CN110686712A - Reflective image photoelectric encoder - Google Patents
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- CN110686712A CN110686712A CN201911153221.1A CN201911153221A CN110686712A CN 110686712 A CN110686712 A CN 110686712A CN 201911153221 A CN201911153221 A CN 201911153221A CN 110686712 A CN110686712 A CN 110686712A
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- 238000004519 manufacturing process Methods 0.000 claims abstract description 29
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- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 claims description 10
- 229910001635 magnesium fluoride Inorganic materials 0.000 claims description 10
- 229910052782 aluminium Inorganic materials 0.000 claims description 9
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 9
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- 238000009434 installation Methods 0.000 abstract description 6
- 238000012545 processing Methods 0.000 description 8
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- 238000002310 reflectometry Methods 0.000 description 4
- 238000003384 imaging method Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
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Abstract
A reflective image photoelectric encoder relates to the technical field of encoders and solves the problems of complex installation and large volume in the prior art, and comprises a reflective code wheel and a measuring probe, wherein the reflective code wheel comprises a manufacturing substrate, and a reflection increasing film and a first antireflection film which are sequentially arranged on the upper surface of the manufacturing substrate at intervals, and the first antireflection film is connected with the reflection increasing film adjacent to the first antireflection film; the measuring probe comprises a shell, a light source system, a detector, a power circuit, a driving circuit, a microprocessor and a communication circuit, wherein the power circuit supplies power, the driving circuit drives the detector and the microprocessor, the light source system comprises a light source, an optical lens and an optical fiber, light emitted by the light source passes through the optical lens to obtain parallel light, the parallel light is transmitted to the coding ring through the optical fiber, the light reflected by the coding ring is received by the detector, the detector detects to obtain a detection signal, the microprocessor collects and processes the detection signal to obtain an angle value, and the angle value is transmitted to the outside through the communication circuit. The invention has the advantages of high precision, small volume, easy installation and debugging and the like.
Description
Technical Field
The invention relates to the technical field of image type photoelectric encoders, in particular to a reflective image photoelectric encoder.
Background
The photoelectric encoder is a digital angle measuring device integrating light, machine and electricity, and has the advantages of high precision, high resolution, high reliability and the like. Among them, the most typical photoelectric encoder in Heidenhain represents the forefront of development, and the resolution of the photoelectric encoder developed by the company can reach 32 bits, but because the photoelectric encoder is based on the moire fringe technology, the realization of the high-resolution photoelectric encoder requires that the size of a code disc and the volume of the encoder are large, and meanwhile, the modulation of the moire fringes is complex. The image type photoelectric encoder utilizes a digital image processing technology, does not need to modulate moire fringes, can realize single-circle absolute encoding and realizes high resolution on a small-area code disc. The Hu Xiao Dong et al of the institute of precision optics and mechanics of Western 'an of Chinese academy of sciences propose a method for determining the encoding mode of light and dark stripes by the number of pixels of a CCD in a light-transmitting area, and successfully develop a single-turn 12-bit coarse-code absolute encoder with the accuracy of 2'; the Changchun optical precision machinery and physical research institute of China academy of sciences propose a subdivision algorithm of an image type encoder to realize 4096 subdivision, the size of a code disc is only 38mm, the thickness is 75mm, and meanwhile, the Changchun optical precision machinery and physical research institute also propose a reflection type image encoder based on the total reflection principle; however, the thickness of the conventional transmissive image encoder is large, and the size thereof is increased, and the total reflection method requires to accurately find the incident angle of incident light to satisfy the total reflection condition, so that the installation and adjustment are complicated.
Disclosure of Invention
The invention provides a reflective image photoelectric encoder, aiming at solving the problem that the conventional image photoelectric encoder which is simple in assembly and adjustment and small in size does not exist.
The technical scheme adopted by the invention for solving the technical problem is as follows:
a reflective image photoelectric encoder comprises a reflective code disc and a measuring probe; the reflective code disc comprises a manufacturing substrate and an encoding ring arranged on the upper surface of the manufacturing substrate, wherein the encoding ring comprises reflection increasing films and first antireflection films which are arranged at intervals in sequence, and the first antireflection films are connected with the reflection increasing films adjacent to the first antireflection films; the measuring probe comprises a shell, a light source system, a detector, a power circuit, a driving circuit, a microprocessor and a communication circuit, wherein the light source system, the detector, the power circuit, the driving circuit, the microprocessor and the communication circuit are all arranged in the shell, the power circuit is connected with the light source system, the detector, the driving circuit, the communication circuit and the microprocessor, the driving circuit is connected with and drives the detector and the microprocessor, the microprocessor is connected with the detector and the communication circuit, the light source system comprises a light source, an optical lens and an optical fiber, light emitted by the light source passes through the optical lens to obtain parallel light, the parallel light is transmitted to a coding ring through the optical fiber, the light reflected by the coding ring is received by the detector, the detector detects to obtain a detection signal, the microprocessor collects and processes the detection signal to obtain an angle.
The invention has the beneficial effects that:
the invention relates to a reflective type image photoelectric encoder which replaces a transmission type and a total reflection type, thus integrating a light source and a detector into a whole: the measuring probe effectively reduces the volume, and the light source and the detector are arranged on the same side of the reflective coded disc. In order to obtain parallel light, an optical lens is added at the light source, the optical fiber is used for transmitting the parallel light, the optical lens and the optical fiber are added at the light source, the influence caused by light source divergence is reduced, and the utilization rate of light source energy is improved. The principle that different substances have different light reflectivity is utilized, light and shade line images of the reflective coded disc are collected and processed, and the anti-reflection film of the reflective coded disc is designed to improve the black-white ratio and the imaging quality of imaging of the detector, so that the precision is improved.
Drawings
FIG. 1 is a schematic diagram of a reflective image photoelectric encoder according to the present invention.
FIG. 2 is a schematic block diagram of a measuring probe of a reflective image photoelectric encoder according to the present invention.
FIG. 3 is a flow chart of signal processing of a reflective image photoelectric encoder according to the present invention.
FIG. 4 is a schematic diagram showing the light propagation on the surface of a reflective code wheel of the reflective image photoelectric encoder of the present invention.
FIG. 5 is a flow chart of the manufacturing process of the reflective code wheel of the reflective image photoelectric encoder of the present invention.
In the figure: 1. the device comprises a reflection type code wheel, 2, a measuring probe, 3, a manufacturing substrate, 4, a reflection increasing film, 5, a first reflection increasing film, 6, a second reflection increasing film, 7, a light source system, 7.1, a light source, 7.2, an optical lens, 7.3, an optical fiber, 8, a detector, 9, a power circuit, 10, a driving circuit, 11, a communication circuit, 12 and a microprocessor.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
A reflective image photoelectric encoder comprises a reflective code disc 1 and a measuring probe 2. The reflective coded disc 1 is arranged on the rotating piece, the measuring probe 2 does not rotate along with the rotation of the rotating piece, namely the reflective coded disc 1 can rotate relative to the measuring probe 2, and the measuring probe 2 obtains a measured angle at the moment. The reflective coded disc 1 is arranged on a shaft or a bearing, the measuring probe 2 is arranged on the bearing 3 or a shaft sleeve 4, the reflective coded disc 1 rotates when the shaft rotates, the measuring probe 2 does not rotate when the shaft rotates, and the reflective coded disc 1 rotates relative to the measuring probe 2.
The reflective code wheel 1 includes a fabrication base 3 and an encoder ring provided on an upper surface of the fabrication base 3. The manufacturing substrate 3 is a light-transmitting substrate, the manufacturing substrate 3 can be an optical glass disc, a resin disc or other materials, in the embodiment, the optical glass disc is adopted, the upper surface of the optical glass disc is provided with an encoding ring, namely an annular code channel, the encoding ring comprises reflection increasing films 4 and first reflection reducing films 5 which are sequentially arranged at intervals, the upper surface of the optical glass disc is provided with a plurality of reflection increasing films 4 at intervals, the first reflection reducing film 5 is arranged on the upper surface of the optical glass disc and between two adjacent reflection increasing films 4, and the first reflection reducing film 5 is connected with the reflection increasing film 4 adjacent to the first reflection reducing film 5. The upper surface of the reflection increasing film 4 can be provided with a second reflection increasing film 6, the first reflection increasing film 5 and the second reflection increasing film 6 are collectively called reflection increasing films, namely, the reflection type code wheel 1 comprises a manufacturing substrate 3, the reflection increasing film 4 and the reflection increasing films. The reflection type code wheel 1 is large in reflectivity of the part plated with the reflection increasing film 4/plated with the reflection increasing film 4 and the second antireflection film 6, and large in transmissivity of the part plated with the first antireflection film 5 on the surface of the reflection type code wheel 1.
The measuring probe 2 comprises a shell, a light source system, a detector 8, a power circuit 9, a driving circuit 10, a communication circuit 11 and a microprocessor 12. The light source system, the detector 8, the power circuit 9, the driving circuit 10, the communication circuit 11 and the microprocessor 12 are all arranged in the shell. The measuring probe 2 is mounted on a shaft sleeve or a bearing through a housing. The shell is provided with a light beam emergent opening corresponding to the light source system, a light beam receiving opening corresponding to the detector 8, the light source system and the detector 8 are correspondingly arranged, light emitted by the light source system can be received by the detector 8 after being reflected by the reflection increasing film 4, and the detector 8 adopts a CCD. The light source system comprises a light source 7.1, an optical lens 7.2 and an optical fiber 7.3, wherein the light source 7.1, the optical lens 7.2 and the optical fiber 7.3 are arranged in sequence. Light emitted by a light source 7.1 passes through an optical lens 7.2 to obtain parallel light, the parallel light is transmitted through an optical fiber 7.3 and is incident on the surface of a reflective coded disc 1 at a certain angle (non-vertical), the parallel light is reflected by an encoding ring of the reflective coded disc 1 and is transmitted to a detector 8, and the detector 8 detects and receives the parallel light, as shown in fig. 1, the structure and implementation state schematic diagram of the reflective image photoelectric encoder is shown. The included angle between the light beam emitted by the optical fiber 7.3 and the vertical direction is larger than 0 degree and smaller than 90 degrees. The power supply circuit 9 is connected with the light source 7.1, the detector 8, the driving circuit 10, the communication circuit 11 and the microprocessor 12, and the power supply circuit 9 supplies power to the light source. The driving circuit 10 is connected with and drives the detector 8 and the microprocessor 12, drives the detector 8 to detect, and drives the microprocessor 12 to collect, process, reset and the like. The detector 8 is connected with the microprocessor 12, the microprocessor 12 is connected with the communication circuit 11, the detector 8 sends detection signals obtained by self detection to the microprocessor 12, the microprocessor 12 performs calculation processing to obtain an angle value, the obtained angle value is transmitted out through the communication circuit 11, the communication circuit 11 can be externally connected with a control receiver, and the externally connected control receiver reads the angle value obtained by the microprocessor 12 through the communication circuit 11. As shown in fig. 2, it is a schematic block diagram of the measuring probe 2, and integrates the CCD, the light source system, the microprocessor 12, the communication circuit 11, and the power supply circuit, the CCD obtains the detection signal and enters the microprocessor 12, and the microprocessor 12 performs signal acquisition, processing, communication, and other operations. When the device is installed, only the measuring probe 2 and the reflective coded disc 1 need to be installed, so that the installation is simple. As shown in fig. 3, the signal processing flow chart of the microprocessor 12 of the measuring probe 2 is shown, the processing process is the prior art, the functions of the microprocessor 12 include initialization, CCD data acquisition, coarse code identification (coarse code processing) based on an image threshold segmentation method, fine code subdivision (fine code processing) by adopting a centroid extraction method, and fine and coarse combination to obtain an angle value, the angle value is a binary angle, and the angle value is transmitted through serial communication of the communication circuit 11, so as to complete the angle measurement using the present invention.
The reflection increasing film 4 is plated on the surface of the reflection type coded disc 1, and due to the large reflectivity, the energy of most light is reflected out, the transmission is less, and bright stripes are formed on the CCD; the antireflection film-coated portion has a large transmission and a small reflection due to its small reflectance, and forms dark stripes on the CCD. When the light source system of the measuring probe 2 emits parallel light and the parallel light passes through the region of the reflective coded disc 1 only plated with the transmission film to transmit the light, the CCD part of the measuring probe 2 forms dark stripes; when the light source system of the measuring probe 2 emits parallel light to be incident on the reflection increasing film 4, the reflection increasing film 4 reflects the parallel light, the detector 8 receives the reflected light of the light source system, bright stripes are formed on the CCD, and therefore the patterns on the reflective coded disc 1 are in stripes with alternate light and shade on the CCD. When the reflective code disc 1 rotates relative to the measuring probe 2, the code disc pattern in the CCD changes, and the change is the change of the angle.
The light is reflected and refracted on the surface of the medium, and the ratio of the reflected light energy to the incident light energy is the reflectivity. The manufacturing substrate 3 of the reflective coded disc 1 adopts an optical glass disc, so that the reflectivity calculation formula of the surface of the reflective coded disc 1 is as follows:
wherein n is the refractive index of the surface film layer plated on the optical glass, and nGIs the refractive index of the optical glass,n0is the refractive index in air. When in use
When the reflection ratio of the film system is 0, the film system plays a role of full reflection increase. For n0＝1，nGWhen n is 1.5, n is 1.22, and such a material cannot be found. Therefore, magnesium fluoride (MgF) with n ═ 1.38 is selected2) Used as the material of the antireflection film. Similarly, the smaller the film-system refractive index n is, the higher the reflectance ρ is, and the more the reflected light energy is. Therefore, the metal aluminum (Al) with high reflectance is selected as the material of the reflection increasing film 4, and the maximum reflectance of the aluminum can reach 80%. As shown in fig. 4, which is a schematic diagram of the propagation of parallel incident light on the surface of the reflective code wheel 1, magnesium fluoride and aluminum are respectively plated on the surface of optical glass to manufacture the reflective code wheel, wherein only the magnesium fluoride plated portion of the surface of the optical glass has an anti-reflection effect on the incident light, and more light passes through the optical glass and less light is reflected, so dark stripes are formed in the CCD; the magnesium fluoride is plated on the aluminum film, the magnesium fluoride firstly plays a role in increasing the reflection of incident light, the light is transmitted to the surface of the aluminum film, then a small part of the light is transmitted, and a large part of the light is reflected back and becomes bright stripes in the CCD after being increased in reflection by the magnesium fluoride.
As shown in fig. 5, a manufacturing process flow of a reflective image photoelectric encoder is to first take a manufacturing substrate 3, perform surface treatment and cleaning on the manufacturing substrate 3, and ensure the cleanliness of the environment in the manufacturing process, otherwise, phenomena such as sand holes and infirm coating of a code wheel easily occur, which affect the anti-reflection effect, and even lead to decoding errors of the photoelectric encoder and other consequences. Then, based on the manufacturing steps of the cleaned substrate 3, the antireflection film 4 is firstly prepared, and then the antireflection film is prepared. Preparing the reflection increasing film 4 comprises an aluminum plating film to obtain a film for increasing the reflection), coating photoresist on the film for increasing the reflection, exposing, developing, corroding, and removing the photoresist to obtain the reflection increasing film 4, wherein the corrosion is to corrode the aluminum to obtain a plurality of reflection increasing film 4 aluminum films arranged at intervals. And then plating an antireflection film magnesium fluoride film on the manufacturing substrate 3 corresponding to the region between the adjacent antireflection films 4 on the antireflection film 4. If only the first antireflection film 5 has no second antireflection film 6, the first antireflection film 5 is obtained by plating a magnesium fluoride film on the production substrate 3 corresponding to the region between the adjacent antireflection films 4 on the production substrate 3 on which only the antireflection film 4 is plated.
At present, the main image-type photoelectric encoder is to place the light source 7.1 and the detector 8 on both sides of the code wheel, and the light emitted by the light source 7.1 passes through the light-transmitting area and the light-proof area of the code wheel to form light and dark stripes on the detector 8, or reflects the light and dark stripes by utilizing the principle of total reflection, so as to realize the measurement. Therefore, the photoelectric encoder is large in size, poor in integration level and not beneficial to installation. According to the invention, the light source 7.1 and the detector 8 are arranged on the same side of the reflective coded disc 1, and the light and dark line images of the reflective coded disc 1 are collected and processed by utilizing the principle that different substances have different light reflectivity. The invention adopts a reflection type to replace a transmission type and a total reflection type, thus integrating a light source 7.1 and a detector 8 into a whole: the measuring probe 2 effectively reduces the volume. When the encoder is installed and debugged, the angle of the incident angle of the light source 7.1 does not need to be accurately found, and the installation and debugging efficiency is greatly improved. The anti-reflection film 4 of the reflection type code wheel 1 is designed, so that the black-white ratio and the imaging quality of the detector 8 are improved, and the precision is further improved. In order to obtain parallel light, an optical lens 7.2 is added at the light source 7.1, the optical fiber 7.3 is used for transmitting the parallel light, and the optical lens 7.2 and the optical fiber 7.3 are added at the light source 7.1, so that the influence caused by the divergence of the light source 7.1 is reduced, and the utilization rate of the energy of the light source 7.1 is improved.
Claims (7)
1. A reflective image photoelectric encoder is characterized by comprising a reflective code disc (1) and a measuring probe (2); the reflective code disc (1) comprises a manufacturing substrate (3) and a coding ring arranged on the upper surface of the manufacturing substrate (3), the coding ring comprises reflection increasing films (4) and first antireflection films (5) which are arranged at intervals in sequence, and the first antireflection films (5) are connected with the reflection increasing films (4) adjacent to the first antireflection films; the measuring probe (2) comprises a shell, a light source system (7), a detector (8), a power circuit (9), a driving circuit (10), a microprocessor (12) and a communication circuit (11), wherein the light source system (7), the detector (8), the power circuit (9), the driving circuit (10), the microprocessor (12) and the communication circuit (11) are all arranged in the shell, the power circuit (9) is connected with the light source system (7), the detector (8), the driving circuit (10), the communication circuit (11) and the microprocessor (12), the driving circuit (10) is connected with and drives the detector (8) and the microprocessor (12), the microprocessor (12) is connected with the detector (8) and the communication circuit (11), the light source system (7) comprises a light source (7.1), an optical lens (7.2) and an optical fiber (7.3), light emitted by the light source (7.1) passes through the optical lens (7.2) to obtain parallel light, the parallel light is transmitted to the coding ring through the optical fiber (7.3), the light reflected by the coding ring is received by the detector (8), the detector (8) detects the light to obtain a detection signal, the microprocessor (12) collects and processes the detection signal to obtain an angle value, and the angle value is transmitted to the outside through the communication circuit (11).
2. The reflective image photoelectric encoder according to claim 1, wherein the production substrate (3) is an optical glass disk.
3. A reflective image photoelectric encoder according to claim 1, wherein the reflective code wheel (1) is rotatable relative to the measuring probe (2).
4. A reflective image photoelectric encoder according to claim 1, characterized in that the angle of incidence of the light incident on the surface of the reflective code disc (1) is less than 90 °.
5. The reflective image photoelectric encoder according to claim 1, wherein the encoder ring further comprises a second antireflection film (6) provided on an upper surface of the antireflection film (4).
6. The reflective image photoelectric encoder according to claim 1, wherein the material of the reflection increasing film (4) is aluminum, and the material of the first reflection increasing film (5) is magnesium fluoride.
7. A reflective image photoelectric encoder according to claim 1, wherein the reflective code wheel (1) is fabricated by:
step 1, obtaining a manufacturing substrate (3) and cleaning the manufacturing substrate (3);
step 2, plating a layer of film for increasing the reflection on one surface of the manufacturing substrate (3), and coating photoresist, exposing, developing, corroding and removing the photoresist on the film for increasing the reflection to obtain the reflection increasing film (4) which is arranged on the manufacturing substrate (3) at intervals;
and 3, plating a first antireflection film (5) on the manufacturing substrate (3) and between two adjacent antireflection films (4) to obtain the reflective coded disc (1).
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111336928A (en) * | 2020-03-13 | 2020-06-26 | 中国科学院长春光学精密机械与物理研究所 | Metal reflective absolute grating ruler based on image detector |
| CN111811548A (en) * | 2020-07-20 | 2020-10-23 | 中国科学院长春光学精密机械与物理研究所 | Light source adjusting device of reflective image photoelectric encoder |
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