CN115078082A - In-situ fatigue testing system used with scanning electron microscope - Google Patents
In-situ fatigue testing system used with scanning electron microscope Download PDFInfo
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- CN115078082A CN115078082A CN202210806123.9A CN202210806123A CN115078082A CN 115078082 A CN115078082 A CN 115078082A CN 202210806123 A CN202210806123 A CN 202210806123A CN 115078082 A CN115078082 A CN 115078082A
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- 238000009661 fatigue test Methods 0.000 title claims abstract description 80
- 238000011065 in-situ storage Methods 0.000 title claims abstract description 32
- 238000012546 transfer Methods 0.000 claims abstract description 23
- 230000007246 mechanism Effects 0.000 claims abstract description 20
- 238000013016 damping Methods 0.000 claims description 85
- 230000035939 shock Effects 0.000 claims description 29
- 238000005086 pumping Methods 0.000 claims description 14
- 238000010438 heat treatment Methods 0.000 claims description 7
- 238000012360 testing method Methods 0.000 abstract description 12
- 230000008878 coupling Effects 0.000 abstract description 3
- 238000010168 coupling process Methods 0.000 abstract description 3
- 238000005859 coupling reaction Methods 0.000 abstract description 3
- 206010016256 fatigue Diseases 0.000 description 72
- 239000000523 sample Substances 0.000 description 47
- 239000000463 material Substances 0.000 description 15
- 238000000034 method Methods 0.000 description 8
- 238000011160 research Methods 0.000 description 8
- 238000012512 characterization method Methods 0.000 description 7
- 230000008569 process Effects 0.000 description 6
- 238000001514 detection method Methods 0.000 description 5
- 238000010249 in-situ analysis Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- 238000011056 performance test Methods 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000004154 testing of material Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/02—Details
- G01N3/06—Special adaptations of indicating or recording means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
- G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/02—Details
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/08—Investigating strength properties of solid materials by application of mechanical stress by applying steady tensile or compressive forces
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/22—Investigating strength properties of solid materials by application of mechanical stress by applying steady torsional forces
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/32—Investigating strength properties of solid materials by application of mechanical stress by applying repeated or pulsating forces
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/0001—Type of application of the stress
- G01N2203/0005—Repeated or cyclic
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/0014—Type of force applied
- G01N2203/0016—Tensile or compressive
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/0014—Type of force applied
- G01N2203/0021—Torsional
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/0058—Kind of property studied
- G01N2203/0069—Fatigue, creep, strain-stress relations or elastic constants
- G01N2203/0073—Fatigue
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/02—Details not specific for a particular testing method
- G01N2203/06—Indicating or recording means; Sensing means
- G01N2203/0641—Indicating or recording means; Sensing means using optical, X-ray, ultraviolet, infrared or similar detectors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/07—Investigating materials by wave or particle radiation secondary emission
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/2204—Specimen supports therefor; Sample conveying means therefore
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Abstract
The invention discloses an in-situ fatigue testing system used with a scanning electron microscope, which comprises a fatigue chamber, a scanning electron microscope and a sample transfer mechanism, wherein a fatigue test bed is arranged in the fatigue chamber; the cavity of the scanning electron microscope is connected with the fatigue chamber through a conveying pipeline, and a blocker which can separate or communicate the cavity of the scanning electron microscope from the fatigue chamber is arranged on the conveying pipeline. The cavity of the scanning electron microscope is communicated with the fatigue chamber, and the fatigue test bed is transmitted into the cavity of the scanning electron microscope through the conveying pipeline by the sample transfer mechanism to observe the test; after the observation is finished, the sample transfer mechanism transfers the fatigue test bed back to the fatigue chamber, and the cavity of the scanning electron microscope is separated (isolated) from the fatigue chamber through the blocker. Because the test space and the observation space of the sample can be completely separated, the fatigue test system can continuously run for a long time without being limited by the use of a scanning electron microscope, and various extreme coupling conditions can be applied to the sample.
Description
Technical Field
The invention belongs to the field of material performance research, relates to material testing equipment, and particularly relates to an in-situ fatigue testing system combined with a scanning electron microscope.
Background
The development of scientific technology provides more means for material characterization, and the development of materials also puts higher requirements on characterization methods. The traditional material performance research is to test the mechanical property of the material under a macroscopic state, then process the tested sample (sample) and observe the microstructure of the sample, and analyze the mechanism of the sample. This method lacks in-situ, real-time, high-resolution microstructural information. Under the condition, in-situ analysis instruments such as an in-situ stretching table, an in-situ heating table and the like which are installed on a scanning electron microscope (scanning electron microscope for short) are promoted, and the microstructure change of the materials can be observed while the performance of the materials is tested under certain conditions, so that the relation between the materials can be found.
The existing in-situ analysis instruments are all directly placed in a cavity of a scanning electron microscope (scanning electron microscope for short). The performance test of the material usually needs a long time, such as the fatigue performance test of the metal material, which reaches hundreds of hours. In-situ research under the condition always occupies a scanning electron microscope, and if the test conditions comprise high temperature or low temperature, the scanning electron microscope is damaged by the long-time test. Therefore, there is a need for an in-situ fatigue testing system capable of being used with a scanning electron microscope and continuously operating for a long time, so as to overcome the problem that the existing in-situ analysis instrument cannot operate for a long time.
Disclosure of Invention
The invention aims to provide an in-situ fatigue testing system used with a scanning electron microscope, which aims to solve the problem that the existing in-situ analysis instrument can cause damage to the scanning electron microscope when high-temperature or low-temperature testing is carried out for a long time.
In order to achieve the purpose, the invention provides the following scheme:
the invention provides an in-situ fatigue testing system used with a scanning electron microscope, which comprises:
the fatigue testing device comprises a fatigue chamber, wherein a fatigue testing stand is arranged in the fatigue chamber and used for carrying out fatigue testing on a sample;
the cavity of the scanning electron microscope is connected with the fatigue chamber through a conveying pipeline, and a blocker is arranged on the conveying pipeline and can separate or communicate the cavity of the scanning electron microscope from the fatigue chamber;
the sample transfer mechanism is arranged in the fatigue chamber, the conveying pipeline or the cavity of the scanning electron microscope, and the sample transfer mechanism can transfer the fatigue test bed into the cavity of the scanning electron microscope through the conveying pipeline so as to observe the sample on the fatigue test bed.
Optionally, still include fatigue room shock attenuation platform, fatigue room shock attenuation platform includes:
a frame body;
the vibration isolators are arranged on the upper surface of the frame body;
the table top is arranged above the vibration isolator; the fatigue chamber is arranged on the table board.
Optionally, a vacuum pumping device and/or a sample heating device is/are arranged on the fatigue chamber.
Optionally, when the fatigue chamber is provided with the vacuum pumping device, the vacuum pumping device is connected with the fatigue chamber through a first damping pipeline; the first shock absorbing conduit includes:
one end of the first vacuumizing pipeline is connected with the fatigue chamber;
the first pipeline damper comprises a first damping flange, a second damping flange and a damping pad, the first damping flange is connected with the second damping flange through a corrugated pipe, the first damping flange and the second damping flange are both rigidly connected with the corrugated pipe through screws, and the damping pad is arranged between the first damping flange and the second damping flange; the first damping flange is connected with the other end of the first vacuumizing pipeline;
and one end of the second vacuumizing pipeline is connected with the second damping flange, and the other end of the second vacuumizing pipeline is connected with the vacuumizing device.
Optionally, the vacuum pumping device includes a molecular pump and a mechanical pump connected in sequence; and the molecular pump is connected with the second vacuum pumping pipeline.
Optionally, the delivery line includes:
one end of the first conveying pipeline is connected with the fatigue chamber, and the blocker is arranged on the first conveying pipeline;
and one end of the second damping pipeline is connected with the other end of the first conveying pipeline, and the other end of the second damping pipeline is connected with the cavity of the scanning electron microscope.
Optionally, the second shock absorbing pipeline includes:
one end of the second conveying pipeline is connected with the cavity of the scanning electron microscope;
the second pipeline damper comprises a third damping flange, a fourth damping flange and a damping pad, the third damping flange and the fourth damping flange are connected through a corrugated pipe, and the damping pad is arranged between the third damping flange and the fourth damping flange; the third damping flange is connected with the other end of the second conveying pipeline, and the fourth damping flange is connected with the first conveying pipeline.
Optionally, the blocker is a gate valve.
Optionally, the sample transfer mechanism is disposed in the fatigue chamber, and includes:
the mechanical arm comprises a fixed arm, a sliding arm and a sliding drive, the fixed arm is fixed in the fatigue chamber, the sliding arm is connected with the fixed arm in a sliding manner, and the sliding drive is connected with the sliding arm so as to drive the sliding arm to transmit between the fatigue chamber and a cavity of the scanning electron microscope;
the manipulator is arranged on the sliding arm and used for clamping the fatigue test stand.
Optionally, the sliding drive is a hydraulic cylinder, an electric telescopic rod, a gear rack assembly (configured with a motor drive) or a screw rod slider assembly (configured with a motor drive).
Optionally, a vacuum pumping device is arranged on the cavity of the scanning electron microscope.
Compared with the prior art, the invention has the following technical effects:
the in-situ fatigue testing system used with the scanning electron microscope is novel and reasonable in structure, when a fatigue test stand needs to enter a cavity of the scanning electron microscope for detection in the process of carrying out a fatigue test on a sample, the cavity of the scanning electron microscope can be communicated (communicated) with a fatigue chamber through a blocker and be in the same vacuum degree, then the fatigue test stand is transmitted into the cavity of the scanning electron microscope through a conveying pipeline through a sample transfer mechanism, and the fatigue test sample is observed through the scanning electron microscope; after the observation is finished, the fatigue test bed is conveyed back to the fatigue chamber by the sample transfer mechanism, the cavity of the scanning electron microscope is separated (isolated) from the fatigue chamber by the blocker, the fatigue test bed continues to carry out fatigue test on the sample in the fatigue chamber, and the scanning electron microscope can be used for other detection requirements. In the invention, the scanning electron microscope and the in-situ fatigue testing system are combined, and the sample material can be conveyed to the scanning electron microscope system at any time for microstructure characterization and research in the sample material performance testing process; in addition, because the test space and the observation space of the sample can be completely separated, the fatigue test system can continuously run for a long time without being limited by the use of a scanning electron microscope, and can apply various extreme coupling conditions (such as high temperature, low temperature, high pressure and the like) to the sample (material) in the fatigue test process, so that the fatigue test system has wide application range and strong practicability.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
FIG. 1 is a schematic diagram of a test state of a sample of an in-situ fatigue testing system used with a scanning electron microscope according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a sample detection state of the in-situ fatigue testing system used with a scanning electron microscope according to an embodiment of the present invention;
FIG. 3 is a schematic view of the internal structure of the fatigue chamber disclosed in the embodiment of the present invention;
FIG. 4 is a schematic structural diagram of a first shock absorbing pipeline according to an embodiment of the present disclosure;
fig. 5 is a schematic structural diagram of a fatigue chamber damping table according to an embodiment of the present invention.
Wherein the reference numerals are:
100. an in-situ fatigue testing system for use with a scanning electron microscope;
1. a fatigue chamber; 2. a fatigue test stand; 3. a scanning electron microscope; 4. a delivery line; 41. a first delivery line; 42. a second shock absorbing conduit; 421. a second delivery line; 422. a second line damper; 5. a sample transfer mechanism; 6. a fatigue chamber damping table; 61. a frame body; 62. a vibration isolator; 63. a table top; 7. a vacuum pumping device; 8. a first shock absorbing conduit; 81. a first evacuation line; 82. a first pipeline damper; 821. a first shock absorbing flange; 822. a second shock absorbing flange; 823. a shock pad; 824. a bellows; 83. a second vacuum pumping pipeline; 9. and (4) a gate valve.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The invention aims to provide an in-situ fatigue testing system used with a scanning electron microscope, which aims to solve the problem that the existing in-situ analysis instrument can cause damage to the scanning electron microscope when a high-temperature or low-temperature test is carried out for a long time.
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.
Example one
As shown in fig. 1 to fig. 3, the embodiment provides an in-situ fatigue testing system 100 used with a scanning electron microscope, which mainly includes a fatigue chamber 1, a scanning electron microscope 3 and a sample transfer mechanism 5, wherein a fatigue test bed 2 is disposed in the fatigue chamber 1 and used for performing fatigue testing on a sample, and the fatigue test bed 2 is an existing fatigue testing device and can perform fatigue testing on a sample material such as pull-pull, pull-press, press-press, pull-twist and the like, and is not described herein again; the cavity of the scanning electron microscope 3 is connected with the fatigue chamber 1 through the conveying pipeline 4, and the conveying pipeline 4 is provided with a blocker, the blocker can separate or communicate the cavity of the scanning electron microscope 3 with the fatigue chamber 1, as a preferred mode, the blocker of the embodiment is preferably a gate valve 9, the gate valve 9 can isolate the cavity of the scanning electron microscope 3 from the fatigue chamber 1, so that the vacuum degree in the cavity of the scanning electron microscope 3 and the vacuum degree in the fatigue chamber 1 are not affected, the running time of the fatigue test bench 2 in the fatigue chamber 1 is not limited by the scanning electron microscope 3, the gate valve 9 is a prior art, a manual knife gate valve can be selected in actual operation, an electric gate valve can also be selected, and details are not repeated; sample transfer mechanism 5 sets up in fatigue room 1, pipeline 4 or scanning electron microscope 3's cavity, and sample transfer mechanism 5 can shift fatigue test platform 2 in pipeline 4 shifts to scanning electron microscope 3's cavity to survey the sample on fatigue test platform 2, sample transfer mechanism 5 also can pass fatigue test platform 2 back to in the fatigue room 1 simultaneously. In the present embodiment, the sample transfer mechanism 5 is preferably provided in the fatigue chamber 1. The in-situ fatigue testing system 100 used with the scanning electron microscope can continuously operate for a long time, can research the performance and microstructure of the sample material in a cross-scale mode, can realize fatigue testing of the sample material, can perform in-situ microstructure characterization and research on the sample material at any time in the performance testing process of the sample material, and can still be used for other purposes in a time gap between two times of microstructure characterization of the sample material by the scanning electron microscope 3.
In the embodiment, the damping table for the fatigue chamber 6 is further included, the damping table for the fatigue chamber 6 includes a frame body 61, vibration isolators 62 and a table top 63, the plurality of vibration isolators 62 are arranged on the upper surface of the frame body 61, and the table top 63 is arranged above the vibration isolators 62; the fatigue room 1 is provided on the table 63. The table 63 may filter the vibration transmitted from the bottom surface to the frame body 61 through the vibration isolator 62. The fatigue room 1 is preferably fixed to the table 63 by bolts.
In this embodiment, the fatigue room 1 is provided with a vacuum extractor 7 and/or a sample heating device. Preferably, a vacuum-pumping device 7 is connected to the fatigue chamber 1, and a sample heating device is provided in the fatigue chamber 1 to heat a sample material to be subjected to a fatigue test. The sample heating device can be a resistance wire or a heating furnace and the like.
In the embodiment, when the fatigue chamber 1 is provided with the vacuumizing device 7, the vacuumizing device 7 is connected with the fatigue chamber 1 through the first damping pipeline 8; the first damping pipeline 8 comprises a first vacuumizing pipeline 81, a first pipeline damper 82 and a second vacuumizing pipeline 83, one end of the first vacuumizing pipeline 81 is connected with the fatigue chamber 1, the first pipeline damper 82 comprises a first damping flange 821, a second damping flange 822 and a damping pad 823, the first damping flange 821 and the second damping flange 822 are connected through a corrugated pipe 824, the first damping flange 821 and the second damping flange 822 are both rigidly connected with the corrugated pipe 824 through screws, and the first damping flange 821 and the second damping flange 822 can be flexibly adjusted through the corrugated pipe 824. A damping pad 823 is arranged between the first damping flange 821 and the second damping flange 822; the first damping flange 821 is connected with the other end of the first vacuum pipeline 81; one end of the second vacuuming pipeline 83 is connected with the second shock absorbing flange 822, and the other end of the second vacuuming pipeline 83 is connected with the vacuuming device 7. In practical operation, preferably, first shock attenuation flange 821 and second shock attenuation flange 822 respectively with the both ends welding of bellows, the bellows is scalable, in bellows outside a week, 6 shock attenuation pad 823 of equipartition installation between first shock attenuation flange 821 and the second shock attenuation flange 822, when evacuating device 7 vacuums to fatigue room 1, evacuating device 7, for example the shock attenuation of molecular pump can make first shock attenuation flange 821 and second shock attenuation flange 822 compress each other, shock attenuation pad 823 can be compressed tightly by first shock attenuation flange 821 and second shock attenuation flange 822 this moment, through the elasticity of shock attenuation pad 823 self, play the effect of shock attenuation.
In this embodiment, the vacuum pumping device 7 includes a molecular pump and a mechanical pump connected in sequence; the molecular pump is connected with a second vacuum-pumping pipeline 83, the molecular pump and the mechanical pump jointly pump the fatigue chamber 1 to be vacuum-pumped, and the fatigue chamber 1 can reach 2.0 multiplied by 10 -4 Pa vacuum degree, used for fatigue test of the fatigue test stand 2 for a long time. The first pipeline damper 82 is used as a molecular pump damping structure, and the molecular pump is connected with the fatigue chamber 1 through the first pipeline damper 82, so that the influence of the self vibration of the molecular pump on the fatigue chamber 1 can be eliminated. The molecular pump and the mechanical pump are preferably provided on the frame body 61 of the fatigue chamber damper table 6. The second vacuum-pumping pipeline 83 in the first pipeline damper 82 is connected with a molecular pump through a sealing ring and a bolt, the molecular pump is connected with a mechanical pump, and the mechanical pump pumps the fatigue chamber 1 to 1.0 multiplied by 10 -1 After Pa, the molecular pump is started, and the molecular pump can vacuumize the fatigue chamber 1 to 2.0 multiplied by 10 -4 Pa。
In this embodiment, the conveying pipeline 4 includes a first conveying pipeline 41 and a second damping pipeline 42, one end of the first conveying pipeline 41 is connected to the fatigue chamber 1, and the blocker is disposed on the first conveying pipeline 41; one end of the second shock absorption pipeline 42 is connected to the other end of the first conveying pipeline 41, and the other end of the second shock absorption pipeline 42 is connected to the cavity of the scanning electron microscope 3. The second damping pipeline 42 includes a second conveying pipeline 421 and a second pipeline damper 422, and one end of the second conveying pipeline 421 is connected to the cavity of the scanning electron microscope 3; the second pipeline damper 422 comprises a third damping flange, a fourth damping flange and a damping pad 823, the third damping flange and the fourth damping flange are connected through a corrugated pipe 824, and the damping pad 823 is arranged between the third damping flange and the fourth damping flange; the third damper flange is connected to the other end of the second delivery pipe 421, and the fourth damper flange is connected to the first delivery pipe 41. It can be seen from the above that the structure and functional principle of the second pipeline damper 422 are the same as those of the first pipeline damper 82, the second pipeline damper 422 is located between the fatigue chamber 1 and the scanning electron microscope 3, and the flexible connection structure of the first pipeline damper 82 can make the damping system of the scanning electron microscope 3 and the damping system of the fatigue chamber 1 not interfere with each other. Preferably, the space between the second delivery pipe 421 and the third damping flange of the second pipe damper 422, and the space between the fourth damping flange of the second pipe damper 422 and the first delivery pipe 41 are sealed by sealing rings, and corresponding sealing rings are also provided at the joint of the gate valve 9 and the first delivery pipe 41.
In the embodiment, the sample transfer mechanism 5 is arranged in the fatigue chamber 1 and comprises a mechanical arm and a mechanical hand, wherein the mechanical arm comprises a fixed arm, a sliding arm and a sliding drive, the fixed arm is fixed in the fatigue chamber 1, the sliding arm is connected with the fixed arm in a sliding manner, and the sliding drive is connected with the sliding arm so as to drive the sliding arm to transmit between the fatigue chamber 1 and a cavity of the scanning electron microscope 3; the manipulator is arranged on the sliding arm and used for clamping the fatigue test stand 2. The sliding drive is a hydraulic cylinder, an electric telescopic rod, a gear rack assembly (provided with a motor drive) or a screw rod sliding block assembly (provided with a motor drive). The working principle of the sample transfer mechanism 5 is specifically explained below by taking an example of adopting an electric telescopic rod for sliding driving: foretell fixed arm passes through the sealing washer with the inside lower surface of fatigue room 1 and seals and pass through the screw fixation, fatigue test platform 2 passes through the screw and is fixed with the manipulator layer board, electric telescopic handle extension and drive fatigue test platform 2 and remove towards scanning electron microscope 3, in the fatigue test platform 2 entering scanning electron microscope 3's cavity on the manipulator and on it, after scanning electron microscope 3 observed the sample, electric telescopic handle shortened to carry back fatigue test platform 2 on the manipulator and in the fatigue room 1.
In this embodiment, the cavity of the scanning electron microscope 3 is also provided with a corresponding vacuum pumping device, such as a molecular pump.
The working principle of the in-situ fatigue testing system 100 used with the scanning electron microscope in this embodiment is as follows:
the fatigue chamber 1 is fixed on the table surface 63 of the fatigue chamber damping table 6 to eliminate the influence of ground vibration, the mechanical pump and the molecular pump vacuumize the fatigue chamber 1, and the vacuum degree reaches 2.0 multiplied by 10 -4 At Pa, the fatigue stage 1 can perform a long-term fatigue treatment on the sample. The fatigue test bed 2 is arranged on the mechanical arm and used for transmitting the fatigue chamber 1 and the cavity of the scanning electron microscope 3, when the fatigue test bed 2 needs to enter the cavity of the scanning electron microscope 3 for detection or observation, the gate valve 9 is opened, the cavity of the scanning electron microscope 3 is communicated with the fatigue chamber 1 and is in the same vacuum degree, then the fatigue test bed 2 and the upper sample thereof are transmitted into the cavity of the scanning electron microscope 3 through the mechanical arm, and the sample of the fatigue test is observed through the scanning electron microscope 3. After the observation is finished, the manipulator transfers the fatigue test bed 2 and the sample thereon back to the fatigue chamber 1, and the gate valve 9 is closed to separate the cavity of the scanning electron microscope 3 from the fatigue chamber 1. At this time, the fatigue test bench 2 of the fatigue room 1 continues to perform fatigue test on the sample in the fatigue room 1, and the scanning electron microscope 3 can be used for other detection requirements.
It can be known from the above that, the in-situ fatigue testing system used with a scanning electron microscope according to this embodiment is a system that can continuously operate for a long time and research the material performance and microstructure in a cross-scale manner, the time for testing the material performance can reach more than 100 hours, various extreme coupling conditions can be applied to the material, the mechanical load reaches 4000N, and the fatigue test of the material can be realized. Meanwhile, in the performance test process, microstructure characterization and research can be carried out on the material at any time, and a scanning electron microscope can still be used for other purposes in the time gap between two times of microstructure characterization.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein, and any reference signs in the claims are not intended to be construed as limiting the claim concerned.
The principle and the implementation mode of the invention are explained by applying a specific example, and the description of the embodiment is only used for helping to understand the method and the core idea of the invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, the specific embodiments and the application range may be changed. In view of the above, the present disclosure should not be construed as limiting the invention.
Claims (10)
1. An in-situ fatigue testing system for use with a scanning electron microscope, comprising:
the fatigue testing device comprises a fatigue chamber, wherein a fatigue testing stand is arranged in the fatigue chamber and used for carrying out fatigue testing on a sample;
the cavity of the scanning electron microscope is connected with the fatigue chamber through a conveying pipeline, and a blocker is arranged on the conveying pipeline and can separate or communicate the cavity of the scanning electron microscope from the fatigue chamber;
the sample transfer mechanism is arranged in the fatigue chamber, the conveying pipeline or the cavity of the scanning electron microscope, and the sample transfer mechanism can transfer the fatigue test bed into the cavity of the scanning electron microscope through the conveying pipeline so as to observe the sample on the fatigue test bed.
2. The in-situ fatigue testing system for use with scanning electron microscopes of claim 1, further comprising a fatigue chamber damping stage comprising:
a frame body;
the vibration isolators are arranged on the upper surface of the frame body;
the table top is arranged above the vibration isolator; the fatigue chamber is arranged on the table board.
3. An in-situ fatigue testing system for use with scanning electron microscopes in accordance with claim 1 or 2, wherein a vacuum extractor and/or a sample heating device is provided on the fatigue chamber.
4. The in-situ fatigue testing system for use with a scanning electron microscope according to claim 3, wherein when the vacuum extractor is disposed on the fatigue chamber, the vacuum extractor is connected to the fatigue chamber through a first shock absorbing pipeline; the first shock absorbing conduit includes:
one end of the first vacuumizing pipeline is connected with the fatigue chamber;
the first pipeline damper comprises a first damping flange, a second damping flange and a damping pad, the first damping flange is connected with the second damping flange through a corrugated pipe, the first damping flange and the second damping flange are both rigidly connected with the corrugated pipe through screws, and the damping pad is arranged between the first damping flange and the second damping flange; the first damping flange is connected with the other end of the first vacuumizing pipeline;
and one end of the second vacuumizing pipeline is connected with the second damping flange, and the other end of the second vacuumizing pipeline is connected with the vacuumizing device.
5. The in-situ fatigue testing system for use with a scanning electron microscope according to claim 4, wherein the vacuum pumping device comprises a molecular pump and a mechanical pump which are connected in sequence; and the molecular pump is connected with the second vacuumizing pipeline.
6. The in situ fatigue testing system for use with scanning electron microscopes according to claim 1 or 2, wherein the transport conduit comprises:
one end of the first conveying pipeline is connected with the fatigue chamber, and the blocker is arranged on the first conveying pipeline;
and one end of the second damping pipeline is connected with the other end of the first conveying pipeline, and the other end of the second damping pipeline is connected with the cavity of the scanning electron microscope.
7. The in-situ fatigue testing system for use with scanning electron microscopes in accordance with claim 6, wherein the second shock absorbing pipeline comprises:
one end of the second conveying pipeline is connected with the cavity of the scanning electron microscope;
the second pipeline damper comprises a third damping flange, a fourth damping flange and a damping pad, the third damping flange and the fourth damping flange are connected through a corrugated pipe, and the damping pad is arranged between the third damping flange and the fourth damping flange; the third damping flange is connected with the other end of the second conveying pipeline, and the fourth damping flange is connected with the first conveying pipeline.
8. The in situ fatigue testing system for use with scanning electron microscopes in accordance with claim 6, wherein the blocker is a gate valve.
9. The in-situ fatigue testing system for use with scanning electron microscopes according to claim 1 or 2, wherein the specimen transfer mechanism is disposed in the fatigue chamber and comprises:
the mechanical arm comprises a fixed arm, a sliding arm and a sliding drive, the fixed arm is fixed in the fatigue chamber, the sliding arm is connected with the fixed arm in a sliding manner, and the sliding drive is connected with the sliding arm so as to drive the sliding arm to transmit between the fatigue chamber and a cavity of the scanning electron microscope;
the manipulator is arranged on the sliding arm and used for clamping the fatigue test stand.
10. The in-situ fatigue testing system for use with a scanning electron microscope according to claim 1 or 2, wherein a vacuum extractor is disposed on the cavity of the scanning electron microscope.
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| CN202210806123.9A CN115078082A (en) | 2022-07-08 | 2022-07-08 | In-situ fatigue testing system used with scanning electron microscope |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116519727A (en) * | 2023-03-21 | 2023-08-01 | 浙江大学 | Scanning electron microscope and observation method for microstructure evolution of sample thereof |
| CN117949678A (en) * | 2024-03-26 | 2024-04-30 | 北京中科科仪股份有限公司 | Sample batch detection device and detection method |
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2022
- 2022-07-08 CN CN202210806123.9A patent/CN115078082A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116519727A (en) * | 2023-03-21 | 2023-08-01 | 浙江大学 | Scanning electron microscope and observation method for microstructure evolution of sample thereof |
| CN116519727B (en) * | 2023-03-21 | 2024-03-26 | 浙江大学 | Scanning electron microscope and observation method for microstructure evolution of sample thereof |
| CN117949678A (en) * | 2024-03-26 | 2024-04-30 | 北京中科科仪股份有限公司 | Sample batch detection device and detection method |
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