CN101750143B - Integrated optical interference three-dimensional vibration monitor - Google Patents
Integrated optical interference three-dimensional vibration monitor Download PDFInfo
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- CN101750143B CN101750143B CN2010100228594A CN201010022859A CN101750143B CN 101750143 B CN101750143 B CN 101750143B CN 2010100228594 A CN2010100228594 A CN 2010100228594A CN 201010022859 A CN201010022859 A CN 201010022859A CN 101750143 B CN101750143 B CN 101750143B
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Abstract
The utility model provides an integrated form optical interference three-dimensional vibration monitor, includes the laser instrument, is the first lens, beam splitter prism, diaphragm and the measurement speculum of same optical axis in proper order along the advancing direction of this laser instrument output light beam, the measurement speculum fix on waiting to monitor the surface of object, be second lens, third lens and photoelectric detector and constitute detecting system outside this beam splitter prism's coherent light output face in proper order. The invention integrates the main part of the light path into a single light splitting prism, and has simple structure, stability and reliability. In addition, two rows of waves for interference are both derived from divergent light emitted by the laser after passing through the lens, so that the two rows of waves are spherical waves, and three-dimensional monitoring of optical interference for distinguishing vibration of the measured object from vibration of a measuring optical path can be realized.
Description
Technical field
The present invention relates to moving monitor, particularly a kind of integrated optical interference three-dimensional vibration monitor.
Background technology
The low-frequency vibration of physical construction has generally that decay is slow, amplitude is big and characteristics such as difficult vibration isolation.In large-scale optical precision optical machinery platform, low-frequency vibration can produce the influence of can not ignore to the light beam of propagating therein by optical element, and therefore effectively the vibration of monitoring optical table is very important.
Traditional optical interferometry method all is to adopt two-beam interference, and wherein a branch of conduct is with reference to light, and is a branch of in addition as measuring light, detects change of interference fringes by photodetector, reflects the vibration state of object.As the measuring method of mentioning in " laser interferometry principle and application thereof that mechanical vibration are measured " literary composition, two train waves of interfering are plane wave on the one hand, can only reflect the two-dimensional signal of object vibration, can not effectively reflect the three-dimensional vibrating of object; On the other hand in measuring process, do not take measures such as laser beam lockings, may interference fringe be changed like this, thereby influence that is to say the vibration that can not distinguish testee effectively and the vibration of monitoring light path to the interference of the monitoring of testee.
Therefore,, there are two aspects should be noted that: will realize that on the one hand vibration separates, also not have good scheme at present if will realize the measurement of practicality; To realize three-dimensional monitoring on the other hand to object vibration, usually all be to adopt a plurality of platforms to measure now, more complicated is impracticable comparatively speaking, as the method for mentioning in document " the novel active isolation systems that has three-dimensional laser interferometer and displacement bimorph actuator ".
Summary of the invention
The objective of the invention is to overcome above-mentioned the deficiencies in the prior art, a kind of integrated optical interference three-dimensional vibration monitor is provided, this monitor can be realized distinguishing the testee vibration and measure the three-dimensional monitoring that the light path vibration with optical is interfered.
Technical solution of the present invention is as follows:
A kind of integrated optical interference three-dimensional vibration monitor, comprise laser instrument, along the working direction of this Laser Output Beam is first lens with optical axis successively, Amici prism, diaphragm, measure catoptron, described measurement catoptron is fixed on the object surfaces to be monitored, the light splitting surface of described Amici prism and the angle of described optical axis are 45 °, the light splitting surface of this Amici prism will be divided into reflected light and transmitted light from the laser beam of plane of incidence input, the periphery of the one side relative with the described plane of incidence is coated with the film that is all-trans in this Amici prism, light hole is left in the centre, light beam by light hole and diaphragm and the described measurement catoptron of direct projection in the described transmitted light is a detecting light beam, the reflecting surface of this Amici prism is coated with the film that is all-trans, described reflected light is called reference beam after described reflecting surface reflection, the one side relative with described reflecting surface is the coherent light output face, is second lens successively outside the coherent light output face of this Amici prism, the 3rd lens and photodetector also constitute detection system.
The light that laser instrument sends is through after first lens, incides on the Amici prism with the form of diverging light, through light splitting surface incident ray is divided into two bundles: reflected light and transmitted light.Wherein folded light beam is as reference light, be coated with the offside reflection of the film that is all-trans after, directly get back to light splitting surface.And transmitted light then has been divided into two parts:
Be positioned at the influence that peripheral light beam is subjected to the reflectance coating that plate around this side, direct reflected back light splitting surface after the reference beam junction, by two lens bundle that contracts, shines on the photodetector formation outer shroud interference fringe at last; The light beam that is positioned at inner ring is then by after the middle light hole and diaphragm, and measured mirror reflects turns back to light splitting surface then equally, interferes ring striped in forming on photodetector with the center section of reference beam.
Advantage and effect that the present invention is compared with prior art had are that the monitoring of light path itself and the monitoring of testee are separate.The interference fringe of outer shroud is to be interfered by the reflected light of two sides of Amici prism itself to form, and does not comprise the information of any testee, has therefore only reflected the information of light path itself.If variation has taken place the outer shroud striped, then explanation measurement light path has been vibrated.And therefore the interference fringe of interior ring can reflect the vibration state of object owing to be to be interfered by light that returns from the measurement catoptron and reference light to form.Owing to measure the variation that the variation of light path also can cause interior ring, therefore under the situation that outer shroud, interior ring change simultaneously, the variation of interior ring striped can not correctly reflect the vibration situation of testee.Only guaranteeing that the measurement light path is motionless, promptly under the situation that the outer shroud striped does not have to change, the variation of interior ring striped could reflect the vibration of testee fully.Simultaneously, the present invention is integrated in main light path in the monolithic Amici prism, and is simple in structure, reliable and stable.In addition, two train waves of interfering all stem from the process lens diverging light afterwards that laser instrument sends, and therefore are spherical wave, can realize distinguishing the three-dimensional monitoring of testee vibration and the interference of measurement light path vibration with optical.
Description of drawings
Fig. 1 is a device synoptic diagram of the present invention;
Fig. 2 is the light path synoptic diagram of the embodiment of the invention;
Fig. 3 is the three-dimensional monitoring principle figure of the present invention.
Embodiment
The invention will be further described below in conjunction with drawings and Examples.
As seen from Figure 1, integrated optical interference three-dimensional vibration monitor of the present invention, comprise laser instrument 1, be characterised in that, along the working direction of this laser instrument 1 output beam is first lens 2 with optical axis successively, Amici prism 3, diaphragm 8 and measurement catoptron 9, described measurement catoptron 9 is fixed on the surface of object 10 to be monitored, the light splitting surface of described Amici prism 3 and the angle of described optical axis are 45 °, the light splitting surface of this Amici prism 3 will be divided into reflected light and transmitted light from the laser beam of plane of incidence input, the periphery of the one side relative with the described plane of incidence is coated with the film 5 that is all-trans in this Amici prism 3,7, light hole 6 is left in the centre, light beam by light hole 6 and diaphragm 8 and the described measurement catoptron 9 of direct projection in the described transmitted light is a detecting light beam, the reflecting surface 4 of this Amici prism 3 is coated with the film that is all-trans, described reflected light is called reference beam after described reflecting surface 4 reflections, the one side relative with described reflecting surface 4 is the coherent light output face, is second lens 11 successively outside the coherent light output face of this Amici prism 3, the 3rd lens 12 and photodetector 13 also constitute detection system.
Below in conjunction with Fig. 2 concrete monitoring method of the present invention is described.In the present embodiment, described laser instrument 1 is the He-Ne laser instrument.
The light that laser instrument 1 sends is through after first lens 2, is radiated on the plane of incidence of Amici prism 3 with the form of a branch of divergent beams.This Amici prism 3 is divided into reflected light and transmitted light two parts by light splitting surface with incident light.
Reflected light part wherein, i.e. light beam between the light 16 and 17 after the reflection through the face that is all-trans 4 of Amici prism 3, directly arrives interference region.This part light is present between light 18 and 19 as reference light.
The transmitted light part can be divided into two parts again:
Wherein be positioned at peripheral light beam, promptly between the light 14 and 20 and the light beam between 15 and 23, through the reflection of being all-trans film 5 and 7 after, the reflection through the light splitting surface of light prism 3 also directly arrives interference region again.This part light is present between light 24 and 25 and between 28 and 29, interferes with reference light, forms the outer shroud interference fringe, is used to monitor the vibration of light path itself.
Another part transmitted light, promptly be positioned at the transmitted light of inner ring, be the light between light 21 and 22, then by after light hole 6 and the diaphragm 8, arrive and measure catoptron 9, the described Amici prism 3 of reflected back then arrives interference region with the reference beam back of joining after the reflection of the light splitting surface of Amici prism 3, form measuring beam.This part light is between light 26 and 27, and same and reference light is interfered, and forms the inner ring interference fringe, is used to monitor the vibration of testee.It should be noted that, light beam between the light beam between light 20 and 21 and light 22 and 23, part is because the surface of diaphragm 8 is a diffuse surface, light beam has carried out diffuse reflection, part is blocked by diaphragm 8 after measuring catoptron 9 reflections, all do not have reflected light electric explorer 13, shown in light 30.Between inner ring interference fringe and outer shroud interference fringe, will form the part blank like this, i.e. part between the light 26 and 25 and 27 and 28, thus can clearly differentiate out two parts interference fringe.
As shown in Figure 2, two train waves of interfering are spherical wave, therefore can realize three-dimensional monitoring.Below this principle is carried out simple declaration.
For spherical wave, the phase function on z=0 plane is:
(x wherein
o, y
o, z
o) be the center of spherical wave, order
(1) but the formula abbreviation be:
In square bracket, contain 1/l
o 2Item less than 1 o'clock, launch (2) formula with binomial theorem, and under the condition of Fresnel approximation, ignore 1/l
o 3Above item can get:
In the present invention, all be through a series of reflecting to form by the light between light 14 and 15 at the two row spherical waves of interfering on the photodetector 13.Therefore, can think there is equivalent virtual light source that interference fringe is to be formed by the spherical wave that they send, the position of virtual light source can be obtained by reflection theorem.
The position of hypothetical reference light wave and measurement light wave virtual light source is respectively (x
R, y
R, z
R), (x
o, y
o, z
o), similarly, their phase functions on test surface can be write as:
Thereby, can draw the optical path difference function and be:
Because the optical path difference of peak strength position Δ=n λ, (n=0, ± 1, ± 2 ...), substitution (6) formula, can under first approximation, obtain the striped equation and be:
Illustrated that once more interference fringe is gang's concentric circles, central coordinate of circle is:
The radius-of-curvature of striped is:
When testee vibrates, measure the catoptron corresponding vibration, cause that measuring light wave changes, this also just is equivalent to change the position of virtual light source.By (8) formula and (9) formula as can be seen, cause that finally the home position of interference fringe and radius-of-curvature change.And as can be seen from Figure 2, when testee 10 carried out the vibration of three directions as shown in the figure, the whichever direction all can cause the position change of virtual light source, caused interference fringe to change.Utilize this point to realize the irrealizable three-dimensional monitoring of plane wave interference institute just.
As shown in Figure 3, suppose that R and O are respectively reference light wave and measure the virtual light source of light wave, so when testee 10 carries out the vibration of three directions as shown in Figure 2, the capital causes that the O point changes, and its variable quantity finally can decompose x shown in Figure 3, and y is on three directions of z.
According to (8) formula and (9) formula, when O when the z direction of principal axis vibrate, the center of interference fringe does not change, and has only the radius-of-curvature variation.That is to say that interference fringe will be shunk as O during along z axle positive movement, and during counter motion, striped can be expanded then.Same analysis can draw: when O when x (y) direction of principal axis vibrate, the center of interference fringe also can be along the vibration of x (y) direction of principal axis, the while radius has subtle change.The final like this three-dimensional monitoring that has realized testee.
This shows that the present invention has realized three-dimensional monitoring, and the separating of light path monitoring and testee vibration monitoring, and simple in structure, adopt the monolithic integrated form, reliable and stable.
Claims (1)
1. integrated optical interference three-dimensional vibration monitor, comprise laser instrument (1), be characterised in that, along the working direction of this laser instrument (1) output beam is first lens (2) with optical axis successively, Amici prism (3), diaphragm (8), measure catoptron (9), described measurement catoptron (9) is fixed on the surface of object to be monitored (10), the light splitting surface of described Amici prism (3) and the angle of described optical axis are 45 °, the light splitting surface of this Amici prism (3) will be divided into reflected light and transmitted light from the laser beam of plane of incidence input, the periphery of the one side relative with the described plane of incidence is coated with the film (5 that is all-trans in this Amici prism (3), 7), and light hole (6) is left in the centre of the one side that the described plane of incidence is relative, light beam by light hole (6) and diaphragm (8) and the described measurement catoptron of direct projection (9) in the described transmitted light is a detecting light beam, the reflecting surface (4) of this Amici prism (3) is coated with the film that is all-trans, described reflected light is called reference beam after described reflecting surface (4) reflection, the one side relative with described reflecting surface (4) is the coherent light output face, is second lens (11) successively outside the coherent light output face of this Amici prism (3), the 3rd lens (12) and photodetector (13) also constitute detection system.
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| CN2010100228594A CN101750143B (en) | 2010-01-15 | 2010-01-15 | Integrated optical interference three-dimensional vibration monitor |
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| CN2010100228594A CN101750143B (en) | 2010-01-15 | 2010-01-15 | Integrated optical interference three-dimensional vibration monitor |
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Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101968380B (en) * | 2010-09-26 | 2012-09-26 | 中国计量科学研究院 | Ultralow frequency vibration measurer calibration system and laser interferometer thereof |
| CN102175303B (en) * | 2011-01-14 | 2013-02-27 | 中国科学院上海光学精密机械研究所 | Three-dimensional vibration interferometry device based on spherical surface cooperation target |
| CN103344315B (en) * | 2013-06-24 | 2015-07-22 | 中国航空工业集团公司北京长城计量测试技术研究所 | High-speed optical fiber balance interference vibration measurement system |
| CN103615989A (en) * | 2013-09-06 | 2014-03-05 | 中国科学院上海光学精密机械研究所 | Online testing apparatus for polishing plastic disc of large-scale ring polishing machine |
| CN103900681A (en) * | 2014-04-09 | 2014-07-02 | 西安电子科技大学 | Scanning laser vibration measurement system |
| US9811984B2 (en) * | 2015-04-13 | 2017-11-07 | Itt Manufacturing Enterprises Llc | Sensing module for monitoring conditions of a pump or pump assembly |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1072773A (en) * | 1991-11-22 | 1993-06-02 | 中国科学院上海光学精密机械研究所 | Active laser displacement sensor |
| US5402235A (en) * | 1993-07-01 | 1995-03-28 | National Research Council Of Canada | Imaging of ultrasonic-surface motion by optical multiplexing |
| US5479375A (en) * | 1994-11-03 | 1995-12-26 | The United States Of America As Represented By The Secretary Of The Army | Real time imaging of acoustic wave devices |
| CN101329200A (en) * | 2008-08-04 | 2008-12-24 | 杨庆华 | Two-way output double-corner reflection body interferometer |
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2010
- 2010-01-15 CN CN2010100228594A patent/CN101750143B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1072773A (en) * | 1991-11-22 | 1993-06-02 | 中国科学院上海光学精密机械研究所 | Active laser displacement sensor |
| US5402235A (en) * | 1993-07-01 | 1995-03-28 | National Research Council Of Canada | Imaging of ultrasonic-surface motion by optical multiplexing |
| US5479375A (en) * | 1994-11-03 | 1995-12-26 | The United States Of America As Represented By The Secretary Of The Army | Real time imaging of acoustic wave devices |
| CN101329200A (en) * | 2008-08-04 | 2008-12-24 | 杨庆华 | Two-way output double-corner reflection body interferometer |
Non-Patent Citations (1)
| Title |
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| JP特开2000-028428A 2000.01.28 |
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