CN109975820B - Linnik type interference microscope-based synchronous polarization phase shift focus detection system - Google Patents
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- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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Abstract
The invention discloses a Linnik type interference microscope-based synchronous polarization phase shift focus detection system, which comprises a white light source, a collimating mirror, a first 1/4 wave plate, a laser source, a Kohler illumination system, a polarizing prism, a transmitting reflector, a cubic beam splitter prism, two micro-objective lenses, a reference plane, a second 1/4 wave plate, an analyzer, a focusing lens, a beam splitter prism, an x-direction linear array CCD and a y-direction linear array CCD. The white light source generates white light, plane polarized light is formed through means of collimation, polarization and the like, the plane polarized light is irradiated to a reference plane and a measured sample through two microscope objectives after being split by the cubic beam splitter prism, return light is irradiated to the linear array CCD in the x direction and the y direction after being split by the beam splitter prism to generate interference fringe images, and focus detection is achieved according to defocusing aberration changes of the images. The laser is uniformly emitted after passing through the Kohler lighting system, reflected by the polarizing prism and the like, and passes through the cubic beam splitter and the like to directly write a sample. The method has the advantages of fast data processing, real-time coke fixation and acquisition of the position and the shape information of the sample to be measured.
Description
Technical Field
The invention belongs to the field of optical detection, and particularly designs a synchronous polarization phase shift focus detection system based on a Linnik type interference microscope.
Background
Autofocus is divided into two categories in principle: one is range finding autofocus based on distance measurement between the lens and the object being photographed; another type is focus detection autofocus based on imaging a sharp image on a focusing screen. There are several different approaches to autofocus technology implementation.
Murakami et al, in the optical triangulation method proposed in the teaching of a laser calibration sensor, based on the fact that when the semiconductor laser moves up and down along the side surface, the position of the imaging spot on the position sensitive detector moves along with the semiconductor laser, and the relationship between the displacement of the side surface and the displacement of the spot can be calculated by using a trigonometric relational expression. The laser triangulation method has the advantages of non-contact, difficult surface damage and the like, but the precision of the laser triangulation method is subject to the measurement error of a measurement system, so that the laser triangulation method is difficult to meet the industrial development requirement.
Li in "auto focus system for micro", proposes to use an auxiliary beam deviating from the optical axis of a laser focusing lens to detect a focusing error, which is referred to as an eccentric beam method for short, and performs focusing by a relationship between a difference in light intensity received by a detector and a displacement.
Higurashi et al, in Nanometer-displacement detection of optically translated particles based on critical angle method for small force detection, propose to use the abrupt change characteristic near the critical angle of total reflection to achieve focusing, called the critical angle method for short, by using the phenomenon that when a sample to be measured is focused, the intensities of light reflected to two detectors are equal, and when the sample is defocused, the intensities of light are not equal to achieve focusing.
Kocher, in "Automated focus test for focus sensing", proposes to insert a knife edge into the return light path from the surface reflection light path to be measured, locate at the focus of the focusing lens of the return light path, and use the knife edge to divide the light beam into two identical left and right parts, which are respectively introduced into two detectors to form a differential signal, thus improving the sensitivity of the system.
Fan et al, KC.Fan et al, in the Development of a low-cost automatic focusing probe for profile measurement, introduced a focusing method widely used in optical storage devices, called the astigmatism method for short, which utilizes the difference of focal lengths of cylindrical lenses in the meridian direction and the sagittal direction, the shape of a focusing spot projected by a light beam onto a four-quadrant detector changes with the displacement of a target object, and a focusing error signal is obtained through the operation of four signal output ends on the four-quadrant detector, thereby driving a voice coil motor to adjust a measured sample to a focal plane.
In the above methods, focusing is mostly performed by a phenomenon and a differential value on a detector when focusing is performed in an in-focus state and an out-of-focus state, but in few methods, a focal plane is given, so that a specific out-of-focus amount is calculated.
Disclosure of Invention
The invention aims to provide a synchronous polarization phase shift focus detection system based on a Linnik type interference microscope, which can rapidly process interference images, realize real-time focus detection and acquire the position and shape information of a detected sample.
The technical solution of the purpose of the invention is as follows: a synchronous polarization phase shift focus detection system based on a Linnik type interference microscope comprises a white light source, a collimating mirror, a first 1/4 wave plate, a laser source, a Kohler lighting system, a polarizing prism, a transmitting reflector, a cubic beam splitter prism, a first microscope objective, a reference plane, a second microscope objective, a second 1/4 wave plate, an analyzer, a focusing lens, a beam splitter prism, an x-direction linear array CCD and a y-direction linear array CCD; the common optical axis is sequentially provided with a white light source, a collimating mirror, a first 1/4 wave plate, a polarizing prism and a transflector, and the optical axis of the components is a first optical axis; the common optical axis is sequentially provided with a laser light source, a Kohler lighting system and a polarizing prism, and the optical axis of the components is a second optical axis; the coaxial axis is sequentially provided with a sample to be measured, a second microscope objective, a cubic beam splitter prism, a transflector, a second 1/4 wave plate, an analyzer, a focusing lens, a beam splitter prism and an x-direction linear array CCD, and the optical axis of the components is a third optical axis; the common optical axis is sequentially provided with a cubic beam splitter prism, a first microscope objective and a reference plane, and the optical axis of the components is a fourth optical axis; a beam splitter prism and a y-direction linear array CCD are sequentially arranged on the common optical axis, and the optical axis where the components are located is a fifth optical axis; the first optical axis, the fourth optical axis and the fifth optical axis are parallel to each other, the second optical axis and the third optical axis are parallel to each other, the first optical axis, the fourth optical axis and the fifth optical axis are perpendicular to the second optical axis and the third optical axis respectively, the first microscope objective and the reference plane are located on a reflection light path of the cubic beam splitter prism, the second microscope objective and the sample to be measured are located on a transmission light path of the cubic beam splitter prism, and the first microscope objective and the second microscope objective are completely the same.
The white light source generates white light, the white light is collimated by a collimating mirror and enters a first 1/4 wave plate placed at 45 degrees to form circularly polarized light, two beams of plane polarized light with mutually vertical vibration directions are formed by a polarizing prism, the plane polarized light is reflected by a transmitting reflector to a cubic beam splitter prism, one beam is reflected by the cubic beam splitter prism to a first microscope objective lens to be transmitted and irradiated to a reference plane, the other beam is projected by the cubic beam splitter prism to a second microscope objective lens to be transmitted and irradiated to a sample to be measured, the two returned beams of light are transmitted to the transmitting reflector through the cubic beam splitter prism, transmitted by the transmitting reflector and subjected to phase shift through a second 1/4 wave plate, after passing through an analyzer placed at 45 degrees, the polarization directions of the two beams of light are the same, the light intensities are equal, interference occurs, the interference light is focused by a focusing lens and enters the beam splitter prism, the beam of light is transmitted and irradiated to a linear array CCD in the x direction, and the other beam of light is reflected and irradiated to a linear array in the y direction by the beam splitter prism, coupling images on the x-direction linear array CCD and the y-direction linear array CCD to obtain a two-dimensional interference image, representing wave aberration by using a Sauter polynomial, and focusing by observing the change of the defocusing aberration of the image to realize focus detection.
After the focus is detected, the laser light source generates laser, the laser is uniformly emitted after passing through the Kohler illumination system, reflected by the polarizing prism, reflected by the transmitting mirror, transmitted by the cubic beam splitter prism and transmitted by the second microscope objective, and the laser directly writes the tested sample.
The wavelength of the white light source is 550nm, the wavelength of the laser light source is 532nm, and the square beam splitter prism is subjected to film coating treatment, so that the square beam splitter prism only has a semi-transmitting and semi-reflecting function on the white light source, and the laser light source is completely transmitted. The reference plane should be focused with high precision, and phase-shift interferometry (PSI) is used here, so that the reference beam path is focused exactly on the focal plane of the reference object.
Compared with the prior art, the invention has the remarkable advantages that:
(1) compared with other detectors, in order to improve the data processing speed, the invention adopts linear array CCDs in the x and y directions, and two interference patterns are superposed on a computer; the linear array CCD transmits photoelectric conversion signals in real time, has high self-scanning speed and high frequency response, and can realize dynamic measurement, so the data processing speed of the invention is high.
(2) When the interference image is processed, the data processing is fast, the reference light path is focused by the phase shift interference method, and the reference focal plane is given, so that the defocusing amount of the detected sample can be obtained in real time, the focusing can be carried out according to the obtained defocusing amount, the sample is finally positioned on the focal plane, and the real-time focusing is realized.
(3) In the invention, after the CCD acquires the image information of the interference pattern, the Sedan polynomial is used for representing the wave aberration, and the position and the shape information of the detected sample can be obtained by fitting the detected surface through the Sedan polynomial.
Drawings
FIG. 1 is an optical path diagram of a Linnik type interference microscope-based synchronous polarization phase shift focus detection system.
Detailed Description
The present invention is described in further detail below with reference to the attached drawing figures.
With reference to fig. 1, a Linnik type interference microscope-based synchronous polarization phase shift focus detection system includes a white light source 1, a collimating mirror 2, a first 1/4 wave plate 3, a laser light source 4, a kohler illumination system 5, a polarizing prism 6, a transflector 7, a cubic beam splitter prism 8, a first microscope objective 9, a reference plane 10, a second microscope objective 11, a second 1/4 wave plate 13, an analyzer 14, a focusing lens 15, a beam splitter prism 16, an x-direction linear CCD17, and a y-direction CCD linear array 18; the white light source 1, the collimating mirror 2, the first 1/4 wave plate 3, the polarizing prism 6 and the transflector 7 are arranged in sequence on a first optical axis; a laser light source 4, a Kohler lighting system 5 and a polarizing prism 6 are sequentially arranged on a second optical axis; a tested sample 12, a second microscope objective 11, a cubic beam splitter prism 8, a transflector 7, a second 1/4 wave plate 13, an analyzer 14, a focusing lens 15, a beam splitter prism 16 and an x-direction linear array CCD17 are sequentially arranged on a third optical axis; a cubic beam splitter prism 8, a first microscope objective 9 and a reference plane 10 are sequentially arranged on a fourth optical axis; a beam splitter prism 16 and a y-direction linear array CCD18 are sequentially arranged on the fifth optical axis; the first optical axis, the fourth optical axis and the fifth optical axis are parallel to each other, the second optical axis and the third optical axis are parallel to each other, the first optical axis, the fourth optical axis and the fifth optical axis are perpendicular to the second optical axis respectively, the first microscope objective 9 and the reference plane 10 are located on a reflection light path of the cubic beam splitter prism 8, and the second microscope objective 11 and the sample 12 to be measured are located on a transmission light path of the cubic beam splitter prism 8.
The white light source 1 generates white light, the white light is collimated by the collimator lens 2 and enters a first 1/4 wave plate 3 placed at 45 degrees to form circularly polarized light, two planar polarized lights with mutually vertical vibration directions are formed by the polarizing prism 6, the circularly polarized light is reflected to the cubic beam splitter prism 8 by the transflector 7, one beam is reflected to the first microscope objective 9 by the cubic beam splitter prism 8 to be transmitted and irradiated to the reference plane 10, the light carrying the information of the reference plane 10 returns to the cubic beam splitter prism 8, the other beam is transmitted to the second microscope objective 11 by the cubic beam splitter prism 8 to be irradiated to the tested sample 12, the light carrying the information of the tested sample 12 returns to the cubic beam splitter prism 8, the returned two beams are transmitted to the transflector 7 by the cubic beam splitter prism 8 and transmitted to the second 1/4 wave plate 13 to generate phase shift, and the polarization directions of the two beams are the same after passing through the analyzer 14 placed at 45 degrees, interference occurs when the light intensity is equal, the interference light enters the beam splitter prism 16 for splitting after passing through the focusing lens 15, one beam is transmitted through the beam splitter prism 16 and irradiated to the x-direction linear array CCD17, the other beam is reflected through the beam splitter prism 16 and irradiated to the y-direction linear array CCD18, images on the x-direction linear array CCD17 and the y-direction linear array CCD18 are coupled to obtain a two-dimensional interference image, the Seatty polynomial is used for representing wave aberration, and focusing is performed by observing the change of defocusing aberration of the image to realize focus detection;
after the focus detection, the laser light source 4 generates laser light, the laser light is uniformly emitted after passing through the Kohler illumination system 5, is reflected to the transflector 7 through the polarizing prism 6, is reflected into the cubic beam splitter prism 8 through the transflector 7, is transmitted through the second microscope objective 11, and directly writes the laser light on the detected sample 12.
The wavelength of the white light source 1 is 550nm, and the wavelength of the laser light source 4 is 532 nm.
The cubic beam splitter prism 8 is coated to only have the semi-transmitting and semi-reflecting functions on the white light source 1, and the laser light source 4 is completely transmitted.
The reference plane 10 should be focused with high precision, and a phase-shift interferometry (PSI) technique is used here, so that the reference beam path is focused exactly on the focal plane of the reference object.
The first microscope objective 9 and the second microscope objective 11 are identical.
The angle between the transmission reflector 7 and the first optical axis is 45 degrees.
The first 1/4 wave plate 3 forms an included angle of 45 degrees with the first optical axis.
The analyzer 14 and the third optical axis form an included angle of 45 degrees.
Compared with other detectors, the invention adopts linear array CCD in x and y directions to increase data processing speed, and two interference patterns are superposed on a computer; the linear array CCD transmits photoelectric conversion signals in real time, has high self-scanning speed and high frequency response, and can realize dynamic measurement, so the data processing speed is high; when an interference pattern image is processed, the reference light path is fixed in focus through a phase shift interference method, and a reference focal plane is given, so that the defocusing amount of a detected sample can be obtained in real time, and focusing can be performed according to the obtained defocusing amount, so that the sample is finally positioned on the focal plane, and real-time focusing is realized; after the CCD acquires the image information of the interference pattern, the Sedan polynomial is utilized to represent the wave aberration, and the position and the shape information of the detected sample can be obtained by fitting the detected surface through the Sedan polynomial.
Claims (8)
1. A synchronous polarization phase shift focus detection system based on a Linnik type interference microscope is characterized in that: the device comprises a white light source (1), a collimating mirror (2), a first 1/4 wave plate (3), a laser source (4), a Kohler lighting system (5), a polarizing prism (6), a transflector (7), a cubic beam splitter prism (8), a first microscope objective (9), a reference plane (10), a second microscope objective (11), a second 1/4 wave plate (13), an analyzer (14), a focusing lens (15), a beam splitter prism (16), an x-direction linear array CCD (17) and a y-direction linear array CCD (18); a white light source (1), a collimating mirror (2), a first 1/4 wave plate (3), a polarizing prism (6) and a transflector (7) are arranged in sequence on a first optical axis; a laser light source (4), a Kohler lighting system (5) and a polarizing prism (6) are sequentially arranged on the second optical axis; a tested sample (12), a second microscope objective (11), a cubic beam splitter prism (8), a transflector (7), a second 1/4 wave plate (13), an analyzer (14), a focusing lens (15), a beam splitter prism (16) and an x-direction linear array CCD (17) are sequentially arranged on a third optical axis; a cubic beam splitter prism (8), a first microscope objective (9) and a reference plane (10) are sequentially arranged on a fourth optical axis; a beam splitter prism (16) and a y-direction linear array CCD (18) are sequentially arranged on a fifth optical axis; the first optical axis, the fourth optical axis and the fifth optical axis are parallel to each other, the second optical axis and the third optical axis are parallel to each other, the first optical axis, the fourth optical axis and the fifth optical axis are perpendicular to the second optical axis respectively, the first microscope objective (9) and the reference plane (10) are located on a reflection light path of the cubic beam splitter prism (8), and the second microscope objective (11) and the sample to be measured (12) are located on a transmission light path of the cubic beam splitter prism (8);
the white light source (1) generates white light, the white light is collimated by the collimator lens (2) and enters the first 1/4 wave plate (3) to form circularly polarized light, two beams of plane polarized light with mutually vertical vibration directions are formed by the polarizing prism (6), the circularly polarized light is reflected to the cubic beam splitter prism (8) by the transflective lens (7), one beam is reflected to the first microobjective (9) by the cubic beam splitter prism (8) and is transmitted to the reference plane (10), the light carrying the information of the reference plane (10) returns to the cubic beam splitter prism (8), the other beam is transmitted to the second microobjective (11) by the cubic beam splitter prism (8) and is then irradiated to the measured sample (12), the light carrying the information of the measured sample (12) returns to the cubic beam splitter prism (8), the two returned beams of light are transmitted to the transflective lens (7) by the cubic beam splitter prism (8) and are transmitted to the second 1/4 wave plate (13) by the transflective lens (7) to generate phase shift, after passing through an analyzer (14), the two beams of light have the same polarization direction and the same light intensity and interfere with each other, the interference light enters a beam splitter prism (16) for splitting after passing through a focusing lens (15), one beam of light is transmitted through the beam splitter prism (16) and irradiated to an x-direction linear array CCD (17), the other beam of light is reflected through the beam splitter prism (16) and irradiated to a y-direction linear array CCD (18), images on the x-direction linear array CCD (17) and the y-direction linear array CCD (18) are coupled to obtain a two-dimensional interference image, the wave aberration is represented by a Sessian polynomial, and focusing is performed by observing the change of the defocusing aberration of the image to realize focus detection;
after the focus is detected, the laser light source (4) generates laser, the laser is uniformly emitted after passing through the Kohler illumination system (5), is reflected to the transflector (7) through the polarizing prism (6), is reflected into the cubic beam splitter prism (8) through the transflector (7), is transmitted through the second microscope objective (11), and directly writes the laser on the detected sample (12).
2. The Linnik-type interference microscope-based synchronized polarization phase shift confocal system of claim 1, wherein: the central wavelength of the white light source (1) is 550nm, and the central wavelength of the laser light source (4) is 532 nm.
3. The Linnik-type interference microscope-based synchronized polarization phase shift confocal system of claim 1, wherein: the cubic beam splitter prism (8) is subjected to film coating treatment, so that the cubic beam splitter prism only has a semi-transmitting and semi-reflecting function on the white light source (1), and the laser light source (4) is completely transmitted.
4. The Linnik-type interference microscope-based synchronized polarization phase shift confocal system of claim 1, wherein: the reference plane (10) is focused with high precision, here by phase-shift interferometry, whereby the reference beam path is accurately focused onto the focal plane of the reference plane (10).
5. The Linnik-type interference microscope-based synchronized polarization phase shift confocal system of claim 1, wherein: the first microscope objective (9) and the second microscope objective (11) are identical.
6. The Linnik-type interference microscope-based synchronized polarization phase shift confocal system of claim 1, wherein: the transmitting reflector (7) and the first optical axis form an included angle of 45 degrees.
7. The Linnik-type interference microscope-based synchronized polarization phase shift confocal system of claim 1, wherein: the first 1/4 wave plate (3) forms an included angle of 45 degrees with the first optical axis.
8. The Linnik-type interference microscope-based synchronized polarization phase shift confocal system of claim 1, wherein: and the analyzer (14) and the third optical axis form an included angle of 45 degrees.
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