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CN103900681A - Scanning laser vibration measurement system - Google Patents

Scanning laser vibration measurement system Download PDF

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Publication number
CN103900681A
CN103900681A CN201410140732.0A CN201410140732A CN103900681A CN 103900681 A CN103900681 A CN 103900681A CN 201410140732 A CN201410140732 A CN 201410140732A CN 103900681 A CN103900681 A CN 103900681A
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China
Prior art keywords
laser
diaphragm
vibration
control system
light
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Pending
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CN201410140732.0A
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Chinese (zh)
Inventor
曹长庆
曾晓东
刘虎
冯喆珺
刘天航
高新华
曹星江
党文佳
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Xidian University
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Xidian University
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Priority to CN201410140732.0A priority Critical patent/CN103900681A/en
Publication of CN103900681A publication Critical patent/CN103900681A/en
Pending legal-status Critical Current

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Abstract

The invention discloses a scanning laser vibration measurement system. A laser beam emitted by a laser passes through a first beam splitter prism to be split, where one path of the laser beam serves as local oscillator light for heterodyning detection to be reflected to a beam combiner through a reflection prism to be combined; the other path of the laser beam reaches a two-dimensional scanning control system through a first aperture, an AO modulator, a second aperture and a second beam splitter prism and then is emitted to a target, and scattered beams reach the beam combiner through the two-dimensional scanning control system and the second beam splitter prism to be combined with the local oscillator light; after the laser beams are combined, the combined laser beam reaches a signal processor through a third aperture, a polarization analyzer, a photoelectric detector and an intermediate frequency amplifier. The scanning laser vibration measurement system has the advantages that on the principle of heterodyning laser interference measurement, characteristics of vibration, speed and displacement of the target can be measured in a non-contact mode, and thus the scanning laser vibration measurement system is high in measurement precision and anti-interference capacity and the like; in the heterodyning detection, the design of receiving and transmitting integration and two-dimensional scanning measurement is adopted, and thus the scanning laser vibration measurement system is firm and compact in structure, convenient to measure and adjust and the like.

Description

A kind of scan laser Vibration-Measuring System
Technical field
The present invention relates to a kind of measuring system, be specifically related to a kind of scan laser Vibration-Measuring System, belong to field of measuring technique.
Background technology
Existing measuring system, mainly there are the following problems for it:
1, measuring distance is short, how in 30m;
2, measuring vibrations frequency range is narrower, how in hundred kHz;
3, a little less than antijamming capability, be subject to ambient light effects;
4, measuring accuracy is low.
Optical detection at present mainly contains direct detection and two kinds of modes of heterodyne detection, and direct detection mode measuring accuracy is low, poor anti jamming capability, and heterodyne detection mode measuring accuracy is high, antijamming capability is strong.But existing heterodyne measurement system is often surveyed for region of target or a point of target, does not possess scan function, while changing the detection of a target or detection of a target region, regulates very difficult.
Summary of the invention
For solving the deficiencies in the prior art, the object of the present invention is to provide that a kind of measuring accuracy is high, the strong and convenient scan laser Vibration-Measuring System that changes detection of a target region of antijamming capability.
In order to realize above-mentioned target, the present invention adopts following technical scheme:
A kind of scan laser Vibration-Measuring System, is characterized in that,
Comprise: laser instrument, the first Amici prism, reflecting prism, the first diaphragm, AO acousto-optic modulator, the second diaphragm, the second Amici prism, two-dimensional scan control system, light combination mirror, the 3rd diaphragm, analyzer, photodetector, intermediate frequency amplifier and signal processor;
The laser beam of aforementioned laser device transmitting is through the first Amici prism beam splitting, and wherein a road light beam reflexes to light combination mirror as the local oscillator light of heterodyne detection through reflecting prism and closes bundle;
Another road light beam arrives two-dimensional scan control system through the first diaphragm, AO acousto-optic modulator, the second diaphragm and the second Amici prism successively, the scanning of two-dimensional scan control system control light beam in two dimension is moved, light beam arrives after target, and scattered beam arrives light combination mirror and local oscillator combiner through two-dimensional scan control system, the second Amici prism successively;
Swash after combiner, through the 3rd diaphragm, analyzer, photodetector and intermediate frequency amplifier, finally by signal processor, difference frequency signal is processed successively.
Aforesaid scan laser Vibration-Measuring System, is characterized in that, the sharp light wavelength of aforementioned laser device transmitting is 532nm.
Aforesaid scan laser Vibration-Measuring System, is characterized in that, aforementioned laser live width is 1MHz, and vibration frequency range is 0Hz-5MHz.
Usefulness of the present invention is: take the principle of heterodyne system laser interferometry, realized the features such as vibration, speed and displacement to target and carried out non-contact measurement, have the advantages such as measuring accuracy is high, antijamming capability is strong; In the time of heterodyne detection, adopt transceiving integrated and two-dimensional scan to measure design, there is compactness firm in structure, change the features such as detection of a target region is convenient.
Brief description of the drawings
Fig. 1 is the theory of constitution schematic diagram of scan laser Vibration-Measuring System of the present invention;
Fig. 2 is the rumble spectrum figure that measures first object gained;
Fig. 3 is the rumble spectrum figure that measures the second target gained;
Fig. 4 is the rumble spectrum figure that measures the 3rd target gained;
Fig. 5 is the rumble spectrum figure that measures the 4th target gained.
The implication of Reference numeral in figure: 1-laser instrument, 2-the first Amici prism, 3-reflecting prism, 4-the first diaphragm, 5-AO acousto-optic modulator, 6-the second diaphragm, 7-the second Amici prism, 8-two-dimensional scan control system, 9-target, 10-light combination mirror, 11-the 3rd diaphragm, 12-analyzer, 13-photodetector, 14-intermediate frequency amplifier, 15-signal processor.
Embodiment
Below in conjunction with the drawings and specific embodiments, the present invention is done to concrete introduction.
With reference to Fig. 1, scan laser Vibration-Measuring System of the present invention comprises: laser instrument 1, the first Amici prism 2, reflecting prism 3, the first diaphragm 4, AO acousto-optic modulator 5, the second diaphragm 6, the second Amici prism 7, two-dimensional scan control system 8, light combination mirror 10, the 3rd diaphragm 11, analyzer 12, photodetector 13, intermediate frequency amplifier 14 and signal processor 15, laser beam is first divided into two bundles, closes bundle again in system, specific as follows:
Laser instrument 1 Emission Lasers bundle, this laser beam is through the first Amici prism 2 beam splitting, and wherein a road light beam reflexes to light combination mirror 10 as the local oscillator light of heterodyne detection through reflecting prism 3 and closes bundle;
Another road light beam arrives two-dimensional scan control system 8 through the first diaphragm 4, AO acousto-optic modulator 5, the second diaphragm 6 and the second Amici prism 7 successively, two-dimensional scan control system 8 is controlled the scanning of light beam in two dimension and is moved, light beam arrives after target 9, produce scattered beam, this scattered beam arrives light combination mirror 10 and local oscillator combiner through two-dimensional scan control system 8, the second Amici prism 7 successively;
Swash after combiner, successively through the 3rd diaphragm 11, analyzer 12, then pass through photodetector 13, light signal is converted into electric signal by photodetector 13, then this electric signal is by intermediate frequency amplifier 14, intermediate frequency amplifier 14 amplifies intermediate-freuqncy signal, finally by signal processor 15, difference frequency signal is processed, thereby is realized the analysis to signal time domain, frequency domain.
The present invention uses 532nm laser, and the sharp light wavelength that laser instrument 1 is launched is 532nm, and laser linewidth is 1MHz, and vibration frequency range is 0Hz-5MHz, can realize accurately measuring the target vibration characteristics within the scope of 0.15m-70m.
Fig. 2 to Fig. 5 is the rumble spectrum figure that measures different target (measuring distance is 55m) gained.Visible, scan laser Vibration-Measuring System of the present invention has higher signal to noise ratio (S/N ratio) and measuring accuracy.
In sum, scan laser Vibration-Measuring System of the present invention is taked the principle of heterodyne system laser interferometry, has realized the features such as vibration, speed and displacement to target and has carried out non-contact measurement, therefore has the advantages such as measuring accuracy is high, antijamming capability is strong.
In addition, in the time of heterodyne detection, owing to having adopted transceiving integrated and two-dimensional scan to measure design, so measuring system of the present invention has compactness firm in structure, changes the features such as detection of a target region is convenient.
It should be noted that, above-described embodiment does not limit the present invention in any form, and all employings are equal to replaces or technical scheme that the mode of equivalent transformation obtains, all drops in protection scope of the present invention.

Claims (3)

1. a scan laser Vibration-Measuring System, is characterized in that,
Comprise: laser instrument (1), the first Amici prism (2), reflecting prism (3), the first diaphragm (4), AO acousto-optic modulator (5), the second diaphragm (6), the second Amici prism (7), two-dimensional scan control system (8), light combination mirror (10), the 3rd diaphragm (11), analyzer (12), photodetector (13), intermediate frequency amplifier (14) and signal processor (15);
The laser beam of described laser instrument (1) transmitting is through the first Amici prism (2) beam splitting, and wherein a road light beam reflexes to light combination mirror (10) as the local oscillator light of heterodyne detection through reflecting prism (3) and closes bundle;
Another road light beam arrives two-dimensional scan control system (8) through the first diaphragm (4), AO acousto-optic modulator (5), the second diaphragm (6) and the second Amici prism (7) successively, two-dimensional scan control system (8) is controlled the scanning of light beam in two dimension and is moved, light beam arrives after target (9), and scattered beam passes through two-dimensional scan control system (8) successively, the second Amici prism (7) arrives light combination mirror (10) and local oscillator combiner;
Swash after combiner, through the 3rd diaphragm (11), analyzer (12), photodetector (13) and intermediate frequency amplifier (14), finally by signal processor (15), difference frequency signal is processed successively.
2. scan laser Vibration-Measuring System according to claim 1, is characterized in that, the sharp light wavelength of described laser instrument (1) transmitting is 532nm.
3. scan laser Vibration-Measuring System according to claim 2, is characterized in that, described laser linewidth is 1MHz, and vibration frequency range is 0Hz-5MHz.
CN201410140732.0A 2014-04-09 2014-04-09 Scanning laser vibration measurement system Pending CN103900681A (en)

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Application Number Priority Date Filing Date Title
CN201410140732.0A CN103900681A (en) 2014-04-09 2014-04-09 Scanning laser vibration measurement system

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Application Number Priority Date Filing Date Title
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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105372673A (en) * 2015-12-25 2016-03-02 西安电子科技大学 Receiving and transmitting integrated inverse SAL (synthetic aperture ladar) system based on acousto-optic frequency shifter
CN105547454A (en) * 2015-12-08 2016-05-04 东华大学 Quick-scanning laser Doppler vibration measurement system
CN105807082A (en) * 2016-04-27 2016-07-27 中国工程物理研究院流体物理研究所 Speed measurement device
CN105928606A (en) * 2016-07-12 2016-09-07 南京大学 Surface acoustic wave optical interference scanning detection system
CN106382979A (en) * 2016-09-23 2017-02-08 中国航空工业集团公司北京长城计量测试技术研究所 Measuring device and method of laser vibration measuring instrument step response
CN108225539A (en) * 2017-12-22 2018-06-29 宁波舜宇智能科技有限公司 A kind of vibration measurement with laser system
CN110109139A (en) * 2019-05-16 2019-08-09 电子科技大学 A kind of high-resolution imaging system and method based on heterodyne detection of laser
CN111221154A (en) * 2018-11-26 2020-06-02 福州高意光学有限公司 Multi-wavelength multi-sound-field acousto-optic modulator system

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CN103278087A (en) * 2013-05-10 2013-09-04 北京空间机电研究所 Micro-electro-mechanical-system (MEMS) scanning 2mum laser heterodyne interferometer optics system and adjustment method thereof
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CN1916574A (en) * 2006-09-14 2007-02-21 中国航空工业第一集团公司北京长城计量测试技术研究所 Angular vibration laser interference measuring method and device
CN101290215A (en) * 2008-06-10 2008-10-22 浙江大学 Micro-displacement sensor based on PGC demodulated interferential scanning
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Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105547454A (en) * 2015-12-08 2016-05-04 东华大学 Quick-scanning laser Doppler vibration measurement system
CN105372673A (en) * 2015-12-25 2016-03-02 西安电子科技大学 Receiving and transmitting integrated inverse SAL (synthetic aperture ladar) system based on acousto-optic frequency shifter
CN105807082A (en) * 2016-04-27 2016-07-27 中国工程物理研究院流体物理研究所 Speed measurement device
CN105807082B (en) * 2016-04-27 2019-01-25 中国工程物理研究院流体物理研究所 A kind of speed measuring device
CN105928606A (en) * 2016-07-12 2016-09-07 南京大学 Surface acoustic wave optical interference scanning detection system
CN105928606B (en) * 2016-07-12 2019-04-16 南京大学 A kind of surface acoustic wave interference of light scanning probe system
CN106382979A (en) * 2016-09-23 2017-02-08 中国航空工业集团公司北京长城计量测试技术研究所 Measuring device and method of laser vibration measuring instrument step response
CN108225539A (en) * 2017-12-22 2018-06-29 宁波舜宇智能科技有限公司 A kind of vibration measurement with laser system
CN108225539B (en) * 2017-12-22 2020-07-17 宁波舜宇智能科技有限公司 Laser vibration measurement system
CN111221154A (en) * 2018-11-26 2020-06-02 福州高意光学有限公司 Multi-wavelength multi-sound-field acousto-optic modulator system
CN111221154B (en) * 2018-11-26 2022-05-24 福州高意光学有限公司 Multi-wavelength multi-sound-field acousto-optic modulator system
CN110109139A (en) * 2019-05-16 2019-08-09 电子科技大学 A kind of high-resolution imaging system and method based on heterodyne detection of laser

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