horizontal direction and realize position control on the horizontal direction, installs the lift adjusting device who realizes the vertical lift of probe support on the cavity roof; the utility model discloses a three-dimensional micron mobile station for quantum diamond atomic force microscope through hollow structure's setting, has realized objective and probe structure part's direct relative installation, and mobile station overall structure is simple and small, can realize three-dimensional fine motion and adjust, and the regulation precision is high.
Description
Technical Field
The utility model belongs to quantum diamond atomic force microscope field, more specifically the utility model relates to a three-dimensional micron mobile station for quantum diamond atomic force microscope that says so.
Background
A Quantum Diamond Atomic Force Microscope (QDAFM) spectrometer is a quantum precision measuring instrument based on NV color center and AFM scanning imaging technology. The method can realize quantitative nondestructive imaging of magnetic properties by quantum control and reading of spins of a nitrogen-vacancy (NV) center luminescent defect in the diamond, has nanoscale high spatial resolution and ultrahigh detection sensitivity of single spin, provides a brand new technical means for development and research of high-density magnetic storage, spintronics, quantum technical application and the like, and is widely applied to the fields of magnetic domain imaging, two-dimensional materials, topological magnetic structures, superconducting magnetics, cell imaging and the like.
The AFM probe is a necessary component on the quantum diamond atomic force microscope, and when the quantum diamond atomic force microscope works, the position between the AFM probe and a test sample is adjusted to realize the adjustment of the acting force of the probe on the sample. Among the prior art, displacement platform is mostly solid construction among the quantum diamond atomic force microscope, and the middle part is filled up by guide structure, and the middle can not install structures such as objective, leads to the whole quantum diamond atomic force microscope or the mobile station is bulky and the structure is complicated, and the mobile station generally can only single-axis motion, generally needs three displacement platform to add the adaptor when realizing three-dimensional motion and just can realize, and weight stack is unsuitable lightweight service environment.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a three-dimensional micron mobile station for quantum diamond atomic force microscope, through hollow structure's setting, realized objective and probe structural component's direct relative installation, mobile station overall structure is simple and small, can realize three-dimensional fine motion and adjust, adjusts the precision height.
The utility model provides a three-dimensional micron mobile station is used to quantum diamond atomic force microscope, including cavity mounting platform, cavity mounting platform is including being cavity roof and the cavity bottom plate of upper and lower rigidity, the cavity roof with be provided with two dimension adjusting device between the cavity bottom plate, two dimension adjusting device bottom is connected with the probe support of installation AFM probe, and the AFM probe is arranged in the cavity regional lower part of cavity mounting platform, two dimension adjusting device passes through the probe support drives the AFM probe and moves the position control on the realization horizontal direction on the horizontal direction, install the lift adjustment device who realizes the vertical lift of probe support on the cavity roof.
Preferably, the two-dimensional adjusting device comprises an X-axis adjusting device and a Y-axis adjusting device which respectively realize the position adjustment of the probe support in the X-axis direction and the Y-axis direction which are perpendicular to each other; the X-axis adjusting device comprises a hollow moving plate arranged at the upper part of the hollow bottom plate, a hollow guide plate arranged at the upper part of the moving plate and an X-axis micromotor for pushing the moving plate to slide along the guide plate in the X-axis direction.
Preferably, the guide plate is rectangular, two groups of opposite side surfaces are respectively provided with a dovetail guide groove, a group of dovetail guide grooves parallel to the X axis are respectively matched with an X-axis slide block, and the two X-axis slide blocks are fixedly installed with the moving plate; and Y-axis fixed guide blocks are respectively matched in a group of dovetail guide grooves vertical to the X axis, the Y-axis fixed guide blocks are fixedly installed with the hollow top plate, and the installation of the movable plate in the vertical direction is realized by the Y-axis fixed guide blocks, the guide plate and the X-axis slide block.
Preferably, the X-axis micromotor is fixed on the hollow bottom plate in a state that the axis is parallel to the X-axis, and a motor shaft of the X-axis micromotor faces the moving plate to push the moving plate to move along the guide plate in the X-axis direction.
Preferably, the X-axis adjusting device further includes an X-axis reset mechanism, the X-axis reset mechanism includes two X-axis reset springs whose two axes project parallel to the X-axis, the two X-axis reset springs are respectively disposed at two sides of the hollow region of the moving plate, and two ends of the X-axis reset spring are respectively fixed to the moving plate and the guide plate, so as to reset the moving plate in the X-axis direction.
Preferably, the Y-axis adjusting device includes a Y-axis micro motor, the Y-axis micro motor is fixed on the hollow bottom plate in a state that an axis is parallel to the Y-axis, a motor shaft of the Y-axis micro motor faces the guide plate and acts on an X-axis slider mounted on the moving plate, and the moving plate and the guide plate are driven to move along the Y-axis direction by pushing the X-axis slider.
Preferably, the Y-axis adjusting device further comprises a Y-axis resetting mechanism, the Y-axis resetting mechanism comprises two Y-axis resetting springs with two axis projections parallel to the Y-axis, the two Y-axis resetting springs are respectively arranged on two sides of the hollow area of the moving plate, and two ends of the Y-axis resetting spring are respectively fixed with the guide plate and the hollow top plate to realize the resetting of the moving plate in the Y-axis direction.
Preferably, the probe support comprises a Z-axis guide plate fixed with the moving plate and a probe cantilever which is vertically arranged and movably connected with the Z-axis guide plate, and the AFM probe is fixed on the probe cantilever; the lifting adjusting device comprises a lifting connecting plate fixedly connected with the probe cantilever and a Y-axis micro motor which is arranged in a vertical state and faces the lifting connecting plate, and the Y-axis micro motor acts on the lifting connecting plate to drive the probe cantilever to lift along the Z-axis guide plate.
Preferably, a Z-axis dovetail groove parallel to the Z-axis direction is formed in the Z-axis guide plate, and a Z-axis slider matched with the Z-axis dovetail groove is fixed to the probe suspension arm; a connecting spring is arranged between the Z-axis guide plate and the probe cantilever, the connecting spring is horizontally arranged, and two ends of the connecting spring are respectively fixed on the Z-axis guide plate and the probe cantilever, so that the Z-axis guide plate is movably connected with the probe cantilever;
and a Z-axis reset spring is connected to the Z-axis guide plate, the axis projection of the Z-axis reset spring is parallel to the Z axis, and two ends of the Z-axis reset spring are respectively fixed with the Z-axis guide plate and the probe cantilever.
The utility model discloses technical scheme's a three-dimensional micron mobile station for quantum diamond atomic force microscope's beneficial effect is:
1. through hollow structure's setting, realized the direct relative installation of objective and probe, can install structure, compact structure light in the displacement table hollow region.
2. The dovetail guide groove on the guide plate is arranged, so that the movable plate is fixed in the vertical direction and convenient to move in the X, Y shaft direction, meanwhile, the reset spring is adopted, the movable plate is compounded, the adjusting gap is eliminated, and the adjusting position precision is high.
Drawings
FIG. 1 is a perspective view of a three-dimensional micrometer moving stage for a quantum diamond atomic force microscope of the present invention,
figure 2 is a front view of figure 1,
fig. 3 is a partial view of fig. 2, wherein the hollow floor is not shown,
FIG. 4 is a perspective view of a three-dimensional micrometer moving stage for a quantum diamond atomic force microscope according to another view angle state of the present invention,
FIG. 5 is a schematic diagram of a probe holder structure.
Detailed Description
In order to facilitate the understanding of the technical solutions of the present invention by those skilled in the art, the technical solutions of the present invention will now be further described with reference to the drawings attached to the specification.
As shown in fig. 1, 2 and 3, the present invention provides a three-dimensional micrometer moving stage for quantum diamond atomic force microscope, which comprises a hollow mounting platform, wherein the hollow mounting platform comprises a hollow top plate 12 and a hollow bottom plate 11 which are fixed up and down. A two-dimensional adjusting device is arranged between the hollow top plate 12 and the hollow bottom plate 11, the bottom of the two-dimensional adjusting device is connected with a probe support for installing the AFM probe 10, and the AFM probe 10 is arranged at the lower part of a hollow area of the hollow installing platform. The two-dimensional adjusting device drives the AFM probe 10 to move in the horizontal direction through the probe support to realize position adjustment in the horizontal direction, and the hollow top plate 12 is provided with a lifting adjusting device for realizing vertical lifting of the probe support.
Based on the technical scheme, fine adjustment of the probe in three directions of an X, Y, Z axis can be realized, wherein an X, Y axis is two directions which are mutually vertical in the horizontal direction, and a Z axis is the vertical direction, and the fine adjustment is the same as a conventional three-dimensional coordinate system in the prior art. In the technical scheme, the hollow structure of the hollow mounting platform is arranged, so that the objective lens and the AFM probe 10 are directly and relatively mounted, a structural member can be mounted in the hollow area of the displacement platform, and the structure is compact and light.
As shown in fig. 1, 2 and 3, the two-dimensional adjustment device includes an X-axis adjustment device and a Y-axis adjustment device that respectively achieve positional adjustment of the probe holders in mutually perpendicular X-axis and Y-axis directions.
The X-axis adjusting means includes a hollow moving plate 22 disposed on the upper portion of the hollow bottom plate 11, a hollow guide plate 24 disposed on the upper portion of the moving plate 22, and an X-axis micromotor 21 for pushing the moving plate 22 to slide in the X-axis direction along the guide plate.
The guide plate 24 is rectangular and two sets of opposite side surfaces are respectively provided with a dovetail guide groove 27. X-axis sliding blocks 23 are respectively matched in a group of dovetail guide grooves parallel to the X axis, and the two X-axis sliding blocks 23 and the moving plate 22 are fixedly installed. And Y-axis fixed guide blocks 25 are respectively matched in a group of dovetail guide grooves vertical to the X axis, and the two Y-axis fixed guide blocks 25 are fixedly installed with the hollow top plate 12. The Y-axis fixed guide block 25, the guide plate 24 and the X-axis slider 23 realize the installation of the moving plate 22 in the vertical direction, so that the moving plate 22 is prevented from sliding downwards under the action of the self weight, and the position of the two-dimensional adjusting device is ensured to be fixed.
The X-axis micromotor 21 is fixed on the hollow bottom plate 11 in a state that the axis is parallel to the X axis, the motor shaft of the X-axis micromotor 21 faces the moving plate 22, the moving plate 22 is pushed to move along the dovetail guide groove on the guide plate 24 in the X-axis direction, and the AFM probe 10 fixed with the moving plate 22 through the probe support moves along with the moving plate 22, so that the position adjustment of the AFM probe 10 in the X-axis direction is realized.
The X-axis adjusting device further comprises an X-axis resetting mechanism, the X-axis resetting mechanism comprises X-axis resetting springs 26, the two X-axis projections of the X-axis resetting springs 26 are parallel to the X axis, the two X-axis resetting springs 26 are respectively arranged on two sides of the hollow area of the moving plate 22, and two ends of each X-axis resetting spring 26 are respectively fixed with the moving plate 22 and the guide plate 24, so that the moving plate 22 is reset in the X-axis direction. The X-axis return spring 26 pulls the starting point of the original position of the moving plate 22, i.e. the zero point of the X-axis, the moving plate 22 can only move forward under the action of the X-axis micromotion motor 21, and when the X-axis micromotion motor 21 needs to be reset or move towards the zero point direction, the X-axis micromotion motor 21 is firstly retracted, and then the moving plate 22 is combined or moves towards the zero point direction under the pulling of the X-axis return spring 26. Meanwhile, the arrangement of the X-axis return spring 26 can offset the moving displacement of the moving plate 22 under the action of the X-axis micromotor 21, so that the position adjustment gap of the moving plate 22 is eliminated, and the position adjustment precision is improved.
The Y-axis adjusting device comprises a Y-axis micromotor 31, the Y-axis micromotor 31 is fixed on the hollow bottom plate 11 in a state that the axis is parallel to the Y axis, the motor shaft of the Y-axis micromotor 31 faces the guide plate 24 and acts on an X-axis slider 23 arranged on the moving plate 22, and the moving plate 22 and the guide plate 24 are driven to move along the Y-axis direction by pushing the X-axis slider 23.
The Y-axis adjusting device further comprises a Y-axis resetting mechanism, the Y-axis resetting mechanism comprises Y-axis resetting springs 32 with two axis projections parallel to the Y axis, the two Y-axis resetting springs 32 are respectively arranged on two sides of the hollow area of the moving plate 22, and two ends of each Y-axis resetting spring 32 are respectively fixed with the guide plate 24 and the hollow top plate 12 to realize resetting of the moving plate 22 in the Y-axis direction. The adjustment of the position of the AFM probe 10 in the Y-axis direction is realized by the moving plate 22 and the guide plate 24, the moving plate 22 and the AFM probe 10 are driven by the guide plate 24 to integrally move, and the adjustment principle and the reset principle are the same as the adjustment principle of the moving plate 22 in the X-axis direction.
Referring to fig. 3 and 5, the probe holder includes a Z-axis guide 42 fixed to the moving plate 22 and a probe suspension 43 arm vertically disposed and movably connected to the Z-axis guide 42, and the AFM probe 10 is fixed to the probe suspension 43. The lifting adjusting device comprises a lifting connecting plate 44 fixedly connected with the probe cantilever 43 and a Y-axis micromotor 41 which is arranged in a vertical state and faces the lifting connecting plate 44. The Y-axis micromotor 41 acts on the lifting connecting plate 44 to drive the probe cantilever 43 to lift along the Z-axis guide plate 42.
A Z-axis dovetail groove parallel to the Z-axis direction is formed in the Z-axis guide plate 42, and a Z-axis slider fitted in the Z-axis dovetail groove is fixed to the probe suspension 43. A connecting spring is arranged between the Z-axis guide plate 42 and the probe cantilever 43, the connecting spring is horizontally arranged, and two ends of the connecting spring are respectively fixed on the Z-axis guide plate 42 and the probe cantilever 43, so that the Z-axis guide plate 42 and the probe cantilever 43 are movably connected. And a Z-axis return spring is connected to the Z-axis guide plate 42, the axial projection of the Z-axis return spring is parallel to the Z axis, and two ends of the Z-axis return spring are respectively fixed with the Z-axis guide plate 42 and the probe cantilever 43. The Z-axis return spring is arranged to enable the probe cantilever 43 to overcome the self gravity and return upwards.
The technical solution of the present invention is to provide an improved method for manufacturing a semiconductor device, which is characterized in that the method is not limited by the above-mentioned method, and the method is not substantially improved by the method and the device, or the method and the device are directly applied to other occasions without improvement, all within the protection scope of the present invention.
Claims (9)
1. The utility model provides a three-dimensional micron moving platform for quantum diamond atomic force microscope, its characterized in that, includes cavity mounting platform, cavity mounting platform is including being cavity roof and the cavity bottom plate of upper and lower rigidity, the cavity roof with be provided with two dimension adjusting device between the cavity bottom plate, two dimension adjusting device bottom is connected with the probe support of installation AFM probe, and the AFM probe is arranged in the cavity regional lower part of cavity mounting platform, two dimension adjusting device passes through the probe support drives the AFM probe and moves the position control on the realization horizontal direction on the horizontal direction, install the lift adjusting device who realizes the vertical lift of probe support on the cavity roof.
2. The three-dimensional micrometer moving stage for the quantum diamond atomic force microscope as claimed in claim 1, wherein the two-dimensional adjusting means comprises an X-axis adjusting means and a Y-axis adjusting means for respectively adjusting the positions of the probe holders in the X-axis and Y-axis directions perpendicular to each other; the X-axis adjusting device comprises a hollow moving plate arranged at the upper part of the hollow bottom plate, a hollow guide plate arranged at the upper part of the moving plate and an X-axis micromotor for pushing the moving plate to slide along the guide plate in the X-axis direction.
3. The three-dimensional micrometer moving stage according to claim 2, wherein the guide plate is rectangular, two sets of opposite side surfaces of the guide plate are respectively provided with a dovetail guide groove, an X-axis slide block is respectively matched in one set of dovetail guide grooves parallel to an X axis, and the two X-axis slide blocks are fixedly mounted with the moving plate; and Y-axis fixed guide blocks are respectively matched in a group of dovetail guide grooves vertical to the X axis, the Y-axis fixed guide blocks are fixedly installed with the hollow top plate, and the installation of the movable plate in the vertical direction is realized by the Y-axis fixed guide blocks, the guide plate and the X-axis slide block.
4. The three-dimensional micrometer moving stage according to claim 2, wherein the X-axis micro motor is fixed on the hollow bottom plate with an axis parallel to the X-axis, and a motor shaft of the X-axis micro motor faces the moving plate to push the moving plate to move along the guide plate in the X-axis direction.
5. The three-dimensional micrometer moving stage for the quantum diamond atomic force microscope as claimed in claim 2, wherein the X-axis adjusting device further comprises an X-axis restoring mechanism, the X-axis restoring mechanism comprises two X-axis restoring springs with two axes projected parallel to the X-axis, the two X-axis restoring springs are respectively disposed at two sides of the hollow region of the moving plate, and two ends of the X-axis restoring spring are respectively fixed with the moving plate and the guide plate to realize the restoration of the moving plate in the X-axis direction.
6. The three-dimensional micrometer moving stage according to claim 2, wherein the Y-axis adjusting means comprises a Y-axis micro motor fixed to the hollow base plate with an axis parallel to the Y-axis, and a motor shaft of the Y-axis micro motor faces the guide plate and acts on an X-axis slider mounted on the moving plate, and the moving plate and the guide plate are moved in the Y-axis direction by pushing the X-axis slider.
7. The three-dimensional micrometer moving stage according to claim 6, wherein the Y-axis adjusting mechanism further comprises a Y-axis return mechanism, the Y-axis return mechanism comprises two Y-axis return springs with two axes projected parallel to the Y-axis, the two Y-axis return springs are respectively arranged at two sides in the hollow area of the moving plate, and two ends of the Y-axis return spring are respectively fixed with the guide plate and the hollow top plate to realize the return of the moving plate in the Y-axis direction.
8. The three-dimensional micrometer moving stage according to claim 2, wherein the probe holder comprises a Z-axis guide fixed to the moving plate and a probe cantilever vertically arranged and movably connected to the Z-axis guide, and an AFM probe is fixed to the probe cantilever; the lifting adjusting device comprises a lifting connecting plate fixedly connected with the probe cantilever and a Y-axis micro motor which is arranged in a vertical state and faces the lifting connecting plate, and the Y-axis micro motor acts on the lifting connecting plate to drive the probe cantilever to lift along the Z-axis guide plate.
9. The three-dimensional micrometer moving table for the quantum diamond atomic force microscope as claimed in claim 8, wherein the Z-axis guide plate is provided with a Z-axis dovetail groove parallel to the Z-axis direction, and the probe suspension arm is fixed with a Z-axis slider matched with the Z-axis dovetail groove; a connecting spring is arranged between the Z-axis guide plate and the probe cantilever, the connecting spring is horizontally arranged, and two ends of the connecting spring are respectively fixed on the Z-axis guide plate and the probe cantilever, so that the Z-axis guide plate is movably connected with the probe cantilever;
and a Z-axis reset spring is connected to the Z-axis guide plate, the axis projection of the Z-axis reset spring is parallel to the Z axis, and two ends of the Z-axis reset spring are respectively fixed with the Z-axis guide plate and the probe cantilever.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120449099.9U CN214310591U (en) | 2021-03-02 | 2021-03-02 | Three-dimensional micron moving platform for quantum diamond atomic force microscope |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202120449099.9U CN214310591U (en) | 2021-03-02 | 2021-03-02 | Three-dimensional micron moving platform for quantum diamond atomic force microscope |
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| CN214310591U true CN214310591U (en) | 2021-09-28 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114647054A (en) * | 2022-03-16 | 2022-06-21 | 苏州凌云光工业智能技术有限公司 | Debugging device |
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2021
- 2021-03-02 CN CN202120449099.9U patent/CN214310591U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114647054A (en) * | 2022-03-16 | 2022-06-21 | 苏州凌云光工业智能技术有限公司 | Debugging device |
| CN114647054B (en) * | 2022-03-16 | 2024-05-31 | 苏州凌云光工业智能技术有限公司 | Mounting and adjusting device |
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Address after: 4 / F, area B, building E2, phase 2, innovation industrial park, Hefei hi tech Zone, Anhui 230000 Patentee after: Guoyi Quantum Technology (Hefei) Co.,Ltd. Address before: 4 / F, area B, building E2, phase 2, innovation industrial park, Hefei hi tech Zone, Anhui 230000 Patentee before: Guoyi Quantum (Hefei) Technology Co.,Ltd. |
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