CN115164775B - Large-caliber convex aspheric surface reflecting mirror surface shape detection device and detection method thereof - Google Patents
Large-caliber convex aspheric surface reflecting mirror surface shape detection device and detection method thereof Download PDFInfo
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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Abstract
The invention provides a large-caliber convex aspheric surface reflecting mirror surface shape detection device and a detection method thereof, wherein the detection method comprises the following steps: a laser interferometer and a spherical standard mirror; the laser interferometer is used for emitting plane waves to be incident to the spherical standard mirror and then to be changed into spherical waves, the spherical waves are incident to the to-be-inspected mirror and reflected by the to-be-inspected mirror to form interference fringes with the reference wave surface, and therefore surface shape information of the central sub-aperture of the to-be-inspected mirror is obtained; the detection device also comprises a CGH; the CGH is placed in front of a light outlet of the laser interferometer and used for converting plane waves into wave fronts conforming to the surface shape of the to-be-inspected mirror, and the pose of the to-be-inspected mirror and the CGH are respectively adjusted, so that interference fringes measured by the sub-aperture of the outer ring of the to-be-inspected mirror are zero fringes, surface shape information of the sub-aperture of the outer ring of the to-be-inspected mirror is obtained, all the sub-aperture surface shapes are spliced through a splicing algorithm, and then full-caliber surface shape information of the to-be-inspected mirror is obtained. The invention can effectively reduce the number of sub-apertures and the splicing difficulty, thereby reducing the error generated in the splicing process.
Description
Technical Field
The invention relates to the technical field of optical detection, in particular to a large-caliber convex aspheric surface reflector surface shape detection device and a detection method thereof.
Background
In the optical system, the aspherical optical element has more design freedom, so that more complex design requirements can be satisfied. The introduction of an aspherical element can expand the field angle and increase the resolution, thereby improving the imaging quality. And under the same performance index condition, the use of the aspheric surface can reduce the number of elements, thereby reducing the complexity of the system. Therefore, the aspherical mirror is increasingly applied to the fields of space optics, astronomical optics, military national defense, high-tech civil use and the like. For example, as early as the 80 s of the last century, the use of aspheric elements for optical devices by the united states army has been as many as 23.46 tens of thousands. In the field of space earth observation and astronomical observation, higher requirements are put on the resolution of an optical imaging system, so that the caliber of the optical system is increased, and the corresponding secondary mirror (generally a convex aspheric surface) is correspondingly increased. For example, the secondary mirror of the james-weber space telescope (JWST, james Webb Space Telescope) that has been launched adopts a convex aspherical surface, with a caliber of 738mm. Nowadays, large-caliber convex aspheric mirrors are increasingly applied to various photoelectric systems, the caliber of the large-caliber convex aspheric mirrors is larger, and the surface shape accuracy requirement is higher, so that higher requirements on high-accuracy surface shape detection are also provided.
Common convex aspheric surface shape detection means are as follows: compensation method, aberration-free spot measurement method, sub-aperture splice detection method, etc. The compensation element is independently used for full-caliber surface shape detection, and an aspheric compensation lens which is larger than the caliber of the mirror to be detected and matched with the mirror to be detected is needed to be manufactured; large caliber aspheres with high steep deviations require CGH with high scoring density. The manufacturing difficulty and the cost are high, and the assembly and detection difficulty is high no matter the compensation lens or the CGH; the aberration-free point measuring method utilizes a pair of conjugate aberration-free points of a quadric surface to finish the measurement of a paraboloid, a hyperboloid and an ellipsoid, but is only applicable to the quadric surface, a Hindle ball or an auxiliary plane mirror with larger caliber is often required when the large-caliber aspheric surface is detected, and the center shielding problem exists in the measuring process; for convex aspheric surfaces with small and medium calibers, the sub-aperture splicing method is simple, convenient and high in precision, however, in the process of coping with the surface shape detection of the convex aspheric surfaces with large calibers, the number of sub-apertures is various by using the splicing detection alone, the difficulty of data processing and the time of detection are increased, more importantly, the error transmission is increased, and the precision of the splicing detection is limited.
Disclosure of Invention
In view of the above problems, an object of the present invention is to provide a large-caliber convex aspheric mirror surface shape detection device and a detection method thereof. The method is different from the traditional detection method in that the asphericity of the center of the to-be-detected mirror is smaller, and the method can be directly measured by an interferometer; and the outer ring is large in deflection, and is detected by adopting a CGH compensation method, and finally, the outer ring is spliced into a complete surface shape through a splicing algorithm. In the detection process, the gravity of the vertically placed to-be-detected mirror can cause a non-negligible influence on the shape detection result, and the influence cannot be obtained through direct measurement, so that the influence needs to be removed through calculation.
According to the invention, through the combination of CGH compensation detection and sub-aperture splicing detection, an accurate full-aperture mirror surface shape result is obtained, and the final detection precision is better than 10nm, so that the requirement of high-precision detection of the large-caliber convex aspheric surface is met.
In order to achieve the above purpose, the present invention adopts the following specific technical scheme:
The invention provides a large-caliber convex aspheric surface reflecting mirror surface shape detection device, which comprises: a laser interferometer and a spherical standard mirror;
the laser interferometer is used for emitting plane waves to be incident to the spherical standard mirror and then to be changed into spherical waves, the spherical waves are incident to the to-be-inspected mirror and reflected by the to-be-inspected mirror to form interference fringes with the reference wave surface, and the pose of the laser interferometer and the to-be-inspected mirror is adjusted until the interference fringes of the central sub-aperture are minimum, so that the surface shape information of the central sub-aperture of the to-be-inspected mirror is obtained;
The detection device also comprises a CGH;
the CGH is placed in front of a light outlet of the laser interferometer and used for converting plane waves into wave fronts conforming to the surface shape of the to-be-inspected mirror, and the pose of the to-be-inspected mirror and the CGH are respectively adjusted, so that interference fringes measured by the sub-aperture of the outer ring of the to-be-inspected mirror are zero fringes, surface shape information of the sub-aperture of the outer ring of the to-be-inspected mirror is obtained, all the sub-aperture surface shapes are spliced through a splicing algorithm, and then full-caliber surface shape information of the to-be-inspected mirror is obtained.
Preferably, the CGH is fixed on a CGH substrate, and a CGH adjusting device is mounted at the bottom of the CGH and is used for adjusting the x, y and z axes of the CGH.
Preferably, a laser interferometer adjusting device is arranged at the bottom of the laser interferometer, and the laser interferometer adjusting device is used for adjusting the z-axis direction of the laser interferometer;
preferably, the bottom of the to-be-inspected mirror is provided with a to-be-inspected mirror adjusting device;
when the central sub-aperture of the to-be-inspected mirror is inspected:
the to-be-inspected mirror adjusting device is used for adjusting the x-axis, the y-axis and the inclination angle of the to-be-inspected mirror;
When the outer ring sub-aperture of the to-be-detected mirror is detected:
The device for adjusting the to-be-inspected mirror is used for adjusting the x, y, z axis direction, the rotation direction and the inclination direction of the to-be-inspected mirror.
The invention also provides a detection method of the large-caliber convex aspheric surface reflecting mirror surface shape detection device, which comprises the following steps:
S1, adjusting the pose between a spherical standard mirror and the central sub-aperture of the to-be-inspected mirror, and detecting the central sub-aperture of the to-be-inspected mirror when zero stripes appear;
s2, adjusting the pose between the laser interferometer and the CGH, and detecting the outer ring sub-aperture of the to-be-detected mirror when zero stripes appear;
s3, removing errors caused by gravity influence in the detection results obtained in the step S1 and the step S2;
s4, splicing the full-caliber surface shape data of the to-be-detected mirror through a sub-aperture splicing algorithm.
Preferably, the pretreatment step S0 is included: and selecting a spherical standard mirror according to parameters of the to-be-inspected mirror, planning sub-apertures of the to-be-inspected mirror and designing a CGH.
Preferably, the preprocessing step S0 comprises the following sub-steps:
s01, selecting a spherical standard mirror with parameters which are consistent with F# and R# or more;
wherein,
F#=f/D，R#R/D；
F# is the F number of the spherical standard mirror, R# is the R number of the to-be-inspected mirror, F is the focal length of the spherical standard mirror, D is the caliber of the spherical standard mirror, R is the radius of curvature of the vertex of the to-be-inspected mirror, and D is the caliber of the to-be-inspected mirror;
s02, planning the sub-aperture of the to-be-detected mirror;
The principle of the aperture planning of the mirror to be detected is as follows:
the number of interference fringes of each sub-aperture is smaller than the maximum resolution fringe number of the laser interferometer;
the planned sub-aperture realizes full-caliber surface shape coverage of the to-be-inspected mirror;
the area of the overlapping area between every two adjacent sub-apertures is more than or equal to 30 percent;
the size of the sub-aperture is R/F#;
s03, designing a CGH according to parameters of the to-be-inspected mirror;
Comprising three regions:
the main area is a detection area and is used for detecting the surface shape of the to-be-detected mirror;
the alignment area is used for alignment between the laser interferometer and the CGH;
the reference area is used for alignment between the CGH and the scope.
Preferably, in step S2: and (3) moving the position of the to-be-inspected mirror to enable the CGH to be aligned with the sub-aperture of the first outer ring sub-aperture which is measured and is 180 degrees apart, and repeating the measurement operation to obtain the surface shape data of the other group of outer ring sub-apertures.
Preferably, in step S3: the error caused by the influence of gravity is half of the difference between the two sets of results of 0 DEG and 180 DEG under the same outer ring sub-aperture, which can be removed in the detection result.
Preferably, the method further comprises a post-processing step S5: carrying out precision analysis on the full-caliber surface shape data by a self-checking method;
The self-checking method comprises the following steps: any one sub-aperture is additionally measured by the to-be-inspected mirror, and point-to-point subtraction is carried out on the full-aperture surface shape data and the self-inspected sub-aperture surface shape data according to the pixel corresponding relation, so that corresponding residual distribution is obtained.
Compared with the prior art, the invention has the following advantages:
1. Compared with the traditional direct sub-aperture splicing, the method can effectively reduce the number of sub-apertures and the splicing difficulty, thereby reducing errors generated in the splicing process;
2. Compared with the traditional full-caliber CGH compensation detection method, the method has the advantages that the CGH is designed aiming at the sub-aperture, the size of the CGH is reduced, only one CGH is needed to be designed for each circle of sub-aperture, the design difficulty and the manufacturing cost of the compensation element are reduced, and the detection process is simplified;
3. the influence of gravity on the surface shape detection result is considered, and the surface shape detection accuracy is improved.
Drawings
Fig. 1 is a schematic diagram of a central sub-aperture detection structure of a large-caliber convex aspheric mirror surface shape detection device according to an embodiment of the present invention.
Fig. 2 is a schematic diagram of an outer ring sub-aperture detection structure of a large-caliber convex aspheric mirror surface shape detection device according to an embodiment of the present invention.
Fig. 3 is a schematic flow chart of a method for detecting a large-caliber convex aspheric mirror surface shape according to an embodiment of the present invention.
Fig. 4 is a flowchart of a method for detecting a large-caliber convex aspherical mirror surface shape according to an embodiment of the present invention.
Wherein reference numerals include: a laser interferometer 1, a laser interferometer adjusting device 2, a spherical standard mirror 3, a to-be-inspected mirror 4, a to-be-inspected mirror adjusting device 5, a CGH substrate 6, a CGH7 and a CGH adjusting device 8.
Detailed Description
Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. In the following description, like modules are denoted by like reference numerals. In the case of the same reference numerals, their names and functions are also the same. Therefore, a detailed description thereof will not be repeated.
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be further described in detail with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not to be construed as limiting the invention.
Fig. 1 shows a schematic diagram of a central sub-aperture detection structure of a large-caliber convex aspheric mirror surface shape detection device according to an embodiment of the present invention.
Fig. 2 shows a schematic diagram of an outer ring sub-aperture detection structure of a large-caliber convex aspheric mirror surface shape detection device according to an embodiment of the invention.
As shown in fig. 1 and 2, the large-caliber convex aspheric mirror surface shape detection device provided by the embodiment of the invention includes: a laser interferometer 1, a laser interferometer adjusting device 2, a spherical standard mirror 3, a to-be-inspected mirror adjusting device 5, a CGH substrate 6, a CGH7 and a CGH adjusting device 8.
Firstly, detecting the central sub-aperture of the to-be-detected mirror 4:
In the process of detecting the surface shape information of the central sub-aperture of the to-be-detected mirror 4, the laser interferometer 1 emits plane wave laser to be incident into the spherical standard mirror 3, the spherical standard mirror 3 changes the plane wave of the laser generated by the laser interferometer 1 into spherical wave, the spherical wave irradiates the surface of the to-be-detected mirror 4, and interference fringes are formed between the spherical wave and the reference wave surface after the spherical wave is reflected by the to-be-detected mirror 4. The pose of the laser interferometer 1 and the pose of the to-be-inspected mirror 4 are respectively adjusted by adjusting the laser interferometer adjusting device 2 and the to-be-inspected mirror adjusting device 5 until the interference fringes of the central sub-aperture are minimum, so that the surface shape information of the central sub-aperture is obtained;
The bottom of the laser interferometer 1 is provided with a laser interferometer adjusting device 2, and the bottom of the to-be-inspected mirror 4 is provided with a to-be-inspected mirror adjusting device 5. The laser interferometer adjusting device 2 adjusts the z-axis direction of the laser interferometer 1, and the objective lens adjusting device 5 adjusts the x-axis, y-axis, and inclination angle of the objective lens 4
Secondly, detecting the outer ring sub-aperture of the to-be-detected mirror 4:
in the process of measuring the sub-aperture of the outer ring, the CGH7 is fixed on the CGH substrate 6, the CGH7 is placed in front of a light outlet of the laser interferometer 1, the CGH7 is used for converting spherical waves emitted by the laser interferometer 1 into wave fronts conforming to the surface shape of the to-be-detected mirror 4, the positions and the postures of the to-be-detected mirror 4 and the CGH7 are respectively adjusted by adjusting the to-be-detected mirror adjusting device 5 and the CGH adjusting device 8 in the figure 2, so that interference fringes measured by the sub-aperture of the outer ring of the to-be-detected mirror 4 are zero fringes, surface shape information of the sub-aperture of the outer ring is obtained, all the sub-aperture surface shapes are spliced through a splicing algorithm, and then full-caliber surface shape information of the to-be-detected mirror 4 is obtained.
The CGH adjusting device 8 is arranged at the bottom of the CGH7, and the to-be-inspected mirror adjusting device 5 is used for adjusting the x, y, z axis directions, the rotation direction and the inclination direction of the to-be-inspected mirror 4; the CGH adjustment device 8 is used for adjusting the x, y and z axis directions of the CGH 7.
Fig. 3 shows a flow chart of a method for detecting a large-caliber convex aspheric mirror surface shape according to an embodiment of the invention.
Fig. 4 shows a flowchart of a large-caliber convex aspherical mirror surface shape detection method according to an embodiment of the present invention.
As shown in fig. 3 and fig. 4, the surface shape detection method of the large-caliber convex aspheric mirror (D >500mm, deviation >100 λ, λ=632.8 nm) provided by the embodiment of the invention firstly performs sub-aperture planning, and calculates the deviation of each circle of sub-apertures. Because the deviation of the central sub-aperture is small, the interferometer and the standard spherical mirror are used for direct measurement; the CGH is designed for the outer ring sub-aperture, and only one CGH is required to be designed for each ring sub-aperture because the to-be-inspected mirror has rotational symmetry; and adjusting the position between the CGH and the interferometer through the alignment area, and adjusting the detection state of the zero stripes of the sub-aperture of the outer ring according to the design of the main area of the CGH.
The method specifically comprises the following steps:
S0, preprocessing: and selecting a spherical standard mirror according to parameters of the to-be-inspected mirror, planning sub-apertures of the to-be-inspected mirror and designing a CGH.
S01, selecting a spherical standard mirror with parameters conforming to F# -R#.
Wherein,
F#=f/D，R#R/D；
F# is the F number of the spherical standard mirror, R# is the R number of the to-be-inspected mirror, F is the focal length of the spherical standard mirror, D is the caliber of the spherical standard mirror, R is the radius of curvature of the vertex of the to-be-inspected mirror, and D is the caliber of the to-be-inspected mirror.
S02, planning the sub-aperture of the to-be-inspected mirror.
The principle of sub-aperture planning is as follows:
the number of interference fringes of each sub-aperture is smaller than the maximum resolution fringe number of the laser interferometer;
The planned sub-aperture can be ensured to realize full-caliber surface shape coverage of the to-be-inspected mirror;
The area of the overlapping area between every two adjacent sub-apertures is more than or equal to 30 percent;
the size of the sub-aperture is approximately R/F#.
S03, designing CGH required by the outer ring sub-aperture according to parameters of the to-be-inspected lens.
CGH is generally divided into three regions:
the main area is a detection area and is used for detecting the surface shape of the to-be-detected mirror;
the alignment area is used for alignment between the interferometer and the CGH;
the reference area is used for alignment between the CGH and the scope.
When the main area is designed, the detection light path should be returned along the original path until the wave aberration is minimum, and the diffraction pattern fringe density should meet the manufacturing conditions of the existing CGH processing technology.
After the steps are finished, the surface shape detection of the to-be-detected mirror is started, and the steps are as follows:
S1, detecting the central sub-aperture of the to-be-detected mirror.
Firstly, selecting a corresponding standard spherical mirror according to parameters of the to-be-inspected mirror. And adjusting the position relation between the standard mirror and the central sub-aperture to minimize interference fringes, and then detecting.
S2, detecting the outer ring sub-aperture of the to-be-detected mirror.
And adjusting the pose between the laser interferometer and the CGH according to the design of the CGH alignment area, aligning the CGH and the sub-aperture of the outer ring of the to-be-inspected mirror until interference fringes are minimum, and detecting the shape of the sub-aperture.
According to the sub-aperture planning scheme, rotating a to-be-inspected mirror adjusting device so as to detect the surface shape of each sub-aperture of the outer ring of the to-be-inspected mirror, and collecting all the surface shape information of the sub-apertures of the outer ring; and (3) moving the position of the to-be-inspected mirror to enable the CGH to be aligned with the sub-aperture of the first outer ring sub-aperture which is measured and is 180 degrees apart, and repeating the measurement operation to obtain the surface shape data of the other group of outer ring sub-apertures.
And S3, removing errors caused by the influence of gravity in the detection results obtained in the step S1 and the step S2.
Because the to-be-inspected mirror is in a vertical state when the sub-aperture of the outer ring is detected, the gravity factor also influences the detection result of the surface shape. The error caused by the influence of gravity is half the difference between the two sets of results of 0 and 180 degrees measured, which can be removed in the detection result.
S4, splicing the full-caliber surface shape data of the to-be-detected mirror through a sub-aperture splicing algorithm.
And (3) utilizing a comprehensive optimization sub-aperture splicing algorithm, obtaining splicing coefficients of adjacent sub-apertures and relative central sub-apertures through least square fitting, and finally obtaining full-caliber surface shape error data through splicing calculation.
S5, post-processing: and (5) carrying out precision analysis on the full-caliber surface shape data by a self-checking method.
The large-caliber convex aspheric surface detection method provided by the invention has some factors which influence the precision: such as the interferometer system itself having systematic errors and random errors during detection; the CGH required for detection has design residual errors, coding errors, substrate errors, characterization distortion caused by the prior art level and the like; adjustment errors can also be generated in the detection process, wherein the adjustment errors comprise alignment errors such as optical intervals, eccentric errors, inclination errors and the like of the mirror to be detected and the CGH; and splicing errors generated by a splicing algorithm.
The accuracy of the algorithm can be evaluated by a self-checking mode; and (3) carrying out precision analysis on the detection result, thereby obtaining an accurate full-caliber surface shape result.
The self-checking method comprises the following steps: and additionally measuring one sub-aperture of the to-be-inspected mirror, and carrying out point-to-point subtraction on the full-aperture surface shape data and the self-inspected sub-aperture surface shape data according to the pixel corresponding relation, so as to obtain corresponding residual distribution.
The final detection precision is better than 10nm (RMS value), thereby meeting the requirement of high-precision detection of the large-caliber convex aspheric surface.
While embodiments of the present invention have been shown and described above, it will be understood that the above embodiments are illustrative and not to be construed as limiting the invention, and that variations, modifications, alternatives and variations may be made to the above embodiments by one of ordinary skill in the art within the scope of the invention.
The above embodiments of the present invention do not limit the scope of the present invention. Any of various other corresponding changes and modifications made according to the technical idea of the present invention should be included in the scope of the claims of the present invention.
Claims (5)
1. A detection method of a large-caliber convex aspheric surface reflecting mirror surface shape detection device is characterized in that,
The large-caliber convex aspheric surface reflecting mirror surface shape detection device comprises a laser interferometer and a spherical standard mirror;
The laser interferometer is used for emitting plane waves to be incident to the spherical standard mirror and then to be changed into spherical waves, the spherical waves are incident to the to-be-inspected mirror and reflected by the to-be-inspected mirror to form interference fringes with a reference wave surface, and the pose of the laser interferometer and the to-be-inspected mirror is adjusted until the interference fringes of the central sub-aperture are minimum, so that the surface shape information of the central sub-aperture of the to-be-inspected mirror is obtained;
the detection device also comprises a CGH;
The CGH is placed in front of a light outlet of the laser interferometer and used for converting the plane wave into wave fronts conforming to the surface shape of the to-be-inspected mirror, the pose of the to-be-inspected mirror and the CGH are respectively adjusted, so that interference fringes measured by the sub-aperture of the outer ring of the to-be-inspected mirror are zero fringes, surface shape information of the sub-aperture of the outer ring of the to-be-inspected mirror is obtained, all the sub-aperture surface shapes are spliced through a splicing algorithm, and then full-caliber surface shape information of the to-be-inspected mirror is obtained;
The detection method of the large-caliber convex aspheric surface reflection mirror surface shape detection device comprises the following steps of:
Pretreatment step S0: selecting the spherical standard mirror according to the parameters of the to-be-inspected mirror, planning the sub-aperture of the to-be-inspected mirror and designing the CGH;
the preprocessing step S0 comprises the following sub-steps:
s01, selecting a spherical standard mirror with parameters which are consistent with F# and R# or more;
wherein,
F#=f/D，R#R/D；
F# is the F number of the spherical standard mirror, R# is the R number of the to-be-inspected mirror, F is the focal length of the spherical standard mirror, D is the caliber of the spherical standard mirror, R is the radius of curvature of the vertex of the to-be-inspected mirror, and D is the caliber of the to-be-inspected mirror;
s02, planning the sub-aperture of the to-be-inspected mirror;
The principle of the aperture planning of the mirror to be detected is as follows:
The number of interference fringes of each sub-aperture is smaller than the maximum resolution fringe number of the laser interferometer;
The planned sub-aperture realizes full-caliber surface shape coverage on the to-be-inspected mirror;
the area of the overlapping area between every two adjacent sub-apertures is more than or equal to 30 percent;
The size of the sub-aperture is R/F#;
s03, designing the CGH according to parameters of the to-be-inspected mirror;
The method comprises three areas:
The main area is a detection area and is used for detecting the surface shape of the to-be-detected mirror;
an alignment area for alignment between the laser interferometer and the CGH;
a reference area is used for alignment between the CGH and the scope;
s1, adjusting the pose between the spherical standard mirror and the central sub-aperture of the to-be-inspected mirror, and detecting the central sub-aperture of the to-be-inspected mirror when zero stripes appear;
S2, adjusting the pose between the laser interferometer and the CGH, and detecting the outer ring sub-aperture of the to-be-detected mirror when zero stripes appear; moving the position of the to-be-inspected mirror to enable the CGH to be aligned with the sub-aperture of the first outer ring sub-aperture which is measured and is 180 degrees apart, and repeating the measuring operation to obtain surface shape data of the other group of outer ring sub-apertures;
S3, removing errors generated due to the influence of gravity in the detection results obtained in the step S1 and the step S2; the error caused by the influence of gravity is half of the difference value between two groups of results of 0 DEG and 180 DEG under the same outer ring sub-aperture obtained by measurement, and the difference value is removed in the detection result;
And S4, splicing the full-caliber surface shape data of the to-be-inspected mirror through a sub-aperture splicing algorithm.
2. The method according to claim 1, wherein the CGH is fixed on a CGH substrate, and a CGH adjusting device is mounted on the bottom of the CGH, and the CGH adjusting device is configured to adjust x, y, and z axes of the CGH.
3. The method according to claim 2, wherein a laser interferometer adjusting device is provided at a bottom of the laser interferometer, and the laser interferometer adjusting device is configured to adjust a z-axis direction of the laser interferometer.
4. The detection method of the large-caliber convex aspheric reflecting mirror surface shape detection device according to claim 3, wherein a to-be-detected mirror adjusting device is arranged at the bottom of the to-be-detected mirror;
When the central sub-aperture of the to-be-inspected mirror is inspected:
the to-be-inspected mirror adjusting device is used for adjusting the x-axis, the y-axis and the inclination angle of the to-be-inspected mirror;
when the outer ring sub-aperture of the to-be-detected mirror is detected:
The device for adjusting the to-be-inspected mirror is used for adjusting the x, y, z axis direction, the rotation direction and the inclination direction of the to-be-inspected mirror.
5. The method for detecting the specular shape of a large-caliber convex aspherical mirror according to claim 4, further comprising a post-processing step S5: carrying out precision analysis on the full-caliber surface shape data by a self-checking method;
The self-checking method comprises the following steps: and additionally measuring any one of the sub-apertures of the to-be-inspected mirror, and performing point-to-point subtraction on the full-caliber surface shape data and the self-inspected sub-aperture surface shape data according to a pixel corresponding relation, so as to obtain corresponding residual distribution.
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