CN103134606B - Differential type acoustic surface wave temperature sensor - Google Patents
Differential type acoustic surface wave temperature sensor Download PDFInfo
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- CN103134606B CN103134606B CN201310047166.4A CN201310047166A CN103134606B CN 103134606 B CN103134606 B CN 103134606B CN 201310047166 A CN201310047166 A CN 201310047166A CN 103134606 B CN103134606 B CN 103134606B
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- 239000000758 substrate Substances 0.000 claims abstract description 47
- 239000012528 membrane Substances 0.000 claims description 73
- 229910052751 metal Inorganic materials 0.000 claims description 27
- 239000002184 metal Substances 0.000 claims description 27
- 229910017083 AlN Inorganic materials 0.000 claims description 12
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 claims description 12
- RNWHGQJWIACOKP-UHFFFAOYSA-N zinc;oxygen(2-) Chemical compound [O-2].[Zn+2] RNWHGQJWIACOKP-UHFFFAOYSA-N 0.000 claims description 12
- 239000000919 ceramic Substances 0.000 claims description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 9
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- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 claims description 3
- 239000010453 quartz Substances 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
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- 239000000377 silicon dioxide Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 238000007789 sealing Methods 0.000 abstract 1
- 238000010897 surface acoustic wave method Methods 0.000 description 46
- 238000012544 monitoring process Methods 0.000 description 9
- 238000005259 measurement Methods 0.000 description 7
- 230000035945 sensitivity Effects 0.000 description 4
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- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
The invention relates to a differential type acoustic surface wave temperature sensor. The differential type acoustic surface wave temperature sensor comprises a shell body, a shell cover, a piezoelectric substrate, a first acoustic surface wave resonator, an a second acoustic surface wave resonator, wherein the piezoelectric substrate is fixed on the bottom portion inside the shell body, and the shell body and the shell cover are connected in a sealing mode. The differential type acoustic surface wave temperature sensor is characterized by further comprising a first piezoelectric film, wherein the first acoustic surface wave resonator is arranged on the surface of the piezoelectric substrate and the first piezoelectric film is arranged on the spare surface of the piezoelectric substrate, and the surface and the periphery of the first acoustic surface wave resonator, and the second acoustic surface wave resonator is arranged on the surface of the first piezoelectric film. The sensor has the advantages of being compact in structure, high in measuring precision, low in production cost and the like.
Description
Technical field
The present invention is specifically related to a kind of differential type SAW Temperature Sensors, be applicable to human body temperature monitoring, or high temperature detection in hazardous environment, or the temperature remote sensing of temperature monitoring and the power transformer etc. of the crucial rotary mechanical part such as generating and power transmission etc.
Background technology
A main application of existing surface acoustic wave sensor is temperature sensor.Be widely used in actual life taking surface acoustic wave as basic passive wireless temperature sensor, for example, in hospital, patient temperature is monitored, or in implant into body, carry out the Real-Time Monitoring of body temperature and blood pressure, or the monitoring of exhausr port high temperature in turbine engine operational process, or the monitoring of the interior temperature of steel industry smelting vessel lining field, or the temperature monitoring of the crucial contact being electrically connected in intelligent grid, or the Real-Time Monitoring of the temperature and pressure of vehicle tyre etc.
As everyone knows, the design of existing SAW Temperature Sensors mainly contains two kinds, resonator and lag line.A single port SAW (Surface Acoustic Wave) resonator is the variation that the resonance frequency by measuring resonator changes to measure temperature; A delay line filter is the variation that changes to measure temperature by the time delay of transfer delay line.And the SAW Temperature Sensors of said structure may be used in wired and wireless two kinds of measurement/monitoring systems.
If be applied in the not high situation of thermometric accuracy requirement, the design of SAW Temperature Sensors normally adopts an one port resonator.Although and the sound surface temperature sensor of this structure is simple in structure, cost is also low, and be applicable to multiple spot be carried out to monitoring temperature with a frequency read/write simultaneously; But the SAW Temperature Sensors that carries out temperature survey or other physical parameters measurements as one port resonator of this use has following shortcoming:
Owing to having variable factor in manufacturing process, therefore, in the time of product export, need to calibrate each sensor;
Due to the variation of ageing equipment and environment, need in application process, carry out the calibration of timing or not timing to each sensor;
The aging meeting of sensor device directly affects the measuring accuracy of sensor;
Measurement result is easily subject to the impact of distance between sensor and rf readers;
Measure and be easily subject to electromagnetic interference between sensor and frequency read/write.
Due to above-mentioned all restrictions, the temperature measurement system that uses the SAW Temperature Sensors of an one port resonator to set up, do not measure the reference signal of temperature, measuring accuracy is not high, before measuring, need to calibrate, and the operating cost of the temperature measurement system of this structure is also higher.
If when temperature measurement accuracy becomes more crucial system requirements, adopt the SAW Temperature Sensors being formed by two one port resonators to carry out the difference measurement of temperature with regard to being necessary.The design of two one port resonators in the past mainly contains two kinds of modes below:
Two one port resonators are positioned at the identical Acoustic Wave Propagation direction on same piezoelectric substrate surface, but have different resonance frequencies;
Two one port resonators are positioned at the different Acoustic Wave Propagation directions on same piezoelectric substrate surface, and have different resonance frequencies;
Although and the SAW Temperature Sensors of said structure has made up the indeterminable shortcoming of only bringing with a resonator, increased the size of sensor, also increased production cost.
Summary of the invention
The object of the invention is: provide a kind of compact conformation, measuring accuracy high, and the low differential type SAW Temperature Sensors of production cost, to overcome the deficiencies in the prior art.
In order to achieve the above object, first technical scheme of the present invention is: a kind of differential type SAW Temperature Sensors, comprise housing, cap, piezoelectric substrate, first sound surface resonator and second sound surface resonator, described piezoelectric substrate is fixed on the bottom in housing, described housing and cap are tightly connected, its innovative point is: also comprise the first piezoelectric membrane, described first sound surface resonator is located at the surface of piezoelectric substrate, and the first piezoelectric membrane is located on the residual surface of piezoelectric substrate and the surface and periphery of first sound surface resonator, described second sound surface resonator is located at the surface of the first piezoelectric membrane.
In above-mentioned first technical scheme, described housing and cap are respectively metal shell and metal cap, or are respectively ceramic shell and metal cap.
In above-mentioned first technical scheme, described the first piezoelectric membrane is zinc paste or aluminium nitride, and piezoelectric substrate is quartz or lithium niobate or lithium tantalate,
or adamas.
In above-mentioned first technical scheme, described first sound surface resonator overlaps or part overlapping or crossing in the projection of vertical direction with second sound surface resonator.
In above-mentioned first technical scheme, described first sound surface resonator and second sound surface resonator are in the time that the projection of vertical direction is crossing, and both angles are within the scope of 0 ° ~ 180 °.
In order to achieve the above object, second technical scheme of the present invention is: a kind of differential type SAW Temperature Sensors, comprise housing, cap, first sound surface resonator and second sound surface resonator, described housing and cap are tightly connected, its innovative point is: also comprise substrate base, the first piezoelectric membrane and the second piezoelectric membrane, described substrate base is fixed on the bottom in housing, the second piezoelectric membrane is located at the surface of substrate base, first sound surface resonator is located on the second piezoelectric membrane, the first piezoelectric membrane is located at the residual surface of the second piezoelectric membrane and surface and the periphery of first sound surface resonator, described second sound surface resonator is located at the surface of the first piezoelectric membrane.
In above-mentioned second technical scheme, described housing and cap are respectively metal shell and metal cap, or are respectively ceramic shell and metal cap.
In above-mentioned second technical scheme, described the first piezoelectric membrane is zinc paste or aluminium nitride, and the second piezoelectric membrane is silicon dioxide, and substrate base is silicon crystal.
In above-mentioned second technical scheme, described first sound surface resonator overlaps or part overlapping or crossing in the projection of vertical direction with second sound surface resonator.
In above-mentioned second technical scheme, described first sound surface resonator and second sound surface resonator are in the time that the projection of vertical direction is crossing, and both angles are within the scope of 0 ° ~ 180 °.
In order to achieve the above object, the 3rd technical scheme of the present invention is: a kind of differential type SAW Temperature Sensors, comprise housing, cap, first sound surface resonator and second sound surface resonator, described housing and cap are tightly connected, its innovative point is: also comprise piezoelectric substrate, the first piezoelectric membrane and the second piezoelectric membrane, described piezoelectric substrate is fixed on the bottom in housing, the second piezoelectric membrane is located at the surface of piezoelectric substrate, first sound surface resonator is located on the second piezoelectric membrane, the first piezoelectric membrane is located at the residual surface of the second piezoelectric membrane and surface and the periphery of first sound surface resonator, described second sound surface resonator is located at the surface of the first piezoelectric membrane.
In above-mentioned the 3rd technical scheme, described housing and cap are respectively metal shell and metal cap, or are respectively ceramic shell and metal cap.
In above-mentioned the 3rd technical scheme, described the first piezoelectric membrane is zinc paste, and the second piezoelectric membrane is aluminium nitride; Or described the first piezoelectric membrane is aluminium nitride, and the second piezoelectric membrane is zinc paste, and piezoelectric substrate is adamas.
In above-mentioned the 3rd technical scheme, described first sound surface resonator overlaps or part overlapping or crossing in the projection of vertical direction with second sound surface resonator.
In above-mentioned the 3rd technical scheme, described first sound surface resonator and second sound surface resonator are in the time that the projection of vertical direction is crossing, and both angles are within the scope of 0 ° ~ 180 °.
The good effect that the present invention has is: owing to having adopted after above-mentioned differential type arrangement of temperature sensor, two SAW (Surface Acoustic Wave) resonator are arranged on to two different physical surfaces, and are arranged to layer structure, compared with two SAW (Surface Acoustic Wave) resonator being arranged on same piezoelectric substrate surface with prior art, chip size of the present invention has at least reduced 50%, again due to the propagation characteristic (acoustic velocity of surface acoustic wave on two different physical surfaces, electromechanical coupling factor etc.) difference, make the temperature coefficient of two sound surface resonance devices also different, therefore, the resonance frequency being caused by temperature variation of two resonators changes also different, one of them SAW (Surface Acoustic Wave) resonator is used for providing reference or reference temperature measuring-signal, another SAW (Surface Acoustic Wave) resonator is used for providing difference temperature signal, by analyzing the difference on the frequency of different resonance frequencies of two SAW (Surface Acoustic Wave) resonator, can obtain accurately the small temperature variation of measured body, thereby realize high-precision differential type temperature survey.
Brief description of the drawings
Fig. 1 is the structural representation of the first embodiment of the present invention;
Fig. 2 is the structural representation of the second embodiment of the present invention;
Fig. 3 is the structural representation of the third embodiment of the present invention.
Embodiment
Below in conjunction with accompanying drawing and the embodiment that provides, the present invention is further illustrated, but be not limited to this.
Embodiment 1
As shown in Figure 1, a kind of differential type SAW Temperature Sensors, comprise housing 1, cap 2, piezoelectric substrate 3, first sound surface resonator 4 and second sound surface resonator 6, described piezoelectric substrate 3 is fixed on the bottom in housing 1, described housing 1 and cap 2 are tightly connected, its innovative point is: also comprise the first piezoelectric membrane 5, described first sound surface resonator 4 is located at the surface of piezoelectric substrate 3, and the first piezoelectric membrane 5 is located on the residual surface of piezoelectric substrate 3 and the surface and periphery of first sound surface resonator 4, described second sound surface resonator 6 is located at the surface of the first piezoelectric membrane 5.
As shown in Figure 1, described housing 1 and cap 2 are respectively metal shell and metal cap, or are respectively ceramic shell and metal cap.
The first piezoelectric membrane 5 of the present invention is zinc paste or aluminium nitride, and piezoelectric substrate 3 is quartz or lithium niobate or lithium tantalate,
or adamas, or other piezoelectric crystals.
As shown in Figure 1, in order to make compact conformation of the present invention, reduce the size of sensor, first sound surface resonator 4 of the present invention overlaps or part overlapping or crossing in the projection of vertical direction with second sound surface resonator 6.
First sound surface resonator 4 of the present invention and second sound surface resonator 6 are in the time that the projection of vertical direction is crossing, both angles are within the scope of 0 ° ~ 180 °, concrete numerical value is determined by the maximal value of the difference of two direction surface acoustic wave time delay temperatures coefficient, can guarantee that like this first sound surface resonator 4 and the sensitivity of the difference measurement of second sound surface resonator 6 are the best.
The acoustic wave energy that in embodiment 1, first sound surface resonator 4 and second sound surface resonator 6 produce all concentrates in the degree of depth of piezoelectric substrate 3 and the first piezoelectric membrane 5 wave length of sounds in bottom, and time delay temperature coefficient (TCD) or the frequency-temperature coefficient (TCF) of these two different acoustic wave propagation paths are different simultaneously.By analyzing the difference on the frequency from the resonance frequency of two different SAW (Surface Acoustic Wave) resonator, just can obtain accurately the subtle change of measured body temperature.
Embodiment 2
As shown in Figure 2, a kind of differential type SAW Temperature Sensors, comprise housing 1, cap 2, first sound surface resonator 4 and second sound surface resonator 6, described housing 1 and cap 2 are tightly connected, its innovative point is: also comprise substrate base 3 ', the first piezoelectric membrane 5 and the second piezoelectric membrane 8, described substrate base 3 ' is fixed on the bottom in housing 1, the second piezoelectric membrane 8 is located at the surface of substrate base 3 ', first sound surface resonator 4 is located on the second piezoelectric membrane 8, the first piezoelectric membrane 5 is located at the residual surface of the second piezoelectric membrane 8 and surface and the periphery of first sound surface resonator 4, described second sound surface resonator 6 is located at the surface of the first piezoelectric membrane 5.
Housing 1 of the present invention and cap 2 are respectively metal shell and metal cap, or are respectively ceramic shell and metal cap.
The first piezoelectric membrane 5 of the present invention is zinc paste or aluminium nitride, and the second piezoelectric membrane 8 is silicon dioxide, and substrate base 3 ' is silicon crystal.
As shown in Figure 2, in order to make compact conformation of the present invention, reduce the size of sensor, first sound surface resonator 4 of the present invention overlaps or part overlapping or crossing in the projection of vertical direction with second sound surface resonator 6.
First sound surface resonator 4 of the present invention and second sound surface resonator 6 are in the time that the projection of vertical direction is crossing, both angles are within the scope of 0 ° ~ 180 °, concrete numerical value is determined by the maximal value of the difference of two direction surface acoustic wave time delay temperatures coefficient, can guarantee that like this first sound surface resonator 4 and the sensitivity of the difference measurement of second sound surface resonator 6 are the best.
Embodiment 3
As shown in Figure 3, a kind of differential type SAW Temperature Sensors, comprise housing 1, cap 2, first sound surface resonator 4 and second sound surface resonator 6, described housing 1 and cap 2 are tightly connected, its innovative point is: also comprise piezoelectric substrate 3, the first piezoelectric membrane 5 and the second piezoelectric membrane 8, described piezoelectric substrate 3 is fixed on the bottom in housing 1, the second piezoelectric membrane 8 is located at the surface of piezoelectric substrate 3, first sound surface resonator 4 is located on the second piezoelectric membrane 8, the first piezoelectric membrane 5 is located at the residual surface of the second piezoelectric membrane 8 and surface and the periphery of first sound surface resonator 4, described second sound surface resonator 6 is located at the surface of the first piezoelectric membrane 5.
Housing 1 of the present invention and cap 2 are respectively metal shell and metal cap, or are respectively ceramic shell and metal cap.
The first piezoelectric membrane 5 of the present invention is zinc paste, and the second piezoelectric membrane 8 is aluminium nitride; Or described the first piezoelectric membrane 5 is aluminium nitride, and the second piezoelectric membrane 8 is zinc paste, and piezoelectric substrate 3 is adamass.
As shown in Figure 3, in order to make compact conformation of the present invention, reduce the size of sensor, first sound surface resonator 4 of the present invention overlaps or part overlapping or crossing in the projection of vertical direction with second sound surface resonator 6.
First sound surface resonator 4 of the present invention and second sound surface resonator 6 are in the time that the projection of vertical direction is crossing, both angles are within the scope of 0 ° ~ 180 °, concrete numerical value is determined by the maximal value of the difference of two direction surface acoustic wave time delay temperatures coefficient, can guarantee that like this first sound surface resonator 4 and the sensitivity of the difference measurement of second sound surface resonator 6 are the best.
If the first sound surface resonator 4 of the embodiment of the present invention 1, embodiment 2 and embodiment 3 and second sound surface resonator 6 are in the time that the projection of vertical direction overlaps, Acoustic Wave Propagation direction is consistent, but resonance frequency is different; If first sound surface resonator 4 and second sound surface resonator 6 are in the time that the projection of vertical direction intersects, guarantee that Acoustic Wave Propagation direction that two SAW (Surface Acoustic Wave) resonator produce has the angle of non-zero, there is different resonance frequencies, guarantee that two SAW (Surface Acoustic Wave) resonator have different time delay temperatures coefficient (TCD) or frequency-temperature coefficient (TCF), by analyzing from the difference on the frequency of the different resonance frequencies of two SAW (Surface Acoustic Wave) resonator, we can obtain the small temperature variation of measured body accurately.
The present invention beams back measuring-signal in order to ensure first sound surface resonator 4 and second sound surface resonator 6 simultaneously, and ensure that signal intensity is the strongest, first sound surface resonator 4 and second sound surface resonator 6 are connected in parallel, and arrive the bottom in housing 1 by Bonding.
In the embodiment of the present invention 1, embodiment 2 and embodiment 3, first sound surface resonator 4 is for providing reference or reference temperature measuring-signal, second sound surface resonator 6 is for providing difference temperature signal, the orientation of first sound surface resonator 4 and second sound surface resonator 6 is come to determine in such a way: first sound surface resonator 4 is selected on the minimum direction of propagation of time delay temperature coefficient (TCD), and second sound surface resonator 6 is selected on the maximum direction of propagation of time delay temperature coefficient (TCD).So just can improve to greatest extent thermometric sensitivity.Certainly, also can be that second sound surface resonator 6 is for providing reference or reference temperature measuring-signal, first sound surface resonator 4 is for providing difference temperature signal, and at this moment the decision principle of two SAW (Surface Acoustic Wave) resonator orientations is still determined by the maximal value of the difference of two direction surface acoustic wave time delay temperatures coefficient.
When the present invention uses, differential type SAW Temperature Sensors is connected on a little radio-frequency antenna.Radiofrequency signal is first sent by radio-frequency queries device, is received by the present invention; Temperature influence and amended signal is fired back by radio-frequency antenna, then received by interrogator.The temperature information that has comprised measured body from radiofrequency signal of the present invention, by processing the difference from two resonant frequency shifts, we can measure/monitor the temperature variation of measurand in real time and accurately.Because do not need separately to add power supply in the time that sensor uses, the temperature sensing of realization is completely wireless and passive.
Structure disclosed in this invention also can be for differential type pressure transducer, differential type vibration transducer, or the differential type of other physical parameters is measured.
Claims (15)
1. a differential type SAW Temperature Sensors, comprise housing (1), cap (2), piezoelectric substrate (3), first sound surface resonator (4) and second sound surface resonator (6), described piezoelectric substrate (3) is fixed on the bottom in housing (1), described housing (1) and cap (2) are tightly connected, it is characterized in that: also comprise the first piezoelectric membrane (5), described first sound surface resonator (4) is located at the surface of piezoelectric substrate (3), and the first piezoelectric membrane (5) is located on the residual surface of piezoelectric substrate (3) and the surface and periphery of first sound surface resonator (4), described second sound surface resonator (6) is located at the surface of the first piezoelectric membrane (5).
2. differential type SAW Temperature Sensors according to claim 1, is characterized in that: described housing (1) and cap (2) are respectively metal shell and metal cap, or is respectively ceramic shell and metal cap.
3. differential type SAW Temperature Sensors according to claim 1, it is characterized in that: described the first piezoelectric membrane (5) is zinc paste or aluminium nitride, piezoelectric substrate (3) is quartz or lithium niobate or lithium tantalate or adamas.
4. differential type SAW Temperature Sensors according to claim 1, is characterized in that: described first sound surface resonator (4) overlaps or part overlapping in the projection of vertical direction with second sound surface resonator (6).
5. differential type SAW Temperature Sensors according to claim 1, it is characterized in that: described first sound surface resonator (4) and second sound surface resonator (6) are in the time that the projection of vertical direction is crossing, and both angles are within the scope of 0 ° ~ 180 °.
6. a differential type SAW Temperature Sensors, comprise housing (1), cap (2), first sound surface resonator (4) and second sound surface resonator (6), described housing (1) and cap (2) are tightly connected, it is characterized in that: also comprise substrate base (3 '), the first piezoelectric membrane (5) and the second piezoelectric membrane (8), described substrate base (3 ') is fixed on the bottom in housing (1), the second piezoelectric membrane (8) is located at the surface of substrate base (3 '), first sound surface resonator (4) is located on the second piezoelectric membrane (8), the first piezoelectric membrane (5) is located at the residual surface of the second piezoelectric membrane (8) and surface and the periphery of first sound surface resonator (4), described second sound surface resonator (6) is located at the surface of the first piezoelectric membrane (5).
7. differential type SAW Temperature Sensors according to claim 6, is characterized in that: described housing (1) and cap (2) are respectively metal shell and metal cap, or is respectively ceramic shell and metal cap.
8. differential type SAW Temperature Sensors according to claim 6, is characterized in that: described the first piezoelectric membrane (5) is zinc paste or aluminium nitride, and the second piezoelectric membrane (8) is silicon dioxide, and substrate base (3 ') is silicon crystal.
9. differential type SAW Temperature Sensors according to claim 6, is characterized in that: described first sound surface resonator (4) overlaps or part overlapping in the projection of vertical direction with second sound surface resonator (6).
10. differential type SAW Temperature Sensors according to claim 6, it is characterized in that: described first sound surface resonator (4) and second sound surface resonator (6) are in the time that the projection of vertical direction is crossing, and both angles are within the scope of 0 ° ~ 180 °.
11. 1 kinds of differential type SAW Temperature Sensors, comprise housing (1), cap (2), first sound surface resonator (4) and second sound surface resonator (6), described housing (1) and cap (2) are tightly connected, it is characterized in that: also comprise piezoelectric substrate (3), the first piezoelectric membrane (5) and the second piezoelectric membrane (8), described piezoelectric substrate (3) is fixed on the bottom in housing (1), the second piezoelectric membrane (8) is located at the surface of piezoelectric substrate (3), first sound surface resonator (4) is located on the second piezoelectric membrane (8), the first piezoelectric membrane (5) is located at the residual surface of the second piezoelectric membrane (8) and surface and the periphery of first sound surface resonator (4), described second sound surface resonator (6) is located at the surface of the first piezoelectric membrane (5).
12. differential type SAW Temperature Sensors according to claim 11, is characterized in that: described housing (1) and cap (2) are respectively metal shell and metal cap, or are respectively ceramic shell and metal cap.
13. differential type SAW Temperature Sensors according to claim 11, is characterized in that: described the first piezoelectric membrane (5) is zinc paste, and the second piezoelectric membrane (8) is aluminium nitride; Or described the first piezoelectric membrane (5) is aluminium nitride, and the second piezoelectric membrane (8) is zinc paste, and piezoelectric substrate (3) is adamas.
14. differential type SAW Temperature Sensors according to claim 11, is characterized in that: described first sound surface resonator (4) overlaps or part overlapping in the projection of vertical direction with second sound surface resonator (6).
15. differential type SAW Temperature Sensors according to claim 11, it is characterized in that: described first sound surface resonator (4) and second sound surface resonator (6) are in the time that the projection of vertical direction is crossing, and both angles are within the scope of 0 ° ~ 180 °.
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| CN103398773A (en) * | 2013-08-06 | 2013-11-20 | 常州智梭传感科技有限公司 | Same-frequency-interference-resistant surface acoustic wave sensor |
| CN104007288B (en) * | 2014-06-11 | 2018-04-10 | 常州智梭传感科技有限公司 | The sensing acceleration transducer with temperature-compensating based on surface acoustic wave |
| CN104006875B (en) * | 2014-06-11 | 2018-04-10 | 常州智梭传感科技有限公司 | The sense vibrations sensor with temperature-compensating based on surface acoustic wave |
| CN104198060B (en) * | 2014-08-26 | 2017-01-18 | 清华大学 | High temperature-resistant wireless MEMS temperature sensing system |
| CN105511376B (en) * | 2015-12-29 | 2020-02-28 | 广州三星通信技术研究有限公司 | Infant wearing article and monitoring system based on surface acoustic wave sensor |
| CN107289883B (en) * | 2017-07-25 | 2019-09-03 | 中国科学院声学研究所 | A kind of wireless passive sonic surface wave strain transducer of differential type resonator type |
| CN108151907B (en) * | 2017-12-25 | 2019-12-10 | 电子科技大学 | Linear temperature frequency characteristic measuring and calculating method of LGS surface acoustic wave temperature sensor |
| CN108548609A (en) * | 2018-03-16 | 2018-09-18 | 张利 | A kind of temperature measuring label |
| CN108519165A (en) * | 2018-05-30 | 2018-09-11 | 广东电网有限责任公司 | A kind of cable bulkhead temperature transducer of calibration-free |
| CN113552171B (en) * | 2021-07-15 | 2022-06-24 | 浙江大学 | MEMS piezoelectric resonant dew point sensor device and dew point identification method thereof |
| CN114136507B (en) * | 2021-12-07 | 2024-10-01 | 中国电子科技集团公司第四十八研究所 | Wireless passive acoustic surface wave pressure sensor and preparation method thereof |
| CN115356009B (en) * | 2022-07-05 | 2024-08-09 | 北京遥测技术研究所 | Surface acoustic wave temperature and pressure composite sensor with double-chamber structure |
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| US20070188054A1 (en) * | 2006-02-13 | 2007-08-16 | Honeywell International Inc. | Surface acoustic wave packages and methods of forming same |
| JP2011124413A (en) * | 2009-12-11 | 2011-06-23 | Murata Mfg Co Ltd | Method of manufacturing electronic component module, and electronic component module |
| FR2965050B1 (en) * | 2010-09-22 | 2013-06-28 | Senseor | LOW COST PRESSURE AND TEMPERATURE SENSOR COMPRISING SAW RESONATORS AND METHOD OF MANUFACTURING SAME |
| CN102288675B (en) * | 2011-05-06 | 2013-01-02 | 浙江省医疗器械研究所 | Liquid-phase detection device of series surface acoustic wave type piezoelectric sensor and manufacturing method thereof |
| CN102853934B (en) * | 2012-07-27 | 2015-04-15 | 上海赛赫信息科技有限公司 | Wireless temperature and humidity sensor and system and measuring method |
| CN102879126A (en) * | 2012-10-26 | 2013-01-16 | 奉化市供电局 | Wireless temperature sensing system for switch cabinet equipment |
| CN203132736U (en) * | 2013-02-06 | 2013-08-14 | 常州智梭传感科技有限公司 | Differential surface-acoustic-wave temperature sensor |
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