Nothing Special   »   [go: up one dir, main page]

CN103781341A - Element installation device and element installation method - Google Patents

Element installation device and element installation method Download PDF

Info

Publication number
CN103781341A
CN103781341A CN201310488310.8A CN201310488310A CN103781341A CN 103781341 A CN103781341 A CN 103781341A CN 201310488310 A CN201310488310 A CN 201310488310A CN 103781341 A CN103781341 A CN 103781341A
Authority
CN
China
Prior art keywords
substrate
component mounting
substrates
interval
component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201310488310.8A
Other languages
Chinese (zh)
Other versions
CN103781341B (en
Inventor
味村好裕
滨崎库泰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Intellectual Property Management Co Ltd
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Publication of CN103781341A publication Critical patent/CN103781341A/en
Application granted granted Critical
Publication of CN103781341B publication Critical patent/CN103781341B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Supply And Installment Of Electrical Components (AREA)
  • Liquid Crystal (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

The present invention aims to provide an element installation device and an element installation method, which can perform element installation to substrates both of a small size and a large size, and thus can the production line of the substrates of both sizes to be uniform. Under the condition that a substrate receiving part (21) sets the gap between two substrate receiving stations (21s) to be a first gap so as to receive two substrates (2) of the small size, a left substrate transferring part (82a) transfers the two substrates (2) of the small size received by the substrate receiving part (21) simultaneously to an element installation part (22); and under the condition that the substrate receiving part (21) sets the gap between the two substrate receiving stations (21s) to be a second gas larger than the first gap so as to receive two substrates (2) of the large size, the left substrate transferring part (82a) transfers the two substrates (2) of the large size received by the substrate receiving part (21) one by one to the element installation part (22)

Description

元件安装装置和元件安装方法Component mounting device and component mounting method

技术领域technical field

本发明涉及在将元件搭载于基板后将该元件压接于基板来进行液晶面板基板的制造的元件安装装置和元件安装方法。The present invention relates to a component mounting device and a component mounting method for manufacturing a liquid crystal panel substrate by pressure-bonding the component to the substrate after mounting the component on the substrate.

背景技术Background technique

以往,已知将元件搭载于基板来进行液晶面板基板的制造的液晶面板基板制造用的元件安装装置(例如,参照专利文献1)。这样的液晶面板基板制造用的元件安装装置除了相对于基板进行元件安装的元件安装部之外,还具备:基板接收部,利用两个基板接收台接收从上游工序侧输送来的两张基板;以及基板转移部,将基板接收部接收到的基板转移至元件安装部,基板转移部利用按照基板接收部具备的两个基板接收台的间隔配置的两个拾取构件,同时拾取两张基板并转移到元件安装部。Conventionally, there is known a component mounting apparatus for liquid crystal panel substrate manufacturing that mounts a component on a substrate to manufacture a liquid crystal panel substrate (for example, refer to Patent Document 1). Such a component mounting device for manufacturing liquid crystal panel substrates includes, in addition to a component mounting section for mounting components on the substrate, a substrate receiving section for receiving two substrates conveyed from the upstream process side by using two substrate receiving tables; and a substrate transfer section that transfers the substrates received by the substrate receiving section to the component mounting section. The substrate transfer section picks up two substrates at the same time and transfers them using two pick-up members arranged at intervals between the two substrate receiving tables provided in the substrate receiving section. to the component mounting section.

在这样的元件安装装置中,存在着以第一尺寸(小尺寸)的基板为对象进行元件安装的元件安装装置、和以尺寸比第一尺寸的基板大的第二尺寸(大尺寸)的基板为对象进行元件安装的元件安装装置。在此,在以小尺寸的基板为对象进行元件安装的元件安装装置将两张大尺寸的基板载置于两个基板接收台的情况下,两张基板相互干涉,因此以大尺寸的基板为对象进行元件安装的元件安装装置需要是与以小尺寸的基板为对象进行元件安装的元件安装装置不同的装置,在对大小两种尺寸的基板进行元件安装的基板生产线中,需要将与大小两种基板对应的两种元件安装装置分别组装到基板生产线。Among such component mounting devices, there are component mounting devices that mount components on boards of the first size (small size), and boards of the second size (large size) that are larger in size than the boards of the first size. A component mounting device that performs component mounting for objects. Here, when two large-sized substrates are placed on two substrate receiving tables by a component mounting device that performs component mounting on small-sized substrates, the two substrates interfere with each other, so the target is large-sized substrates. The component mounting device for component mounting needs to be different from the component mounting device for component mounting on small-sized substrates. The two types of component mounting devices corresponding to the substrate are respectively assembled in the substrate production line.

专利文献1:日本特开平6-75199号公报Patent Document 1: Japanese Patent Application Laid-Open No. 6-75199

然而,如上所述将与大小两种基板对应的两种元件安装装置分别组装到基板生产线的话,基板的生产线变为多条,存在着在成本方面不利的问题。However, if the two types of component mounting devices corresponding to the two types of large and small substrates are separately assembled on the substrate production line as described above, there will be a plurality of substrate production lines, which is disadvantageous in terms of cost.

发明内容Contents of the invention

因此,本发明的目的在于提供一种元件安装装置和元件安装方法,对于小尺寸的基板和大尺寸的基板均能够进行元件安装,能够使大小两种尺寸的基板的生产线统一化。Therefore, an object of the present invention is to provide a component mounting device and a component mounting method that can perform component mounting on both small-sized and large-sized substrates, and can unify production lines for both large and small-sized substrates.

技术方案1涉及的元件安装装置为具备对基板进行元件安装的元件安装部的元件安装装置,其中,所述元件安装装置具备:基板接收部,将两个基板接收台的间隔设定为第一间隔而接收从上游工序侧输送来的两张第一尺寸的基板,或者将所述两个基板接收台的间隔设定为比所述第一间隔大的第二间隔而接收从所述上游工序侧输送来的两张尺寸比所述第一尺寸的基板大的第二尺寸的基板;以及基板转移部,将所述基板接收部接收到的所述第一尺寸或所述第二尺寸的基板转移到所述基板安装部,在所述基板接收部接收到两张所述第二尺寸的基板的情况下,所述基板转移部将该接收到的两张所述第二尺寸的基板一张一张地分别转移到元件安装部。The component mounting apparatus according to Claim 1 is a component mounting apparatus including a component mounting portion for mounting components on a substrate, wherein the component mounting apparatus includes: a substrate receiving portion that sets an interval between two substrate receiving stages to a first Receive two substrates of the first size transported from the upstream process side at intervals, or set the interval between the two substrate receiving stations to a second interval greater than the first interval and receive the substrates from the upstream process Two substrates of a second size larger than the substrate of the first size that are transported from the side; and a substrate transfer part that receives the substrate of the first size or the second size received by the substrate receiving part transfer to the substrate mounting section, and in the case where the substrate receiving section receives two substrates of the second size, the substrate transfer section takes one of the received two substrates of the second size Transfer to the component mounting part one by one.

技术方案2所述的元件安装装置为,在技术方案1所述的元件安装装置中,在所述基板接收部接收到两张所述第一尺寸的基板的情况下,所述基板转移部将该接收到的两张所述第一尺寸的基板同时转移到所述元件安装部。In the component mounting device according to claim 2, in the component mounting device according to claim 1, when the board receiving part receives two boards of the first size, the board transfer part The received two substrates of the first size are simultaneously transferred to the component mounting section.

技术方案3所述的元件安装装置为,在技术方案1或2所述的元件安装装置中,所述元件安装部具备:基板保持部,对由所述基板转移部同时转移两张过来的所述第一尺寸的基板或者由所述基板转移部一张一张地分别转移过来的所述第二尺寸的基板进行保持;粘接部件粘贴作业部,将粘接部件粘贴到由基板保持部保持的基板;元件搭载作业部,将元件搭载到由所述粘接部件粘贴作业部粘贴了粘接部件的基板;以及元件压接作业部,将利用所述元件搭载作业部搭载的元件压接于在所述元件搭载作业部搭载了元件的基板,所述基板保持部能够选择性地安装同时保持两张所述第一尺寸的基板的第一基板保持台或者保持一张所述第二尺寸的基板的第二基板保持台。In the component mounting device according to claim 3, in the component mounting device according to claim 1 or 2, the component mounting part includes a board holding part for simultaneously transferring two sheets of the board from the board transferring part. The substrates of the first size or the substrates of the second size transferred one by one by the substrate transfer part are held; The component mounting operation part mounts the component on the substrate on which the adhesive member is pasted by the adhesive member pasting operation part; and the component crimping operation part crimps the component mounted by the component mounting operation part on the substrate A substrate on which components are mounted on the component mounting operation section, the substrate holding section can selectively mount a first substrate holding table that simultaneously holds two substrates of the first size or a single substrate of the second size. A second substrate holding table for the substrate.

技术方案4所述的元件安装装置为,在技术方案1至3的任意一项所述的元件安装装置中,所述基板转移部具有两个拾取构件,所述两个拾取构件被配置成能够同时拾取所述基板接收部在将所述两个基板接收台调整为所述第一间隔的状态下接收到的两张所述第一尺寸的基板的间隔,在所述基板接收部在将所述两个基板接收台调整为所述第一间隔的状态下接收到两张所述第一尺寸的基板的情况下,所述基板转移部利用所述两个拾取构件同时拾取两张所述第一尺寸的基板并转移到所述基板保持部。In the component mounting device according to claim 4, in the component mounting device according to any one of claims 1 to 3, the substrate transfer section has two pick-up members configured to be able to Simultaneously pick up the interval between two substrates of the first size received by the substrate receiving section when the two substrate receiving stages are adjusted to the first interval, and place the substrates in the substrate receiving section When the two substrate receiving stations are adjusted to the first interval and receive two substrates of the first size, the substrate transfer part picks up two sheets of the second substrate at the same time by using the two pick-up members. One-size substrate and transfer to the substrate holder.

技术方案5所述的元件安装装置为,在技术方案4所述的元件安装装置中,在所述基板接收部在将所述两个基板接收台调整为所述第二间隔的状态下接收到两张所述第二尺寸的基板的情况下,所述基板转移部利用所述两个拾取构件中的一个拾取构件拾取一张所述第二尺寸的基板并转移到所述基板保持部,然后在所述基板接收部将所述两个基板接收台调整为所述第一间隔后,所述基板转移部利用所述两个拾取构件中的另一个拾取构件拾取余下的一张所述第二尺寸的基板并转移到所述基板保持部。In the component mounting apparatus according to claim 5, in the component mounting apparatus according to claim 4, the board receiving unit receives the substrate while the two board receiving stages are adjusted to the second interval. In the case of two substrates of the second size, the substrate transfer unit uses one of the two pick-up members to pick up a substrate of the second size and transfer it to the substrate holding unit, and then After the substrate receiving part adjusts the two substrate receiving stages to the first interval, the substrate transfer part picks up the remaining one of the second pick-up members by the other pick-up member of the two pick-up members. sized substrates and transfer to the substrate holder.

技术方案6涉及的元件安装方法为通过具备对基板进行元件安装的元件安装部的元件安装装置实现的元件安装方法,其中,所述元件安装方法包括:基板接收工序,将两个基板接收台的间隔设定为第一间隔而接收从上游工序侧输送来的两张第一尺寸的基板,或者将所述两个基板接收台的间隔设定为比所述第一间隔大的第二间隔而接收从所述上游工序侧输送来的两张尺寸比所述第一尺寸的基板大的第二尺寸的基板;以及基板转移工序,将在所述基板接收工序中接收到的所述第一尺寸或所述第二尺寸的基板转移到所述基板安装部,在所述基板接收工序中接收到两张所述第二尺寸的基板的情况下,在所述基板转移工序中将该接收到的两张所述第二尺寸的基板一张一张地分别转移到元件安装部。The component mounting method according to claim 6 is a component mounting method realized by a component mounting device provided with a component mounting section for component mounting on a substrate, wherein the component mounting method includes a substrate receiving step of placing two substrate receiving stages The interval is set as the first interval to receive two substrates of the first size transported from the upstream process side, or the interval between the two substrate receiving stations is set to a second interval greater than the first interval to receiving two substrates of a second size larger than the substrate of the first size conveyed from the upstream process side; and a substrate transfer process of transferring the first size received in the substrate receiving process Or the substrate of the second size is transferred to the substrate mounting part, and when two substrates of the second size are received in the substrate receiving process, the received substrates are transferred in the substrate transfer process The two substrates of the second size are transferred to the component mounting part one by one.

技术方案7所述的元件安装方法为,在技术方案6所述的元件安装方法中,在所述基板接收工序中接收到两张所述第一尺寸的基板的情况下,在所述基板转移工序中将该接收到的两张所述第一尺寸的基板同时转移到所述元件安装部。In the component mounting method according to claim 7, in the component mounting method according to claim 6, when two substrates of the first size are received in the substrate receiving step, the substrate transfer In the process, the received two substrates of the first size are simultaneously transferred to the component mounting part.

在本发明中,将两个基板接收台的间隔设定为第一间隔而接收从上游工序侧输送来的两张第一尺寸(小尺寸)的基板,或者将两个基板接收台的间隔设定为比第一间隔大的第二间隔而接收从上游工序侧输送来的两张尺寸比第一尺寸的基板大的第二尺寸(大尺寸)的基板。并且,在接收到两张第二尺寸的基板的情况下,将该接收到的两张第二尺寸的基板一张一张地分别转移到元件安装部,能够对第一尺寸的基板和第二尺寸的基板中的任意一种基板进行元件安装,因此能够使大小两种尺寸的基板的生产线统一化。In the present invention, the interval between the two substrate receiving stations is set as the first interval to receive two substrates of the first size (small size) conveyed from the upstream process side, or the interval between the two substrate receiving stations is set to Two substrates of a second size (large size) that are larger than the substrate of the first size and transported from the upstream process side are received at a second interval that is larger than the first interval. And, in the case of receiving two substrates of the second size, the received two substrates of the second size are transferred to the component mounting part one by one, so that the substrate of the first size and the substrate of the second Since component mounting is performed on any one of boards of different sizes, it is possible to unify production lines for boards of both sizes.

附图说明Description of drawings

图1是本发明的一个实施方式的元件安装装置的俯视图。FIG. 1 is a plan view of a component mounting device according to one embodiment of the present invention.

图2是示出本发明一个实施方式的元件安装装置的对基板的元件安装作业的进行步骤的图。FIG. 2 is a diagram showing a procedure for performing a component mounting operation on a substrate in the component mounting apparatus according to one embodiment of the present invention.

图3是示出本发明一个实施方式的元件安装装置的控制系统的框图。FIG. 3 is a block diagram showing a control system of the component mounting apparatus according to one embodiment of the present invention.

图4(a)(b)是示出本发明一个实施方式的元件安装装置所具备的基板接收部的结构的图。4( a ) and ( b ) are diagrams illustrating a configuration of a board receiving unit included in a component mounting device according to an embodiment of the present invention.

图5(a)(b)是本发明一个实施方式的元件安装装置所具备的ACF粘贴作业部和左方基板运送部的立体图。5( a ) and ( b ) are perspective views of an ACF pasting unit and a left board transport unit included in the component mounting apparatus according to the embodiment of the present invention.

图6(a)(b)是本发明一个实施方式的元件安装装置所具备的ACF粘贴作业部和左方基板运送部的立体图。6( a ) and ( b ) are perspective views of an ACF pasting unit and a left board transport unit included in the component mounting apparatus according to the embodiment of the present invention.

图7(a)(b)(c)是示出利用本发明的一个实施方式中的ACF粘贴作业部进行的ACF带的粘贴作业的执行步骤的图。7( a ), ( b ) and ( c ) are diagrams showing the execution procedure of the ACF tape pasting operation performed by the ACF pasting operation unit in one embodiment of the present invention.

图8(a)(b)是本发明一个实施方式的元件安装装置所具备的元件搭载作业部和中央基板运送部(右方基板运送部)的立体图。8( a ) and ( b ) are perspective views of a component mounting operation unit and a central board transport unit (right board transport unit) included in the component mounting apparatus according to one embodiment of the present invention.

图9(a)(b)是本发明一个实施方式的元件安装装置所具备的元件搭载作业部和中央基板运送部(右方基板运送部)的立体图。9( a ) and ( b ) are perspective views of a component mounting operation unit and a central board transport unit (right board transport unit) included in the component mounting apparatus according to one embodiment of the present invention.

图10是示出利用本发明一个实施方式的元件搭载作业部进行的元件搭载作业的执行步骤的流程图。FIG. 10 is a flowchart showing the execution procedure of a component mounting operation performed by a component mounting operation unit according to one embodiment of the present invention.

图11(a)(b)(c)是示出利用本发明一个实施方式的元件搭载作业部进行的元件搭载作业的执行步骤的图。11( a ) ( b ) ( c ) are diagrams illustrating execution procedures of component mounting work performed by the component mounting work unit according to one embodiment of the present invention.

图12(a)(b)(c)是示出利用本发明一个实施方式的元件搭载作业部进行的元件搭载作业的执行步骤的图。12( a ), (b) and (c) are diagrams showing the execution procedure of component mounting work performed by the component mounting work unit according to one embodiment of the present invention.

图13(a)(b)是本发明一个实施方式的元件安装装置所具备的第一元件压接作业部(第二元件压接作业部)和左方基板运送部(右方基板运送部)的立体图。13( a ) and ( b ) show the first component crimping unit (second component crimping unit) and the left board transport unit (right board transport unit) included in the component mounting apparatus according to the embodiment of the present invention. stereogram.

图14(a)(b)是本发明一个实施方式的元件安装装置所具备的第一元件压接作业部(第二元件压接作业部)和左方基板运送部(右方基板运送部)的立体图。14( a ) and ( b ) show the first component crimping unit (second component crimping unit) and the left board transport unit (right board transport unit) included in the component mounting apparatus according to the embodiment of the present invention. stereogram.

图15(a)(b)(c)是示出本发明一个实施方式的第一元件压接作业部(第二元件压接作业部)的元件压接作业的执行步骤的图。15( a ), ( b ) and ( c ) are diagrams showing the execution steps of the component crimping work of the first component crimping work unit (second component crimping work unit) according to the embodiment of the present invention.

图16是示出本发明一个实施方式的元件安装装置执行的元件压接作业的步骤的流程图。FIG. 16 is a flowchart showing the steps of the component crimping operation performed by the component mounting apparatus according to the embodiment of the present invention.

图17(a)~(f)是示出利用本发明一个实施方式的第一元件压接作业部(第二元件压接作业部)进行的元件压接作业的执行步骤的图。17( a ) to ( f ) are diagrams showing the execution steps of component crimping work performed by the first component crimping work unit (second component crimping work unit) according to one embodiment of the present invention.

图18(a)(b)是示出本发明一个实施方式的元件安装装置所具备的基板交接部的结构的图。18( a ) and ( b ) are diagrams illustrating the configuration of a board delivery section included in a component mounting device according to an embodiment of the present invention.

图19是本发明的一个实施方式的基板转移部的立体图。Fig. 19 is a perspective view of a substrate transfer unit according to one embodiment of the present invention.

图20是本发明的一个实施方式的元件安装装置的局部俯视图。Fig. 20 is a partial plan view of a component mounting device according to one embodiment of the present invention.

图21(a)(b)(c)是示出利用本发明一个实施方式的元件安装装置进行的元件安装作业的执行步骤的图。21( a ) ( b ) ( c ) are diagrams showing the execution steps of component mounting work performed by the component mounting device according to one embodiment of the present invention.

图22(a)(b)(c)是示出利用本发明一个实施方式的元件安装装置进行的元件安装作业的执行步骤的图。22( a ), (b) and (c) are diagrams showing execution steps of component mounting work performed by the component mounting device according to one embodiment of the present invention.

图23(a)(b)(c)是示出利用本发明一个实施方式的元件安装装置进行的元件安装作业的执行步骤的图。23( a ), (b) and (c) are diagrams showing the execution steps of component mounting work performed by the component mounting device according to one embodiment of the present invention.

图24(a)(b)(c)是示出利用本发明一个实施方式的元件安装装置进行的元件安装作业的执行步骤的图。24( a ) ( b ) ( c ) are diagrams illustrating execution steps of component mounting work performed by the component mounting device according to one embodiment of the present invention.

图25(a)(b)(c)是示出利用本发明一个实施方式的元件安装装置进行的元件安装作业的执行步骤的图。25( a ) ( b ) ( c ) are diagrams illustrating execution steps of component mounting work performed by the component mounting device according to one embodiment of the present invention.

图26(a)(b)是示出利用本发明一个实施方式的元件安装装置进行的元件安装作业的执行步骤的图。26( a ) and ( b ) are diagrams illustrating execution steps of component mounting work performed by the component mounting device according to one embodiment of the present invention.

图27(a)(b)(c)是示出利用本发明一个实施方式的元件安装装置进行的元件安装作业的执行步骤的图。27( a ) ( b ) ( c ) are diagrams illustrating execution steps of component mounting work performed by the component mounting device according to one embodiment of the present invention.

图28(a)(b)(c)是示出利用本发明一个实施方式的元件安装装置进行的元件安装作业的执行步骤的图。28( a ) ( b ) ( c ) are diagrams showing execution steps of component mounting work performed by the component mounting device according to one embodiment of the present invention.

图29(a)(b)(c)是示出利用本发明一个实施方式的元件安装装置进行的元件安装作业的执行步骤的图。29( a ) ( b ) ( c ) are diagrams illustrating execution steps of component mounting work performed by the component mounting device according to one embodiment of the present invention.

图30(a)(b)(c)是示出利用本发明一个实施方式的元件安装装置进行的元件安装作业的执行步骤的图。30 ( a ) ( b ) ( c ) are diagrams showing execution steps of component mounting work performed by the component mounting device according to one embodiment of the present invention.

图31(a)(b)是示出利用本发明一个实施方式的元件安装装置进行的元件安装作业的执行步骤的图。31( a ) and ( b ) are diagrams showing execution steps of component mounting work performed by the component mounting device according to one embodiment of the present invention.

标号说明Label description

1:元件安装装置;1: component mounting device;

2:基板;2: Substrate;

3:ACF带(粘接部件);3: ACF tape (adhesive parts);

4:元件;4: component;

21:基板接收部;21: substrate receiving part;

21s:基板接收台;21s: substrate receiving station;

22:元件安装部;22: component installation part;

22a:ACF粘贴作业部(粘接部件粘贴作业部);22a: ACF paste operation department (adhesive parts paste operation department);

22b:元件搭载作业部;22b: component loading operation department;

22c:第一元件压接作业部(元件压接作业部);22c: The first component crimping operation department (component crimping operation department);

22d:第二元件压接作业部(元件压接作业部);22d: the second component crimping operation department (component crimping operation department);

33L:左方基板运送部(基板保持部);33L: Left substrate conveying part (substrate holding part);

36:基板保持台(第一基板保持台);36: substrate holding table (first substrate holding table);

36T:基板保持台(第二基板保持台);36T: substrate holding table (second substrate holding table);

82a:左方基板转移部(基板转移部);82a: left substrate transfer part (substrate transfer part);

94:臂(拾取构件)。94: Arm (pick component).

具体实施方式Detailed ways

下面,参照附图说明本发明的实施方式。图1所示的液晶面板基板制造用的元件安装装置1执行如下的元件安装作业:在将作为粘接部件的ACF带3粘贴到在图2所示的长方形的面板状的基板2的四边中的一边的端部设置的电极部2a后,将元件4搭载(临时压接)于该粘贴好的ACF带3,然后利用压接(正式压接)将元件4装配于基板2。此处采用的元件4例如为驱动电路元件,其具有薄膜状部分4a。Hereinafter, embodiments of the present invention will be described with reference to the drawings. The component mounting apparatus 1 for manufacturing liquid crystal panel substrates shown in FIG. 1 executes component mounting operations in which ACF tape 3 as an adhesive member is attached to four sides of a rectangular panel-shaped substrate 2 shown in FIG. 2 . After the electrode portion 2a is provided at one end of the ACF tape 3, the element 4 is mounted (temporarily crimped) on the pasted ACF tape 3, and then the element 4 is mounted on the substrate 2 by crimping (full crimping). The element 4 employed here is, for example, a drive circuit element, which has a film-like portion 4a.

在图1中,元件安装装置1的基台11从自操作者OP观察到的左右方向(图1中的纸面左右方向,设为X轴方向)的左方起按顺序依次配置左方基台11a、中央基台11b和右方基台11c,在左方基台11a具备基板接收部21,在中央基台11b具备元件安装部22,在右方基台11c具备基板交接部23。上述基板接收部21、元件安装部22和基板交接部23分别由作为控制构件的控制装置24(图3)控制其动作。基板2沿X轴方向从左侧向右侧,即按照基板接收部21、元件安装部22、基板交接部23的顺序流动并依次被实施作业。In FIG. 1 , the bases 11 of the component mounting apparatus 1 are arranged in order from the left in the left-right direction viewed from the operator OP (the left-right direction on the paper in FIG. 1 is referred to as the X-axis direction). The table 11a, the central base 11b, and the right base 11c include a board receiving section 21 on the left base 11a, a component mounting section 22 on the central base 11b, and a board transfer section 23 on the right base 11c. The operations of the above-mentioned board receiving unit 21 , component mounting unit 22 and board delivery unit 23 are controlled by a control device 24 ( FIG. 3 ) as a control member. The substrate 2 flows from left to right along the X-axis direction, that is, in the order of the substrate receiving part 21 , the component mounting part 22 , and the substrate delivery part 23 , and operations are performed sequentially.

在图1中,基板接收部21具有左侧(上游工序侧)和右侧(下游工序侧)的两个基板接收台21s。所述两个基板接收台21s被设置成相对于左方基台11a升降自如,在两个基板接收台21s载置有从元件安装装置1的上游工序侧输送来的两张基板2。In FIG. 1 , the substrate receiving unit 21 has two substrate receiving tables 21 s on the left side (upstream process side) and right side (downstream process side). The two substrate receiving tables 21 s are provided so as to be able to move up and down with respect to the left base 11 a, and two substrates 2 transported from the upstream process side of the component mounting apparatus 1 are placed on the two substrate receiving tables 21 s.

如图4所示,右侧的基板接收台21s相对于左方基台11a固定,左侧的基板接收台21s能够在左方基台11a上沿X轴方向移动。该元件安装装置1能够相对于大小不同的尺寸的基板2进行元件安装作业,例如在进行对第一尺寸(以下,称为小尺寸)的基板2的元件安装作业的情况下,将两个基板接收台21s的间隔设定为能够彼此不干涉地接收两张小尺寸的基板2的间隔(称为第一间隔)(图4(a)),而在进行对尺寸比小尺寸的基板2大的第二尺寸(以下,称为大尺寸)的基板2的元件安装作业的情况下,将两个基板接收台21s的间隔设定为比第一间隔大的、能够彼此不干涉地接收两张大尺寸的基板2的间隔(称为第二间隔)(图4(b))。As shown in FIG. 4 , the substrate receiving table 21s on the right is fixed to the left base 11a, and the substrate receiving table 21s on the left is movable in the X-axis direction on the left base 11a. This component mounting apparatus 1 can perform component mounting operations on substrates 2 of different sizes. The interval between the receiving stations 21s is set so that two small-sized substrates 2 can be received without interfering with each other (referred to as the first interval) (Fig. In the case of component mounting work on a substrate 2 of the second size (hereinafter referred to as a large size), the interval between the two substrate receiving stations 21s is set to be larger than the first interval so that two large substrates can be received without interfering with each other. Dimensions of the substrate 2 spacing (referred to as the second spacing) (Figure 4(b)).

元件安装部22具有:进行将作为粘接部件的ACF带3粘贴到基板2的作业的ACF粘贴作业部22a(粘接部件粘贴作业部)、进行元件4到基板2的搭载作业的元件搭载作业部22b、将利用元件搭载作业部22b搭载的元件4压接于在元件搭载作业部22b进行过元件4的搭载作业的基板2的两个元件压接作业部(第一元件压接作业部22c和第二元件压接作业部22d)。The component mounting unit 22 has an ACF sticking operation unit 22a (adhesive component sticking work unit) for sticking the ACF tape 3 as an adhesive member to the substrate 2, and a component mounting operation for performing the mounting operation of the component 4 on the substrate 2. part 22b, two component crimping operation parts (the first component crimping operation part 22c) that press-bond the component 4 mounted by the component mounting operation part 22b to the substrate 2 that has carried out the mounting operation of the component 4 in the component mounting operation part 22b. and the second element crimping operation part 22d).

ACF粘贴作业部22a设于中央基台11b的左部区域,元件搭载作业部22b设于中央基台11b的中央区域。第一元件压接作业部22c设于中央基台11b上的ACF粘贴作业部22a与元件搭载作业部22b之间的区域,第二元件压接作业部22d设于中央基台11b上的元件搭载作业部22b的右侧的区域。即,在本实施方式的元件安装装置1中,第一元件压接作业部22c和第二元件压接作业部22d被设置于从左右两侧方夹着元件搭载作业部22b的位置。The ACF bonding operation part 22a is provided in the left area of the center base 11b, and the component mounting operation part 22b is provided in the center area of the center base 11b. The first component crimping operation part 22c is provided in the area between the ACF bonding operation part 22a and the component mounting operation part 22b on the central base 11b, and the second component crimping operation part 22d is provided on the component mounting part on the central base 11b. The area on the right side of the working part 22b. That is, in the component mounting apparatus 1 of this embodiment, the first component crimping operation part 22c and the second component crimping operation part 22d are provided at positions sandwiching the component mounting operation part 22b from the left and right sides.

在中央基台11b上的ACF粘贴作业部22a的前方区域(将从操作者OP观察到的前后方向设为Y轴方向)设有第一底座部31,在中央基台11b上的元件搭载作业部22b、第一元件压接作业部22c和第二元件压接作业部22d的前方区域沿X轴方向延伸设置有第二底座部32。The first base part 31 is provided in the area in front of the ACF bonding operation part 22a on the central base 11b (the front and rear direction viewed from the operator OP is the Y-axis direction), and the component mounting operation on the central base 11b A second base portion 32 is provided extending in the X-axis direction in front regions of the portion 22b, the first component crimping operation portion 22c, and the second component crimping operation portion 22d.

在图1和图5(a)、(b)中,在第一底座部31设有左方基板运送部33L。该左方基板运送部33L在第一底座部31上沿Y轴方向延伸设置,其具有在第一底座部31上沿X轴方向移动自如地设置的Y轴工作台34、在Y轴工作台34上沿Y轴方向移动自如地设置的移动台35、以及在移动台35的上表面沿X轴方向并列设置的两个基板保持台36。从基板接收部21的两个基板接收台21s将两张基板2转移并保持在两个基板保持台36上。In FIGS. 1 and 5( a ) and ( b ), the first base unit 31 is provided with a left substrate transport unit 33L. The left substrate transport unit 33L is extended in the Y-axis direction on the first base portion 31 , and has a Y-axis table 34 movably provided in the X-axis direction on the first base portion 31 . 34 , a movable table 35 provided movably in the Y-axis direction, and two substrate holding tables 36 arranged side by side in the X-axis direction on the upper surface of the movable table 35 . Two substrates 2 are transferred from the two substrate receiving stages 21 s of the substrate receiving section 21 and held on the two substrate holding stages 36 .

如图6(a)所示,左方基板运送部33L的两个基板保持台36能够调换成一张基板保持台36T,在该情况下,从基板接收部21的两个基板接收台21s中的一个基板接收台21s将一张基板2转移并保持在基板保持台36T上。As shown in FIG. 6( a ), the two substrate holding tables 36 of the left substrate transport unit 33L can be exchanged for one substrate holding table 36T. One substrate receiving table 21s transfers and holds one substrate 2 on the substrate holding table 36T.

另外,在左方基板运送部33L安装两个基板保持台36是为了利用所述两个基板保持台36保持两张小尺寸的基板2的情况,而在左方基板运送部33L安装一个基板保持台36T是为了利用该一个基板保持台36T保持一张大尺寸的基板2的情况。即,在本实施方式中,左方基板运送部33L能够选择性地安装同时保持两张小尺寸的基板2的两个基板保持台36(第一基板保持台)或者保持一张大尺寸的基板2的一个基板保持台36T(第二基板保持台)。In addition, two substrate holding tables 36 are installed on the left substrate conveying part 33L in order to use the two substrate holding stages 36 to hold two small-sized substrates 2, and one substrate holding table 36 is installed on the left substrate conveying part 33L. The table 36T is for holding a single large-sized substrate 2 by the one substrate holding table 36T. That is, in the present embodiment, the left substrate transport unit 33L can selectively mount two substrate holding tables 36 (first substrate holding tables) that simultaneously hold two small-sized substrates 2 or hold one large-sized substrate 2 . One substrate holding table 36T (second substrate holding table).

两个基板保持台36(或者一个基板保持台36T)分别相对于移动台35升降自如,控制装置24使移动台35相对于Y轴工作台34在Y轴方向移动来进行基板2的运送,使两个基板保持台36或一个基板保持台36T升降,使在两个基板保持台36或一个基板保持台36T上载置的基板2上下移动。The two substrate holding tables 36 (or one substrate holding table 36T) can move up and down freely relative to the movable table 35, and the control device 24 moves the movable table 35 in the Y-axis direction relative to the Y-axis table 34 to carry out the transportation of the substrate 2, so that The two substrate holding tables 36 or one substrate holding table 36T are raised and lowered, and the substrate 2 placed on the two substrate holding tables 36 or one substrate holding table 36T is moved up and down.

在图5(a)、(b)和图6(a)、(b)中,ACF粘贴作业部22a具有在中央基台11b的上方沿X轴方向并列设置的两个粘贴头41、和在各粘贴头41的下方沿X轴方向延伸设置的两个ACF粘贴作业用的辅助台42。In Fig. 5 (a), (b) and Fig. 6 (a), (b), the ACF sticking operation part 22a has two sticking heads 41 arranged side by side along the X-axis direction above the central base 11b, and Two auxiliary tables 42 for ACF pasting work are provided extending below each pasting head 41 along the X-axis direction.

两个粘贴头41分别具备:带供给部41a,其抽出并供给ACF带3,将所述抽出的ACF带3以预定长度切断并将其以水平姿势保持在预定的位置;以及粘贴工具41b,其将由带供给部41a保持在水平姿势的ACF带3从上方按压到ACF粘贴作业用的辅助台42一侧。The two sticking heads 41 are respectively equipped with: a tape supply part 41a, which draws out and supplies the ACF tape 3, cuts the drawn out ACF tape 3 to a predetermined length and holds it at a predetermined position in a horizontal posture; and a sticking tool 41b, This presses the ACF tape 3 held in a horizontal posture by the tape supply unit 41 a from above to the side of the auxiliary table 42 for ACF pasting work.

控制装置24使左方基板运送部33L的移动台35在设定于Y轴工作台34上的前方的“基板交接位置”(图5(a)和图6(a))和设定于后方的“作业位置”(图5(b)和图6(b))之间移动。“基板交接位置”是能够相对于两个基板保持台36(或者一个基板保持台36T)进行基板2的交接的位置,“作业位置”是能够使载置于两个基板保持台36的两张基板2各自的电极部2a位于两个ACF粘贴作业用的辅助台42的上方的位置(或者能够使载置于一个基板保持台36T的一张基板2的电极部2a位于两个ACF粘贴作业用的辅助台42中的一个辅助台42的上方的位置)。The control device 24 sets the moving stage 35 of the left substrate conveying unit 33L at the "substrate transfer position" set in front of the Y-axis table 34 (Fig. Move between the "working positions" (Fig. 5(b) and Fig. 6(b)). The "substrate transfer position" is a position where the substrate 2 can be transferred to and from the two substrate holding tables 36 (or one substrate holding table 36T), and the "work position" is a position where two substrates placed on the two substrate holding tables 36 can be placed. The respective electrode portions 2a of the substrates 2 are located above the auxiliary table 42 for the two ACF bonding operations (or the electrode portions 2a of one substrate 2 placed on one substrate holding table 36T can be positioned above the two ACF bonding operations). The position above one of the auxiliary tables 42 of the auxiliary tables 42).

参照图7说明由粘贴头41将ACF带3粘贴到基板2的粘贴作业。首先,如图7(a)所示,控制装置24使带供给部41a动作并使按预定长度切断了的状态的ACF带3位于基板2(电极部2a)的上方。接着,如图7(b)所示,使粘贴工具41b下降,针对每个基板2将ACF带3按压到ACF粘贴作业用的辅助台42。最后,如图7(c)所示,使粘贴工具41b相对于基板2上升。结果,将预定长度的ACF带3相对于基板2粘贴。The sticking operation of sticking the ACF tape 3 to the substrate 2 by the sticking head 41 will be described with reference to FIG. 7 . First, as shown in FIG. 7( a ), the control device 24 operates the tape supply unit 41 a to position the ACF tape 3 cut to a predetermined length above the substrate 2 (electrode portion 2 a ). Next, as shown in FIG. 7( b ), the bonding tool 41 b is lowered, and the ACF tape 3 is pressed against the auxiliary table 42 for the ACF bonding operation for each substrate 2 . Finally, as shown in FIG. 7( c ), the sticking tool 41 b is raised with respect to the substrate 2 . As a result, the ACF tape 3 of a predetermined length is attached to the substrate 2 .

在图1中,在第二底座部32设有中央基板运送部33C和右方基板运送部33R。中央基板运送部33C和右方基板运送部33R为同类型,中央基板运送部33C位于右方基板运送部33R的左方。如图8(a)、(b)所示,中央基板运送部33C(右方基板运送部33R也同样)具有在第二底座部32上沿X轴方向移动自如地设置的Y轴工作台51、在Y轴工作台51上沿Y轴方向移动自如地设置的移动台52、以及在移动台52的上表面沿X轴方向并列设置的两个基板保持台53。移动台52内置有使两个基板保持台53分别向Z轴方向升降的升降机构。两个基板保持台53通过Y轴工作台51相对于第二底座部32在X轴方向的移动和移动台52相对于Y轴工作台51的移动而向水平方向移动自如,从左方基板运送部33L的两个基板保持台36将两张基板2转移并保持在两个基板保持台53上。In FIG. 1 , a central substrate transport unit 33C and a right substrate transport unit 33R are provided on the second base unit 32 . The central substrate transport unit 33C is of the same type as the right substrate transport unit 33R, and the central substrate transport unit 33C is located to the left of the right substrate transport unit 33R. As shown in FIGS. 8( a ) and ( b ), the central substrate transport unit 33C (the same applies to the right substrate transport unit 33R) has a Y-axis table 51 provided on the second base unit 32 to be movable in the X-axis direction. , a moving table 52 provided movably in the Y-axis direction on the Y-axis table 51 , and two substrate holding tables 53 arranged side by side in the X-axis direction on the upper surface of the moving table 52 . The moving table 52 incorporates an elevating mechanism for elevating the two substrate holding tables 53 in the Z-axis direction, respectively. The two substrate holding tables 53 are freely movable in the horizontal direction by the movement of the Y-axis table 51 relative to the second base part 32 in the X-axis direction and the movement of the moving table 52 relative to the Y-axis table 51, and the substrate is transported from the left side. The two substrate holding tables 36 of the section 33L transfer and hold the two substrates 2 on the two substrate holding tables 53 .

中央基板运送部33C的两个基板保持台53和右方基板运送部33R的两个基板保持台53分别能够如图9(a)所示地调换成一张基板保持台53T,在该情况下,从左方基板运送部33L的一个基板保持台36T将一张基板2转移并保持在基板保持台53T上。The two substrate holding tables 53 of the central substrate transport unit 33C and the two substrate holding tables 53 of the right substrate transport unit 33R can be replaced with one substrate holding table 53T as shown in FIG. 9( a ). In this case, One substrate 2 is transferred from one substrate holding table 36T of the left substrate transport unit 33L and held on the substrate holding table 53T.

另外,在中央基板运送部33C和右方基板运送部33R安装两个基板保持台53是为了利用所述两个基板保持台53保持两张小尺寸的基板2的情况,而在中央基板运送部33C和右方基板运送部33R安装一个基板保持台53T是为了利用该一个基板保持台53T保持一张大尺寸的基板2的情况。即,在本实施方式中,中央基板运送部33C和右方基板运送部33R能够选择性地安装同时保持两张小尺寸的基板的两个基板保持台53(第一基板保持台)或者保持一张大尺寸的基板2的一个基板保持台53T(第二基板保持台)。In addition, two substrate holding tables 53 are installed in the central substrate conveying part 33C and the right substrate conveying part 33R in order to use the two substrate holding tables 53 to hold two small-sized substrates 2, and the central substrate conveying part One substrate holding table 53T is attached to 33C and the right substrate conveyance part 33R in order to hold a single large-sized substrate 2 by the one substrate holding table 53T. That is, in the present embodiment, the central substrate transport unit 33C and the right substrate transport unit 33R can selectively mount two substrate holding tables 53 (first substrate holding tables) that simultaneously hold two small-sized substrates or hold one substrate holding table. One substrate holding table 53T (second substrate holding table) for the large-sized substrate 2 is expanded.

两个基板保持台53(或者一个基板保持台53T)各自通过Y轴工作台51相对于第二底座部32在X轴方向的移动和移动台52相对于Y轴工作台51的移动而沿水平方向移动自如,并且被设置成通过在移动台52内置的上述升降机构的驱动而分别升降自如。控制装置24通过进行Y轴工作台51相对于第二底座部32在X轴方向的移动和移动台52相对于Y轴工作台51向Y轴方向的移动并使两个基板保持台53(或者一个基板保持台53T)在水平面内方向移动,来进行基板2的运送,使两个基板保持台53(或者一个基板保持台53T)下降/上升,使载置于两个基板保持台53的两张基板2(或者载置于一个基板保持台53T的一张基板2)相对于辅助台64的上表面着陆/离开。The two substrate holding tables 53 (or one substrate holding table 53T) are each moved horizontally by the movement of the Y-axis table 51 in the X-axis direction relative to the second base portion 32 and the movement of the moving table 52 relative to the Y-axis table 51 . The direction of movement is free, and it is provided so that it can be moved up and down freely by the driving of the above-mentioned lifting mechanism built in the moving table 52 . The control device 24 makes the two substrate holding tables 53 (or One substrate holding table 53T) is moved in the horizontal plane direction to carry out the transportation of the substrate 2, and the two substrate holding tables 53 (or one substrate holding table 53T) are lowered/raised, and the two substrates placed on the two substrate holding tables 53 One substrate 2 (or one substrate 2 placed on one substrate holding table 53T) lands on/off the upper surface of the auxiliary table 64 .

在图1、图8(a)、(b)和图9(a)、(b)中,元件搭载作业部22b具备:元件供给部61,其从中央基台11b的后部向后方伸出设置并进行元件4的供给;搭载头63,其借助在中央基台11b的中央后部设置的搭载头移动机构62在水平面内移动自如,并从上方吸附元件供给部61供给的元件4;以及元件搭载作业用的辅助台64,其在第二底座部32的中央部后方区域沿Y轴方向延伸设置。控制装置24控制元件供给部61的元件4的供给动作、由搭载头移动机构62的动作实现的搭载头63的水平面内的移动动作、搭载头63对元件4的吸附动作。由此,进行从搭载头63对元件4的吸附(拾取)到元件4向基板2的搭载为止的一连串的作业。In Fig. 1, Fig. 8 (a), (b) and Fig. 9 (a), (b), the component mounting operation part 22b is equipped with: a component supply part 61 protruding rearward from the rear part of the central base 11b The supply of components 4 is provided and carried out; the mounting head 63 is movable in the horizontal plane by the mounting head moving mechanism 62 provided at the central rear portion of the center base 11b, and absorbs the components 4 supplied from the component supply part 61 from above; and The auxiliary table 64 for component mounting operation is extended in the Y-axis direction in the area behind the central portion of the second base portion 32 . The control device 24 controls the supply operation of the component 4 by the component supply unit 61 , the movement operation of the mounting head 63 in the horizontal plane by the operation of the head moving mechanism 62 , and the suction operation of the component 4 by the mounting head 63 . Thereby, a series of operations are performed from the suction (pick-up) of the component 4 by the mounting head 63 to the mounting of the component 4 on the substrate 2 .

在图8(a)和图9(a)中,在元件搭载作业用的辅助台64沿X轴方向并列设置有摄像视场朝向上方的两个位置识别摄像机65。所述两个位置识别摄像机65由控制装置24控制而进行摄像动作,通过在元件搭载用的辅助台64的上部设置的石英玻璃等透明材料部64a(图8(a)和图9(a)),对位于元件搭载用的辅助台64的上方的物体进行摄像。In FIG. 8( a ) and FIG. 9( a ), two position recognition cameras 65 whose imaging field of view faces upward are arranged in parallel along the X-axis direction on the auxiliary table 64 for component mounting work. The two position recognition cameras 65 are controlled by the control device 24 to perform an imaging operation, passing through a transparent material part 64a such as quartz glass provided on the upper part of the auxiliary table 64 for component mounting (Fig. 8(a) and Fig. 9(a) ), an image is taken of the object located above the auxiliary table 64 for component mounting.

控制装置24的元件搭载作业控制部SR1(图3)使中央基板运送部33C的移动台52在设定于Y轴工作台51上的前方的“基板交接位置”(图8(a)和图9(a))和设定于后方的“作业位置”(图8(b)和图9(b))之间移动。“基板交接位置”为能够相对于两个基板保持台53(或者一个基板保持台53T)进行基板2的交接的位置。“作业位置”是能够使在载置于两个基板保持台53(或者一个基板保持台53T)的基板2的电极部2a粘贴的ACF带3位于元件搭载作业用的辅助台64的上方(进一步说是在后述的元件压接作业用的辅助台72的上方)的位置。The component mounting operation control unit SR1 ( FIG. 3 ) of the control device 24 sets the moving stage 52 of the central substrate transport unit 33C at the “substrate transfer position” ( FIG. 8( a ) and FIG. 9(a)) and the "working position" (Fig. 8(b) and Fig. 9(b)) set at the rear. The “substrate delivery position” is a position where the substrate 2 can be delivered to and from the two substrate holding tables 53 (or one substrate holding table 53T). The "working position" is a position where the ACF tape 3 attached to the electrode portion 2a of the substrate 2 mounted on the two substrate holding tables 53 (or one substrate holding table 53T) can be positioned above the auxiliary table 64 for component mounting work (further That is, it is a position above an auxiliary table 72 for component crimping work described later).

在执行将元件4搭载于基板2的元件搭载作业的情况下,控制装置24(元件搭载作业控制部SR1)首先通过使移动台52移动到“作业位置”,从而使基板2的电极部2a定位于辅助台64的上方位置(搭载作业位置)(图10的流程图所示的步骤ST1)。接着,使两个位置识别摄像机65对位于元件搭载用的辅助台64的上方的基板2所具有的两个位置识别标记m(图2)进行摄像、识别(图11(a)),基于两个位置识别标记m的位置信息算出(取得)与基板2的位置相关的信息(基板2相对于基板保持台53或者基板保持台53T的位置信息),将其结果存储到控制装置24的存储部24a(图3)(步骤ST2)。When executing the component mounting operation of mounting the component 4 on the substrate 2, the control device 24 (component mounting operation control unit SR1) first moves the moving table 52 to the "working position" to position the electrode portion 2a of the substrate 2 It is at a position above the auxiliary table 64 (loading work position) (step ST1 shown in the flowchart of FIG. 10 ). Next, two position recognition cameras 65 are used to image and recognize two position recognition marks m ( FIG. 2 ) on the substrate 2 located above the auxiliary table 64 for component mounting ( FIG. 11( a )). Calculate (acquire) information related to the position of the substrate 2 (position information of the substrate 2 relative to the substrate holding table 53 or the substrate holding table 53T) from the position information of each position identification mark m, and store the result in the storage unit of the control device 24. 24a (Fig. 3) (step ST2).

具体来说,在将两张基板2载置在两个基板保持台53的情况下,将在中央基板运送部33C的左侧的基板保持台53上保持的基板2的相对于基板保持台53的位置校正量的数据作为与基板2的位置相关的信息存储到存储部24a的第一校正数据存储区域KR1。同样地,将在中央基板运送部33C的右侧的基板保持台53上保持的基板2的位置校正量的数据存储在第二校正数据存储区域KR2。而且,将在右方基板运送部33R的左侧的基板保持台53上保持的基板2的相对于基板保持台53的位置校正量的数据存储在第三校正数据存储区域KR3,将在右侧的基板保持台53上保持的基板2的位置校正数据存储在第四校正数据存储区域KR4。Specifically, when two substrates 2 are placed on the two substrate holding tables 53, the substrate 2 held on the substrate holding table 53 on the left side of the central substrate conveying part 33C will be held relative to the substrate holding table 53. The data of the position correction amount is stored in the first correction data storage area KR1 of the storage unit 24a as information on the position of the substrate 2 . Similarly, the data of the position correction amount of the substrate 2 held on the substrate holding table 53 on the right side of the central substrate conveyance unit 33C is stored in the second correction data storage area KR2 . Furthermore, the data of the position correction amount of the substrate 2 held on the substrate holding table 53 on the left side of the right substrate conveyance part 33R with respect to the substrate holding table 53 is stored in the third correction data storage area KR3, and the data on the right side The position correction data of the substrate 2 held on the substrate holding table 53 is stored in the fourth correction data storage area KR4.

另一方面,在将一张基板2载置在一个基板保持台53T的情况下,将在中央基板运送部33C的基板保持台53T上保持的基板2的相对于基板保持台53T的位置校正量的数据作为与基板2的位置相关的信息存储到存储部24a的第一校正数据存储区域KR1。同样地,将在右方基板运送部33R的基板保持台53T上保持的基板2的相对于基板保持台53T的位置校正量的数据存储在第三校正数据存储区域KR3。On the other hand, in the case of placing one substrate 2 on one substrate holding table 53T, the position correction amount of the substrate 2 held on the substrate holding table 53T of the central substrate transport unit 33C relative to the substrate holding table 53T The data of is stored in the first correction data storage region KR1 of the storage unit 24a as information related to the position of the substrate 2 . Similarly, the data of the position correction amount of the substrate 2 held on the substrate holding table 53T of the right substrate transport unit 33R with respect to the substrate holding table 53T is stored in the third correction data storage area KR3 .

控制装置24(元件搭载作业控制部SR1)在上述步骤ST2完成后,使移动台52暂时向前方移动而使基板2的电极部2a从辅助台64的上方位置(搭载作业位置)退避(图11(b)。步骤ST3),接着使搭载头63下降,使元件4向接近辅助台64(位置识别摄像机65一侧)的方向(搭载作业位置)移动(步骤ST4)。接着,此时利用两个位置识别摄像机65对元件4具有的未图示的位置识别标记进行摄像、识别(图11(c)),算出(取得)与元件4的位置相关的信息(元件4相对于搭载头63的位置信息),然后求得元件4的位置校正量,将其结果存储在上述存储部24a(步骤ST5)。After the above-mentioned step ST2 is completed, the control device 24 (component mounting operation control unit SR1) temporarily moves the moving table 52 forward to retract the electrode portion 2a of the substrate 2 from the position above the auxiliary table 64 (the mounting operation position) ( FIG. 11 ). (b). Step ST3 ), next, the mounting head 63 is lowered to move the component 4 toward the auxiliary table 64 (on the side of the position recognition camera 65 ) (the mounting operation position) (step ST4 ). Next, at this time, two position recognition cameras 65 image and recognize unillustrated position recognition marks of the component 4 ( FIG. 11( c )), and calculate (acquire) information related to the position of the component 4 (component 4 position information with respect to the mounting head 63 ), the position correction amount of the component 4 is obtained, and the result is stored in the storage unit 24 a (step ST5 ).

控制装置24(元件搭载作业控制部SR1)在如上所述地将基板2的位置信息和元件4的位置信息存储在存储部24a后,使搭载头63上升(图12(a),然后使移动台52再次位于“作业位置”。接着,基于在存储部24a存储的与基板2的位置相关的信息(基板2的位置校正量)和与元件4的位置相关的信息(元件4的位置校正量),以使元件4侧的电极部(未图示)与基板2侧的电极部2a上下对齐的方式进行中央基板运送部33C的动作控制,进行基板2相对于元件搭载作业部22b(直接来说,相对于元件4)的定位(图12(b)。步骤ST6)。The control device 24 (the component mounting operation control unit SR1) stores the position information of the substrate 2 and the position information of the component 4 in the storage unit 24a as described above, then raises the mounting head 63 ( FIG. 12( a ), and then moves the The stage 52 is located at the "working position" again. Next, based on the information on the position of the substrate 2 (position correction amount of the substrate 2) and the information on the position of the component 4 (position correction amount of the component 4) stored in the storage unit 24a, ), so that the electrode portion (not shown) on the element 4 side and the electrode portion 2a on the substrate 2 side are vertically aligned to control the movement of the central substrate conveying portion 33C, and the substrate 2 is relative to the element mounting operation portion 22b (directly from Say, with respect to the positioning of element 4) (Fig. 12(b). Step ST6).

控制装置24(元件搭载作业控制部SR1)在如此进行基板2相对于元件搭载作业部22b的定位后,使搭载头63下降,将由搭载头63吸附的元件4按压在基板2上的ACF带3而搭载于基板2(图12(c)。步骤ST7)。另外,此时的搭载头63的按压力由元件搭载用的辅助台64承受。控制装置24在将元件4搭载于基板2后,使搭载头63上升(步骤ST8)。The control device 24 (component mounting operation control unit SR1 ), after positioning the substrate 2 relative to the component mounting operation unit 22b in this way, lowers the mounting head 63 and presses the component 4 sucked by the mounting head 63 against the ACF tape 3 on the substrate 2 And it is mounted on the board|substrate 2 (FIG.12(c). Step ST7). In addition, the pressing force of the mounting head 63 at this time is received by the auxiliary table 64 for component mounting. The control device 24 raises the mounting head 63 after mounting the component 4 on the substrate 2 (step ST8 ).

如图8、图9、图11和图12所示,在中央基板运送部33C(右方基板运送部33R也同样)具备的两个基板保持台53分别(或者一个基板保持台53T)设有具有水平部54a的框状的薄膜状部分支承部54,所述水平部54a在该基板保持台53(或者基板保持台53T)的后方沿X轴方向延伸。如图2等所示,通过元件搭载作业部22b搭载于基板2的元件4在搭载于基板2的状态下薄膜状部分4a伸出到基板2之外。然而,通过将上述薄膜状部分支承部54设置于各基板保持台53(或者基板保持台53T),利用薄膜状部分支承部54的水平部54a从下方支承在元件4搭载于基板2的状态下伸出到基板2之外的元件4的薄膜状部分4a。由此,防止了搭载于基板2的状态的元件4的薄膜状部分4a成为向下方垂下的状态。As shown in FIG. 8, FIG. 9, FIG. 11 and FIG. 12, the two substrate holding tables 53 (or one substrate holding table 53T) provided in the center substrate conveying part 33C (the same applies to the right substrate conveying part 33R) are respectively provided with The frame-shaped film-shaped partial support portion 54 has a horizontal portion 54 a extending in the X-axis direction behind the substrate holding table 53 (or the substrate holding table 53T). As shown in FIG. 2 and the like, the component 4 mounted on the substrate 2 by the component mounting operation part 22b protrudes from the substrate 2 with the thin film portion 4a in the state mounted on the substrate 2 . However, by providing the above-mentioned film-shaped portion supporting portion 54 on each substrate holding table 53 (or substrate holding table 53T), the element 4 is supported from below by the horizontal portion 54 a of the film-shaped portion supporting portion 54 in a state where the element 4 is mounted on the substrate 2 . Film-like portion 4a of element 4 protruding beyond substrate 2 . This prevents the thin film portion 4 a of the element 4 mounted on the substrate 2 from hanging down downward.

如图13(a)、(b)和图14(a)、(b)所示,第一元件压接作业部22c(第二元件压接作业部22b也同样)具有沿X轴方向并列设置的两个压接头71和在各压接头71的下方沿Y轴方向延伸设置的两个元件压接作业用的辅助台72。控制装置24的元件压接作业控制部SR2(图3)控制第一元件压接作业部22c具备的压接头71和第二元件压接作业部22d具备的压接头71各自的升降动作(图3)。As shown in Fig. 13(a), (b) and Fig. 14(a), (b), the first component crimping operation part 22c (the same is true for the second component crimping operation part 22b) has There are two crimping heads 71 and two auxiliary tables 72 for component crimping work extending in the Y-axis direction below each crimping head 71 . The component crimping operation control unit SR2 ( FIG. 3 ) of the control device 24 controls the respective lifting operations of the crimping head 71 provided in the first component crimping operation part 22 c and the crimping head 71 provided in the second component crimping operation part 22 d ( FIG. 3 ). ).

关于中央基板运送部33C所具备的两个基板保持台53上载置的两张基板2(或者在一个基板保持台53T上载置的一张基板2),控制装置24(元件压接作业控制部SR2)在搭载头63对元件4的搭载作业完成后,使Y轴工作台51保持不变地沿第二底座部32向左方(即沿水平方向向第一元件压接作业部22c的一侧)移动,使在两个基板保持台53上载置的两张基板2(或者在一个基板保持台53T上载置的一张基板2)的各ACF带3所粘贴的部分位于两个元件压接作业用的辅助台72的上方(两个压接头71的下方)。此时,基于在存储部24a存储的与基板2的位置相关的信息使基板保持台53(或者基板保持台53T)移动,将基板2相对于第一元件压接作业部22c定位(图13(a)或者图14(a))。Regarding the two substrates 2 placed on the two substrate holding tables 53 (or one substrate 2 placed on one substrate holding table 53T) included in the central substrate conveying unit 33C, the control device 24 (the component pressing operation control unit SR2 ) After the mounting operation of the component 4 by the mounting head 63 is completed, keep the Y-axis table 51 to the left along the second base part 32 (that is, to the side of the first component crimping operation part 22c in the horizontal direction ) moves so that the parts to which the ACF tapes 3 of the two substrates 2 placed on the two substrate holding tables 53 (or one substrate 2 placed on one substrate holding table 53T) are pasted are positioned between the two component crimping operations. The top of the auxiliary table 72 used (below the two crimping heads 71). At this time, the substrate holding table 53 (or the substrate holding table 53T) is moved based on the information on the position of the substrate 2 stored in the storage unit 24a, and the substrate 2 is positioned with respect to the first component crimping operation part 22c ( FIG. 13( ). a) or Figure 14(a)).

具体来说,在将两张基板2载置于两个基板保持台53的情况下,对于在左侧的基板保持台53上保持的基板2使用从第一校正数据存储区域KR1读出的位置校正量的数据进行定位,对于在右侧的基板保持台53上保持的基板2使用从第二校正数据存储区域KR2读出的位置校正量的数据进行定位。并且,使第一元件压接作业部22c所具备的两个压接头71依次下降,将由元件搭载作业部22b搭载的元件4压接在两张基板2上(图15(a)→图15(b)→图15(c))。另一方面,在一个基板保持台53T载置一张基板2的情况下,对由基板保持台53T保持的基板2使用从第一校正数据存储区域KR1读出的位置校正量的数据进行定位。并且,使第一元件压接作业部22c所具备的两个压接头71依次下降,将由元件搭载作业部22b搭载的元件4压接在两张基板2上(图15(a)→图15(b)→图15(c))。Specifically, when two substrates 2 are placed on the two substrate holding tables 53, the position read from the first correction data storage area KR1 is used for the substrate 2 held on the left substrate holding table 53. The data of the correction amount is used for positioning, and the substrate 2 held on the right substrate holding table 53 is positioned using the data of the position correction amount read from the second correction data storage area KR2 . Then, the two crimping heads 71 included in the first component crimping operation part 22c are lowered sequentially, and the components 4 mounted by the component mounting operation part 22b are crimped on the two substrates 2 (FIG. 15(a)→FIG. 15( b) → Fig. 15(c)). On the other hand, when one substrate 2 is placed on one substrate holding table 53T, the substrate 2 held by the substrate holding table 53T is positioned using the data of the position correction amount read from the first correction data storage area KR1. Then, the two crimping heads 71 included in the first component crimping operation part 22c are lowered sequentially, and the components 4 mounted by the component mounting operation part 22b are crimped on the two substrates 2 (FIG. 15(a)→FIG. 15( b) → Fig. 15(c)).

同样地,关于右方基板运送部33R所具备的两个基板保持台53上载置的两张基板2(或者在一个基板保持台53T上载置的一张基板2),控制装置24(元件压接作业控制部SR2)在搭载头63对元件4的搭载作业完成后,使Y轴工作台51保持不变地沿第二底座部32向右方(即向第二元件压接作业部22d的一侧)移动,使在两个基板保持台53上载置的两张基板2(或者在一个基板保持台53T上载置的一张基板2)的元件4所搭载的部分分别位于元件压接作业用的辅助台72的上方(压接头71的下方)。接着,基于在所述步骤ST2取得的与基板2的位置相关的信息使基板保持台53移动,将基板2相对于第二元件压接作业部22d定位(图13(a)或者图14(a))。Similarly, with respect to two substrates 2 placed on the two substrate holding tables 53 (or one substrate 2 placed on one substrate holding table 53T) included in the right substrate conveying unit 33R, the control device 24 (component pressure bonding) The operation control part SR2) after the mounting operation of the component 4 by the mounting head 63 is completed, the Y-axis table 51 is kept unchanged and moves to the right along the second base part 32 (that is, to one side of the second component crimping operation part 22d). side) so that the parts on which the components 4 are mounted on the two substrates 2 placed on the two substrate holding tables 53 (or one substrate 2 placed on one substrate holding table 53T) are respectively positioned at the parts for the component crimping operation. Above the auxiliary table 72 (below the crimping head 71). Next, based on the information on the position of the substrate 2 acquired in step ST2, the substrate holding table 53 is moved to position the substrate 2 relative to the second component crimping operation part 22d ( FIG. 13( a ) or FIG. 14( a ). )).

具体来说,在将两张基板2载置于两个基板保持台53的情况下,对于在左侧的基板保持台53上保持的基板2使用从第三校正数据存储区域KR3读出的位置校正量的数据进行定位,对于在右侧的基板保持台53上保持的基板2使用从第四校正数据存储区域KR4读出的位置校正量的数据进行定位。并且,使第二元件压接作业部22d所具备的两个压接头71依次下降,将由元件搭载作业部22b搭载的元件4压接在两张基板2上(图15(a)→图15(b)→图15(c))。另一方面,在一个基板保持台53T载置一张基板2的情况下,对由基板保持台53T保持的基板2使用从第三校正数据存储区域KR3读出的位置校正量的数据进行定位。并且,使第二元件压接作业部22d所具备的两个压接头71依次下降,将由元件搭载作业部22b搭载的元件4压接在两张基板2上(图15(a)→图15(b)→图15(c))。Specifically, when two substrates 2 are placed on the two substrate holding tables 53, the position read from the third correction data storage area KR3 is used for the substrate 2 held on the left substrate holding table 53. The data of the correction amount is used for positioning, and the substrate 2 held on the substrate holding table 53 on the right is positioned using the data of the position correction amount read from the fourth correction data storage area KR4 . Then, the two crimping heads 71 included in the second component crimping operation part 22d are lowered sequentially, and the components 4 mounted by the component mounting operation part 22b are crimped on the two substrates 2 ( FIG. 15( a ) → FIG. 15 ( b) → Fig. 15(c)). On the other hand, when one substrate 2 is placed on one substrate holding table 53T, the substrate 2 held by the substrate holding table 53T is positioned using the data of the position correction amount read from the third correction data storage area KR3. Then, the two crimping heads 71 included in the second component crimping operation part 22d are lowered sequentially, and the components 4 mounted by the component mounting operation part 22b are crimped on the two substrates 2 ( FIG. 15( a ) → FIG. 15 ( b) → Fig. 15(c)).

在第一元件压接作业部22c和第二元件压接作业部22d各自所具备的两个压接头71对元件4的压接作业中,在安装两个基板保持台53并同时处理两张基板2的情况下,所述两个基板保持台53安装在一个移动台52,因此各基板2相对于对应的压接头71的定位和此后的元件压接作业错开时机而依次进行。对该动作按照图16和图17详细说明。In the crimping operation of the components 4 by the two crimping heads 71 respectively provided in the first component crimping operation part 22c and the second component crimping operation part 22d, two substrate holding tables 53 are installed and two substrates are simultaneously processed. 2, since the two substrate holding tables 53 are mounted on one moving table 52, the positioning of each substrate 2 with respect to the corresponding crimping head 71 and subsequent component crimping operations are sequentially performed with timing shifted. This operation will be described in detail with reference to FIGS. 16 and 17 .

控制装置24(元件压接作业控制部SR2)首先将在两个基板保持台53上载置的两张基板2各自的搭载有元件4的部分定位到辅助台72的上方位置(压接作业位置)(图16的流程图所示的步骤ST11)。此时,基于在上述的元件搭载作业中取得并存储在存储部24a的第一校正数据存储区域KR1(或者第三校正数据存储区域KR3)中的与基板2的位置相关的信息(在左侧的基板保持台53上保持的基板2的位置校正量数据)使移动台52移动。由此,将左侧的基板2相对于对应的压接头71定位(图17(a)。步骤ST12)。The control device 24 (component crimping operation control unit SR2 ) first positions the parts of the two substrates 2 placed on the two substrate holding tables 53 on which the components 4 are mounted to the upper position of the auxiliary table 72 (the crimping operation position). (Step ST11 shown in the flowchart of FIG. 16 ). At this time, based on the information related to the position of the substrate 2 acquired in the above-mentioned component mounting operation and stored in the first correction data storage region KR1 (or the third correction data storage region KR3 ) of the storage unit 24a (on the left side The position correction amount data of the substrate 2 held on the substrate holding table 53 of the substrate) moves the moving table 52 . As a result, the substrate 2 on the left side is positioned with respect to the corresponding crimp head 71 ( FIG. 17( a ). Step ST12 .

控制装置24在将左侧的基板2定位后,接下来使左侧的压接头71下降,将基板2在辅助台72与压接头71之间夹紧,将元件4相对于左侧的基板2压接(图17(b)。步骤ST13)。接着,在保持该夹紧状态的状态下,使左侧的基板保持台53稍稍下降,解除基板保持台53对基板2的保持(图17(c)。步骤ST14)。After the control device 24 has positioned the substrate 2 on the left side, the crimping head 71 on the left side is then lowered, the substrate 2 is clamped between the auxiliary table 72 and the crimping head 71, and the component 4 is positioned relative to the substrate 2 on the left side. Crimping (Fig. 17(b). Step ST13). Next, while maintaining the clamped state, the substrate holding table 53 on the left is slightly lowered to release the holding of the substrate 2 by the substrate holding table 53 ( FIG. 17( c ). Step ST14 .

由此,能够使移动台52独立于左侧的基板2地移动,然后基于同样在上述的元件搭载作业中取得并存储在存储部24a的第二校正数据存储区域KR2(或者第四校正数据存储区域KR4)中的与基板2的位置相关的信息(在右侧的基板保持台53上保持的基板2的位置校正量的数据)使移动台52移动,将右侧的基板2相对于对应的压接头71定位(步骤ST15)。Thus, the mobile table 52 can be moved independently of the left substrate 2, and then based on the second correction data storage area KR2 (or the fourth correction data storage area KR2) (or the fourth correction data storage area KR2) which is also obtained in the above-mentioned component mounting operation and stored in the storage unit 24a, it can be moved independently of the left substrate 2. The information related to the position of the substrate 2 in the area KR4) (the data of the position correction amount of the substrate 2 held on the substrate holding table 53 on the right side) moves the moving stage 52 to move the substrate 2 on the right side relative to the corresponding The crimping head 71 is positioned (step ST15).

控制装置24在将右侧的基板2定位后,接下来使右侧的压接头71下降,将基板2在辅助台72与压接头71之间夹紧,将元件4相对于右侧的基板2压接(图17(d)。步骤ST16)。制造装置24(元件压接作业控制部SR2)在将元件4相对于右侧的基板2压接后,使左侧的基板保持台53上升并保持基板2,然后使左侧的压接头71上升(图17(e)。步骤ST17),接着使右侧的压接头71上升(图17(f)。步骤ST18)。由此,完成元件4相对于两张基板2的压接作业。After the control device 24 has positioned the substrate 2 on the right, it then lowers the crimping head 71 on the right, clamps the substrate 2 between the auxiliary table 72 and the crimping head 71, and places the component 4 relative to the substrate 2 on the right. Crimp (Fig. 17(d). Step ST16). After the manufacturing device 24 (component pressure bonding operation control unit SR2 ) press-bonds the component 4 to the right board 2 , it raises the left board holding table 53 to hold the board 2 , and then raises the left pressure head 71 ( FIG. 17( e ). Step ST17 ), and then raise the crimping head 71 on the right side ( FIG. 17( f ). Step ST18 . Thus, the crimping operation of the component 4 relative to the two substrates 2 is completed.

控制装置24(元件压接作业控制部SR2)在通过上述的步骤进行元件4相对于两张基板2压接的压接作业后,使移动台52沿Y轴工作台51向前方移动,使移动台52复原到“基板交接位置”。The control device 24 (component crimping operation control unit SR2 ) moves the moving table 52 forward along the Y-axis table 51 after performing the crimping operation of the component 4 relative to the two substrates 2 through the above-mentioned steps. The table 52 returns to the "substrate delivery position".

另外,压接头71相对于在两个基板保持台53上载置的基板2的定位和压接头71对元件4的压接也可以不像上述那样相对于左右的基板2分别进行,而是同时进行。在该情况下,算出在元件搭载作业中取得的左侧的基板2相对于左侧的基板保持台53的位置偏移和右侧的基板2相对于右侧的基板保持台53的位置偏移的平均值,将左侧和右侧的基板保持台53同时相对于各自对应的压接头71定位。然后,利用压接头71同时将元件4压接在基板2。在该情况下,与分别定位的情况相比,定位精度稍稍降低,但是能够缩短节拍时间。In addition, the positioning of the crimping head 71 with respect to the substrates 2 placed on the two substrate holding tables 53 and the crimping of the components 4 by the crimping head 71 may not be performed separately with respect to the left and right substrates 2 as described above, but simultaneously. . In this case, the positional displacement of the left substrate 2 with respect to the left substrate holding table 53 and the positional displacement of the right substrate 2 with respect to the right substrate holding table 53 acquired during the component mounting operation are calculated. The average value of , the left and right substrate holding stages 53 are simultaneously positioned relative to the respective crimping heads 71 . Then, the element 4 is simultaneously crimped to the substrate 2 by the crimp head 71 . In this case, the positioning accuracy is slightly lower than in the case of separate positioning, but the tact time can be shortened.

在图1中,基板交接部23具有左侧(上游工序侧)和右侧(下游工序侧)的两个基板交接台23s。所述左右两个基板交接台23s被设成相对于右方基台11c升降自如,在两个基板交接台23s载置有在第一元件压接作业部22c或第二元件压接作业部22d完成了元件4的压接作业的两张基板2。载置于两个基板交接台23s的两张基板2由未图示的基板搬出构件输送至在元件安装装置1的下游工序下侧设置的其他装置。In FIG. 1 , the substrate delivery unit 23 has two substrate delivery stages 23 s on the left side (upstream process side) and right side (downstream process side). The two left and right substrate transfer stations 23s are provided so as to be able to move up and down with respect to the right base 11c, and the first component crimping operation part 22c or the second component crimping operation part 22d is placed on the two substrate transfer tables 23s. The two substrates 2 with the components 4 crimped. The two substrates 2 placed on the two substrate delivery tables 23 s are conveyed to another device installed on the downstream side of the component mounting device 1 by a substrate carrying-out means (not shown).

如图18所示,左侧的基板交接台23s相对于右方基台11c固定,右侧的基板交接台23s能够在右方基台11c上沿X轴方向移动。在进行对小尺寸的基板2的元件安装作业的情况下,两个基板交接台23s的间隔被设定为能够彼此不会干涉地接收两张小尺寸的基板2的所述第一间隔(图18(a)),或设定为能够彼此不会干涉地接收两张大尺寸的基板2的所述第二间隔(图18(b))。As shown in FIG. 18 , the substrate delivery table 23s on the left is fixed to the right base 11c, and the substrate delivery table 23s on the right is movable in the X-axis direction on the right base 11c. In the case of performing component mounting operations on small-sized substrates 2, the interval between the two substrate transfer stations 23s is set to the first interval capable of receiving two small-sized substrates 2 without interfering with each other (Fig. 18(a)), or the second interval set to be able to receive two large-sized substrates 2 without interfering with each other ( FIG. 18( b )).

在图11中,在基台11的前方区域设有在左方基台11a、中央基台11b和右方基台11c的范围沿X轴方向延伸的移动底座81。在该移动底座81上从左方起依次设有左方基板转移部82a、中央基板转移部82b和右方基板转移部82c。In FIG. 11 , a movable base 81 extending in the X-axis direction is provided in the area in front of the base 11 in the range of the left base 11a, the center base 11b, and the right base 11c. On this moving base 81, a left board transfer unit 82a, a central board transfer unit 82b, and a right board transfer unit 82c are provided in this order from the left.

如图19所示,左方基板转移部82a、中央基板转移部82b和右方基板转移部82c分别具有相对于移动底座81沿X轴方向移动自如地设置的基部91和在基板91上设置的两台臂单元92。各臂单元92具备在基部91固定的臂底座93和从臂底座93向水平后方延伸设置的两个臂94。在各臂94设有吸附面朝向下方的多个吸附垫95。各臂单元92能够通过在两个臂94设置的共计四个吸附垫95对一张基板2进行真空吸附。As shown in FIG. 19, the left substrate transfer part 82a, the central substrate transfer part 82b, and the right substrate transfer part 82c respectively have a base part 91 provided to move freely in the X-axis direction relative to the movable base 81 and a base part 91 provided on the substrate 91. Two arm units 92. Each arm unit 92 includes an arm base 93 fixed to the base 91 and two arms 94 extending horizontally rearward from the arm base 93 . Each arm 94 is provided with a plurality of suction pads 95 whose suction surfaces face downward. Each arm unit 92 is capable of vacuum-adsorbing one substrate 2 by a total of four suction pads 95 provided on two arms 94 .

在利用左方基板转移部82a拾取在基板接收部21的基板接收台21s上载置的基板2的情况下,控制装置24在左方基板转移部82a的右侧的臂94的吸附垫95位于两个基板接收台21s中的固定在左方基台11a的右侧的基板接收台21s的上方的状态下,使基板接收台21s升降。在此,左方基板转移部82a、中央基板转移部82b和右方基板转移部82c各自具备的两个臂94的X轴方向的间隔被设定为上述第一间隔,因此,在将两个基板接收台21s设定为第一间隔的情况下,右侧的基板接收台21s位于右侧的臂94的吸附垫95的下方,并且右侧的基板接收台21s位于左侧的臂94的吸附垫95的下方,在两张基板2载置于两个基板接收台21s的情况下,能够利用两个臂94同时拾取两张基板2。When the substrate 2 placed on the substrate receiving table 21s of the substrate receiving unit 21 is picked up by the left substrate transfer unit 82a, the suction pad 95 of the arm 94 on the right side of the left substrate transfer unit 82a of the control device 24 is located on both sides. Among the substrate receiving stages 21s, the substrate receiving stage 21s is raised and lowered while being fixed above the substrate receiving stage 21s on the right side of the left base 11a. Here, the interval in the X-axis direction of the two arms 94 provided in each of the left substrate transfer unit 82a, the central substrate transfer unit 82b, and the right substrate transfer unit 82c is set to the first interval. When the substrate receiving table 21s is set at the first interval, the substrate receiving table 21s on the right is located under the suction pad 95 of the right arm 94, and the substrate receiving table 21s on the right is located on the suction pad 95 of the left arm 94. Below the pad 95, when two substrates 2 are placed on the two substrate receiving stages 21s, the two arms 94 can pick up two substrates 2 at the same time.

在由臂94拾取在左方基板运送部33L的基板保持台36(或者基板保持台36T)上载置的基板2,或者将由臂94拾取的基板2载置于基板保持台36(或基板保持台36T)的情况下,控制装置24在使两个臂94的吸附垫95位于左方基板运送部33L所具备的两个基板保持台36的上方的状态下(或者使两个臂94中的一个臂94的吸附垫95位于一个基板保持台36T的上方的状态下)使两个基板保持台36(或者一个基板保持台36T)升降。The arm 94 picks up the substrate 2 placed on the substrate holding table 36 (or the substrate holding table 36T) of the left substrate transport part 33L, or places the substrate 2 picked up by the arm 94 on the substrate holding table 36 (or the substrate holding table 36T). 36T), the control device 24 positions the suction pads 95 of the two arms 94 above the two substrate holding tables 36 included in the left substrate transport unit 33L (or makes one of the two arms 94 The suction pad 95 of the arm 94 moves up and down the two substrate holding tables 36 (or one substrate holding table 36T) while the adsorption pad 95 of the arm 94 is located above one of the substrate holding tables 36T.

而且,在由臂94拾取在中央基板运送部33C或者右方基板运送部33R的基板保持台53(或者基板保持台53T)上保持的基板2,或者将由臂94拾取的基板2载置于基板保持台53(或基板保持台53T)的情况下,控制装置24在使两个臂94的吸附垫95位于中央基板运送部33C或右方基板运送部33R所具备的两个基板保持台53的上方的状态下或者使两个臂94中的一个臂94的吸附垫95位于一个基板保持台53T的上方的状态下(或者使两个臂94中的一个臂94的吸附垫95位于一个基板保持台53T的上方的状态下)使两个基板保持台53(或者一个基板保持台53T)升降。Then, the arm 94 picks up the substrate 2 held on the substrate holding table 53 (or the substrate holding table 53T) of the central substrate conveyance part 33C or the right substrate conveyance part 33R, or places the substrate 2 picked up by the arm 94 on the substrate. In the case of the holding table 53 (or the substrate holding table 53T), the control device 24 positions the suction pads 95 of the two arms 94 between the two substrate holding tables 53 included in the central substrate conveyance part 33C or the right substrate conveyance part 33R. In the upper state or in the state where the suction pad 95 of one arm 94 of the two arms 94 is positioned above one substrate holding table 53T (or the suction pad 95 of one arm 94 of the two arms 94 is positioned on a substrate holding table 53T above the table 53T), the two substrate holding tables 53 (or one substrate holding table 53T) are raised and lowered.

控制装置24控制左方基板转移部82a、中央基板转移部82b、右方基板转移部82c各自沿移动底座81向X轴方向的移动动作、各臂单元92经由吸附垫95对基板2的吸附动作(图3)。具体来说,控制装置24使左方基板转移部82a动作来将基板2从基板接收部21运送至左方基板运送部33L,使中央基板转移部82b动作来将基板2从左方基板运送部33L运送至中央基板运送部33C或者右方基板运送部33R。即,将通过ACF粘贴作业部22a粘贴有ACF带3的基板2分开载置到中央基板运送部33C所具备的两个基板保持台53(或者一个基板保持台53T)以及右方基板运送部33R所具备的两个基板保持台53(或者一个基板保持台53T)。而且,控制装置24使右方基板转移部82c动作,将基板2从中央基板运送部33C或者右方基板运送部33R运送至基板交接部23。The control device 24 controls the movement of the left substrate transfer part 82a, the central substrate transfer part 82b, and the right substrate transfer part 82c along the moving base 81 to the X-axis direction, and the suction operation of each arm unit 92 to the substrate 2 via the suction pad 95. (image 3). Specifically, the control device 24 operates the left substrate transfer unit 82a to transfer the substrate 2 from the substrate receiving unit 21 to the left substrate transfer unit 33L, and operates the central substrate transfer unit 82b to transfer the substrate 2 from the left substrate transfer unit 33L. 33L is transported to the center substrate transport unit 33C or the right substrate transport unit 33R. That is, the substrate 2 to which the ACF tape 3 is pasted by the ACF pasting operation part 22a is separately placed on the two substrate holding tables 53 (or one substrate holding table 53T) provided in the central substrate conveying part 33C and the right substrate conveying part 33R. Two substrate holding tables 53 (or one substrate holding table 53T) are provided. Then, the control device 24 operates the right substrate transfer unit 82 c to transfer the substrate 2 from the central substrate transfer unit 33C or the right substrate transfer unit 33R to the substrate transfer unit 23 .

接着,对元件安装装置1进行对基板2的元件安装作业时各部分的动作进行说明。如图20所示,控制装置24将左方基板转移部82a、中央基板转移部82b和右方基板转移部82c各自可能的位置设定为:基板接收部21的前方位置(第一位置P1)、ACF粘贴作业部22a的前方位置(第二位置P2)、第一元件压接作业部22c的前方位置(第三位置P3)、元件搭载作业部22b的前方位置(第四位置P4)、第二元件压接作业部22d的前方位置(第五位置P5)以及基板交接部23的前方位置(第六位置P6)。Next, the operation of each part when the component mounting apparatus 1 performs component mounting work on the substrate 2 will be described. As shown in FIG. 20 , the control device 24 sets the respective possible positions of the left substrate transfer part 82a, the central substrate transfer part 82b and the right substrate transfer part 82c as: the front position of the substrate receiving part 21 (the first position P1) , the front position of the ACF bonding operation part 22a (second position P2), the front position of the first component crimping operation part 22c (third position P3), the front position of the component mounting operation part 22b (fourth position P4), the The front position (fifth position P5 ) of the two-component crimping operation part 22 d and the front position (sixth position P6 ) of the board transfer part 23 .

在该元件安装装置1中,如上所述,能够对大小两种尺寸的基板2进行元件安装作业,在以下的说明中为了方便,将对小尺寸的基板2进行元件安装的作业模式称为第一模式,将对大尺寸的基板2进行元件安装的作业模式称为第二模式。在元件安装装置1以第一模式实施元件安装作业还是以第二模式实施元件安装作业的选择是通过操作者OP操作与控制装置24相连的模式选择开关90(图3)来进行的。In this component mounting device 1, as described above, the component mounting operation can be performed on the substrate 2 of two sizes, and in the following description, for convenience, the operation mode of performing component mounting on the small-sized substrate 2 is referred to as the first mode. In the first mode, the work mode in which components are mounted on a large-sized substrate 2 is called a second mode. The selection of whether to perform component mounting work in the first mode or in the second mode in the component mounting apparatus 1 is performed by the operator OP operating a mode selection switch 90 ( FIG. 3 ) connected to the control device 24 .

在设定为第一模式的情况下,基板接收部21在将两个基板接收台21s设定为第一间隔的状态下同时接收从上游工序侧输送来的两张小尺寸的基板2。另一方面,在设定为第二模式的情况下,基板接收部21在将两个基板接收台21s设定为第二间隔的状态下同时接收从上游工序侧输送来的两张大尺寸的基板2。When the first mode is set, the substrate receiving section 21 simultaneously receives two small-sized substrates 2 conveyed from the upstream process side with the two substrate receiving stages 21s set at a first interval. On the other hand, when the second mode is set, the substrate receiving section 21 simultaneously receives two large-sized substrates conveyed from the upstream process side in a state where the two substrate receiving stages 21s are set at the second interval. 2.

同样地,在设定为第一模式的情况下,基板交接部23在将两个基板交接台23s设定为第一间隔的状态下从中央基板运送部33C或右方基板运送部33R同时接收两张基板2并交接到下游工序侧,在设定为第二模式的情况下,基板交接部23在将两个基板交接台23s设定为第二间隔的状态下从中央基板运送部33C或右方基板运送部33R分别接收一张基板并交接到下游工序侧。Similarly, when the first mode is set, the substrate transfer unit 23 simultaneously receives substrates from the central substrate transfer unit 33C or the right substrate transfer unit 33R with the two substrate transfer stations 23s set at a first interval. Two substrates 2 are delivered to the downstream process side. When the second mode is set, the substrate delivery unit 23 transfers from the central substrate transfer unit 33C or The right substrate conveying unit 33R receives one substrate and delivers it to the downstream process side.

操作者OP在选择第一模式的情况下,首先,将两个基板保持台36安装到左方基板运送部33L的移动台35上,并且将两个基板保持台53安装到中央基板运送部33C和右方基板运送部33R各自的移动台52上。接着,进行模式选择开关90的操作,选择第一模式。When the operator OP selects the first mode, first, the two substrate holding stages 36 are mounted on the moving stage 35 of the left substrate conveying part 33L, and the two substrate holding stages 53 are mounted on the central substrate conveying part 33C. and the right substrate transport unit 33R on the respective moving stages 52 . Next, the mode selection switch 90 is operated to select the first mode.

在由模式选择开关90选择第一模式后,控制装置24使左方基板转移部82a位于第一位置P1、使中央基板转移部82b位于第二位置P2、使右方基板转移部82c位于第四位置P4,而且使中央基板运送部33C位于元件搭载作业部22b的前方位置,使右方基板运送部33R位于第二元件压接作业部22d的前方位置。接着,将基板接收部21的两个基板接收台21s的间隔和基板交接部23的两个基板交接台23s的间隔均设定为第一间隔(以后不变化),在由基板接收部21的两个基板接收台21s接收从上游工序侧的装置输送来的两张小尺寸的基板2后(基板接收工序),由左方基板转移部82a的两个臂94拾取所述接收的两张基板2(图21(a))。After the first mode is selected by the mode selection switch 90, the control device 24 makes the left substrate transfer part 82a at the first position P1, the central substrate transfer part 82b at the second position P2, and the right substrate transfer part 82c at the fourth position. In position P4, the central substrate conveyance part 33C is positioned in front of the component mounting operation part 22b, and the right substrate conveyance part 33R is positioned in front of the second component crimping operation part 22d. Next, the interval between the two substrate receiving stations 21s of the substrate receiving section 21 and the interval between the two substrate transferring stations 23s of the substrate transferring section 23 are both set to the first interval (not changed hereafter). After the two substrate receiving stations 21s receive the two small-sized substrates 2 transported from the device on the upstream process side (substrate receiving process), the two received two substrates are picked up by the two arms 94 of the left substrate transfer part 82a 2 (Fig. 21(a)).

控制装置24在由左方基板转移部82a的两个臂94从基板接收部21的两个基板接收台21s拾取两张基板2后,通过使左方基板转移部82a位于第二位置P2、使中央基板转移部82b位于第四位置P4、使右方基板转移部82c位于第六位置P6,从而将左方基板转移部82a拾取的两张基板2载置并保持在左方基板运送部33L的两个基板保持台36(图21(b)。基板转移工序)。接着,使左方基板运送部33L的移动台35移动到“作业位置”,执行ACF粘贴作业部22a对两张基板2的ACF粘贴作业(图21(c))。另外,在此期间,在基板接收部21的两个基板接收台21s上载置新的两张基板2。After the control device 24 picks up two substrates 2 from the two substrate receiving tables 21s of the substrate receiving section 21 by the two arms 94 of the left substrate transferring section 82a, the left substrate transferring section 82a is positioned at the second position P2, The central substrate transfer unit 82b is located at the fourth position P4, and the right substrate transfer unit 82c is located at the sixth position P6, so that the two substrates 2 picked up by the left substrate transfer unit 82a are placed and held on the left side substrate transfer unit 33L. Two substrate holding stages 36 ( FIG. 21( b ). Substrate transfer process). Next, the moving table 35 of the left substrate conveyance unit 33L is moved to the “working position”, and the ACF bonding operation of the two substrates 2 by the ACF bonding operation unit 22 a is performed ( FIG. 21( c )). In addition, during this period, two new substrates 2 are placed on the two substrate receiving tables 21 s of the substrate receiving unit 21 .

控制装置24在执行了ACF粘贴作业部22a对两张基板2的ACF粘贴作业后,使ACF左方基板运送部33L的移动台35移动到“基板交接位置”,然后使左方基板转移部82a位于第一位置P1、使中央基板转移部82b位于第二位置P2、使右方基板转移部82c位于第四位置P4。接着,利用左方基板转移部82a的两个臂94拾取基板接收部21的两个基板接收台21s上的两张基板2,利用中央基板转移部82b的两个臂94拾取左方基板运送部33L上的两张基板2(图22(a))。After the control device 24 has executed the ACF pasting operation of the two substrates 2 by the ACF pasting operation part 22a, the moving table 35 of the ACF left substrate transport part 33L is moved to the "substrate transfer position", and then the left substrate transfer part 82a At the first position P1, the central substrate transfer part 82b is located at the second position P2, and the right substrate transfer part 82c is located at the fourth position P4. Next, use the two arms 94 of the left substrate transfer part 82a to pick up the two substrates 2 on the two substrate receiving tables 21s of the substrate receiving part 21, and use the two arms 94 of the central substrate transfer part 82b to pick up the left substrate transport part. Two substrates 2 on 33L (Fig. 22(a)).

控制装置24利用左方基板转移部82a的两个臂94从基板接收部21的两个基板接收台21s拾取两张基板2,利用中央基板转移部82b的两个臂94拾取左方基板运送部33L的两个基板保持台36上的两张基板2,然后使左方基板转移部82a位于第二位置P2、使中央基板转移部82b位于第四位置P4、使右方基板转移部82c位于第六位置P6,由此,将利用左方基板转移部82a的两个臂94拾取的两张基板2载置并保持在左方基板运送部33L的两个基板保持台36,将由中央基板转移部82b的两个臂94拾取的两张基板2载置并保持在中央基板运送部33C的两个基板保持台53(图22(b))。The control device 24 uses the two arms 94 of the left substrate transfer part 82a to pick up two substrates 2 from the two substrate receiving tables 21s of the substrate receiving part 21, and uses the two arms 94 of the central substrate transfer part 82b to pick up the left substrate transport part. Two substrates 2 on the two substrate holding tables 36 of 33L, then make the left substrate transfer part 82a be located at the second position P2, make the central substrate transfer part 82b be located at the fourth position P4, make the right substrate transfer part 82c be located at the second position Six positions P6, whereby the two substrates 2 picked up by the two arms 94 of the left substrate transfer part 82a are placed and held on the two substrate holding tables 36 of the left substrate transfer part 33L, and the two substrates 2 picked up by the central substrate transfer part The two substrates 2 picked up by the two arms 94 of 82b are placed and held on the two substrate holding tables 53 of the central substrate conveying unit 33C ( FIG. 22( b )).

控制装置24接下来使左方基板运送部33L的移动台35位于“作业位置”并执行ACF粘贴作业部22a对两张基板2的ACF粘贴作业,另一方面,使中央基板运送部33C的移动台52移动到“作业位置”,使两个基板保持台53上的两张基板2中的左方的基板2位于元件搭载作业用的辅助台64的上方,从而执行元件搭载作业部22b对左方的基板2的元件搭载作业(图22(c)。元件搭载工序)。Next, the control device 24 positions the moving table 35 of the left substrate conveying unit 33L at the “working position” and executes the ACF bonding operation of the two substrates 2 by the ACF bonding unit 22a, and on the other hand, moves the central substrate conveying unit 33C The table 52 is moved to the "working position", so that the left substrate 2 among the two substrates 2 on the two substrate holding tables 53 is located above the auxiliary table 64 for component mounting operations, so that the component mounting operation part 22b is aligned to the left. Component mounting operation on a square substrate 2 ( FIG. 22( c ). Component mounting process).

控制装置24在执行了上述元件搭载作业部22b对左方的基板2的元件搭载作业后使中央基板运送部33C向左方移动,使在中央基板运送部33C的两个基板保持台53上载置的两张基板2中的右方的基板2位于元件搭载作业用的辅助台64的上方,从而执行元件搭载作业部22b对右方的基板2的元件搭载作业(图23(a)。元件搭载工序)。另外,在此期间,在基板接收部21的两个基板接收台21s上载置新的两张基板2。The control device 24 moves the central substrate conveyance part 33C to the left after performing the component mounting operation of the above-mentioned component mounting operation part 22b on the left substrate 2, and places the substrate on the two substrate holding tables 53 of the central substrate conveyance part 33C. The right substrate 2 among the two substrates 2 is located above the auxiliary table 64 for component mounting operations, so that the component mounting operation part 22b performs component mounting operations on the right substrate 2 (Figure 23 (a). Component mounting process). In addition, during this period, two new substrates 2 are placed on the two substrate receiving tables 21 s of the substrate receiving unit 21 .

控制装置24在执行了基于上述元件搭载作业部22b的元件搭载作业后,使中央基板运送部33C保持不变地向左方(第一元件压接作业部22c的一侧)移动,将在两个基板保持台53上载置的基板2运送到第一元件压接作业部22c,使在两个基板保持台53上载置的两张基板2位于两个元件压接作业用的辅助台72的上方,从而执行第一元件压接作业部22c对两张基板2的元件压接作业(图23(b)。元件压接工序)。而且,与此同时,使左方基板转移部82a位于第一位置P1,利用左方基板转移部82a的两个臂94拾取在基板接收部21的两个基板接收台21s上载置的两张基板2,另一方面,使左方基板运送部33L的移动台35位于“基板交接位置”并与此配合地使中央基板转移部82b位于第二位置P2,利用中央基板转移部82b的两个臂94拾取左方基板运送部33L的两个基板保持台36上的两张基板2。而且,使右方基板运送部33R位于元件搭载作业部22b的前方位置,并且使右方基板转移部82c位于第四位置P4。After the control device 24 executes the component mounting operation by the above-mentioned component mounting operation part 22b, the central substrate conveyance part 33C is moved to the left (the side of the first component crimping operation part 22c) without changing, and the The substrate 2 placed on each substrate holding table 53 is transported to the first component crimping operation section 22c, so that the two substrates 2 placed on the two substrate holding tables 53 are located above the two auxiliary tables 72 for component crimping operation. , thereby performing the component crimping operation of the first component crimping operation part 22 c on the two substrates 2 ( FIG. 23( b ). Component crimping process). And at the same time, the left substrate transfer part 82a is positioned at the first position P1, and the two substrates placed on the two substrate receiving tables 21s of the substrate receiving part 21 are picked up by the two arms 94 of the left substrate transfer part 82a. 2. On the other hand, make the moving table 35 of the left substrate conveying part 33L located at the "substrate handover position" and in conjunction with this, position the central substrate transfer part 82b at the second position P2, using the two arms of the central substrate transfer part 82b 94 picks up the two substrates 2 on the two substrate holding tables 36 of the left substrate transport unit 33L. Furthermore, the right board conveyance part 33R is located in the front position of the component mounting operation part 22b, and the right board transfer part 82c is located in the 4th position P4.

控制装置24在上述作业完成后,使右方基板转移部82c位于第六位置P6,然后使中央基板转移部82b位于第四位置P4,将从左方基板运送部33L的两个基板保持台36上拾取的两张基板2载置并保持在右方基板运送部33R的两个基板保持台53,而且通过使左方基板转移部82a位于第二位置P2,将从基板接收部21的两个基板接收台21s拾取的两张基板2载置并保持在左方基板运送部33L的两个基板保持台36(图23(c))。After the above operations are completed, the control device 24 sets the right substrate transfer unit 82c at the sixth position P6, then positions the central substrate transfer unit 82b at the fourth position P4, and transfers the two substrate holding platforms 36 from the left substrate transfer unit 33L to the sixth position P6. The two substrates 2 picked up from the top are placed and held on the two substrate holding tables 53 of the right substrate conveying part 33R, and by placing the left substrate transfer part 82a at the second position P2, the two substrates from the substrate receiving part 21 are placed and held. The two substrates 2 picked up by the substrate receiving table 21 s are placed and held on the two substrate holding tables 36 of the left substrate transport unit 33L ( FIG. 23( c )).

控制装置24在将基板2载置于右方基板运送部33R的两个基板保持台36和左方基板运送部33L的两个基板保持台53后,使左方基板运送部33L的移动台35位于“作业位置”并执行ACF粘贴作业部22a对两张基板2的ACF粘贴作业,另一方面,使右方基板运送部33R的移动台52移动到“作业位置”,使在两个基板保持台53上载置的两张基板2中的右方的基板2位于元件搭载作业用的辅助台64的上方,从而执行元件搭载作业部22b对右方的基板2的元件搭载作业(图24(a)。元件搭载工序)。After the control device 24 places the substrate 2 on the two substrate holding tables 36 of the right substrate transporting part 33R and the two substrate holding tables 53 of the left substrate transporting part 33L, the moving stage 35 of the left substrate transporting part 33L Located in the "working position" and performing the ACF pasting operation of the ACF pasting operation part 22a on the two substrates 2, on the other hand, the moving table 52 of the right substrate conveying part 33R is moved to the "working position" to hold the two substrates Among the two substrates 2 placed on the table 53, the right substrate 2 is located above the auxiliary table 64 for component mounting operation, so that the component mounting operation of the right substrate 2 by the component mounting operation part 22b is performed (FIG. 24(a). ). Component mounting process).

控制装置24在执行了基于上述ACF粘贴作业部22a的ACF粘贴作业和基于元件搭载作业部22a的元件搭载作业后,使右方基板运送部33R向右方移动,使在右方基板运送部33R的两个基板保持台53上载置的两张基板2中的左方的基板2位于元件搭载作业用的辅助台64的上方,从而执行元件搭载作业部22b对左方的基板2的元件搭载作业(图24(b)。元件搭载工序)。另外,在此期间,在基板接收部21的两个基板接收台21s上载置(搬入)新的两张基板2。After the control device 24 has executed the ACF pasting operation by the above-mentioned ACF pasting operation part 22a and the component mounting operation by the component mounting operation part 22a, the right board conveying part 33R is moved to the right, and the right board conveying part 33R is moved to the right. Among the two substrates 2 placed on the two substrate holding tables 53, the left substrate 2 is located above the auxiliary table 64 for component mounting operation, so that the component mounting operation of the component mounting operation part 22b on the left substrate 2 is performed. (Fig. 24(b). Component mounting process). In addition, during this period, two new substrates 2 are placed (carried in) on the two substrate receiving stages 21 s of the substrate receiving unit 21 .

控制装置24在执行了基于上述元件搭载作业部22b的元件搭载作业后,使右方基板运送部33R保持不变地向右方(第二元件压接作业部22d的一侧)移动,将在两个基板保持台53上载置的两张基板2运送到第二元件压接作业部22d,使在两个基板保持台53上载置的两张基板2位于两个元件压接作业用的辅助台72的上方,从而执行第二元件压接作业部22d对两张基板2的元件压接作业(图24(c)。元件压接工序)。而且,与此同时,使左方基板转移部82a位于第一位置P1,利用左方基板转移部82a的两个臂94拾取在基板接收部21的两个基板接收台21s上载置的两张基板2,另一方面,使左方基板运送部33L的移动台35位于“基板交接位置”并与此配合地使中央基板转移部82b位于第二位置P2,利用中央基板转移部82b的两个臂94拾取左方基板运送部33L的两个基板保持台36上的两张基板2。而且,使中央基板运送部33C的移动台52移动到“基板交接位置”并使中央基板运送部33C位于元件搭载作业部22b的前方位置,利用位于元件搭载作业部22b的前方的右方基板转移部82c的两个臂94拾取中央基板运送部33C的两个基板保持台36上的两张基板2(图24(c))。After executing the component mounting operation by the component mounting operation part 22b, the control device 24 moves the right substrate conveyance part 33R to the right (side of the second component crimping operation part 22d) without changing, and will The two substrates 2 placed on the two substrate holding tables 53 are transported to the second component crimping work section 22d, and the two substrates 2 placed on the two substrate holding tables 53 are positioned on the auxiliary table for the two component crimping operations. 72, thereby performing the component crimping operation of the second component crimping operation part 22d on the two substrates 2 (FIG. 24(c). Component crimping process). And at the same time, the left substrate transfer part 82a is positioned at the first position P1, and the two substrates placed on the two substrate receiving tables 21s of the substrate receiving part 21 are picked up by the two arms 94 of the left substrate transfer part 82a. 2. On the other hand, make the moving table 35 of the left substrate conveying part 33L located at the "substrate handover position" and in conjunction with this, position the central substrate transfer part 82b at the second position P2, using the two arms of the central substrate transfer part 82b 94 picks up the two substrates 2 on the two substrate holding tables 36 of the left substrate transport unit 33L. Then, move the moving table 52 of the central substrate conveyance part 33C to the "substrate delivery position" and position the central substrate conveyance part 33C at the front position of the component mounting operation part 22b, and transfer the substrate by the right side located in front of the component mounting operation part 22b. The two arms 94 of the section 82 c pick up the two substrates 2 on the two substrate holding tables 36 of the central substrate transport section 33C ( FIG. 24( c )).

控制装置24在上述作业完成后,使右方基板转移部82c位于第六位置P6并将两张基板2载置在基板交接部23的两个基板交接台23s,另一方面,使中央基板转移部82b位于第四位置P4,将从左方基板运送部33L的两个基板保持台36上拾取的两张基板2载置并保持在中央基板运送部33C的两个基板保持台53,而且通过使左方基板转移部82a位于第二位置P2,将从基板接收部21的两个基板接收台21s拾取的两张基板2载置并保持在左方基板运送部33L的两个基板保持台36(图25(a))。After the above operations are completed, the control device 24 positions the right substrate transfer unit 82c at the sixth position P6 and places the two substrates 2 on the two substrate transfer stations 23s of the substrate transfer unit 23, and transfers the central substrate The part 82b is located at the fourth position P4, and the two substrates 2 picked up from the two substrate holding tables 36 of the left substrate transporting part 33L are placed and held on the two substrate holding tables 53 of the central substrate transporting part 33C, and passed With the left substrate transfer unit 82a positioned at the second position P2, the two substrates 2 picked up from the two substrate receiving tables 21s of the substrate receiving unit 21 are placed and held on the two substrate holding tables 36 of the left substrate transport unit 33L. (Fig. 25(a)).

控制装置24在将基板2载置并保持在中央基板运送部33C的两个基板保持台36和左方基板运送部33L的两个基板保持台36后,使左方基板运送部33L的移动台35位于“作业位置”并执行ACF粘贴作业部22a对两张基板2的ACF粘贴作业,另一方面,使中央基板运送部33C的移动台52位于“作业位置”,使两张基板2中的左方的基板2位于元件搭载作业用的辅助台64的上方,从而执行元件搭载作业部22b对左方的基板2的元件搭载作业(图25(b)。元件搭载工序)。After the control device 24 places and holds the substrate 2 on the two substrate holding tables 36 of the central substrate transporting part 33C and the two substrate holding tables 36 of the left substrate transporting part 33L, the moving stage of the left substrate transporting part 33L 35 is located in the "working position" and executes the ACF pasting operation of the two substrates 2 by the ACF pasting operation part 22a. The left substrate 2 is located above the auxiliary table 64 for component mounting operation, and the component mounting operation part 22b performs component mounting operation on the left substrate 2 ( FIG. 25( b ). Component mounting process).

控制装置24在执行了基于上述ACF粘贴作业部22a的ACF粘贴作业和基于元件搭载作业部22a的元件搭载作业后,使中央基板运送部33C向左方移动,使在中央基板运送部33C的两个基板保持台53上载置的两张基板2中的右方的基板2位于元件搭载作业用的辅助台64的上方,从而执行元件搭载作业部22b对右方的基板2的元件搭载作业(图25(c)。元件搭载工序)。另外,在此期间,在基板接收部21的两个基板接收台21s上载置新的两张基板2。After the control device 24 executes the ACF pasting operation by the above-mentioned ACF pasting operation part 22a and the component mounting operation by the component mounting operation part 22a, it moves the central board conveying part 33C to the left, so that both sides of the central board conveying part 33C Among the two substrates 2 placed on each substrate holding table 53, the right substrate 2 is located above the auxiliary table 64 for component mounting operation, so that the component mounting operation of the component mounting operation part 22b on the right substrate 2 is performed (Fig. 25(c). Component mounting process). In addition, during this period, two new substrates 2 are placed on the two substrate receiving tables 21 s of the substrate receiving unit 21 .

控制装置24在执行了基于上述元件搭载作业部22b的元件搭载作业后,使中央基板运送部33C保持不变地向左方(第一元件压接作业部22c的一侧)移动,将在两个基板保持台53上载置的两张基板2运送到第一元件压接作业部22c,使在两个基板保持台53上载置的两张基板2位于两个元件压接作业用的辅助台72的上方,从而执行第一元件压接作业部22c对两张基板2的元件压接作业(图26(a)。元件压接工序)。而且,与此同时,使左方基板转移部82a位于第一位置P1,利用左方基板转移部82a的两个臂94拾取在基板接收部21的两个基板接收台21s上载置的两张基板2,另一方面,使左方基板运送部33L的移动台35位于“基板交接位置”并与此配合地使中央基板转移部82b位于第二位置P2,利用中央基板转移部82b的两个臂94拾取左方基板运送部33L的两个基板保持台36上的两张基板2。而且,使右方基板运送部33R的移动台52移动到“基板交接位置”并使右方基板运送部33R位于元件搭载作业部22b的前方,利用已经位于元件搭载作业部22b的前方的右方基板转移部82c的两个臂94拾取右方基板运送部33R上的两张基板2(图26(a))。After the control device 24 executes the component mounting operation by the above-mentioned component mounting operation part 22b, the central substrate conveyance part 33C is moved to the left (the side of the first component crimping operation part 22c) without changing, and the The two substrates 2 placed on the two substrate holding tables 53 are transported to the first component crimping operation part 22c, and the two substrates 2 placed on the two substrate holding tables 53 are positioned on the auxiliary table 72 for the two component crimping operations. , so as to perform the component crimping operation of the first component crimping operation part 22c on the two substrates 2 ( FIG. 26( a ). Component crimping process). And at the same time, the left substrate transfer part 82a is positioned at the first position P1, and the two substrates placed on the two substrate receiving tables 21s of the substrate receiving part 21 are picked up by the two arms 94 of the left substrate transfer part 82a. 2. On the other hand, make the moving table 35 of the left substrate conveying part 33L located at the "substrate handover position" and in conjunction with this, position the central substrate transfer part 82b at the second position P2, using the two arms of the central substrate transfer part 82b 94 picks up the two substrates 2 on the two substrate holding tables 36 of the left substrate transport unit 33L. And move the moving table 52 of the right board conveying part 33R to the "substrate delivery position" and make the right board conveying part 33R located in front of the component mounting operation part 22b, and utilize the right hand side already located in front of the component mounting operation part 22b. The two arms 94 of the substrate transfer unit 82 c pick up the two substrates 2 on the right substrate transport unit 33R ( FIG. 26( a )).

控制装置24在上述作业完成后,使右方基板转移部82c位于第六位置P6并将两张基板2载置在基板交接部23的两个基板交接台23s,并且,使中央基板转移部82b位于第四位置P4,将从左方基板运送部33L的基板保持台36拾取的两张基板2载置并保持在右方基板运送部33R的两个基板保持台53,使左方基板转移部82a位于第二位置P2,从而将从基板接收部21的两个基板接收台21s拾取的两张基板2载置并保持在左方基板运送部33L的两个基板保持台36(图26(b))。After the above operations are completed, the control device 24 positions the right substrate transfer unit 82c at the sixth position P6 and places two substrates 2 on the two substrate transfer stations 23s of the substrate transfer unit 23, and makes the central substrate transfer unit 82b Located at the fourth position P4, the two substrates 2 picked up from the substrate holding table 36 of the left substrate conveying part 33L are placed and held on the two substrate holding tables 53 of the right substrate conveying part 33R, so that the left substrate transfer part 82a is located at the second position P2, so that the two substrates 2 picked up from the two substrate receiving tables 21s of the substrate receiving part 21 are loaded and held on the two substrate holding tables 36 of the left substrate conveying part 33L (Fig. 26(b) )).

该图26(b)的状态与图23(c)的状态完全相同,因此以后,通过重复图23(c)~图26(a)的工序,能够重复执行从基板接收部21接收来自外部的基板2经过元件4向基板2的装配直到基板交接部23向外部交接基板2为止的一连串的动作,从而进行连续的基板生产。The state of this FIG. 26(b) is exactly the same as the state of FIG. 23(c). Therefore, by repeating the steps of FIG. 23(c) to FIG. The substrate 2 undergoes a series of operations from mounting the components 4 on the substrate 2 until the substrate transfer unit 23 transfers the substrate 2 to the outside, thereby performing continuous substrate production.

另一方面,操作者OP在选择第二模式的情况下,首先,将一个基板保持台36T安装到左方基板运送部33L的移动台35上,并且将一个基板保持台53T也安装到中央基板运送部33C和右方基板运送部33R各自的移动台52上。接着,进行模式选择开关90的操作,选择第二模式。On the other hand, when the operator OP selects the second mode, first, one substrate holding table 36T is attached to the moving table 35 of the left substrate conveyance part 33L, and one substrate holding table 53T is also attached to the center substrate. The transport unit 33C and the right substrate transport unit 33R are placed on the respective moving stages 52 . Next, the mode selection switch 90 is operated to select the second mode.

在由模式选择开关90选择第二模式后,控制装置24使左方基板转移部82a位于第一位置P1、使中央基板转移部82b位于第二位置P2、使右方基板转移部82c位于第四位置P4,而且使中央基板运送部33C位于元件搭载作业部22b的前方位置,使右方基板运送部33R位于第二元件压接作业部22d的前方位置。接着,将基板接收部21的两个基板接收台21s的间隔设定为第二间隔,在由基板接收部21的两个基板接收台21s接收从上游工序侧的装置输送来的两张大尺寸的基板2后(基板接收工序),由左方基板转移部82a的右侧的臂94拾取所述接收的两张基板2中的右方的基板2(图27(a))。After the second mode is selected by the mode selection switch 90, the control device 24 makes the left substrate transfer part 82a at the first position P1, the central substrate transfer part 82b at the second position P2, and the right substrate transfer part 82c at the fourth position. The position P4 is such that the central substrate conveying unit 33C is positioned in front of the component mounting operation portion 22b, and the right substrate conveying portion 33R is positioned in front of the second component crimping operation portion 22d. Next, the interval between the two substrate receiving tables 21s of the substrate receiving section 21 is set to the second interval, and the two substrate receiving tables 21s of the substrate receiving section 21 receive two large-sized paper sheets transported from the device on the upstream process side. After the substrate 2 (substrate receiving process), the right substrate 2 among the received two substrates 2 is picked up by the right arm 94 of the left substrate transfer part 82 a ( FIG. 27( a )).

控制装置24在由左方基板转移部82a的右侧的臂94从基板接收部21的右侧的基板接收台21s拾取基板2后,使左方基板转移部82a位于第二位置P2、使中央基板转移部82b位于第四位置P4、使右方基板转移部82c位于第六位置P6,从而将左方基板转移部82a拾取的基板2载置并保持在左方基板运送部33L的基板保持台36T(图27(b)。基板转移工序)。在此期间,使基板接收部21的载置有基板2的状态的左侧的基板接收台21s向右方移动,将两个基板接收台21s的间隔设定为第一间隔(图27(b))。接着,使左方基板运送部33L的移动台35移动到“作业位置”,执行ACF粘贴作业部22a对基板2的ACF粘贴作业(图27(c))。After the control device 24 picks up the substrate 2 from the substrate receiving table 21s on the right side of the substrate receiving unit 21 by the arm 94 on the right side of the left substrate transferring unit 82a, the left substrate transferring unit 82a is positioned at the second position P2, and the center The substrate transfer unit 82b is located at the fourth position P4, and the right substrate transfer unit 82c is located at the sixth position P6, so that the substrate 2 picked up by the left substrate transfer unit 82a is placed and held on the substrate holding table of the left substrate transfer unit 33L 36T (Fig. 27(b). Substrate transfer process). During this period, the substrate receiving stage 21s on the left side of the substrate receiving section 21 in the state where the substrate 2 is placed is moved to the right, and the interval between the two substrate receiving stages 21s is set to the first interval ( FIG. 27( b ). )). Next, the moving table 35 of the left substrate conveying unit 33L is moved to the “working position”, and the ACF bonding operation of the ACF bonding operation unit 22 a to the substrate 2 is performed ( FIG. 27( c )).

控制装置24在执行了ACF粘贴作业部22a对基板2的ACF粘贴作业后,使ACF左方基板运送部33L的移动台35移动到“基板交接位置”,然后使左方基板转移部82a位于第一位置P1、使中央基板转移部82b位于第二位置P2、使右方基板转移部82c位于第四位置P4。接着,利用左方基板转移部82a的左侧的臂94拾取基板接收部21的左侧的基板接收台21s上的基板2,利用中央基板转移部82b的右侧的臂94拾取左方基板运送部33L上的基板2(图28(a))。After the control device 24 executes the ACF pasting operation of the substrate 2 by the ACF pasting operation part 22a, the moving table 35 of the ACF left substrate transport part 33L moves to the "substrate transfer position", and then the left substrate transfer part 82a is positioned at the first position. In the first position P1, the central substrate transfer part 82b is located in the second position P2, and the right substrate transfer part 82c is located in the fourth position P4. Next, use the left arm 94 of the left substrate transfer part 82a to pick up the substrate 2 on the substrate receiving table 21s on the left side of the substrate receiving part 21, and use the right arm 94 of the central substrate transfer part 82b to pick up the left substrate and transport it. The substrate 2 on the portion 33L ( FIG. 28( a )).

控制装置24在利用左方基板转移部82a拾取基板接收部21的左侧的基板接收台21s上的基板2,利用中央基板转移部82b拾取左方基板运送部33L的基板保持台36T上的基板2后,使左方基板转移部82a位于第二位置P2、使中央基板转移部82b位于第四位置P4、使右方基板转移部82c位于第六位置P6,由此,将由左方基板转移部82a拾取的基板2载置并保持在左方基板运送部33L的基板保持台36T,将由中央基板转移部82b拾取的基板2载置并保持在中央基板运送部33C的基板保持台53T(图28(b))。并且,在此期间,使基板接收部21的左侧的基板接收台21s向左方移动,将两个基板接收台21s的间隔设定为第二间隔。The control device 24 picks up the substrate 2 on the substrate receiving table 21 s on the left side of the substrate receiving section 21 by using the left substrate transfer part 82 a, and picks up the substrate on the substrate holding table 36T of the left substrate transport part 33L by using the central substrate transfer part 82 b. After 2, make the left side substrate transfer part 82a be positioned at the second position P2, make the center substrate transfer part 82b be positioned at the fourth position P4, make the right side substrate transfer part 82c be positioned at the sixth position P6, thereby, will be positioned at the sixth position P6 by the left side substrate transfer part. The substrate 2 picked up by 82a is placed and held on the substrate holding table 36T of the left substrate transfer unit 33L, and the substrate 2 picked up by the central substrate transfer unit 82b is placed and held on the substrate holding table 53T of the central substrate transfer unit 33C ( FIG. 28 (b)). And, during this period, the substrate receiving table 21s on the left side of the substrate receiving unit 21 is moved to the left, and the interval between the two substrate receiving tables 21s is set as the second interval.

控制装置24接下来使左方基板运送部33L的移动台35位于“作业位置”并执行ACF粘贴作业部22a对基板2的ACF粘贴作业,另一方面,使中央基板运送部33C的移动台52移动到“作业位置”,使基板2位于元件搭载作业用的辅助台64的上方,从而执行元件搭载作业部22b对基板2的元件搭载作业(图28(c)。元件搭载工序)。另外,在此期间,在基板接收部21载置新的两张大尺寸的基板2。Next, the control device 24 positions the moving stage 35 of the left substrate conveying part 33L at the "working position" to execute the ACF pasting operation of the substrate 2 by the ACF pasting operation part 22a. On the other hand, the moving stage 52 of the central substrate conveying part 33C Move to the "working position" to position the substrate 2 above the auxiliary table 64 for component mounting operation, and perform the component mounting operation on the substrate 2 by the component mounting operation part 22b ( FIG. 28( c ). Component mounting process). In addition, during this period, two new large-sized substrates 2 are placed on the substrate receiver 21 .

控制装置24在执行了上述元件搭载作业部22b对基板2的元件搭载作业后,使中央基板运送部33C保持不变地向左方(第一元件压接作业部22c的一侧)移动,将在基板保持台53T上保持的基板2运送到第一元件压接作业部22c,使在基板保持台53T上保持的基板2位于两个元件压接作业用的辅助台72的一方(此处为左方)的辅助台72的上方,从而执行第一元件压接作业部22c对基板2的元件压接作业(图29(a)。元件压接工序)。而且,与此同时,使左方基板转移部82a位于第一位置P1,利用左方基板转移部82a的右侧的臂94拾取在基板接收部21的右侧的基板接收台21s上载置的基板2,另一方面,使左方基板运送部33L的移动台35位于“基板交接位置”并与此配合地使中央基板转移部82b位于第二位置P2,利用中央基板转移部82b的左侧的臂94拾取左方基板运送部33L上的基板2。而且,使右侧基板转移部82c位于第四位置P4(图29(a))。After executing the component mounting operation on the substrate 2 by the component mounting operation part 22b, the control device 24 moves the central substrate conveyance part 33C to the left (to the side of the first component pressure bonding operation part 22c) without changing, and moves the The substrate 2 held on the substrate holding table 53T is transported to the first component pressure-bonding operation part 22c, and the substrate 2 held on the substrate holding table 53T is positioned on one side of the two auxiliary tables 72 (herein, left) above the auxiliary table 72, thereby performing the component crimping work of the first component crimping operation part 22c on the substrate 2 ( FIG. 29( a ). Component crimping process). And at the same time, the left substrate transfer part 82a is positioned at the first position P1, and the substrate placed on the substrate receiving table 21s on the right side of the substrate receiving part 21 is picked up by the arm 94 on the right side of the left substrate transfer part 82a. 2. On the other hand, make the moving table 35 of the left substrate conveying part 33L located at the "substrate transfer position" and coordinate with this to locate the central substrate transfer part 82b at the second position P2, and use the left side of the central substrate transfer part 82b The arm 94 picks up the substrate 2 on the left substrate transport unit 33L. Furthermore, the right board transfer part 82c is positioned at the fourth position P4 ( FIG. 29( a )).

控制装置24在上述作业完成后,使右方基板转移部82c位于第六位置P6,并且使右侧基板运送部33R位于元件搭载作业部22b的前方位置,然后使中央基板转移部82b位于第四位置P4,从而将从左方基板运送部33L拾取的基板2载置并保持在右方基板运送部33R的基板保持台53T,而且使左方基板转移部82a位于第二位置P2,从而将从基板接收部21拾取的基板2载置并保持在左方基板运送部33L的基板保持台36T(图29(b))。After the above operations are completed, the control device 24 positions the right board transfer unit 82c at the sixth position P6, and positions the right board transfer unit 33R at the front position of the component mounting operation unit 22b, and then positions the central board transfer unit 82b at the fourth position. position P4, thereby placing and holding the substrate 2 picked up from the left substrate conveying part 33L on the substrate holding table 53T of the right substrate conveying part 33R, and making the left substrate transfer part 82a located at the second position P2, so that the substrate 2 picked up from the left substrate conveying part 33L The substrate 2 picked up by the substrate receiving unit 21 is placed and held on the substrate holding table 36T of the left substrate transport unit 33L ( FIG. 29( b )).

控制装置24在将基板2分别保持于右方基板运送部33R的基板保持台53T和左方基板运送部33L的基板保持台36T后,使左方基板运送部33L的移动台35位于“作业位置”并执行ACF粘贴作业部22a对基板2的ACF粘贴作业,另一方面,使右方基板运送部33R的移动台52移动到“作业位置”,使在基板保持台53T上载置的基板2位于元件搭载作业用的辅助台64的上方,从而执行元件搭载作业部22b对基板2的元件搭载作业(图29(c)。元件搭载工序)。After the control device 24 holds the substrate 2 on the substrate holding table 53T of the right substrate conveying unit 33R and the substrate holding table 36T of the left substrate conveying unit 33L, respectively, the moving table 35 of the left substrate conveying unit 33L is positioned at the “working position”. ” and execute the ACF pasting operation of the substrate 2 by the ACF pasting operation unit 22a, and on the other hand, move the moving table 52 of the right substrate transport unit 33R to the “working position” so that the substrate 2 placed on the substrate holding table 53T is positioned The component mounting operation part 22b executes the component mounting operation on the substrate 2 above the auxiliary table 64 for the component mounting operation ( FIG. 29( c ). Component mounting process).

控制装置24在执行了基于上述ACF粘贴作业部22a的ACF粘贴作业和基于元件搭载作业部22a的元件搭载作业后,使右方基板运送部33R保持不变地向右方(第二元件压接作业部22d的一侧)移动,将在基板保持台53T上保持的基板2运送到第二元件压接作业部22d,使在基板保持台53T上载置的基板2位于一方(在此为左方)的元件压接作业用的辅助台72的上方,从而执行第二元件压接作业部22d对基板2的元件压接作业(图30(a)。元件压接工序)。而且,与此同时,使左方基板转移部82a位于第一位置P1,利用左方基板转移部82a的左侧的臂94拾取在基板接收部21的左侧的基板接收台21s上载置的基板2,另一方面,使左方基板运送部33L的移动台35位于“基板交接位置”并与此配合地使中央基板转移部82b位于第二位置P2,利用中央基板转移部82b的右侧的臂94拾取左方基板运送部33L的基板保持台36T上的基板2。而且,使中央基板运送部33C的移动台52移动到“基板交接位置”并使中央基板运送部33C位于元件搭载作业部22b的前方位置,利用位于元件搭载作业部22b的前方的右方基板转移部82c的右侧的臂94拾取中央基板运送部33C的基板保持台53T上的基板2(图30(a))。After the control device 24 executes the ACF pasting operation by the above-mentioned ACF pasting operation part 22a and the component mounting operation by the component mounting operation part 22a, it keeps the right board conveying part 33R to the right (the second component press-bonding operation). One side of the operation part 22d) moves, and the substrate 2 held on the substrate holding table 53T is transported to the second component crimping operation part 22d, so that the substrate 2 placed on the substrate holding table 53T is located on one side (here, the left side). ) above the auxiliary table 72 for the component crimping operation, thereby performing the component crimping operation of the second component crimping operation part 22d on the substrate 2 ( FIG. 30( a ). Component crimping process). And at the same time, the left substrate transfer part 82a is positioned at the first position P1, and the substrate placed on the substrate receiving table 21s on the left side of the substrate receiving part 21 is picked up by the arm 94 on the left side of the left substrate transfer part 82a. 2. On the other hand, make the moving table 35 of the left substrate transfer part 33L located at the "substrate transfer position" and coordinate with this to locate the central substrate transfer part 82b at the second position P2, and use the right side of the central substrate transfer part 82b. The arm 94 picks up the substrate 2 on the substrate holding table 36T of the left substrate transport unit 33L. Then, move the moving table 52 of the central substrate conveyance part 33C to the "substrate delivery position" and position the central substrate conveyance part 33C at the front position of the component mounting operation part 22b, and transfer the substrate by the right side located in front of the component mounting operation part 22b. The arm 94 on the right side of the section 82 c picks up the substrate 2 on the substrate holding table 53T of the central substrate transport section 33C ( FIG. 30( a )).

控制装置24在上述作业完成后,使右方基板转移部82c位于第六位置P6并将由右侧的臂94拾取的基板2载置在设定成第二间隔的基板交接部23的右侧的基板交接台23s,另一方面,使中央基板转移部82b位于第四位置P4,将从左方基板运送部33L的基板保持台36T上拾取的基板2载置并保持在中央基板运送部33C的基板保持台53T,且使左方基板转移部82a位于第二位置P2,从而将从基板接收部21的左侧的基板接收台21s拾取的基板2载置并保持在左方基板运送部33L的基板保持台36T(图30(b))。After the above work is completed, the control device 24 positions the right substrate transfer unit 82c at the sixth position P6 and places the substrate 2 picked up by the right arm 94 on the right side of the substrate transfer unit 23 set at the second interval. The substrate transfer table 23s, on the other hand, places the central substrate transfer part 82b at the fourth position P4, and places and holds the substrate 2 picked up from the substrate holding table 36T of the left substrate transfer part 33L on the center substrate transfer part 33C. The substrate holding table 53T, and the left substrate transfer part 82a is located at the second position P2, so that the substrate 2 picked up from the substrate receiving table 21s on the left side of the substrate receiving part 21 is placed and held on the left side of the substrate conveying part 33L. The substrate holding table 36T ( FIG. 30( b )).

控制装置24在将基板2分别载置于中央基板运送部33C的基板保持台53T和左方基板运送部33L的基板保持台36T后,使左方基板运送部33L的移动台35位于“作业位置”并执行ACF粘贴作业部22a对基板2的ACF粘贴作业,另一方面,使中央基板运送部33C的移动台52移动到“作业位置”,使基板保持台53T上的基板2位于元件搭载作业用的辅助台64的上方,从而执行元件搭载作业部22b对基板2的元件搭载作业(图30(c)。元件搭载工序)。并且,在此期间,使基板交接部23的右侧的基板交接台23s向右方移动,将两个基板交接台23s的间隔设定为第二间隔(图30(c))。After the control device 24 places the substrate 2 on the substrate holding table 53T of the central substrate conveying part 33C and the substrate holding table 36T of the left substrate conveying part 33L, respectively, the moving stage 35 of the left substrate conveying part 33L is positioned at the "working position". ” and execute the ACF pasting operation of the substrate 2 by the ACF pasting operation part 22a, and on the other hand, move the moving table 52 of the central substrate conveying part 33C to the “working position” so that the substrate 2 on the substrate holding table 53T is located in the component mounting operation The component mounting operation of the component mounting operation part 22b on the substrate 2 is performed above the auxiliary table 64 used ( FIG. 30( c ). Component mounting process). And, during this period, the substrate transfer stage 23s on the right side of the substrate transfer section 23 is moved to the right, and the interval between the two substrate transfer stages 23s is set to the second interval ( FIG. 30( c )).

控制装置24在执行了基于上述ACF粘贴作业部22a的ACF粘贴作业和基于元件搭载作业部22b的元件搭载作业后,使中央基板运送部33C保持不变地向左方(第一元件压接作业部22c的一侧)移动,将在基板保持台53T上保持的基板2运送到第一元件压接作业部22c,使在基板保持台53T上载置的基板2位于一方(在此为右侧)的元件压接作业用的辅助台72的上方,从而执行第一元件压接作业部22c对基板2的元件压接作业(图31(a)。元件压接工序)。而且,与此同时,使左方基板转移部82a位于第一位置P1,利用左方基板转移部82a的右侧的臂94拾取在基板接收部21的右侧的基板接收台21s上载置的基板2,另一方面,使左方基板运送部33L的移动台35位于“基板交接位置”并与此配合地使中央基板转移部82b位于第二位置P2,利用中央基板转移部82b的左侧的臂94拾取左方基板运送部33L的基板保持台36T上的基板2(图31(a))。After the control device 24 executes the ACF pasting operation by the above-mentioned ACF pasting operation part 22a and the component mounting operation by the component mounting operation part 22b, the central substrate conveying part 33C is turned to the left without changing (the first component pressure-bonding operation). part 22c) to move the substrate 2 held on the substrate holding table 53T to the first component crimping operation part 22c so that the substrate 2 placed on the substrate holding table 53T is located on one side (here, the right side) Above the auxiliary table 72 for the component crimping operation, the component crimping operation of the first component crimping operation part 22c on the substrate 2 is performed ( FIG. 31( a ). Component crimping process). And at the same time, the left substrate transfer part 82a is positioned at the first position P1, and the substrate placed on the substrate receiving table 21s on the right side of the substrate receiving part 21 is picked up by the arm 94 on the right side of the left substrate transfer part 82a. 2. On the other hand, make the moving table 35 of the left substrate conveying part 33L located at the "substrate transfer position" and coordinate with this to locate the central substrate transfer part 82b at the second position P2, and use the left side of the central substrate transfer part 82b The arm 94 picks up the substrate 2 on the substrate holding table 36T of the left substrate transport unit 33L ( FIG. 31( a )).

控制装置24在上述作业完成后,使右方基板转移部82c位于第六位置P6并将由左侧的臂94拾取的基板2载置在基板交接部23的左侧的基板交接台23s,并且,使中央基板转移部82b位于第四位置P4,将从左方基板运送部33L的基板保持台36T拾取的基板2载置在右方基板运送部33R的基板保持台53T,使左方基板转移部82a位于第二位置P2,从而将从基板接收部21的右侧的基板接收台21s拾取的基板2载置在左方基板运送部33L的基板保持台36T(图31(b))。After the above operation is completed, the control device 24 positions the right substrate transfer unit 82c at the sixth position P6 and places the substrate 2 picked up by the left arm 94 on the left substrate delivery table 23s of the substrate delivery unit 23, and, With the central substrate transfer unit 82b at the fourth position P4, the substrate 2 picked up from the substrate holding table 36T of the left substrate transfer unit 33L is placed on the substrate holding table 53T of the right substrate transfer unit 33R, and the left substrate transfer unit 82 a is located at the second position P2 , and the substrate 2 picked up from the substrate receiving table 21 s on the right side of the substrate receiving unit 21 is placed on the substrate holding table 36T of the left substrate transport unit 33L ( FIG. 31( b )).

该图31(b)的状态与图29(b)的状态完全相同,因此以后,通过重复图29(b)~图31(a)的工序,能够重复执行从向基板接收部21搬入基板2经过元件4向基板2的装配直到向基板交接部23搬出为止的一连串的动作,从而进行连续的基板生产。The state in FIG. 31( b ) is exactly the same as the state in FIG. 29( b ). Therefore, by repeating the steps in FIG. 29( b ) to FIG. Continuous substrate production is performed through a series of operations from mounting the components 4 on the substrate 2 to carrying out to the substrate transfer unit 23 .

如以上说明了的,本实施方式的元件安装装置1除了对基板2进行元件安装的元件安装部22之外,还具备:基板接收部21,其将两个基板接收台21s的间隔设定为第一间隔而接收从上游工序侧输送来的两张小尺寸的基板2,或者将两个基板接收台21s的间隔设定为比第一间隔大的第二间隔而接收从上游工序侧输送来的两张尺寸比小尺寸的基板2大的大尺寸的基板2;以及左方基板转移部82a,其将基板接收部21接收的小尺寸或者大尺寸的基板2转移到元件安装部22,左方基板转移部82a在基板接收部21接收到两张小尺寸的基板2的情况下,将该基板接收部21接收到的两张小尺寸的基板2同时转移到元件安装部22,并在基板接收部21接收到两张大尺寸的基板2的情况下,将该基板接收部21接收到的两张大尺寸的基板2一张一张地分别转移到元件安装部22。As described above, the component mounting apparatus 1 of the present embodiment includes, in addition to the component mounting portion 22 for mounting components on the substrate 2, the substrate receiving portion 21 that sets the interval between two substrate receiving stages 21s to Receive two small-sized substrates 2 transported from the upstream process side at the first interval, or set the interval between the two substrate receiving stations 21s to a second interval greater than the first interval to receive the substrates 2 transported from the upstream process side. Two large-sized substrates 2 whose size is larger than the small-sized substrate 2; and the left substrate transfer part 82a, which transfers the small-sized or large-sized substrate 2 received by the substrate receiving part 21 to the component mounting part 22, the left The square substrate transfer section 82a transfers the two small-sized substrates 2 received by the substrate receiving section 21 to the component mounting section 22 at the same time when the substrate receiving section 21 receives two small-sized substrates 2, and places the two small-sized substrates 2 on the substrate receiving section 21. When receiving two large-sized substrates 2 , the receiving unit 21 transfers the two large-sized substrates 2 received by the substrate receiving unit 21 to the component mounting unit 22 one by one.

并且,元件安装部22具备:作为基板保持部的左方基板运送部33L,其保持由左方基板转移部82a同时转移两张过来的小尺寸的基板2或者由左方基板转移部82a一张一张地分别转移过来的大尺寸的基板2;ACF粘贴作业部22a(粘接部件粘贴作业部),其将作为粘接部件的ACF带3粘贴于在左方基板运送部33L上保持的基板2;元件搭载作业部22b,其将元件4搭载到由ACF粘贴作业部22a粘贴了ACF带3的基板2;以及元件压接作业部(第一元件压接作业部22c和第二元件压接作业部22d),其将利用元件搭载作业部22b搭载的元件4压接到在元件搭载作业部22b搭载有元件4的基板2,左方基板运送部33L能够选择性地安装同时保持两张小尺寸的基板2的第一基板保持台(两个基板保持台36)或者保持一张大尺寸的基板2的第二基板保持台(一张基板保持台36T)。In addition, the component mounting unit 22 is provided with a left board conveying unit 33L as a board holding unit, which holds two small-sized boards 2 simultaneously transferred by the left board transfer unit 82 a or one board transferred by the left board transfer unit 82 a. Large-sized substrates 2 transferred one by one; ACF pasting unit 22a (adhesive member pasting unit) that sticks ACF tape 3 as an adhesive member to the substrate held on the left board transport unit 33L 2; the component mounting operation part 22b, which mounts the component 4 to the substrate 2 on which the ACF tape 3 has been pasted by the ACF pasting operation part 22a; and the component crimping operation part (the first component crimping operation part 22c and the second component crimping operation part 22d), which crimps the component 4 mounted by the component mounting operation part 22b to the substrate 2 on which the component 4 is mounted on the component mounting operation part 22b, and the left substrate conveyance part 33L can selectively mount while holding two small The first substrate holding table (two substrate holding tables 36 ) for a substrate 2 of small size or the second substrate holding table (one substrate holding table 36T) for holding one large-sized substrate 2 .

并且,进而,左方基板转移部82a具有两个臂94(拾取构件),所述两个臂94被配置成能够同时拾取在基板接收部21将两个基板接收台21s调整为第一间隔的状态下接收的两张小尺寸的基板2的间隔,在基板接收部21将两个基板接收台21s调整为第一间隔的状态下接收到两张小尺寸的基板2的情况下,左方基板转移部82a利用两个臂94同时拾取两张小尺寸的基板2并转移到左方基板运送部33L,另一方面,在基板接收部21将两个基板接收台21s调整为第二间隔的状态下接收到两张大尺寸的基板2的情况下,左方基板转移部82a利用两个臂94中的一个臂94拾取一张大尺寸的基板2并转移到左方基板运送部33L,然后在基板接收部21将两个基板接收台21s调整为第一间隔后,利用两个臂94中的另一个臂94拾取余下的一张大尺寸的基板2并转移到左方基板运送部33L。Furthermore, the left substrate transfer section 82a has two arms 94 (picking members) configured to be able to simultaneously pick up the two substrate receiving tables 21s adjusted to the first interval in the substrate receiving section 21 . The interval between two small-sized substrates 2 received in the state, when the substrate receiving part 21 adjusts the two substrate receiving stations 21s to the first interval to receive two small-sized substrates 2, the left substrate The transfer unit 82a uses two arms 94 to pick up two small-sized substrates 2 at the same time and transfer them to the left substrate transport unit 33L. On the other hand, the substrate receiving unit 21 adjusts the two substrate receiving tables 21s to the state of the second interval. In the case of receiving two large-sized substrates 2, the left substrate transfer unit 82a picks up a large-sized substrate 2 with one of the two arms 94 and transfers it to the left substrate transport unit 33L, and then transfers it to the left substrate transfer unit 33L, and then transfers it to the left substrate transfer unit 33L, and then transfers it to the substrate receiving unit 33L. After adjusting the two substrate receiving stages 21s to the first interval, the part 21 uses the other arm 94 of the two arms 94 to pick up the remaining large-sized substrate 2 and transfer it to the left substrate conveying part 33L.

而且,本实施方式的元件安装方法包括:基板接收工序,将两个基板接收台21s的间隔设定为第一间隔而接收从上游工序侧输送来的两张小尺寸的基板2,或者将两个基板接收台21s的间隔设定为比第一间隔大的第二间隔而接收从上游工序侧输送来的尺寸比小尺寸的基板大的两张大尺寸的基板2;以及基板转移工序,将在基板接收工序中接收到的小尺寸或者大尺寸的基板2转移到元件安装部22,基板转移工序为,在基板接收工序中接收到两张小尺寸的基板2的情况下,将该基板接收工序中接收到的两张小尺寸的基板2同时转移到元件安装部22,在基板接收工序中接收到两张大尺寸的基板2的情况下,将该基板接收工序中接收到的两张大尺寸的基板2一张一张地分别转移到元件安装部。Moreover, the component mounting method of this embodiment includes: a substrate receiving step, setting the interval between two substrate receiving stations 21s as the first interval to receive two small-sized substrates 2 conveyed from the upstream process side, or to place the two substrates 2 The interval of each substrate receiving station 21s is set to a second interval larger than the first interval to receive two large-size substrates 2 that are transported from the upstream process side and are larger than the small-size substrate; The small-size or large-size substrate 2 received in the substrate receiving process is transferred to the component mounting part 22. The substrate transfer process is to receive two small-sized substrates 2 in the substrate receiving process. The two small-sized substrates 2 received in the process are transferred to the component mounting part 22 at the same time. In the case of receiving two large-sized substrates 2 in the substrate receiving process, the two large-sized substrates received in the substrate receiving process 2Transfer to the component mounting part one by one.

在本实施方式的元件安装装置1和元件安装方法中,将两个基板接收台21s的间隔设定为第一间隔而接收从上游工序侧输送来的两张小尺寸的基板2,或者将两个基板接收台21s的间隔设定为比第一间隔大的第二间隔而接收从上游工序侧输送来的两张尺寸比小尺寸的基板2大的大尺寸的基板2。并且,在接收到两张大尺寸的基板2的情况下,将该接收到的两张大尺寸的基板2一张一张地分别转移到元件安装部22,从而能够对小尺寸的基板2和大尺寸的基板2中的任意一种进行元件安装,因此能够使大小两种尺寸的基板2的生产线统一化。In the component mounting apparatus 1 and the component mounting method of the present embodiment, the interval between two substrate receiving stations 21s is set as the first interval to receive two small-sized substrates 2 conveyed from the upstream process side, or to place the two substrates 2 The interval between the two substrate receiving stations 21s is set to a second interval greater than the first interval, and two large-size substrates 2 having a size larger than the small-size substrate 2 transported from the upstream process side are received. And, in the case of receiving two large-sized substrates 2, the received two large-sized substrates 2 are transferred to the component mounting part 22 one by one, so that the small-sized substrate 2 and the large-sized substrate 2 can be compared. Since components are mounted on any one of the substrates 2, the production lines for substrates 2 of two sizes can be unified.

工业上的可利用性Industrial availability

提供一种元件安装装置和元件安装方法,对于小尺寸的基板和大尺寸的基板均能够进行元件安装,能够使大小两种尺寸的基板的生产线统一化。Provided are a component mounting device and a component mounting method that can perform component mounting on both a small-sized substrate and a large-sized substrate, and can unify production lines for both large and small-sized substrates.

Claims (7)

1. an element fixing apparatus, for possessing the element fixing apparatus that substrate is carried out to the element installation portion of element installation, is characterized in that,
Described element fixing apparatus possesses:
Substrate acceptance division, the interval of two substrate receiving platforms be set as to the first interval and receive the substrate of two first sizes that transport from upstream process side, or the interval of described two substrate receiving platforms be set as to second interval larger than described the first interval and receive the substrate of the second size that two sizes transporting from described upstream process side are larger than the substrate of described first size; And
Substrate transfer portion, the described first size that described substrate acceptance division is received or the substrate of described the second size are transferred to described substrate installation portion,
Receive the substrate of two described the second sizes at described substrate acceptance division, element installation portion transferred to respectively one by one by the substrate of these two described the second sizes that receive by described substrate transfer portion.
2. element fixing apparatus according to claim 1, is characterized in that,
Receive the substrate of two described first sizes at described substrate acceptance division, described element installation portion transferred to by the substrate of these two described first sizes that receive by described substrate transfer portion simultaneously.
3. element fixing apparatus according to claim 1 and 2, is characterized in that,
Described element installation portion possesses:
Substrate maintaining part, to shifted the substrate of two described first sizes of coming or kept by the substrate of described substrate transfer portion described the second size that transfer is come respectively one by one simultaneously by described substrate transfer portion;
Adhering part sticking operation portion, pastes adhering part the substrate being kept by substrate maintaining part;
Element mounting homework department, by element mounting to the substrate of having been pasted adhering part by described adhering part sticking operation portion; And
Element crimping operation portion, is crimped on the element that utilizes described element mounting homework department to carry the substrate that has carried element in described element mounting homework department,
The first substrate that described substrate maintaining part can optionally be installed the substrate that simultaneously keeps two described first sizes keeps platform or keeps the second substrate of the substrate of described second size to keep platform.
4. according to the element fixing apparatus described in any one of claims 1 to 3, it is characterized in that,
Described substrate transfer portion has two pick-up member, described two pick-up member are configured to pick up described substrate acceptance division at the interval that described two substrate receiving platforms is adjusted into the substrate of two described first sizes that receive under the state at described the first interval simultaneously, receive the substrate of two described first sizes under the state that described two substrate receiving platforms is adjusted into described the first interval at described substrate acceptance division, described substrate transfer portion utilizes described two pick-up member to pick up the substrate of two described first sizes simultaneously and transfer to described substrate maintaining part.
5. element fixing apparatus according to claim 4, is characterized in that,
Receive the substrate of two described the second sizes under the state that described two substrate receiving platforms is adjusted into described the second interval at described substrate acceptance division, described substrate transfer portion utilizes a pick-up member in described two pick-up member to pick up the substrate of described second size and transfer to described substrate maintaining part, then at described substrate acceptance division, described two substrate receiving platforms are adjusted into behind described the first interval, described substrate transfer portion utilizes another pick-up member in described two pick-up member pick up the substrate of remaining described second size and transfer to described substrate maintaining part.
6. a component mounting method, for by possessing the component mounting method that substrate is carried out to the element fixing apparatus realization of the element installation portion of element installation, is characterized in that,
Described component mounting method comprises:
Substrate receives operation, the interval of two substrate receiving platforms be set as to the first interval and receive the substrate of two first sizes that transport from upstream process side, or the interval of described two substrate receiving platforms be set as to second interval larger than described the first interval and receive the substrate of the second size that two sizes transporting from described upstream process side are larger than the substrate of described first size; And
Substrate transfering process, transfers to described substrate installation portion by the described first size receiving in described substrate reception operation or the substrate of described the second size,
Receive in operation and receive the substrate of two described the second sizes at described substrate, the substrate of two described the second sizes that in described substrate transfering process, this received is transferred to respectively element installation portion one by one.
7. component mounting method according to claim 6, is characterized in that,
Receive in operation and receive the substrate of two described first sizes at described substrate, the substrate of two described first sizes that in described substrate transfering process, this received is transferred to described element installation portion simultaneously.
CN201310488310.8A 2012-10-17 2013-10-17 Element fixing apparatus and component mounting method Active CN103781341B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012229450A JP5845446B2 (en) 2012-10-17 2012-10-17 Component mounting apparatus and component mounting method
JP2012-229450 2012-10-17

Publications (2)

Publication Number Publication Date
CN103781341A true CN103781341A (en) 2014-05-07
CN103781341B CN103781341B (en) 2017-11-03

Family

ID=50572990

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201310488310.8A Active CN103781341B (en) 2012-10-17 2013-10-17 Element fixing apparatus and component mounting method

Country Status (2)

Country Link
JP (1) JP5845446B2 (en)
CN (1) CN103781341B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106061133A (en) * 2015-04-09 2016-10-26 松下知识产权经营株式会社 Component mounting apparatus and component mounting method
CN110169219A (en) * 2017-01-13 2019-08-23 雅马哈发动机株式会社 Apparatus for mounting component

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6435506B2 (en) * 2015-01-30 2018-12-12 パナソニックIpマネジメント株式会社 Component mounting equipment
CN112566485B (en) * 2019-09-25 2022-05-13 芝浦机械电子装置株式会社 Mounting device for electronic component

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1662133A (en) * 2004-02-25 2005-08-31 重机公司 Electronic component mounting device
CN1717970A (en) * 2002-11-29 2006-01-04 松下电器产业株式会社 Substrate conveying device, parts assembling device, and substrate conveying method for parts assembling
JP2011171537A (en) * 2010-02-19 2011-09-01 Panasonic Corp Component packaging apparatus and method of carrying substrate in apparatus

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3591469B2 (en) * 2001-03-02 2004-11-17 松下電器産業株式会社 Electronic component mounting equipment
JP2009200413A (en) * 2008-02-25 2009-09-03 Panasonic Corp Sticking pattern determination device
JP5120357B2 (en) * 2009-10-14 2013-01-16 パナソニック株式会社 Electronic component mounting apparatus and electronic component mounting method

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1717970A (en) * 2002-11-29 2006-01-04 松下电器产业株式会社 Substrate conveying device, parts assembling device, and substrate conveying method for parts assembling
CN1662133A (en) * 2004-02-25 2005-08-31 重机公司 Electronic component mounting device
JP2011171537A (en) * 2010-02-19 2011-09-01 Panasonic Corp Component packaging apparatus and method of carrying substrate in apparatus

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106061133A (en) * 2015-04-09 2016-10-26 松下知识产权经营株式会社 Component mounting apparatus and component mounting method
CN106061133B (en) * 2015-04-09 2020-06-02 松下知识产权经营株式会社 Component mounting device and component mounting method
CN110169219A (en) * 2017-01-13 2019-08-23 雅马哈发动机株式会社 Apparatus for mounting component
CN110169219B (en) * 2017-01-13 2020-12-29 雅马哈发动机株式会社 Component mounting device
US10939597B2 (en) 2017-01-13 2021-03-02 Yamaha Hatsudoki Kabushiki Kaisha Component mounting device

Also Published As

Publication number Publication date
JP5845446B2 (en) 2016-01-20
JP2014081499A (en) 2014-05-08
CN103781341B (en) 2017-11-03

Similar Documents

Publication Publication Date Title
JP5834212B2 (en) Component mounting apparatus and component mounting method
CN102273333B (en) Component mounting device and method
JP4802003B2 (en) Electronic component mounting apparatus and mounting method
JP2018170497A (en) Electronic component mounting device and method for manufacturing member for display
KR20180093822A (en) Device for mounting electric component and method for manufacturing a display member
JP6663940B2 (en) Electronic component mounting apparatus and display member manufacturing method
CN103781341A (en) Element installation device and element installation method
CN1796254B (en) Panel feed apparatus, panel feed method and panel assembly apparatus
WO2014030326A1 (en) Component packaging device and component packaging method
TW201203408A (en) FPD module assembling apparatus
JP6043962B2 (en) Component mounting apparatus and component mounting method
JP2007311774A (en) Different kind adhesive tape sticking method, bonding method using the same, and devices for these
JP5845417B2 (en) Component mounting apparatus and component mounting method
CN106061133B (en) Component mounting device and component mounting method
JP2001068487A (en) Method and device for chip bonding
JP6340580B2 (en) Component mounting equipment
JP2016164902A (en) Preparation method for inspection board and crimping operation inspection method for component crimping device
JP6405522B2 (en) Component mounting apparatus and component mounting method
JP5370280B2 (en) Tape sticking device and tape sticking method
JP2016164904A (en) Acf sticking method and acf sticking device
JP2015065193A (en) Component mounting device
JP5143670B2 (en) Tape-like member sticking device
JP6244550B2 (en) Method for replacing protective sheet in component mounting apparatus
JP4626278B2 (en) Workpiece assembly device
JP2020120054A (en) Component mounting apparatus and component mounting method

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C41 Transfer of patent application or patent right or utility model
TA01 Transfer of patent application right

Effective date of registration: 20151102

Address after: Osaka

Applicant after: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT Co.,Ltd.

Address before: Osaka

Applicant before: Matsushita Electric Industrial Co.,Ltd.

GR01 Patent grant
GR01 Patent grant