CN102374974A - Attenuated total reflection (ATR) spectrum measurement type Fourier transform spectrometer based on integrated optical waveguide - Google Patents
Attenuated total reflection (ATR) spectrum measurement type Fourier transform spectrometer based on integrated optical waveguide Download PDFInfo
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Abstract
The invention provides an ATR spectrum measurement type Fourier transform spectrometer based on integrated optical waveguide. The spectrometer comprises an integrated optical waveguide electro-optical modulator, a voltage function generator, a broadband light source, a photoelectric detector, a signal processing chip and a fiber having an ATR sensitive window. According to the invention, light from the light source is coupled into the fiber, passes through an ATR sensitive window zone along the fiber and coupled into the integrated optical waveguide electro-optical modulator; voltage varying with time is applied on the integrated optical waveguide electro-optical modulator by using the voltage function generator, the intensity of output light of the integrated optical waveguide electro-optical modulator is measured by using the photoelectric detector simultaneously, and the signal processing chip connected with the photoelectric detector and the voltage function generator carries out Fourier transform processing on measured optical signals so as to obtain the spectrum of incident light. The spectrometer provided in the invention can determine visible-infrared absorption spectrum of solid, liquid and monomolecular layers adsorbed on the surface of the ATR sensitive window, has strong anti-interference capability and is applicable to on-site rapid quantitative detection.
Description
Technical field
The present invention relates to MOEMS (MOEMS) process technology, integrated light guide electrooptical modulation technology, optical fiber sensing technology and spectral measurement methods field, is a kind ofly to distinguish detection by quantitative fast based on Fourier transform attenuated total reflection (ATR) spectrometer of integrated light guide technology and to the scene of biochemical substances.
Background technology
Spectrometer is the strong instrument of amalyzing substances composition, structure and content, in various fields extensive application such as atmospheric surveillance, monitoring water environment, food safety detection, product quality detection, chemical defence anti-terrorism, biomedicine, petrochemical complex, space exploration, material development.Common spectrometer is based on the desktop FTIS of index glass Michelson interferometer structure.This commercialization spectrometer is made up of separate optical element; Each element needs accurately location, needs the high-precision index glass drive unit of a cover, and the space free light beam of internal system is easy to receive the interference that environment temperature, humidity, air pressure and atmosphere change; Volume is big; Price is high, and shock resistance is poor, is not suitable for carrying and field quick detection.And real-life many special occasions need on-site real-time to detect, the online data that provide.With regard to on-site real-time detection and Aero-Space detection, the size and the weight ratio raising spectral resolution that reduce spectrometer are even more important.
To the deficiency of the large-scale spectrometric instrument in laboratory, portable spectrometer becomes the focus of current international community research.Miniature Fourier transform spectrometer [the O.Manzardo that people such as Switzerland
the Omar Manzardo of microtechnology research institute of university in 1999 adopt the MOEMS technology to develop a kind of size to be merely 5mm * 4mm; H.P.Herzig; C.R.Marxer; And N.F.de Rooij, Opt.Lett.24 (1999) 1705-1707.].This spectrometer uses miniature silicon catoptron as the interferometric scanning index glass of Michelson, uses electrostatic actuator to drive miniature silicon catoptron, can realize the accurate scanning to micromirror systems.People such as German Wallrabe prepared a Miniature Fourier spectrometer [U.Wallrabe, etc., Sens.Actuators A, 2005,123-124,459-467] in 2005.They at first utilize the LIGA technology to prepare an area to be 11.5mm * 9.4mm optical table; Beam splitter, sphere lens, detector, optical fiber interface, catoptron and electromagnetic driver are installed on this optical table then, are formed Michelson interfere type Fourier low-light spectrometer.
Compare with the desktop Fourier spectrometer of routine, the certain volume of Miniature Fourier spectrometer is little, and is in light weight, is easy to carry.But these Miniature Fourier low-light spectrometers still are made up of resolution element; Each element still needs accurately location, still contains moving component, and surveying light still is the space free light beam; Therefore still exist anti-mechanical vibration property poor, performance is subject to the interference that environment temperature, humidity, air pressure and atmosphere change.And fine motion mirror displacement is little, makes spectral resolution low; The fine motion mirror area is little, makes luminous flux little, and the result has reduced signal to noise ratio (S/N ratio).This shows, also have many congenital deficiencies based on the Fourier transform spectrometer, of index glass Michelson interfere type.
Summary of the invention
The objective of the invention is to disclose a kind of attenuated total reflection (ATR) spectral measurement formula Fourier spectrometer based on integrated light guide; To overcome the Fourier transform spectrometer, of existing index glass Michelson interferometer structure; And the deficiency in traditional ATR spectral measurement method, have highly sensitive, simple in structure, need not moving component, good stability, advantage that antijamming capability is strong.
For achieving the above object, technical solution of the present invention is:
A kind of attenuated total reflection (ATR) spectral measurement formula Fourier spectrometer based on integrated light guide; It comprises casing, is provided with Transmission Fibers, an integrated light guide electrooptic modulator, a photodetector, a function of voltage generator, a signal processing chip and interface that a wideband light source, has the responsive window of ATR in the casing;
The casing surface is provided with a window, an interface, and interface is connected with follow-up equipment with external power supply;
The wideband light source input end is connected with power supply through interface, and the wideband light source output terminal is connected with Transmission Fibers one end light, and the Transmission Fibers other end is connected with integrated light guide electrooptic modulator light; The integrated light guide electrooptic modulator is connected with photodetector light respectively, is electrically connected with the function of voltage generator; The output terminal of photodetector, function of voltage generator is electrically connected with signal processing chip respectively, and the signal processing chip output terminal is connected in follow-up equipment;
Transmission Fibers is provided with the responsive window of optical fiber ATR, and the responsive window of optical fiber ATR front is positioned at the casing surface window, and back side holder has responsive window substrate, and responsive window base is covered window by the inboard.
Described ATR spectral measurement formula Fourier spectrometer; The responsive window of its said optical fiber ATR be side polishing fiber, D type optical fiber, double-tapered fiber or go cladded-fiber one of them, wherein side polish, D type polish, biconial stretch zones, go cladding regions to be used as the responsive window of optical fiber ATR; Responsive window outer surface of substrate vertically is provided with the V-type groove, and the responsive window fixed of the optical fiber ATR on the Transmission Fibers and is exposed in the window of casing in the V-type groove.
Described ATR spectral measurement formula Fourier spectrometer, the responsive window of its said optical fiber ATR, there is one deck biochemical reagents decorative layer on the expose portion surface in the casing window.
Described ATR spectral measurement formula Fourier spectrometer, its said Transmission Fibers two ends have standard interface, are convenient to be connected with the integrated light guide electrooptic modulator with wideband light source.
Described ATR spectral measurement formula Fourier spectrometer, its said integrated light guide electrooptic modulator, for lithium niobate base optical waveguide, lithium tantalite based optical waveguide, GaAs based optical waveguide, indium phosphide optical waveguide one of them; Or be made by the optical waveguide that comprises zinc paste, barium titanate electric light function film.
Described ATR spectral measurement formula Fourier spectrometer, its said integrated light guide electrooptic modulator, its electrode length L is several millimeters to several centimetres, electrode separation d=4um～10um.
Described ATR spectral measurement formula Fourier spectrometer, its workflow is following:
A) start power supply, the light that wideband light source sends is coupled into Transmission Fibers, passes between the responsive window region of optical fiber ATR along Transmission Fibers, is coupled into the integrated light guide electrooptic modulator then;
B) the function of voltage generator applies time dependent voltage for the integrated light guide electrooptic modulator; Utilize photodetector to measure of the variation of integrated light guide electrooptic modulator output light intensity in real time simultaneously with modulation voltage; Use the signal processing chip that links to each other simultaneously with photodetector and function of voltage generator that the light signal that records is carried out Fast Fourier Transform (FFT) again and handle, obtain incident light spectrum;
C) again testing sample is placed the responsive window of optical fiber ATR after, survey incident light spectrum as previously mentioned, obtain the ATR absorption spectrum of testing sample thus.
Described ATR spectral measurement formula Fourier spectrometer, when it uses,
A) a small amount of solid to be measured or fluid sample are placed the responsive window of optical fiber ATR, based on the interaction of evanescent field and material, sample will absorb the guided wave of specific wavelength, and spectrometer is the absorption spectrum of working sample rapidly and sensitively;
B) absorption spectrum in the unimolecular layer of the responsive window surface absorption of optical fiber ATR is measured in real time,, realized the property distinguished detection monomolecular adsorption layer further by the distinctive spectral fingerprint of molecule;
C) utilize biochemical reagents that the responsive window of optical fiber ATR is carried out finishing with molecular recognition ability; Strengthen the selective binding of target molecules and finishing coat in the solution example to be measured; Utilize this spectrometer that the target unimolecular layer that forms in the responsive window surface of optical fiber ATR is carried out spectral analysis then, realize the property the distinguished trace of biochemical substances is surveyed.
A kind of hyperchannel ATR spectral measurement formula Fourier spectrometer of described ATR spectral measurement formula Fourier spectrometer expansion; It comprises that casing is provided with a plurality of windows, and a plurality of integrated light guide electrooptic modulators of preparation in same optical waveguide substrate use many Transmission Fibers with the responsive window of optical fiber ATR; The wideband light source of a plurality of emission different spectrals; The different photodetector of a plurality of detection spectral ranges, at least one function of voltage generator, at least one signal processing chip; Constitute hyperchannel Fourier transform ATR spectrometer by each corresponding component; The spectral range of each channel measurement is different, thereby the spectral measurement ranges of expansion overall optical spectrometer improves spectral resolution.
A kind of attenuated total reflection based on integrated light guide of the present invention (ATR) spectral measurement formula Fourier spectrometer can be determined at the visible-infrared absorption spectrum of solid, liquid even monomolecular adsorption layer in the responsive window of optical fiber ATR delicately.This spectrometer architecture is simply novel, makes easily, and cost is low, and volume is little, and is in light weight; Reliable and stable, be easy to carry, easy to use, spectral range is wide, and resolution is high; Measuring Time is short, and highly sensitive, antijamming capability is strong, and is of many uses, and the scene that is particularly suitable for is distinguished fast and surveyed and detection by quantitative.
Description of drawings
Fig. 1 is the attenuated total reflection based on integrated light guide of the present invention (ATR) spectral measurement formula Fourier spectrometer structural representation;
Fig. 2 is the structural representation of first kind of responsive window of optical fiber ATR described in attenuated total reflection (ATR) the spectral measurement formula Fourier spectrometer that the present invention is based on integrated light guide, is optical fiber side polish;
Fig. 3 is the structural representation of second kind of responsive window of optical fiber ATR described in attenuated total reflection (ATR) the spectral measurement formula Fourier spectrometer that the present invention is based on integrated light guide, is optical fiber D type polish;
Fig. 4 is the structural representation of the responsive window of the third optical fiber ATR described in attenuated total reflection (ATR) the spectral measurement formula Fourier spectrometer that the present invention is based on integrated light guide, is the double-tapered fiber stretch zones;
Fig. 5 is the structural representation of the 4th kind of responsive window of optical fiber ATR described in attenuated total reflection (ATR) the spectral measurement formula Fourier spectrometer that the present invention is based on integrated light guide, for optical fiber goes the covering core region;
In the specific embodiment that Fig. 6 provides for the present invention, employed integrated light guide electrooptic modulator structural representation;
In the specific embodiment that Fig. 7 provides for the present invention, modulation voltage is integrated light guide electrooptic modulator output light intensity graph of a relation over time over time and in modulated process;
Fig. 8 carries out the spectrogram about sampled point and luminous power that obtains after the discrete Fourier transformation for the interference pattern to integrated light guide electrooptic modulator shown in Figure 7 output;
Fig. 9 is for the light source light spectrogram of Fig. 8 transverse axis from obtaining after number of sampling converts wavelength into, and it is the spectrogram about wavelength and luminous power.
Label among the figure:
1 is wideband light source; 2 is Transmission Fibers; 3 is the responsive window of optical fiber ATR; 31 is the responsive window substrate of optical fiber ATR, and this base plate strip is useful on the V-type groove structure of fixed fiber; 4 is the integrated light guide electrooptic modulator; 41 for having the input and output optical fiber of standard interface, and wherein input optical fibre links to each other with the optical fiber that has the responsive window of ATR through fiber adapter, and output optical fibre is connected to photodetector; 42 is LiNbO
3Single mode three-dimensional optical waveguide Mach-Zehnder interferometer; 43 for recommending modulator electrode, and it links to each other with function of voltage generator 6 shown in Figure 1; 44 is LiNbO
3Substrate; 5 is photodetector; 6 is the function of voltage generator; 7 is signal processing chip; 8 is power supply and follow-up equipment interface; 9 is casing, and 91 is the casing window.
Embodiment
A kind of attenuated total reflection based on integrated light guide of the present invention (ATR) spectral measurement formula Fourier spectrometer, its operating wavelength range are by the transmission window of integrated light guide and the detectable wavelength coverage of photodetector is common determines.Integrated light guide electrooptic modulator commonly used is by LiNbO
3Based optical waveguide (transmission peak wavelength scope 0.4 μ m～5 μ m) or LiTaO
3Based optical waveguide (transmission peak wavelength scope 0.45 μ m～5 μ m) constitutes; Transmission window with non-constant width; Therefore the kind of photodetector has determined the operating wavelength range of the spectrometer that the present invention proposes; As being 0.4 μ m～1.1 μ m between the sensitive volume of Si photodetector, between the sensitive volume of InGaAs photodetector 0.8 μ m～1.7 μ m or the like.In order to widen the detection interval of spectrometer, a plurality of electrooptic modulators of preparation in same integrated light guide substrate use many optical fiber with the responsive window of ATR; The wideband light source of a plurality of emission different spectrals; The different photodetector of a plurality of detection spectral ranges, one or more function of voltage generator chips, one or more signal processing chips; Constitute multi-channel spectrometer based thus; The spectral range of each channel measurement is different, thereby the spectral measurement ranges of expansion overall optical spectrometer improves spectral resolution.
A kind of attenuated total reflection of the present invention (ATR) spectral measurement formula Fourier spectrometer based on integrated light guide; Not only can carry out test analysis to the emission spectrum of unknown light source; And the material that can be used for following three aspects is distinguished and the quantitative measurement function: (1) is if place the responsive window surface of optical fiber ATR with a small amount of solid to be measured or fluid sample; By the interaction of guided wave evanescent field and surface mass, the absorption spectrum that this spectrometer can working sample; (2) this spectrometer can also be measured the disappearance ripple absorption spectrum of the monomolecular adsorption layer that forms in the responsive window surface of optical fiber ATR in real time; Further, can realize the property distinguished detection to gas to be measured and biochemical substances by every kind of distinctive spectral fingerprint of molecule; (3) if utilize biochemical reagents that the responsive window of optical fiber ATR is carried out suitable finishing with molecular recognition ability; Enhanced surface is to the selective binding of target molecules in the solution example to be measured; Utilize this spectrometer that the monomolecular adsorption layer that forms in the responsive window surface of optical fiber ATR is carried out spectral analysis then, can realize the detection of the property distinguished trace.
See Fig. 1; A kind of attenuated total reflection of the present invention (ATR) spectral measurement formula Fourier spectrometer based on integrated light guide; Comprise casing 9, be provided with Transmission Fibers 2 that a wideband light source 1, has the responsive window of ATR, an integrated light guide electrooptic modulator 4, a photodetector 5, a function of voltage generator 6, a signal processing chip 7 and interface 8 in the casing 9.Interface 8 can be connected with follow-up equipment with external power supply.
Wideband light source 1 input end is connected with power supply through interface 8, and wideband light source 1 output terminal is connected with Transmission Fibers 2 one end light, and Transmission Fibers 2 other ends are connected with integrated light guide electrooptic modulator 4 light.Integrated light guide electrooptic modulator 4 is connected with photodetector 5 light respectively, is electrically connected with function of voltage generator 6.The output terminal of photodetector 5, function of voltage generator 6 is electrically connected with signal processing chip 7 respectively, and signal processing chip 7 output terminals are connected in follow-up equipment.
Referring to Fig. 2,3,4,5; The responsive window 3 of optical fiber ATR has various ways; For side polishing fiber, D type optical fiber, double-tapered fiber or go cladded-fiber one of them; Wherein side polish (like Fig. 2), D type polish (like Fig. 3), biconial stretch zones (like Fig. 4), go cladding regions (like Fig. 5) to be positioned at Transmission Fibers 2 centre portions, as the responsive window of ATR.Responsive window substrate 31 outside surfaces vertically are provided with the V-type groove, and the responsive window 3 of the optical fiber ATR on the Transmission Fibers 2 is fixed in the V-type groove, and is exposed in the window 91 of casing 9.
Can carry out one deck biochemical reagents on the responsive window of optical fiber ATR 3 surfaces modifies.
Transmission Fibers 2 two ends have standard interface (not illustrating among the figure), are convenient to be connected with integrated light guide electrooptic modulator 4 with wideband light source 1, also are convenient to maintenance, replacement renewal simultaneously.
Integrated light guide electrooptic modulator 4, be lithium niobate base optical waveguide, lithium tantalite based optical waveguide, GaAs based optical waveguide, indium phosphide optical waveguide one of them; Or be made by the optical waveguide that comprises electric light function films such as zinc paste, barium titanate.
A kind of attenuated total reflection of the present invention (ATR) spectral measurement formula Fourier spectrometer based on integrated light guide, its workflow is following:
Start power supply, the light that wideband light source 1 sends is coupled into Transmission Fibers 2, passes the responsive window of optical fiber ATR 3 intervals along Transmission Fibers 2, is coupled into integrated light guide electrooptic modulator 4 then.Function of voltage generator 6 applies time dependent voltage for integrated light guide electrooptic modulator 4; Utilize photodetector 5 to measure of the variation of integrated light guide electrooptic modulator 4 output light intensities in real time simultaneously with modulation voltage; Use the 7 pairs of light signals that record of signal processing chip that link to each other simultaneously with photodetector 5 and function of voltage generator 6 to carry out Fast Fourier Transform (FFT) again and handle, obtain incident light spectrum.After again testing sample being placed the responsive window 3 of optical fiber ATR, for another example before said detection incident light spectrum, obtain the ATR absorption spectrum of testing sample thus.
Utilize function of voltage generator 6 to apply the voltage of linear change in time for integrated light guide electrooptic modulator 4; Utilize photodetector 5 to measure of the variation of the output light signal of integrated light guide electrooptic modulator 4 in real time simultaneously with modulation voltage; Utilize 7 pairs of light signals that record of signal processing chip to carry out Fast Fourier Transform (FFT) then and handle, obtain the intensity spectrum of incident light after passing between the responsive window region of optical fiber ATR.
During use, can a small amount of solid to be measured or fluid sample be placed the responsive window 3 of optical fiber ATR, based on the interaction of evanescent field and material, sample will absorb the guided wave of specific wavelength, and spectrometer is the absorption spectrum of working sample rapidly and sensitively.
Can also measure in real time absorption spectrum,, realize the property distinguished detection monomolecular adsorption layer further by the distinctive spectral fingerprint of molecule in the unimolecular layer of responsive window 3 surface adsorption of optical fiber ATR.
The biochemical reagents that utilization has the molecular recognition ability carry out finishing to the responsive window of optical fiber ATR; Strengthen the selective binding of target molecules and finishing coat in the solution example to be measured; Utilize this spectrometer that the target unimolecular layer that forms in the responsive window surface of ATR is carried out spectral analysis then, realize the property the distinguished trace of biochemical substances is surveyed.
A kind of attenuated total reflection based on integrated light guide of the present invention (ATR) spectral measurement formula Fourier spectrometer can also be extended to hyperchannel ATR spectral measurement formula Fourier spectrometer.Referring to Fig. 6, a plurality of integrated light guide electrooptic modulators 4 of preparation in same optical waveguide substrate 44 use many Transmission Fibers 2 with the responsive window 3 of optical fiber ATR; The wideband light source 1 of a plurality of emission different spectrals; The photodetector 5 that a plurality of detection spectral ranges are different, one or more function of voltage generators 6, one or more signal processing chips 7; Then constitute hyperchannel ATR spectral measurement formula Fourier spectrometer thus; The spectral range of each channel measurement is different, thereby the spectral measurement ranges of expansion overall optical spectrometer improves spectral resolution.
In the practical operation, a kind of attenuated total reflection based on integrated light guide of the present invention (ATR) spectral measurement formula Fourier spectrometer adopts structure as shown in Figure 1, and wherein, the responsive window 3 of the ATR of optical fiber adopts side polishing fiber structure as shown in Figure 2; Integrated light guide electrooptic modulator 4 adopts as shown in Figure 6 having to recommend the LiNbO of modulator electrode 43 structures
3Optical waveguide Mach-Zehnder interferometer 42, among the figure, LiNbO
3Single mode three-dimensional optical waveguide Mach-Zehnder interferometer 42 comprises optical fiber 41, recommends modulator electrode 43, LiNbO
3 Substrate 44, is recommended modulator electrode 43 and is fixedly arranged on LiNbO at optical fiber 41
3 Substrate 44 upper surfaces.The optical fiber 41 that has standard interface, its input end links to each other with the Transmission Fibers 2 that has the responsive window 3 of ATR through fiber adapter, and output terminal is connected to photodetector 5, recommends modulator electrode 43 and links to each other with function of voltage generator 6.In the present embodiment, electrode 43 length L=10mm, electrode 43 spacing d=8 μ m.
At first, use wavelength as the monochromatic light of 808nm as wideband light source 1.Transmission Fibers 2 one ends that have standard interface are connected with wideband light source 1, and the other end is connected with integrated light guide electrooptic modulator 4.The light that wideband light source 1 sends is coupled into Transmission Fibers 2, passes the responsive window of optical fiber ATR 3 intervals along Transmission Fibers 2, is coupled into integrated light guide electrooptic modulator 4 then.The output light signal of integrated light guide electrooptic modulator 4 is received by the photodetector 5 of light connection with it.Function of voltage generator 6 is electrically connected with integrated light guide electrooptic modulator 4, and applies the voltage of linear change in time for integrated light guide electrooptic modulator 4.Utilize photodetector 5 to measure the variation of the output light intensity of integrated light guide electrooptic modulator 4 with modulation voltage in real time simultaneously, the result that experiment records is as shown in Figure 7.As can be seen from the figure along with modulation voltage increased to+60V from-60V linearity in 0.05 second; The output light intensity periodic swinging of integrated light guide electrooptic modulator 4 24 times; Be that light phase has changed 48 π, the semi-wave modulated voltage V of hence one can see that integrated light guide electrooptic modulator 4
π=2.5V.
Fourier transform chip spectrometer (application number: 201010138943.2) in the same applicant's proposition of the present invention before based on integrated optical tech; We have proved: the output light intensity of integrated light guide electrooptic modulator 4 is as the function of modulation voltage, and Fourier transform each other between the power spectrum of light source.Therefore utilization is carried out the Fast Fourier Transform (FFT) processing with 7 pairs of interference signals that record of signal processing chip that photodetector 5 and function of voltage generator 6 link to each other simultaneously, can obtain incident light spectrum.Fig. 8 is the spectrogram of interference pattern shown in Figure 7 being done gained after the discrete Fourier transformation, and it is the spectrogram about sampling number and luminous power, also needs the sampling number in this spectrogram horizontal ordinate is corresponding with wavelength.Before the Fourier transform chip spectrometer that proposes of the same applicant of the present invention based on integrated optical tech (application number: 201010138943.2), we have described the corresponding method of sampling number and wavelength in detail.Use this method to obtain incident light spectrogram shown in Figure 9, it is the spectrogram about wavelength-light source power.As can be seen from Figure 9 spectrum spectrum peak appears at the 808.7nm wavelength, with the wavelength of used light source coincide very good, explain and utilizes integrated light guide electrooptic modulator 4 combination Fourier transform treatment technologies, can be finally inversed by the power spectrum of light source exactly.In like manner, light source when monochromatic light expands to polychromatic light, can be obtained the distribution of polychromatic light intensity with wavelength by the Fourier transform inverting, further utilize optical fiber sensing technology can record the ATR absorption spectrum of biochemical substances.
Result based on above specific embodiment gained can know by inference; ATR spectral measurement formula Fourier spectrometer of the present invention is except carrying out the emission spectrum of unknown light source the test analysis; Can also carry out the spectrum test analysis to various materials; And by the distinctive spectral fingerprint of molecule, the realization scene is the property distinguished detection by quantitative fast.
For the deficiency of the Fourier transform spectrometer, that overcomes index glass Michelson interferometer structure, the approach that the present invention proposes to adopt integrated light guide electrooptical modulation technology and optical fiber ATR sensitive technology to combine prepares the Fourier spectrometer of omnidistance guided wave.This spectrometer utilizes guided wave to replace the space free light beam, does not contain moving component, does not need ccd detector, and it is little to have a volume; In light weight, simple in structure, spectral window is wide; Good mechanical stability, characteristics such as antijamming capability is strong are suitable for that on-site real-time detects under mal-condition.
Fourier transform chip spectrometer (application number: 201010138943.2) compare with the same applicant's proposition of the present invention before based on integrated optical tech; The attenuated total reflection based on integrated light guide (ATR) the spectral measurement formula Fourier spectrometer that the present invention proposes; Realized that responsive window effectively separates with the integrated light guide electrooptic modulator; Make that preparation technology obtains simplifying, responsive window is convenient to change, and device performance is improved.From present disclosed document, find the attenuated total reflection based on integrated light guide (ATR) the spectral measurement formula Fourier spectrometer that proposes with the present invention and the similar method and apparatus of Fourier transform chip spectrometer that proposes before as yet based on integrated optical tech.
Claims (9)
1. attenuated total reflection spectral measurement formula Fourier spectrometer based on integrated light guide; It is characterized in that; Comprise casing, be provided with Transmission Fibers, an integrated light guide electrooptic modulator, a photodetector, a function of voltage generator, a signal processing chip and interface that a wideband light source, has the responsive window of ATR in the casing;
The casing surface is provided with a window, an interface, and interface is connected with follow-up equipment with external power supply;
The wideband light source input end is connected with power supply through interface, and the wideband light source output terminal is connected with Transmission Fibers one end light, and the Transmission Fibers other end is connected with integrated light guide electrooptic modulator light; The integrated light guide electrooptic modulator is connected with photodetector light respectively, is electrically connected with the function of voltage generator; The output terminal of photodetector, function of voltage generator is electrically connected with signal processing chip respectively, and the signal processing chip output terminal is connected in follow-up equipment;
Transmission Fibers is provided with the responsive window of optical fiber ATR, and the responsive window face exposure of optical fiber ATR is in the window of casing, and back side holder has responsive window substrate, and responsive window substrate is fixed in the casing inboard.
2. ATR spectral measurement formula Fourier spectrometer according to claim 1; It is characterized in that; The responsive window of said optical fiber ATR; For side polishing fiber, D type optical fiber, double-tapered fiber or go cladded-fiber one of them, wherein side polish, D type polish, biconial stretch zones, go cladding regions to be used as the responsive window of optical fiber ATR; Responsive window outer surface of substrate vertically is provided with the V-type groove, and the responsive window fixed of the optical fiber ATR on the Transmission Fibers and is exposed in the window of casing in the V-type groove.
3. ATR spectral measurement formula Fourier spectrometer according to claim 1 is characterized in that, there is one deck biochemical reagents decorative layer on the surface of the responsive window section of said optical fiber ATR.
4. ATR spectral measurement formula Fourier spectrometer according to claim 1 is characterized in that said Transmission Fibers two ends have standard interface, is convenient to be connected with the integrated light guide electrooptic modulator with wideband light source.
5. ATR spectral measurement formula Fourier spectrometer according to claim 1 is characterized in that, said integrated light guide electrooptic modulator, for lithium niobate base optical waveguide, lithium tantalite based optical waveguide, GaAs based optical waveguide, indium phosphide optical waveguide one of them; Or be made by the optical waveguide that comprises zinc paste, barium titanate electric light function film.
6. ATR spectral measurement formula Fourier spectrometer according to claim 1 is characterized in that, said integrated light guide electrooptic modulator, and its electrode length L is several millimeters to several centimetres, electrode separation d is less than 10 microns.
7. ATR spectral measurement formula Fourier spectrometer according to claim 1 is characterized in that its workflow is following:
A) start power supply, the light that wideband light source sends is coupled into Transmission Fibers, passes between the responsive window region of optical fiber ATR along Transmission Fibers, is coupled into the integrated light guide electrooptic modulator then;
B) the function of voltage generator applies time dependent voltage for the integrated light guide electrooptic modulator; Utilize photodetector to measure of the variation of integrated light guide electrooptic modulator output light intensity in real time simultaneously with modulation voltage; Use the signal processing chip that links to each other simultaneously with photodetector and function of voltage generator that the light signal that records is carried out Fast Fourier Transform (FFT) again and handle, obtain incident light spectrum;
C) again testing sample is placed the responsive window of optical fiber ATR after, survey incident light spectrum as previously mentioned, obtain the ATR absorption spectrum of testing sample thus.
8. ATR spectral measurement formula Fourier spectrometer according to claim 1 is characterized in that, during use,
A) a small amount of solid to be measured or fluid sample are placed the responsive window of optical fiber ATR, based on the interaction of evanescent field and material, sample will absorb the guided wave of specific wavelength, and spectrometer is the absorption spectrum of working sample rapidly and sensitively;
B) absorption spectrum in the unimolecular layer of the responsive window surface absorption of optical fiber ATR is measured in real time,, realized the property distinguished detection monomolecular adsorption layer further by the distinctive spectral fingerprint of molecule;
C) utilize biochemical reagents that the responsive window of optical fiber ATR is carried out finishing with molecular recognition ability; Strengthen the selective binding of target molecules and finishing coat in the solution example to be measured; Utilize this spectrometer that the target unimolecular layer that forms in the responsive window surface of optical fiber ATR is carried out spectral analysis then, realize the property the distinguished trace of biochemical substances is surveyed.
9. the hyperchannel ATR spectral measurement formula Fourier spectrometer of an ATR spectral measurement formula Fourier spectrometer expansion according to claim 1 is characterized in that, comprises that casing is provided with a plurality of windows; The a plurality of integrated light guide electrooptic modulators of preparation in same optical waveguide substrate; Use many Transmission Fibers, the wideband light source of a plurality of emission different spectrals, the different photodetector of a plurality of detection spectral ranges with the responsive window of optical fiber ATR; At least one function of voltage generator; At least one signal processing chip constitutes hyperchannel ATR spectral measurement formula Fourier spectrometer by each corresponding component, and the spectral range of each channel measurement is different; Thereby the spectral measurement ranges of expansion overall optical spectrometer improves spectral resolution.
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