CN116818762A - Optical detection device and method - Google Patents
Optical detection device and method Download PDFInfo
- Publication number
- CN116818762A CN116818762A CN202210298714.XA CN202210298714A CN116818762A CN 116818762 A CN116818762 A CN 116818762A CN 202210298714 A CN202210298714 A CN 202210298714A CN 116818762 A CN116818762 A CN 116818762A
- Authority
- CN
- China
- Prior art keywords
- light
- imaging
- light beam
- measured
- detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 title claims abstract description 116
- 230000003287 optical effect Effects 0.000 title claims abstract description 81
- 238000000034 method Methods 0.000 title claims abstract description 18
- 238000003384 imaging method Methods 0.000 claims abstract description 98
- 238000001228 spectrum Methods 0.000 claims abstract description 46
- 238000012545 processing Methods 0.000 claims abstract description 24
- 238000005286 illumination Methods 0.000 claims abstract description 15
- 238000005259 measurement Methods 0.000 claims description 10
- 230000010287 polarization Effects 0.000 claims description 10
- 238000007689 inspection Methods 0.000 claims description 3
- 238000005516 engineering process Methods 0.000 description 4
- 238000013461 design Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 238000012634 optical imaging Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 206010063385 Intellectualisation Diseases 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 229940079593 drug Drugs 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- -1 traffic Substances 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
The invention discloses an optical detection device and a method, wherein the optical detection device comprises an objective table for bearing an object to be detected, an illumination module for emitting detection light beams to the object to be detected, and a focusing module for respectively injecting the detection light beams into the object to be detected and a reference focal plane through light splitting by an optical component and converging the detection light beams to a spectrum recorder by the optical component; the data processing module is used for acquiring the phase information and the spectrum wavelength of the interference light beam, calculating according to the phase information and the spectrum wavelength of the interference light beam, and setting the optimal relative distance between the objective table and the imaging objective lens when the surface to be measured of the object to be measured is positioned on the optimal focal plane; and the control module is used for controlling the driving part to drive the objective table to move in the direction perpendicular to the plane of the objective table so as to enable the relative distance between the objective table and the imaging objective lens to reach the optimal relative distance. The device is used for improving the detection efficiency on the basis of guaranteeing the optical detection accuracy.
Description
Technical Field
The present invention relates to the field of optical detection technologies, and in particular, to an optical detection device and method.
Background
In recent years, with the deep and popular industrial automation and intellectualization, the use of automatic optical inspection equipment (Auto Optical Inspection, AOI) to replace the traditional manual visual inspection has become a trend in technology development. AOI equipment is widely used in the fields of automobiles, medicines, traffic, semiconductors and the like by virtue of the rapid and accurate defect identification positioning capability.
Currently, existing AOI equipment typically includes optical imaging modules, stages, material handling systems, and the like. Wherein the optical imaging module comprises an illumination unit, an imaging objective, a detector, and the like. In the conventional AOI equipment detection process, the surface to be detected needs to be adjusted to an optimal focal plane so as to obtain a clear picture, thereby being convenient for identifying the defects of the surface to be detected. Generally, in the prior art, an optical system is adopted to scan and photograph an object to be measured in the direction of a vertical objective table, but the scanning process occupies a certain period of time, and the detection efficiency on a production line is affected.
Based on the background, how to improve and optimize the detection efficiency on the basis of ensuring the optical detection accuracy becomes a technical problem currently faced.
Disclosure of Invention
The embodiment of the invention provides an optical detection device and an optical detection method, which are used for improving the detection efficiency on the basis of ensuring the optical detection accuracy.
In a first aspect, the present invention provides an optical detection device, including a stage for carrying an object to be detected, an illumination module for emitting a detection beam to the object to be detected, and a focusing module for respectively injecting the detection beam into the object to be detected and a reference focal plane through optical components by splitting, and converging the detection beam to a spectrum recorder through the optical components; the spectrum recorder is used for recording phase information and spectrum wavelength of the interference light beam after the detection light beam is reflected by the object to be detected and the reference focal plane respectively. The optical detection device also comprises a data processing module which is used for acquiring the phase information and the spectrum wavelength of the interference light beam, calculating according to the phase information and the spectrum wavelength of the interference light beam, and setting the optimal relative distance between the objective table and the imaging objective lens when the surface to be detected of the object to be detected is positioned on the optimal focal plane. And the control module is used for controlling the driving part to drive the objective table to move in the direction perpendicular to the plane of the objective table so that the relative distance between the objective table and the imaging objective lens reaches the optimal relative distance.
The optical detection device provided by the invention has the beneficial effects that: according to the method, the data processing module calculates the optimal relative distance between the objective table and the imaging objective lens when the surface to be measured of the object to be measured is placed on the optimal focal plane by utilizing the principle of white light interference ranging through the phase information and the spectrum wavelength of the interference light beam, and can adjust the objective table once based on the optimal relative distance, so that the focusing process is completed, multiple scanning and image shooting of the object to be measured can be avoided, focusing time is saved, and detection efficiency is improved on the basis of guaranteeing optical detection accuracy.
Optionally, the optical detection device further includes an imaging module, configured to collect an imaging beam of the detection beam reflected by the object to be detected when the surface to be detected of the object to be detected is placed on an optimal focal plane, and image the object to be detected to form image information. The data processing module is further used for acquiring the image information from the imaging module and carrying out optical detection on the image information.
Optionally, the data processing module is further configured to obtain a light intensity of the interference light beam, and determine a light intensity adjustment amount of the detection light path module according to the light intensity of the interference light beam; the detection light path module is connected with the data processing module and is also used for adjusting the light intensity of the detection light beam according to the light intensity adjustment quantity.
Optionally, the illumination module comprises a focusing light source, a first mechanical switch, a first light splitting plate and an imaging light source; the focusing light source is used for emitting a first detection light beam, the imaging light source is used for emitting a second detection light beam, and the first mechanical switch is used for controlling the on or off of a focusing light path corresponding to the first detection light beam;
the focusing module comprises a surface to be measured optical path, a reference surface optical path and a focal surface measuring optical path; the surface light path to be measured comprises a first imaging objective lens and a second light splitting flat plate which are adjacent to the object to be measured; the reference plane light path comprises a second mechanical switch, a second imaging objective lens and a reference focal plane; the focal plane measuring light path comprises a third light splitting flat plate, a lens and a spectrum recorder;
when a first mechanical switch is turned on, the first detection light beam and the second detection light beam are incident to the object to be detected through the first light splitting flat plate, the second light splitting flat plate and the first imaging objective lens, and are reflected by the surface of the object to be detected to form a first reflected light beam; and when the second mechanical switch is turned on, the first detection light beam and the second detection light beam are incident to the reference focal plane through the first light splitting flat plate, the second light splitting flat plate and the second imaging objective lens, a second reflection light beam is formed through the reflection of the surface of the reference focal plane, the first reflection light beam and the second reflection light beam form the interference light beam, and the interference light beam is incident to the spectrum recorder through the lens.
Optionally, the illumination module includes a focusing light source, a first polarizer, a first light splitting plate, an imaging light source, and a second polarizer. The focusing module comprises a surface to be measured optical path, a reference surface optical path and a focal surface measuring optical path; the surface light path to be measured comprises a first imaging objective lens and a second light splitting flat plate which are adjacent to the object to be measured; the reference plane light path comprises a second mechanical switch, a second imaging objective lens and a reference focal plane; the focal plane measuring light path comprises a third light splitting flat plate, an analyzer, a lens and a spectrum recorder; the polarization direction of the analyzer is the same as the polarization direction of the first polarizer, but orthogonal to the polarization direction of the second polarizer.
The first detection light beam and the second detection light beam are incident to the object to be detected through a first light splitting flat plate, the second light splitting flat plate and the first imaging objective lens, and are reflected by the surface of the object to be detected to form a first reflected light beam; and the first detection light beam is incident to a reference focal plane through the first light splitting plate, the second light splitting plate, the analyzer and the second imaging objective lens, a second reflection light beam is formed by reflection on the surface of the reference focal plane, the first reflection light beam and the second reflection light beam form the interference light beam, and the interference light beam is incident to the spectrum recording module through a lens.
Optionally, the focusing light source is a broad spectrum light source.
Optionally, the broad spectrum light source is a white light source.
In a second aspect, the present invention also provides an optical detection method, which may be applied to the optical detection device according to any embodiment of the first aspect, and the method includes:
controlling the lighting module to emit detection light beams to an object to be detected, wherein the object to be detected is arranged on the objective table;
the focusing control module is used for respectively injecting the detection light beams into an object to be detected and a reference focal plane through light splitting by the optical component and converging the detection light beams to the spectrum recorder through the optical component; the spectrum recorder is used for recording phase information and spectrum wavelength of an interference light beam formed after the detection light beam is respectively reflected by the object to be detected and the reference focal plane;
acquiring phase information and spectrum wavelength of the interference light beam, calculating according to the phase information and spectrum wavelength of the interference light beam, and enabling the objective table to be perpendicular to the optimal relative distance between the objective table and the imaging objective lens when the surface to be measured of the object to be measured is placed on the optimal focal plane; and the control module is used for controlling the driving part to drive the objective table to move in the direction perpendicular to the plane of the objective table so that the relative distance between the objective table and the imaging objective lens reaches the optimal relative distance.
Optionally, the method further comprises: when the surface to be measured of the object to be measured is placed on the optimal focal plane, the imaging module is controlled to collect imaging light beams of the detection light beams reflected by the object to be measured, and the object to be measured is imaged to form image information; and controlling the data processing module to acquire the image information from the imaging module, and performing overlay measurement on the image information.
Compared with the prior art, the optical detection device and the optical detection method provided by the embodiment of the invention have the advantages that on one hand, the spectrum recorder calculates the optimal relative distance between the objective table and the imaging objective lens when the object to be detected is positioned on the optimal focal plane by utilizing the principle of white light interference ranging, so that multiple scanning images are avoided, the scanning time is saved, and the yield is improved; on the other hand, the light source of the focusing system and the light source of the imaging system are separated, and the two light sources are respectively provided for the focusing system and the imaging system by utilizing a special light path design and are not mutually interfered, so that the spectrometer ranging technology can be better utilized on the premise of ensuring the yield.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the description of the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of an optical detection device according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of another optical detection device according to an embodiment of the present invention;
fig. 3 is a schematic flow chart of an optical detection method according to an embodiment of the present invention.
Reference numerals
An illumination module 101, a focusing module 102, an imaging module 103, a data processing module 104, a control module 105, and a stage 106;
focusing light source 1-1, imaging light source 1-2;
a first light-splitting plate 2-1, a second light-splitting plate 2-2 and a third light-splitting plate 8;
a first mechanical switch 14, a second mechanical switch 5;
an object 4 to be measured, a first imaging objective 3, a second imaging objective 6, a reference focal plane 7;
a lens 9 and a spectrum recorder 10;
an imaging objective lens 11 and a camera 12;
a first polarizer 3-1, a second polarizer 3-2, and an analyzer 3-3.
Detailed Description
In order to make the contents of the present invention more clear and understandable, the contents of the present invention will be further described with reference to the accompanying drawings. Of course, the invention is not limited to this particular embodiment, and common alternatives known to those skilled in the art are also encompassed within the scope of the invention.
In the following detailed description of the embodiments of the present invention, the structures of the present invention are not drawn to a general scale, and the structures in the drawings are partially enlarged, deformed, and simplified, so that the present invention should not be construed as being limited thereto.
Fig. 1 is a schematic structural diagram of an optical detection device according to an embodiment of the present invention. As shown in fig. 1, the optical detection device includes: an illumination module 101, a focusing module 102, an imaging module 103, a data processing module 104, a control module 105, and a stage 106. Wherein:
a stage 106 for carrying an object 4 to be measured. The object 4 to be measured may be a wafer or other semiconductor device.
An illumination system 101 for emitting a detection beam towards said object 4 to be measured. As shown in fig. 1, the illumination system 01 includes a focusing light source 1-1, a first mechanical switch 14, an imaging light source 1-2, and a first spectroscopic plate 2-1. The focusing light source 1-1 is used for emitting a first detection light beam, and the imaging light source 1-2 is used for emitting a second detection light beam. The focused light source may be a broad spectrum light source. In one possible embodiment, the focusing light source is a white light source so as to measure distance by using a spectrometer, and the two light sources are designed to be respectively provided to the focusing system and the imaging system by using a special light path design without interference. When the first mechanical switch 14 is turned on, the first detection beam emitted from the focusing light source 1-1 is emitted into the object 4 to be measured and the reference focal plane 7 through the first mechanical switch 14, the first light splitting flat plate 2-1 and the second light splitting flat plate 2-2. When the first mechanical switch 14 is turned off, the first detection beam emitted from the focusing light source 1-1 does not enter the object 4 to be measured and the reference focal plane 7.
The focusing module 102 includes a surface-to-be-measured optical path, a reference surface optical path, and a focal plane measurement optical path. The surface light path to be measured comprises a first imaging objective lens 3 and a second light splitting flat plate 2-2 which are adjacent to the object to be measured 4; the reference plane light path comprises a second mechanical switch 5, a second imaging objective 6 and a reference focal plane 7, the reference plane 7 being the best focal plane of the known objective. The focal plane measuring light path comprises a third light splitting flat plate 8, a lens 9 and a spectrum recorder 10. When the second mechanical switch 5 is turned on, the first detection light beam and the second detection light beam are incident to the reference focal plane 7 through the first beam splitting plane 2-1, the second beam splitting plane 2-2 and the second imaging objective lens 6, a second reflected light beam is formed by the reflection of the surface of the reference focal plane 7, the first reflected light beam and the second reflected light beam form the interference light beam, and the interference light beam is emitted into the spectrum recorder 10 through the lens 9.
In the focal plane measurement stage, a data processing module 104, configured to acquire phase information and spectral wavelength of the interference beam, and calculate, according to the phase information and spectral wavelength of the interference beam, an optimal relative distance between the objective table 106 and the imaging objective 12 when the surface to be measured of the object 4 to be measured is placed on an optimal focal plane; and a control module 104 for controlling the driving part to drive the objective table 7 to move in the direction perpendicular to the plane of the objective table, so that the relative distance between the objective table and the imaging objective lens reaches the optimal relative distance.
It should be noted that, the best focal plane refers to the focal plane with the best imaging effect, and the best relative distance refers to the distance between the objective table 106 and the imaging objective 12 when the surface to be measured is placed on the best focal plane. Therefore, the device calculates the optimal relative distance between the objective table and the imaging objective lens when the object to be measured is positioned at the optimal focal plane by using the principle of white light interference ranging by using the spectrum recorder, so that multiple scanning images are avoided, the scanning time is saved, and the yield is improved.
The device further comprises an imaging module 103, configured to collect an imaging beam formed by the detection beam after being reflected by the object 7 to be detected when the surface to be detected of the object 7 to be detected is placed on an optimal focal plane, and image the object 7 to be detected to form image information. The data processing module 104 is further configured to acquire the image information from the imaging module 12, and perform overlay measurement on the image information.
Referring to fig. 1, in the overlay measurement stage, the imaging module 103 includes a third spectroscopic plate 8, an imaging objective 11, and a camera 12; when the surface to be measured of the object to be measured 4 is placed on the optimal focal plane, the second detection beam is incident to the object to be measured 4 through the first light splitting plane 2-1, the second light splitting plane 2-2 and the first imaging objective lens 3, and is reflected by the surface of the object to be measured 4 to form a third reflection beam, and the third reflection beam sequentially passes through the third light splitting plane 8, the imaging objective lens 11 and the camera 12 to form an imaging beam. The camera 12 is configured to collect the imaging beam and image the object 4 to be measured. The data processing module 104 obtains the image information from the imaging module 12 and performs overlay measurement or optical detection of the image information.
In another embodiment of the present invention, considering that the mechanical switch has a problem of time consuming on-off during the optical detection process, the present embodiment further provides another optical detection device, as shown in fig. 2, where an illumination module in the optical detection device includes a focusing light source 1-1, a first polarizer 3-1, a first light splitting plane 2-1, an imaging light source 1-2, and a second polarizer 3-2. The focusing module comprises a surface to be measured optical path, a reference surface optical path and a focal surface measuring optical path; the surface light path to be measured comprises a first imaging objective lens 3 and a second light splitting flat plate 2-2 which are adjacent to the object to be measured 4; the reference plane optical path comprises an analyzer 3-3, a second imaging objective 6 and a reference focal plane 7; the focal plane measuring light path comprises a third light splitting flat plate 8, a lens 9 and a spectrum recorder 10. The polarization direction of the analyzer 3-3 is the same as the polarization direction of the first polarizer 3-1, but orthogonal to the polarization direction of the second polarizer 3-2.
In the focal plane measurement process, a first detection emitted by the focusing light source 1-1 passes through the light splitting plates 2-1 and 2-2, one beam enters an imaging light path to acquire focal plane information of the object 4 to be measured, and the other beam enters a reference plane light path to acquire information of the reference focal plane 7. The reflected light beams of the object 4 to be measured and the reference focal plane 7 are converged into a beam through the light splitting flat plate 2-2 and generate white light interference, the beam enters the spectrum recorder 10 through the light splitting flat plate 8, the spectrum recorder 10 records an interference pattern and transmits data signals to the data processing module 13, the data processing module 13 analyzes phase information of two arms in spectrum interference fringes, and the absolute distance detection is carried out through phase extraction and expansion, so that the relative distance between the object plane of the object 4 to be measured and the reference focal plane can be obtained, focusing can be achieved, in the embodiment, the accuracy can be achieved within 10nm, and the whole focal plane measuring process does not need to carry out multiple scanning.
In the imaging process, the second detection light beam emitted by the imaging light source 1-2 can pass through the light splitting flat plates 2-1 and 2-2, one beam enters an imaging light path to acquire object plane information of the object 4 to be detected, and the other beam enters a reference light path to be intercepted by the analyzer 5. The reflected light of the object 4 to be measured is transmitted through the spectroscopic plate 8 and finally imaged on the camera 12. Due to the special arrangement of the polarization, neither the reflected light of the reference focal plane 7 nor the broad spectrum white light emitted by the focusing light source 1-1 enters the camera 12 and thus does not have an influence on the imaging.
Based on the optical detection device, in one possible embodiment, the data processing module 104 is further configured to obtain a light intensity of the interference light beam, and determine a light intensity adjustment amount of the detection light path module according to the light intensity of the interference light beam; the lighting module 101 is connected to the data processing module 104, and the lighting module 101 is further configured to adjust the light intensity of the detection light beam according to the light intensity adjustment amount.
Fig. 3 is a flow chart of an optical detection method according to an embodiment of the present invention. As shown in fig. 3, the optical detection method may be performed by a controller, the method comprising the steps of:
s301, controlling the illumination module to emit detection light beams to an object to be detected, wherein the object to be detected is arranged on the object stage.
S302, controlling a focusing module to respectively irradiate the detection light beams into an object to be detected and a reference focal plane through light splitting by an optical assembly, and converging the detection light beams to a spectrum recorder through the optical assembly.
The spectrum recorder is used for recording phase information and spectrum wavelength of an interference light beam formed after the detection light beam is reflected by the object to be detected and the reference focal plane respectively.
S303, controlling a data processing module to acquire the phase information and the spectrum wavelength of the interference light beam, and calculating the optimal relative distance between the objective table and the imaging objective lens when the surface to be measured of the object to be measured is placed on the optimal focal plane according to the phase information and the spectrum wavelength of the interference light beam.
S304, controlling the driving part to drive the objective table to move in the direction perpendicular to the plane of the objective table, so that the relative distance between the objective table and the imaging objective lens reaches the optimal relative distance.
The method further comprises the steps of: when the surface to be measured of the object to be measured is placed on the optimal focal plane, the imaging module is controlled to collect imaging light beams formed by the detection light beams after being reflected by the object to be measured, and imaging is carried out on the object to be measured to form image information; and controlling the data processing module to acquire the image information from the imaging module, and performing overlay measurement on the image information. In addition, when the optical detection device does not include a mechanical switch, the controller does not need to control the mechanical switch.
In summary, compared with the prior art, the optical detection device and the method provided by the embodiment of the invention have the advantages that on one hand, the spectrum recorder calculates the optimal relative distance between the objective table and the imaging objective lens when the object to be detected is positioned on the optimal focal plane by utilizing the principle of white light interference ranging, so that multiple image scanning is avoided, the scanning time is saved, and the yield is improved; on the other hand, the light source of the focusing system and the light source of the imaging system are separated, and the two light sources are respectively provided for the focusing system and the imaging system by utilizing a special light path design and are not mutually interfered, so that the spectrometer ranging technology can be better utilized on the premise of ensuring the yield.
The foregoing description is only of the preferred embodiments of the present invention, and the embodiments are not intended to limit the scope of the invention, so that all changes made in the equivalent structures of the present invention described in the specification and the drawings are included in the scope of the invention. The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention.
Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (10)
1. An optical inspection device, comprising:
the objective table is used for bearing an object to be measured;
the illumination module is used for emitting detection light beams to the object to be detected;
the focusing module is used for respectively injecting the detection light beams into the object to be detected and the reference focal plane through light splitting by the optical assembly and converging the detection light beams to the spectrum recorder through the optical assembly; the spectrum recorder is used for recording phase information and spectrum wavelength of an interference light beam formed after the detection light beam is respectively reflected by the object to be detected and the reference focal plane;
the data processing module is used for acquiring the phase information and the spectrum wavelength of the interference light beam, calculating according to the phase information and the spectrum wavelength of the interference light beam, and setting the optimal relative distance between the objective table and the imaging objective lens when the surface to be measured of the object to be measured is positioned on the optimal focal plane;
and the control module is used for controlling the driving part to drive the objective table to move in the direction perpendicular to the plane of the objective table so that the relative distance between the objective table and the imaging objective lens reaches the optimal relative distance.
2. The optical detection device of claim 1, wherein the device further comprises:
the imaging module is used for collecting imaging light beams of the detection light beams reflected by the object to be detected when the surface to be detected of the object to be detected is placed on an optimal focal plane, and imaging the object to be detected to form image information;
the data processing module is further used for acquiring the image information from the imaging module and performing overlay measurement on the image information.
3. The optical detection device according to claim 1, wherein the data processing module is further configured to obtain a light intensity of the interference light beam, and determine a light intensity adjustment amount of the detection light path module according to the light intensity of the interference light beam;
the illumination module is connected with the data processing module and is also used for adjusting the light intensity of the detection light beam according to the light intensity adjustment quantity.
4. The optical detection device of claim 1, wherein the illumination module comprises a focusing light source, a first mechanical switch, a first light splitting plate, and an imaging light source; the focusing light source is used for emitting a first detection light beam, the imaging light source is used for emitting a second detection light beam, and the first mechanical switch is used for controlling the on or off of a focusing light path corresponding to the first detection light beam;
the focusing module comprises a surface to be measured optical path, a reference surface optical path and a focal surface measuring optical path; the surface light path to be measured comprises a first imaging objective lens and a second light splitting flat plate which are adjacent to the object to be measured; the reference plane light path comprises a second mechanical switch, a second imaging objective lens and a reference focal plane; the focal plane measuring light path comprises a third light splitting flat plate, a lens and a spectrum recorder;
when a first mechanical switch is turned on, the first detection light beam and the second detection light beam are incident to the object to be detected through the first light splitting flat plate, the second light splitting flat plate and the first imaging objective lens, and are reflected by the surface of the object to be detected to form a first reflected light beam; and when the second mechanical switch is turned on, the first detection light beam and the second detection light beam are incident to the reference focal plane through the first light splitting flat plate, the second light splitting flat plate and the second imaging objective lens, a second reflection light beam is formed through the reflection of the surface of the reference focal plane, the first reflection light beam and the second reflection light beam form the interference light beam, and the interference light beam is incident to the spectrum recorder through the lens.
5. The optical detection device of claim 4, wherein the imaging module comprises a third light splitting plate, an imaging objective, and a camera; when the surface to be measured of the object to be measured is placed on an optimal focal plane, the second detection light beam is incident to the object to be measured through the first light splitting plate, the second light splitting plate and the first imaging objective lens, a third reflection light beam is formed by reflection on the surface of the object to be measured, and the third reflection light beam sequentially passes through the third light splitting plate, the imaging objective lens and the camera to form an imaging light beam;
the camera is used for collecting the imaging light beam to image the object to be detected.
6. The optical detection device of claim 4, wherein the control module is electrically connected to the first mechanical switch and the second mechanical switch, respectively, and is further configured to control the first mechanical switch and the second mechanical switch to be simultaneously turned on or simultaneously turned off.
7. The optical detection device of claim 1, wherein the illumination module comprises a focusing light source, a first polarizer, a first light splitting plate, an imaging light source, and a second polarizer;
the focusing module comprises a surface to be measured optical path, a reference surface optical path and a focal surface measuring optical path; the surface light path to be measured comprises a first imaging objective lens and a second light splitting flat plate which are adjacent to the object to be measured; the reference plane optical path comprises an analyzer, a second imaging objective lens and a reference focal plane; the focal plane measuring light path comprises a third light splitting flat plate, a lens and a spectrum recorder; the polarization direction of the analyzer is the same as the polarization direction of the first polarizer, but orthogonal to the polarization direction of the second polarizer.
8. The optical detection device of claim 4, wherein the focused light source is a broad spectrum light source.
9. An optical detection method using the optical detection device according to any one of claims 1 to 8, comprising:
controlling the lighting module to emit detection light beams to an object to be detected, wherein the object to be detected is arranged on the objective table;
the focusing control module is used for respectively injecting the detection light beams into an object to be detected and a reference focal plane through light splitting by the optical component and converging the detection light beams to the spectrum recorder through the optical component; the spectrum recorder is used for recording phase information and spectrum wavelength of an interference light beam formed after the detection light beam is respectively reflected by the object to be detected and the reference focal plane;
the control data processing module acquires phase information and spectrum wavelength of the interference light beam, calculates according to the phase information and spectrum wavelength of the interference light beam, and when a surface to be measured of the object to be measured is placed on an optimal focal plane, the optimal relative distance between the objective table and the imaging objective lens is obtained;
the control driving part drives the objective table to move in the direction perpendicular to the plane of the objective table, so that the relative distance between the objective table and the imaging objective lens reaches the optimal relative distance.
10. The optical detection method of claim 9, wherein the method further comprises:
when the surface to be measured of the object to be measured is placed on the optimal focal plane, the imaging module is controlled to collect imaging light beams of the detection light beams reflected by the object to be measured, and the object to be measured is imaged to form image information;
and controlling the data processing module to acquire the image information from the imaging module, and performing overlay measurement on the image information.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210298714.XA CN116818762A (en) | 2022-03-22 | 2022-03-22 | Optical detection device and method |
| PCT/CN2022/084025 WO2023178720A1 (en) | 2022-03-22 | 2022-03-30 | Optical inspection device and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210298714.XA CN116818762A (en) | 2022-03-22 | 2022-03-22 | Optical detection device and method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116818762A true CN116818762A (en) | 2023-09-29 |
Family
ID=88099668
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210298714.XA Pending CN116818762A (en) | 2022-03-22 | 2022-03-22 | Optical detection device and method |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN116818762A (en) |
| WO (1) | WO2023178720A1 (en) |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4844617A (en) * | 1988-01-20 | 1989-07-04 | Tencor Instruments | Confocal measuring microscope with automatic focusing |
| US6552806B1 (en) * | 2000-02-03 | 2003-04-22 | Veeco Instruments Inc. | Automated minimization of optical path difference and reference mirror focus in white-light interference microscope objective |
| DE102012009836A1 (en) * | 2012-05-16 | 2013-11-21 | Carl Zeiss Microscopy Gmbh | Light microscope and method for image acquisition with a light microscope |
| US9395173B2 (en) * | 2014-10-22 | 2016-07-19 | National Applied Research Laboratories | Multi-functioned optical measurement device and method for optically measuring a plurality of parameters |
| CN113739694A (en) * | 2016-09-15 | 2021-12-03 | 科磊股份有限公司 | System and method for optimizing focus of imaging-based coverage metrics |
| CN109975820B (en) * | 2019-02-25 | 2022-03-22 | 南京理工大学 | Linnik type interference microscope-based synchronous polarization phase shift focus detection system |
| CN113029366B (en) * | 2021-03-11 | 2022-09-23 | 深圳中科飞测科技股份有限公司 | Zero phase difference position finding method, scanning system and storage medium |
-
2022
- 2022-03-22 CN CN202210298714.XA patent/CN116818762A/en active Pending
- 2022-03-30 WO PCT/CN2022/084025 patent/WO2023178720A1/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| WO2023178720A1 (en) | 2023-09-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US9606071B2 (en) | Defect inspection method and device using same | |
| CN110411348A (en) | Automatic detection and positioning device and method for laser spot focus | |
| KR20160150018A (en) | Inspection apparatus and inspection method | |
| CN106772923B (en) | Automatic focusing method and system based on inclined slit | |
| JP2016166789A (en) | Inspection device and inspection method | |
| KR20210034001A (en) | Detection device and detection method | |
| KR101917131B1 (en) | Optical inspecting apparatus | |
| US20080260204A1 (en) | Apparatus For and Method of Measuring Image | |
| JP4671695B2 (en) | Method for optimizing inspection speed without sacrificing signal-to-noise ratio, resolution, or focus quality in low light and fluorescent light applications | |
| CN114114860B (en) | Focus detection device and method | |
| JP2007205828A (en) | Optical image acquisition device, pattern inspection device, optical image acquisition method, and pattern inspection method | |
| TWM618396U (en) | Scanning fluorescent detection apparatus | |
| JP2016015371A (en) | Thickness measurement apparatus, thickness measurement method and exposure apparatus | |
| CN116818762A (en) | Optical detection device and method | |
| KR102160025B1 (en) | Charged particle beam device and optical inspection device | |
| JP2010170602A (en) | Lens decentration measuring method and lens assembly method | |
| CN115436376A (en) | Detection system and detection method | |
| JP2011069676A (en) | Inspection system, and inspection method | |
| JP2008046361A (en) | Optical system and its control method | |
| CN217505694U (en) | Detection device | |
| CN214953101U (en) | Detection system | |
| JPH07208917A (en) | Automatic focusing method and device | |
| CN109211117A (en) | Wire width measuring system and wire width measuring device | |
| CN114726995B (en) | Detection method and detection system | |
| CN219475904U (en) | Imaging device and detection system thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |