CN117735824B - Manufacturing method of micro lens, micro lens and manufacturing system thereof - Google Patents
Manufacturing method of micro lens, micro lens and manufacturing system thereof Download PDFInfo
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- CN117735824B CN117735824B CN202410184039.7A CN202410184039A CN117735824B CN 117735824 B CN117735824 B CN 117735824B CN 202410184039 A CN202410184039 A CN 202410184039A CN 117735824 B CN117735824 B CN 117735824B
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 23
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- 238000010438 heat treatment Methods 0.000 claims abstract description 40
- 238000000034 method Methods 0.000 claims abstract description 27
- 230000009477 glass transition Effects 0.000 claims abstract description 26
- 238000005498 polishing Methods 0.000 claims abstract description 25
- 230000009471 action Effects 0.000 claims abstract description 10
- 230000005484 gravity Effects 0.000 claims abstract description 8
- 238000012546 transfer Methods 0.000 claims abstract description 8
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- 238000007524 flame polishing Methods 0.000 description 3
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Abstract
The invention provides a manufacturing method of a micro lens, the micro lens and a manufacturing system thereof, wherein the method comprises the following steps: the spray head faces the surface to be treated of the micro lens to be treated; controlling the spray nozzle to spray oxyhydrogen flame with preset gas flow, and continuously heating the micro lens to be treated through the oxyhydrogen flame, wherein the heated heat transfer thickness covers the height of the micro lens to be treated; heating the micro-lens to be treated to the instant temperature to reach the glass transition temperature, so that micro-nano viscoelastic flow is generated on the surface to be treated of the micro-lens to be treated, and the micro-nano viscoelastic flow flows under the action of tension and gravity, so that polishing and shape adjustment of the surface to be treated of the micro-lens to be treated are realized. Compared with the prior art, the invention improves the yield of the micro lens.
Description
Technical Field
The invention relates to the technical field of manufacturing of micro lenses, in particular to a manufacturing method of micro lenses, a micro lens and a manufacturing system thereof.
Background
Compared with the traditional large-size lens, the micro-lens can be integrated in a millimeter scale space due to extremely small unit size, arrangement flexibility and high precision, so that resolution and transmissivity can be improved, and better image quality can be obtained. The microlens can face the extreme demands of high-power lasers, aerospace, solar energy and other application occasions, and the preparation of the microlens and the array thereof by using quartz glass materials gradually becomes the development trend of related industries. However, in the process of manufacturing and processing the microlens, the processed surface is liable to remain, and the yield is not high.
Disclosure of Invention
In order to overcome the defects in the prior art, the invention provides a manufacturing method of a micro lens. The method adopts oxyhydrogen flame to continuously and stably heat the micro lens, so that a better finished product effect compared with the prior art is realized; the specific technical scheme is as follows:
A method of making a microlens, the method comprising:
The spray head faces the surface to be treated of the micro lens to be treated;
Controlling the spray nozzle to spray oxyhydrogen flame with preset gas flow, and continuously heating the micro lens to be treated through the oxyhydrogen flame, wherein the heated heat transfer thickness covers the height of the micro lens to be treated;
And heating the micro-lens to be treated to the instant temperature to reach the glass transition temperature, so that micro-nano viscoelastic flow is generated on the surface to be treated of the micro-lens to be treated, and the micro-nano viscoelastic flow flows under the action of tension and gravity, so that the surface to be treated of the micro-lens to be treated is polished and adjusted in shape.
In a specific embodiment, the polishing corresponds to a glass transition temperature greater than or equal to 1365 ℃; the glass transition temperature corresponding to the shape adjustment is more than or equal to 1470 ℃.
In a specific embodiment, said continuously heating said microlens to be treated by said oxyhydrogen flame comprises:
and controlling the nozzle to move relative to the micro-lens to be processed, or controlling the micro-lens to be processed to move relative to the nozzle, or controlling the nozzle and the micro-lens to be processed to move relative to the other party, so as to realize continuous and uniform heating of the oxyhydrogen flame to the micro-lens to be processed.
Further, the controlling the movement of the nozzle relative to the microlens to be processed or the controlling the movement of the microlens to be processed relative to the nozzle includes:
One of the spray head and the microlens to be processed is fixed, and the other one of the spray head and the microlens to be processed moves within a preset range in a preset path.
Further, the preset path includes one or more of a raster scan path, a nested scan path, and a pulse scan path.
In a specific embodiment, before the continuous heating of the microlens to be processed by the oxyhydrogen flame, the method further includes: and fixing the spray head and the micro-lens to be treated so that the oxyhydrogen flame sprayed by the spray head is vertical to the surface to be treated of the micro-lens to be treated.
Further, the diameter of the spray head is greater than or equal to half the length of the microlens to be processed.
In a specific embodiment, before the continuous heating of the microlens to be processed by the oxyhydrogen flame, the method further includes: and preheating the micro lens to be processed.
Further, the preheating operation includes: heating the microlens to be treated to 300-600 ℃.
In a specific embodiment, during the continuous heating of the microlens to be processed by the oxyhydrogen flame, an image of the surface to be processed of the microlens to be processed is acquired by a microscope and displayed on a display connected with the microscope.
The invention also provides a micro-lens, which is manufactured by the manufacturing method of the micro-lens.
The invention also provides a manufacturing system of the micro lens, which comprises: a spray head and a controller;
the spray head is used for spraying oxyhydrogen flame;
The controller is used for controlling the spray head to face the surface to be processed of the micro lens to be processed; controlling the spray nozzle to spray oxyhydrogen flame with preset gas flow, and continuously heating the micro lens to be treated through the oxyhydrogen flame, so that the heated heat transfer thickness covers the height of the micro lens to be treated; and heating the micro-lens to be treated to the instant temperature to reach the glass transition temperature, so that micro-nano viscoelastic flow is generated on the surface to be treated of the micro-lens to be treated, and the micro-nano viscoelastic flow flows under the action of tension and gravity, so that the surface to be treated of the micro-lens to be treated is polished and adjusted in shape.
The invention has at least the following beneficial effects:
according to the manufacturing method of the micro-lens, the micro-lens to be processed is continuously and stably heated through oxyhydrogen flame, the instantaneous temperature of the micro-lens to be processed is controlled to the glass transition temperature corresponding to polishing and shape adjustment, micro-nano viscoelastic flow generated after the instantaneous temperature reaches the glass transition temperature is utilized to eliminate the micro-level residual steps of the micro-lens to be processed, the nano-level rough morphology of the micro-lens to be processed is smoothed, and the geometric shape of the micro-lens to be processed is changed by utilizing the action of the micro-nano viscoelastic flow after the instantaneous temperature is continuously increased to the glass transition temperature corresponding to shape adjustment, so that the polishing and shape adjustment of the micro-lens to be processed are realized. Compared with the prior art, the polishing device has better polishing effect, realizes the function of adjusting the shape by utilizing the instantaneous temperature of the micro lens, and realizes higher yield.
Furthermore, the sprayer and the micro lens to be processed in the method can be fixed and can also do relative movement, so that the flexibility is high. Under the condition of the relative movement of the spray head and the micro lens to be processed, the effects of uniform heating and instantaneous temperature stabilization of the micro lens to be processed are realized by setting a preset path, such as a pulse scanning path. In addition, the micro lens to be treated is preheated before being heated, so that the micro lens to be treated can reach a heat balance state faster when being heated by oxyhydrogen flame, the heating time is shortened, the efficient polishing and shape adjusting efficiency is realized, and the yield of the micro lens is finally improved.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for the description of the embodiments will be briefly described below, and it is apparent that the drawings in the following description are only some embodiments of the present application, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic flow chart of a method for fabricating a microlens according to the present invention;
FIG. 2 is a schematic diagram of a microlens fabrication method of the present invention;
FIG. 3 is a schematic view of a showerhead, oxyhydrogen flame, and microlens to be treated according to the present invention;
FIG. 4 is a diagram showing the relationship between the instantaneous temperature T W of the microlens to be processed, the working distance d S and the scanning speed v S;
FIG. 5 is a schematic diagram of critical transition temperatures of micro-nano viscoelastic flow of a microlens surface to be treated;
FIG. 6 is a schematic diagram of the height H of the microlens to be processed and its shape error e f;
FIG. 7 is a schematic diagram of a raster scan path;
FIG. 8 is a schematic diagram of nested scan paths;
FIG. 9 is a schematic diagram of a pulse scan path;
fig. 10 is a schematic diagram of a temperature deviation e of a preset path.
Reference numerals:
1-a spray head; 2-oxyhydrogen flame; 3-a microlens to be treated; 31-surface to be treated.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are only some, but not all embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In the description of the present invention, it should be noted that the azimuth or positional relationship indicated by the terms "vertical", "upper", "lower", "horizontal", etc. are based on the azimuth or positional relationship shown in the drawings, and are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the apparatus or element referred to must have a specific azimuth, be constructed and operated in a specific azimuth, and thus should not be construed as limiting the present invention.
In the description of the present invention, it should also be noted that, unless explicitly specified and limited otherwise, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.
The invention provides a manufacturing method of a micro lens, referring to fig. 1, the method comprises the following steps:
S100: and the spray head faces the surface to be treated of the micro lens to be treated.
S200: and controlling the spray nozzle to spray oxyhydrogen flame with preset gas flow, and continuously heating the micro lens to be treated through the oxyhydrogen flame, wherein the heated heat transfer thickness covers the height of the micro lens to be treated.
S300: heating the micro-lens to be treated to the instant temperature to reach the glass transition temperature, so that micro-nano viscoelastic flow is generated on the surface to be treated of the micro-lens to be treated, and the micro-nano viscoelastic flow flows under the action of tension and gravity, so that polishing and shape adjustment of the surface to be treated of the micro-lens to be treated are realized.
Referring to fig. 2, the principle of the method is: heating the micro lens to be treated through oxyhydrogen flame, and when the instantaneous temperature of the micro lens to be treated reaches the glass transition temperature corresponding to polishing and above, forming viscoelastic fluid on the surface layer of the surface to be treated of the micro lens to be treated, and flowing at a speed v f under the action of tension and gravity, namely viscoelasticity flowing. The viscoelastic flow can completely eliminate residual steps on the micrometer scale of the surface to be treated of the microlens to be treated, maintain good shape accuracy, and simultaneously completely smooth the rough morphology on the nanometer scale and repair subsurface damage.
After the residual steps under the micrometer scale are eliminated, the micro lens to be processed is continuously heated, when the instantaneous temperature of the micro lens reaches the glass transition temperature corresponding to the shape adjustment and above, the continuously generated viscoelasticity flow gradually changes the geometric shape of the micro lens to be processed, so that the shape adjustment effect of the micro lens is realized, for example, the original trapezoid or rectangle outline is adjusted to be a circular arc outline.
Specifically, in step S100, referring to fig. 3, a working distance d S exists between the output end of the showerhead and the surface to be processed. Alternatively, the working distance d S may remain the same during the heating process of the subsequent step S200, or may be increased or decreased. In addition, the heat transfer thickness d W of oxyhydrogen flame heating covers the height H of the microlens to be treated.
Illustratively, the spray head may be connected to the H 2-O2 generator to achieve the effect of spraying oxyhydrogen flame.
When the step S200 is performed, optionally, the nozzle may be controlled to move relative to the microlens to be processed, or the microlens to be processed may be controlled to move relative to the nozzle, or both the nozzle and the microlens to be processed may be controlled to move relative to the other party, so as to achieve continuous and uniform heating of the microlens to be processed by oxyhydrogen flame.
In an embodiment in which one of the nozzle and the microlens to be processed is fixed, and the other moves within a preset range along a preset path, for example, the nozzle may be fixed on a gantry, the microlens to be processed is directly or indirectly connected to a motion platform, the motion platform drives the microlens to be processed to move relative to the nozzle, and the relative movement speed of the microlens to be processed is defined as v S. The inventor has found through experiments that, under the condition that the preset gas flow is 1slm, the relationship shown in fig. 4 exists between the instantaneous temperature T W of the microlens to be processed and the working distance d S and the relative speed v S, that is, the instantaneous temperature T W decreases with the increase of the working distance d S and the relative speed v S. In addition, the predetermined range is understood to be within a fixed range, that is, a projection of the moving party on the fixed party does not exceed the fixed party.
In embodiments where the showerhead and the microlens to be treated are both stationary, it will be appreciated that a single point oxyhydrogen flame heating is present, in which case the diameter of the showerhead may be set to be greater than or equal to half the length of the microlens to be treated. The reason is that: typically, the diameter of the oxyhydrogen flame is about 2 times the diameter of the nozzle, so that the nozzle diameter is set to be greater than or equal to half the length of the microlens to be treated, so that the entire range of the microlens to be treated is heated by the oxyhydrogen flame in the case of single-point oxyhydrogen flame heating.
In addition, preferably, when the nozzle and the micro-lens to be treated are both fixed, the oxyhydrogen flame direction sprayed by the nozzle is also perpendicular to the surface to be treated of the micro-lens to be treated.
Alternatively, before heating the microlens to be treated with oxyhydrogen flame, the microlens to be treated may be further subjected to a preheating operation. The reason is that the preheated micro-lens to be treated can reach a heat balance state more quickly when being heated by oxyhydrogen flame, namely, the heating time is shortened. Preferably, the microlenses to be treated are heated to between 300 ℃ and 600 ℃ by a preheating operation.
Example 1
The present embodiment provides a first specific implementation manner: the micro-lens to be treated is heated to the instant temperature of 1365 ℃ and above by oxyhydrogen flame, thereby realizing the polishing of the micro-lens to be treated. It should be noted that, heating to the instantaneous temperature of 1365 ℃ and above is mainly set based on the glass transition temperature corresponding to polishing, and the glass transition temperature corresponding to polishing and shape adjustment is obtained by the inventors through a great deal of experimental summary. The procedure of the experiment will be exemplarily shown below.
Specifically, the spray head adopts a copper spray head with the diameter of 0.6mm, the copper spray head faces the surface to be treated of the micro-lens to be treated vertically, and the working distance between the output end of the copper spray head and the surface to be treated of the micro-lens to be treated is d S. Under the condition that the preset gas flow is 1slm, a single-point oxyhydrogen flame heating experiment of a micro lens (materials: quartz, micro lens length x width: 0.3mm x 1 mm) is carried out, the heating time is set to 120S, and in the process, the instantaneous temperature T W of the surface to be treated of the micro lens to be treated is collected, and the outline and the surface roughness S a of the surface to be treated are detected.
The instantaneous temperature T W is recorded by a thermal infrared imager, a contour image of the surface to be processed is recorded by a microscope, and the recorded image is displayed on a display connected to the microscope.
In experiments, referring to fig. 5, as the working distance d S decreases from 14mm to 8mm, the instantaneous temperature T W increases from 1260 ℃ to 1520 ℃, and the roughness S a of the surface to be treated of the microlens to be treated decreases from 140 nm to 0.15 nm. When the instantaneous temperature T W reaches 1420 ℃ and above, the surface to be treated of the micro lens to be treated can reach atomic roughness and tend to be stable.
Thus, under the nanoscale definition, the critical transition temperature corresponding to the smoothness of the rough morphology to the stable surface quality is 1420 ℃.
In addition, when the instantaneous temperature T W reached 1470 ℃, the micrometer-scale residual step was completely eliminated, but this phenomenon was not observed when the instantaneous temperature T W was 1365 ℃ and below. And as the instantaneous temperature T W continues to increase from 1470 ℃, the height of the microlens to be treated decreases significantly, and the geometry of the microlens to be treated can be considered to have changed.
Then at the micrometer scale, the heat-flow enhancement to the critical transition temperature for residual step elimination and the critical transition temperature for residual step elimination to shape profile adjustment are defined to be 1365 ℃ and 1470, respectively.
It can be understood that the residual step is eliminated, that is, the microlens is polished, and the shape profile is adjusted, that is, the microlens is shaped, so that the glass transition temperature corresponding to polishing is greater than or equal to 1365 ℃ and the glass transition temperature corresponding to shape adjustment is greater than or equal to 1470 ℃.
Therefore, when the microlens to be treated is heated to the instant temperature of 1365 ℃ and above, the polishing effect can be achieved. Preferably, the microlens to be treated is heated to an instantaneous temperature of 1420 ℃ and above to achieve the optimal polishing effect.
In this regard, the inventors have also verified the effect of polishing. Specifically, a test for verifying the oxyhydrogen flame polishing effect of an arc-shaped profile microlens array (material: quartz, microlens array length×width: 6mm×1 mm) was performed by using a copper shower head with a diameter of 0.6mm under the conditions that the preset gas flow rate was 1slm, the working distance d S was 8mm, and the relative speed v S was 1 mm/s. The preheating temperature of the micro lens to be treated is set to 300 ℃, the cycle times of the preset path are set to 72, the micro lens to be treated is heated to the instant temperature of 1365 ℃ to 1470 ℃ through oxyhydrogen flame, and the height H of the micro lens to be treated and the shape error e f of the surface to be treated of the micro lens to be treated are observed.
Referring to fig. 6, the height H of the polished microlens is substantially unchanged, and the shape error e f is reduced from the initial ±1.7μm to ±0.5μm or less, so that the uniformity of the microlens is improved, since the micro-scale residual step of the surface to be processed of the microlens is completely eliminated and the nano-scale roughness morphology is completed to be smooth. In addition, the oxyhydrogen flame polishing does not generate hydroxyl groups on the surface to be treated of the microlens, and can ensure good optical performance.
Example 2
The present example provides a second specific implementation: the micro-lens to be treated is heated to the instantaneous temperature of 1470 ℃ and above by oxyhydrogen flame, so that the micro-lens to be treated is polished and adjusted.
According to the single-point oxyhydrogen flame heating experiment in example 1, as the instantaneous temperature continues to increase from 1470 ℃, the height of the microlens to be processed is significantly reduced, and the geometry of the microlens to be processed is changed, that is, the shape adjustment of the microlens to be processed is realized. In addition, since 1470 ℃ exceeds the glass transition temperature corresponding to polishing, the embodiment realizes shape adjustment and polishing effect.
Example 3
In this embodiment, on the basis that one of the nozzle and the microlens to be processed is fixed, and the other moves within a preset range by using a preset path, three preset paths, namely a raster scan path, a nested scan path and a pulse scan path, are provided based on realizing uniform heating of the microlens to be processed by oxyhydrogen flame and ensuring the stability of the instantaneous temperature of the microlens to be processed. The three preset paths are respectively referred to fig. 7, 8 and 9.
Alternatively, in the process of heating the microlens to be processed by oxyhydrogen flame, any one of the nozzle and the microlens to be processed can be moved relative to the other along any one or combination of the above-mentioned preset paths.
Specifically, the inventor performs experimental analysis on the three preset paths, and the experimental process is as follows:
the spray head adopts a copper spray head with the diameter of 0.6mm, under the conditions that the gas flow rate is 1.1slm, the working distance d S mm and the scanning speed v S are 1mm/s, oxyhydrogen flame polishing/shape adjusting experiments are carried out on quartz glass (without micro lenses, the length is multiplied by the width is multiplied by 54 mm), and the calculated temperature deviation e is calculated by means of the instantaneous temperature T g corresponding to the observation points n (the number is 33) on the surface of the quartz glass in the recording process of an infrared thermal imager. Referring to fig. 10, among the three scan paths, the temperature deviation e of the pulse scan path is minimum, only ±6.3 ℃. Therefore, among the three preset paths, a pulse scanning path is preferably adopted, so that a stable polishing/shape adjusting effect is advantageously obtained.
The invention also proposes a microlens which can be produced by the method described in any of the embodiments described above.
In addition, the invention also provides a manufacturing system of the micro lens, which comprises the following steps: a spray head and a controller.
Specifically, the spray head is used for spraying oxyhydrogen flame, and the controller is used for controlling the spray head to face the surface to be treated of the microlens to be treated and controlling the spray head to spray oxyhydrogen flame with preset gas flow. The micro-lens to be treated is continuously heated through oxyhydrogen flame, so that the heated heat transfer thickness covers the height of the micro-lens to be treated, the micro-lens to be treated is heated to the instant temperature to reach the glass transition temperature, micro-nano viscoelastic flow is generated on the surface to be treated of the micro-lens to be treated, and then the micro-nano viscoelastic flow flows under the action of tension and gravity, so that polishing and shape adjustment of the surface to be treated of the micro-lens to be treated are realized.
In summary, the method for manufacturing the micro-lens provided by the invention heats the micro-lens to be processed by oxyhydrogen flame, controls the instantaneous temperature of the micro-lens to be processed to be greater than or equal to the glass transition temperature, eliminates the micro-nano viscoelastic flow generated after reaching the glass transition temperature to eliminate the micro-scale residual steps of the micro-lens to be processed, smoothes the nano-scale rough morphology of the micro-lens to be processed, and changes the geometric shape of the micro-lens to be processed by utilizing the action of the micro-nano viscoelastic flow after the instantaneous temperature is continuously increased to the glass transition temperature corresponding to the shape adjustment, thereby realizing polishing and shape adjustment of the micro-lens to be processed and higher yield; the manufacturing method of the micro lens is summarized through a large number of experiments, has good novelty, creativity and practicability, and is worth popularizing.
Note that the above is only a preferred embodiment of the present invention and the technical principle applied. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, while the invention has been described in connection with the above embodiments, the invention is not limited to the embodiments, but may be embodied in many other equivalent forms without departing from the spirit or scope of the invention, which is set forth in the following claims.
The foregoing description of the preferred embodiments of the invention is not intended to limit the invention to the precise form disclosed, and any such modifications, equivalents, and alternatives falling within the spirit and scope of the invention are intended to be included within the scope of the invention.
Claims (11)
1. A method of making a microlens, the method comprising:
The spray head faces the surface to be treated of the micro lens to be treated;
Controlling the spray nozzle to spray oxyhydrogen flame with preset gas flow, and continuously heating the micro lens to be treated through the oxyhydrogen flame, wherein the heated heat transfer thickness covers the height of the micro lens to be treated;
Heating the micro-lens to be treated to the instant temperature to reach the glass transition temperature, so that micro-nano viscoelastic flow is generated on the surface to be treated of the micro-lens to be treated, and the micro-nano viscoelastic flow flows under the action of tension and gravity, so that polishing and shape adjustment of the surface to be treated of the micro-lens to be treated are realized;
Polishing the corresponding glass transition temperature to be greater than or equal to 1365 ℃; the glass transition temperature corresponding to the shape adjustment is more than or equal to 1470 ℃.
2. The method of claim 1, wherein the continuously heating the microlens to be processed by the oxyhydrogen flame comprises:
and controlling the nozzle to move relative to the micro-lens to be processed, or controlling the micro-lens to be processed to move relative to the nozzle, or controlling the nozzle and the micro-lens to be processed to move relative to the other party, so as to realize continuous and uniform heating of the oxyhydrogen flame to the micro-lens to be processed.
3. The method according to claim 2, wherein controlling the movement of the showerhead with respect to the microlens to be processed or controlling the movement of the microlens to be processed with respect to the showerhead comprises:
One of the spray head and the microlens to be processed is fixed, and the other one of the spray head and the microlens to be processed moves within a preset range in a preset path.
4. A method of fabricating a microlens according to claim 3, wherein the predetermined path comprises one or more of a raster scan path, a nested scan path, and a pulse scan path.
5. The method according to claim 1, wherein before the continuous heating of the microlens to be processed by the oxyhydrogen flame, further comprises: and fixing the spray head and the micro-lens to be treated so that the oxyhydrogen flame sprayed by the spray head is vertical to the surface to be treated of the micro-lens to be treated.
6. The method according to claim 5, wherein the diameter of the nozzle is greater than or equal to half the length of the microlens to be processed.
7. The method according to claim 1, wherein before the continuous heating of the microlens to be processed by the oxyhydrogen flame, further comprises: and preheating the micro lens to be processed.
8. The method of claim 7, wherein the preheating comprises: heating the microlens to be treated to 300-600 ℃.
9. The method according to claim 1, wherein an image of a surface to be processed of the microlens to be processed is acquired by a microscope and displayed on a display connected to the microscope during the continuous heating of the microlens to be processed by the oxyhydrogen flame.
10. A microlens, characterized in that it is produced by the method according to any one of claims 1 to 9.
11. A microlens fabrication system, comprising: a spray head and a controller;
the spray head is used for spraying oxyhydrogen flame;
The controller is used for controlling the spray head to face the surface to be processed of the micro lens to be processed; controlling the spray nozzle to spray oxyhydrogen flame with preset gas flow, and continuously heating the micro lens to be treated through the oxyhydrogen flame, so that the heated heat transfer thickness covers the height of the micro lens to be treated; heating the micro-lens to be treated to the instant temperature to reach the glass transition temperature, so that micro-nano viscoelastic flow is generated on the surface to be treated of the micro-lens to be treated, and the micro-nano viscoelastic flow flows under the action of tension and gravity, so that polishing and shape adjustment of the surface to be treated of the micro-lens to be treated are realized;
Polishing the corresponding glass transition temperature to be greater than or equal to 1365 ℃; the glass transition temperature corresponding to the shape adjustment is more than or equal to 1470 ℃.
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| CN202410184039.7A CN117735824B (en) | 2024-02-19 | 2024-02-19 | Manufacturing method of micro lens, micro lens and manufacturing system thereof |
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| CN202410184039.7A CN117735824B (en) | 2024-02-19 | 2024-02-19 | Manufacturing method of micro lens, micro lens and manufacturing system thereof |
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| CN117735824B true CN117735824B (en) | 2024-05-07 |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1405428A (en) * | 1971-11-17 | 1975-09-10 | American Optical Corp | Method of producing an optical quality surface on a lens |
| CN101571603A (en) * | 2009-06-02 | 2009-11-04 | 中国科学院上海光学精密机械研究所 | Method for preparing micro-optical element on quartz glass substrate by applying femtosecond laser |
| CN111943526A (en) * | 2020-07-06 | 2020-11-17 | 南方科技大学 | Polishing method and application, polishing device and quartz glass |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10259890A1 (en) * | 2002-12-20 | 2004-07-08 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Method and device for deliberately changing the surface contour of an optical lens made of glass or glass-like material |
-
2024
- 2024-02-19 CN CN202410184039.7A patent/CN117735824B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1405428A (en) * | 1971-11-17 | 1975-09-10 | American Optical Corp | Method of producing an optical quality surface on a lens |
| CN101571603A (en) * | 2009-06-02 | 2009-11-04 | 中国科学院上海光学精密机械研究所 | Method for preparing micro-optical element on quartz glass substrate by applying femtosecond laser |
| CN111943526A (en) * | 2020-07-06 | 2020-11-17 | 南方科技大学 | Polishing method and application, polishing device and quartz glass |
Non-Patent Citations (1)
| Title |
|---|
| 王加龙编著.《塑料成型工艺》.印刷工业出版社,2009,(第1版),第211页. * |
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| CN117735824A (en) | 2024-03-22 |
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