CN107727125B - Wireless and passive test macro and test method based on thin film acoustic wave sensor - Google Patents
Wireless and passive test macro and test method based on thin film acoustic wave sensor Download PDFInfo
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- CN107727125B CN107727125B CN201710824004.5A CN201710824004A CN107727125B CN 107727125 B CN107727125 B CN 107727125B CN 201710824004 A CN201710824004 A CN 201710824004A CN 107727125 B CN107727125 B CN 107727125B
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- 238000012360 testing method Methods 0.000 title claims abstract description 33
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- 239000000758 substrate Substances 0.000 claims abstract description 20
- 230000005284 excitation Effects 0.000 claims abstract description 9
- 238000001514 detection method Methods 0.000 claims abstract description 6
- 239000004642 Polyimide Substances 0.000 claims description 10
- 229920001721 polyimide Polymers 0.000 claims description 10
- 230000004044 response Effects 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 3
- 229920000139 polyethylene terephthalate Polymers 0.000 claims description 3
- 239000005020 polyethylene terephthalate Substances 0.000 claims description 3
- 125000000118 dimethyl group Chemical group [H]C([H])([H])* 0.000 claims description 2
- -1 polyethylene terephthalate Polymers 0.000 claims description 2
- 229920005573 silicon-containing polymer Polymers 0.000 claims description 2
- 230000035945 sensitivity Effects 0.000 abstract description 7
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- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
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- 235000008434 ginseng Nutrition 0.000 description 2
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical group [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/48—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using wave or particle radiation means
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Arrangements For Transmission Of Measured Signals (AREA)
Abstract
The wireless and passive test macro based on thin film acoustic wave sensor that the invention discloses a kind of, include: wireless transceiver, with the wireless transceiver electrical connection inquiry antenna, substrate, the thin film acoustic wave sensor and receiving antenna for being set in the substrate and being connect by impedance matching network, the wireless transceiver will emit wireless pulses interrogation signal by the inquiry antenna, and the receiving antenna is using received wireless pulses interrogation signal as the energy of excitation thin film acoustic wave sensor.The wireless and passive test method based on thin film acoustic wave sensor that the invention discloses a kind of.Present system has the characteristics that high sensitivity, detection accuracy are high, are miniaturized, and can play a significant role in fields such as embedded Control, wearable electronic and Internet of Things.
Description
Technical field
The present invention relates to sonic sensor fields, and in particular to a kind of wireless and passive survey based on thin film acoustic wave sensor
Test system and test method.
Background technique
Currently, acoustic wave device has obtained extensive commercial applications, wherein surface acoustic wave (Surface Acoustic
Wave, SAW) device and film bulk acoustic (Film Bulk Acoustic Resonator, FBAR) device be even more logical in individual
Letter and sensing aspect obtain important application, this has benefited from, and acoustic wave device working frequency is high, quality factor are high, sensing sensitivity is high,
The excellent properties such as reliability height.It is passed in mass sensitivity, temperature sensing, gas sensing, biochemistry sensing, humidity sensor, pressure
Sense etc., has corresponding sonic sensor to be increasingly developed out.These years, have benefited from embedded Control, wearable electricity
The development of son and Internet of Things, the sales volume rapid growth of world market sensor, sonic sensor present huge market
Potentiality.
Existing active wired sensor generally obtains energy by battery, and that there are life cycles is short, maintenance cost is higher
Deficiency, and can not be applied under dangerous and adverse circumstances, in order to make up the defect, wireless and passive acoustic wave device is studied
And put into application." the Passive surface wave sensor of United States Patent (USP) US 6144332 disclosed on 2 4th, 2003
Which can be wirelessly interrogated " reports one kind can be by the passive of pulse signal wireless interrogation
SAW sensor, and the sensor has temperature compensation function.The article that L.M.Reindl et al. is delivered in November, 2004
" Wireless Measurement of Temperature Using Surface Acoustic Waves Sensors " report
Road a kind of wireless and passive SAW temperature sensor, monitoring accuracy reach 0.2 DEG C.Report one kind within F.Schmid et al. 1994
Human body physical parameter remote sensing device based on SAW, the detection accuracy of the sensor for temperature reach 0.1 DEG C, detecting distance
Reach 15m.It can be seen that SAW sensor can not only accomplish wireless and passive, moreover it is possible to realize remote, high-precision sensing.
In terms of thin film acoustic wave sensor, also there is new research achievement to be reported successively.Manohar Nagaraju et al.
Article " the A fully integrated wafer-scale sub-mm delivered for 20143FBAR-based wireless
Mass sensor " reports a kind of wireless quality sensor based on FBAR, but the sensor be it is active, need battery
Power supply.Article " the Wireless Temperature Sensing using a that Jon-Hong Lin et al. is delivered for 2008
Passive RFID Tag with Film Bulk Acoustic Resonator " discloses a kind of wireless nothing based on FBAR
Source temperature senses RFID, which is the RF energy that reader transmitting is obtained using the principle of inductive coupling, by receiving line
The circuit of circle and active semiconductor device receives and stores energy, and starting sensing node circuit (contains after energy reaches centainly
FBAR work), and in inductive coupling system, the operating distance of close coupled system is 0~15cm, dredges the operating distance of coupled system
For 0~1m.
Summary of the invention
In view of above-mentioned, the present invention provides a kind of wireless and passive test macro and test based on thin film acoustic wave sensor
Method.The present invention is by the way of mechanical-electric coupling, the wireless pulses interrogation signal that wireless transceiver is emitted, as excitation film
The energy of bulk acoustic wave device, substitute it is traditional in such a way that inductive coupling or battery obtain energy, to improve thin-film body sound
The distance sensing of wave sensor, and its application flexibility of data monitoring is carried out in the presence of a harsh environment.
An embodiment of the present invention provides a kind of wireless and passive test macro based on thin film acoustic wave sensor, including
Wireless transceiver, substrate, is set in the substrate and by impedance the inquiry antenna being electrically connected with the wireless transceiver
The thin film acoustic wave sensor and receiving antenna of distribution network connection, the wireless transceiver will emit nothing by the inquiry antenna
Line pulse interrogation signal, the receiving antenna receive energy of the wireless pulses interrogation signal as excitation thin film acoustic wave sensor
Amount.
The technology of the present invention content uses FBAR wireless and passive system, is electromagnetic wave directly excitation after wireless transmission electromagnetic wave
FBAR resonance, and it is reflected back the mechanical-electric coupling mode of electromagnetic wave, tens of meters of distance sensings may be implemented, due to sensing node circuit
Simply, only FBAR and antenna, sensing sensitivity can significantly improve, and not drawn low reactance-resistance ratio by sensing node circuit, accomplish really
Wireless and passive.And working frequency can be greatly improved in the present invention, to improve sensing sensitivity and transmission range, and volume
It can greatly reduce, including sensor FBAR and antenna size.
Preferably, the substrate is hard pcb board or flexible substrates.Further preferably, the material of the flexible substrates
It can be polyimides (PI), polyethylene terephthalate (PET) or dimethyl silicone polymer (PDMS).Flexible substrates make
It obtains entire sensor and has certain flexibility, can be applicable to the fields such as wearable electronic.
Preferably, the receiving antenna is external antenna or microstrip antenna.The external antenna passes through SMA RF repeating
Head is connect with the impedance matching network.The microstrip antenna is printed on a flexible substrate by transfer technique, described micro-
Band antenna is laminated structure, and shape is round, square, triangle or helical form.
Preferably, the impedance matching network is L-type matching network, π type matching network or T-type matching network, by electricity
Anti- element composition.
Preferably, the centre frequency of the inquiry antenna and receiving antenna is 500MHz~10GHz.
Preferably, the thin film acoustic wave sensor can be the physics such as detection temperature, humidity, pressure or gas concentration
The thin film acoustic wave sensor of amount, temperature, humidity, pressure or gas concentration etc. can change the resonance frequency, phase, amplitude of FBAR
Etc. parameters, can receive the variation of these parameters by receiver, to realize to the sensing of node.These film bulk acoustics pass
Sensor has very high sensing sensitivity, detection accuracy and stability, this has benefited from its design feature and high working frequency, phase
There is big advantage than other sensors.
Another embodiment of the present invention provides a kind of wireless and passive test method based on thin film acoustic wave sensor, should
Method utilizes above-mentioned test macro, comprising the following steps:
The wireless transceiver emits wireless pulses interrogation signal using the inquiry antenna；
The receiving antenna receives energy of the wireless pulses interrogation signal as excitation thin film acoustic wave sensor；
The receiving antenna returns to the response signal modulated through measurand to the wireless transceiver.
Embodiment of the present invention has the beneficial effect that
The present invention substitutes traditional inductive coupling with mechanical-electric coupling or from the mode of battery acquisition energy, is received by antenna
Wireless pulses interrogation signal provides energy to thin film acoustic wave sensor, so that wireless and passive thin film acoustic wave sensor
Have farther distance sensing, improves the flexibility of its application.Compared with active wired acoustic wave sensor, the present invention also has
There is lower cost.Embodiment of the present invention also has the characteristics that high sensitivity, detection accuracy are high, are miniaturized, can be embedded
The fields such as control, wearable electronic and Internet of Things play a significant role.
Detailed description of the invention
Fig. 1 is wireless and passive test system structure schematic diagram of the embodiment of the present invention based on thin film acoustic wave sensor；
Fig. 2 is wireless and passive test method flow chart of the embodiment of the present invention based on thin film acoustic wave sensor；
Fig. 3 is the wireless and passive test system structure signal based on film bulk acoustic temperature sensor that embodiment 1 provides
Figure；
Fig. 4 be embodiment 1 provide film bulk acoustic temperature sensor wireless and passive and it is wired active under the conditions of frequency
Rate-temperature-responsive test comparison chart；
Fig. 5 is the wireless and passive test system structure signal based on film bulk acoustic humidity sensor that embodiment 2 provides
Figure；
Fig. 6 be embodiment 3 provide film bulk acoustic pressure transducer wireless and passive and it is wired active under the conditions of frequency
Rate-temperature-responsive test comparison chart.
Specific embodiment
In order to more specifically describe the present invention, with reference to the accompanying drawing and specific embodiment is to technical solution of the present invention
It is described in detail.
Fig. 1 is wireless and passive test system structure schematic diagram of the embodiment of the present invention based on thin film acoustic wave sensor.Ginseng
See Fig. 1, which includes: wireless transceiver 1, inquiry antenna 2, substrate 3, receiving antenna 4 and thin film acoustic wave sensor
5, wireless transceiver 1 is electrically connected with inquiry antenna 2, and receiving antenna 4 and thin film acoustic wave sensor 5 are each provided in substrate 3, and
It is electrically connected between receiving antenna 4 and thin film acoustic wave sensor 5 by impedance matching network 6.
Fig. 2 is wireless and passive test mode structural schematic diagram of the embodiment of the present invention based on thin film acoustic wave sensor.Ginseng
See Fig. 2, which includes:
S201, wireless transceiver 1 emit wireless pulses interrogation signal using inquiry antenna 2；
S202, receiving antenna 4 receive energy of the wireless pulses interrogation signal as excitation thin film acoustic wave sensor 5；
S203, receiving antenna 4 return to the response signal modulated through measurands such as temperature, humidity, pressure and receive to wireless
Send out device 1.
Embodiment 1
Flexible substrates are used in the present embodiment, base material is polyimides, and receiving antenna uses helical form microstrip antenna,
Thin film acoustic wave sensor uses film bulk acoustic temperature sensor, and specific system structure diagram is as shown in figure 3, include wireless
Transceiver 1, inquiry antenna 2, base polyimide 3, helical form microstrip antenna 4 and film bulk acoustic temperature sensor 5, it is wireless to receive
Hair device 1 is electrically connected with inquiry antenna 2, and helical form microstrip antenna 4 and film bulk acoustic temperature sensor 5 are in base polyimide
It is electrically connected on 3 by impedance matching network 6.
Specifically, base polyimide 3 with a thickness of 500um, have stronger flexibility, the curved surfaces such as skin can be fitted in
On.Helical form microstrip antenna 4 is printed on base polyimide 3 by transfer technique, centre frequency 4.8GHz, and work exists
Hyperfrequency (UHF) frequency range.Film bulk acoustic temperature sensor 5 has Sanming City of the lower electrode of au upper electrode, zinc oxide piezoelectric layer, gold
Structure is controlled, and using polyimides as acoustic reflecting layer, is fixed on base polyimide 1 by 3M PR40 glue.
Utilize the method for the test system and test temperature are as follows: wireless transceiver 1 emits wireless pulses using inquiry antenna 2 and asks
Ask signal；Helical form microstrip antenna 4 receives energy of the wireless pulses interrogation signal as excitation film bulk acoustic temperature sensor 5
Amount；Helical form microstrip antenna 4 returns to the response signal through temperature modulation to wireless transceiver 1.
Using test macro provided in this embodiment, to film bulk acoustic temperature sensor 5 carry out frequency-temperature respond into
Row test, as shown in figure 4, testing film bulk acoustic temperature sensing provided in this embodiment under the conditions of wired passive simultaneously
The frequency-temperature response diagram of device, as shown in Figure 4.In Fig. 4, horizontal axis represents temperature (Temperature), and the longitudinal axis represents film
The resonance frequency (Frequency) of bulk acoustic wave temperature sensor.Analysis chart 4 can obtain, under wireless and wireline case, thin-film body sound
Wave temperature sensor is demonstrated by linear frequency-temperature response, embodies the wireless and passive of film bulk acoustic temperature sensor
The feasibility and excellent performance of test macro provide a kind of new test method for thin film acoustic wave sensor field.
Embodiment 2
Hard pcb board is used using substrate in the present embodiment, receiving antenna uses glue stick antenna, thin film acoustic wave sensor
Using film bulk acoustic humidity sensor, specific system structure diagram is as shown in figure 5, include wireless transceiver 1, inquiry antenna
2, hard pcb board 3, glue stick antenna 4 and film bulk acoustic humidity sensor 5, wireless transceiver 1 are electrically connected with inquiry antenna 2,
Glue stick antenna 4 is electrically connected on hard pcb board 3 by impedance matching network 6 with film bulk acoustic humidity sensor 5, impedance
Matching network 6 uses L-type structure, by capacitor X1With inductance X2It constitutes.
Specifically, hard pcb board substrate 3 with a thickness of 1mm.Glue stick antenna 4 passes through the SMA that is welded on hard pcb board 3
Radio frequency adapter is connect with impedance matching network 6, centre frequency 2.4GHz, is worked in hyperfrequency (UHF) frequency range.Thin-film body
Sound wave humidity sensor 5 has the sandwich structure of the lower electrode of au upper electrode, aluminium nitride piezoelectric layer, gold, and with back etching
Silicon wafer is fixed in hard pcb board substrate 3 as acoustic reflecting layer by 3M PR40 glue.
Embodiment 3
Test macro provided in this embodiment and the test macro that embodiment 2 provides are essentially identical, unique the difference is that originally
Embodiment is using film bulk acoustic pressure transducer.
Using test macro provided in this embodiment, to film bulk acoustic pressure transducer carry out frequency-temperature respond into
Row test, as shown in fig. 6, testing film bulk acoustic pressure sensing provided in this embodiment under the conditions of wired passive simultaneously
The frequency-temperature response diagram of device, as shown in Figure 6.In Fig. 6, horizontal axis represents temperature (Temperature), and the longitudinal axis represents film
The resonance frequency (Frequency) of bulk acoustic wave pressure transducer.Analysis chart 6 can obtain, under wireless and wireline case, thin-film body sound
Wave pressure transducer is demonstrated by linear frequency-temperature response, embodies the wireless and passive of film bulk acoustic pressure transducer
The feasibility and excellent performance of test macro provide a kind of new test method for thin film acoustic wave sensor field.
Technical solution of the present invention and beneficial effect is described in detail in above-described specific embodiment, Ying Li
Solution is not intended to restrict the invention the foregoing is merely presently most preferred embodiment of the invention, all in principle model of the invention
Interior done any modification, supplementary, and equivalent replacement etc. are enclosed, should all be included in the protection scope of the present invention.
Claims (7)
1. a kind of wireless and passive test macro based on thin film acoustic wave sensor, which is characterized in that including wireless transceiver, with
The inquiry antenna of the wireless transceiver electrical connection, is set in the substrate and by impedance matching network connection substrate
Thin film acoustic wave sensor and receiving antenna, the wireless transceiver, which emits wireless pulses inquiry by the inquiry antenna, to be believed
Number, the receiving antenna receives energy of the wireless pulses interrogation signal as excitation thin film acoustic wave sensor；
The impedance matching network is L-type matching network, π type matching network or T-type matching network, is made of reactance component；
The thin film acoustic wave sensor can be the thin film acoustic wave sensor of detection temperature, humidity, pressure or gas concentration.
2. the wireless and passive test macro based on thin film acoustic wave sensor as described in claim 1, which is characterized in that described
Substrate is hard pcb board or flexible substrates.
3. the wireless and passive test macro based on thin film acoustic wave sensor as claimed in claim 2, which is characterized in that described
The material of flexible substrates is polyimides, polyethylene terephthalate or dimethyl silicone polymer.
4. the wireless and passive test macro based on thin film acoustic wave sensor as described in claim 1, which is characterized in that described
Receiving antenna is external antenna or microstrip antenna.
5. the wireless and passive test macro based on thin film acoustic wave sensor as claimed in claim 4, which is characterized in that described
The shape of microstrip antenna is round, square, triangle or helical form.
6. the wireless and passive test macro based on thin film acoustic wave sensor as described in claim 1, which is characterized in that described
The centre frequency of inquiry antenna and receiving antenna is 500MHz~10GHz.
7. a kind of test method using any system of claim 1~6, comprising the following steps:
The wireless transceiver emits wireless pulses interrogation signal using the inquiry antenna；
The receiving antenna receives energy of the wireless pulses interrogation signal as excitation thin film acoustic wave sensor；
The receiving antenna returns to the response signal modulated through measurand to the wireless transceiver.
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| CN108548718A (en) * | 2018-05-18 | 2018-09-18 | 武汉理工大学 | Crack Propagation monitoring system based on microstrip antenna sensor and its monitoring method |
| WO2021173880A1 (en) * | 2020-02-25 | 2021-09-02 | Geegah LLC | Rf reflectometer ultrasonic impedance and time-of-flight sensor |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2522873Y (en) * | 2002-02-07 | 2002-11-27 | 重庆大学 | Surface acoustic wave passive wireless multi-sensor signal receiving and processing apparatus |
| US7268647B2 (en) * | 2004-04-20 | 2007-09-11 | Kabushiki Kaisha Toshiba | Film bulk acoustic-wave resonator and method for manufacturing the same |
| JP4835238B2 (en) * | 2006-04-06 | 2011-12-14 | ソニー株式会社 | RESONATOR, RESONATOR MANUFACTURING METHOD, AND COMMUNICATION DEVICE |
| CN103414006A (en) * | 2013-08-13 | 2013-11-27 | 常州智梭传感科技有限公司 | Ultra-thin passive wireless acoustic surface wave sensor |
| CN105067160A (en) * | 2015-07-23 | 2015-11-18 | 东南大学 | Oxidized graphene sponge-based flexible pressure sensor and manufacturing method thereof |
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2522873Y (en) * | 2002-02-07 | 2002-11-27 | 重庆大学 | Surface acoustic wave passive wireless multi-sensor signal receiving and processing apparatus |
| US7268647B2 (en) * | 2004-04-20 | 2007-09-11 | Kabushiki Kaisha Toshiba | Film bulk acoustic-wave resonator and method for manufacturing the same |
| JP4835238B2 (en) * | 2006-04-06 | 2011-12-14 | ソニー株式会社 | RESONATOR, RESONATOR MANUFACTURING METHOD, AND COMMUNICATION DEVICE |
| CN103414006A (en) * | 2013-08-13 | 2013-11-27 | 常州智梭传感科技有限公司 | Ultra-thin passive wireless acoustic surface wave sensor |
| CN105067160A (en) * | 2015-07-23 | 2015-11-18 | 东南大学 | Oxidized graphene sponge-based flexible pressure sensor and manufacturing method thereof |
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