CN101424511A - Coplanarity detector for pins of IC chip - Google Patents
Coplanarity detector for pins of IC chip Download PDFInfo
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- CN101424511A CN101424511A CNA2008100739874A CN200810073987A CN101424511A CN 101424511 A CN101424511 A CN 101424511A CN A2008100739874 A CNA2008100739874 A CN A2008100739874A CN 200810073987 A CN200810073987 A CN 200810073987A CN 101424511 A CN101424511 A CN 101424511A
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Abstract
The invention discloses an IC chip pin coplanarity detecting instrument which comprises an optical image acquisition system and an automatic recognition software system, and is characterized in that the detecting instrument is also provided with an electromechanical controlling system including a chip feeding location mechanism, a light path switching mechanism and an electrical cabinet; the optical image acquisition system is an eudipleural double-light-path transmission structure, and the electromechanical controlling system is respectively connected with the optical image acquisition system and the automatic recognition software system. The detecting instrument has the advantages of rapid detecting speed, high qualification rate, low equipment cost, novel structure, small occupying area as well as easy installation and operation.
Description
Technical field
The present invention relates to the checkout equipment of electronic integrated circuit module, particularly IC chip pin coplanarity checkout equipment.
Background technology
Along with developing rapidly of electronic information industry, on the streamline of electronic integrated circuit device production, it is an important operation that properties of product detect, and particularly SO type IC chip is when carrying out surface mount, and attachment process has proposed quite high requirement to the coplanarity of pin.According to correlation study, the producer that produces similar detecting instrument is arranged at present in the world, but only has the instrument that 20 pin, 28mm detect with the big visual field of interior chip, and find to have the manufacturer that produces this type of product facility at home as yet, with Japanese like product is representative, its detecting instrument has computer Recognition, image acquisition and light-source illuminating system, and its detection method is to judge by object lens depth of field effect and imaging definition thereof whether the IC chip is qualified, and the shortcoming of this method is as follows:
1, detection speed is slow, because of needs are controlled the depth of field value 0.1mm of object lens well, then the visual field of object lens is unsuitable excessive, cross conference and cause aberration big, especially off-axis aberration is difficult to eliminate, thereby is difficult to guarantee depth of field 0.1mm, so can't the pin of disposable detection more than 28, finally cause detection speed slow, a chip divides four sections to detect, and its chip time of detection needs 8 seconds approximately;
2, the chip production cost is big, because of its equipment is that end face with chip is as reference field, pin up, lie on the detection platform of equipment, for the stationarity that guarantees to detect, just must guarantee the processing plane degree of end face, and with the depth of parallelism of pin bottom surface, can propose higher requirement to the crudy of chip itself like this, thereby cause the increase of chip production cost;
3, object lens manufacturing cost height, very high because of the accuracy requirement of object lens depth of field value, can make objective lens arrangement become very complicated, thereby processing cost is very high;
4, equipment price costliness.
Summary of the invention
The objective of the invention is in order to overcome above-mentioned the deficiencies in the prior art, disclose a kind of novel structure, low price, energy fast detecting IC chip pin coplanarity, a kind of IC chip pin coplanarity detecting instrument of bad welding takes place when avoiding large-scale production.
The present invention includes image capturing system and automatic recognition software system, unlike the prior art be: it also is provided with the Mechatronic control system that comprises chip charging detent mechanism, light path switching mechanism and motor control mechanism three parts, the optical imagery acquisition system is symmetrical bifocal path structure, and Mechatronic control system is connected with computer recognition system with the optical imagery acquisition system respectively.
Described chip charging detent mechanism places between the middle part and half-reflecting half mirror of detector main backstop, by chip bracing frame, left chip fixedly press strip, right chip fixedly press strip, chip location-plate and positioning bead are formed, offer a through hole at the middle part of chip location-plate, positioning bead is arranged in this through hole, left side chip fixedly press strip and right chip fixedly press strip be fitted in respectively on the left and right end face of the below of chip location-plate and chip bracing frame corresponding to the size of detected chip.
Described light path switching mechanism comprises push-and-pull prism apparatus and carriage, the push-and-pull prism apparatus is made up of linear electric motors, push-and-pull prism push rod, push-and-pull prism base plate, push-and-pull prism table, chip push rod, sensor and left and right push-and-pull prism and left and right Stroke Control bar, be fixed on the guide rail slide mass below the push-and-pull prism base plate right side, top and the push-and-pull prism table on right side links, right push-and-pull right-angle prism, left push-and-pull right-angle prism be fixed on push-and-pull prism base plate and push-and-pull prism table round the space in (the reflecting surface direction of two prisms is opposite); Fixing left lateral process control bar, right lateral process control bar, push-and-pull prism base plate left end face in the elongated slot at push-and-pull prism base plate middle part respectively links to each other with linear electric motors on being fixed on the motor supporting seat, push-and-pull prism base plate lower left links to each other with the chip push rod, the left end of fixing rack for sensor is fixed on the top of motor supporting seat, the top of the main backstop about the two ends, right side of fixing rack for sensor respectively are fixed on, sensor is fixed on the middle part of fixing rack for sensor.
Carriage comprises back-up block, guide rail base, slide track seat and guide rail slide mass, back-up block is fixed on the main backstop, slide track seat is fixed on the middle part of back-up block, about each guide rail base be fixed on the slide track seat, two guide rail base sandwich guide rail slide masses, and on the face of contact, fill up ball, can make the guide rail slide mass in the middle to-and-fro movement freely back and forth of two guide rail bases.
Described motor control mechanism, its electrical control cubicles is arranged on by the main backstop, is provided with single-chip microcomputer in electrical control cubicles, and this single-chip microcomputer is connected with linear electric motors by lead.
Described symmetrical double light path mechanism, promptly the right and left at the chip detent mechanism is symmetrically arranged with light-source box, three condensers, light billows and half-reflecting half mirror, be provided with two right-angle prisms relative at the top of main backstop inner face with half-reflecting half mirror, right-angle prism is arranged in the right-angle prism seat, the push-and-pull prism also is two, and reflecting surface is opposite side by side, reflecting surface is relative with right-angle prism, the push-and-pull prism is arranged in the push-and-pull prism table, the push-and-pull prism table is arranged on the carriage, and the push-and-pull right-angle prism is reflected in imaging among the object lens of its vertical direction and the CCD with light signal.During work, the light that tungsten lamp sends is successively by three condensers (condenser is fixed on the main backstop), the light billows, behind the half-reflecting half mirror, direct projection is on detection chip pin and chip bracing frame, after this surface emitting, direct projection is on the reflecting surface of half-reflecting half mirror, light reflexed to (right-angle prism is fixed on the right-angle prism seat on the right-angle prism that is positioned at the half-reflecting half mirror vertical direction, the right-angle prism seat is fixed on the main backstop), this right-angle prism reflexes to light with this prism and becomes horizontal direction then, and be placed in the push-and-pull prism table, on the reflecting surface right push-and-pull right-angle prism on the other side, by this prism light is reflexed to the CCD that is positioned at its vertical direction at last and carry out imaging.CCD can only carry out imaging to the light signal of a side pin wherein at every turn in whole optical path, and the switching of two ways of optical signals is to be placed in two right-angle prisms (right push-and-pull right-angle prism, left push-and-pull right-angle prism) that reflecting surface is opposite and placed side by side in push-and-pull prism table and the push-and-pull prism base plate, adds by motor the reciprocal control of push-and-pull prism base plate is realized that two ways of optical signals switches.
Whole checkout equipment operational process is described as follows:
When linear electric motors are pushed ahead, detection chip and be installed in push-and-pull prism base plate and push-and-pull prism table right push-and-pull right-angle prism in the circumjacent space, push-and-pull right-angle prism in a left side travels forward together, touch the surveyed area of sensor up to left lateral process control bar, sensor sends a signal to single-chip microcomputer, the Single-chip Controlling motor stops, this moment, left push-and-pull right-angle prism passed to the CCD imaging with detection chip left side sensed light signal by object lens, after treating software processes, silk has been detected in PC notice single-chip microcomputer left side, the Single-chip Controlling linear electric motors move backward, be installed in right push-and-pull right-angle prism in the circumjacent space of push-and-pull prism base plate and push-and-pull prism table institute this moment, left side push-and-pull right-angle prism is motion (detection chip rests on the detection position) backward together, after right lateral process control bar touches the surveyed area of sensor, sensor sends a signal to single-chip microcomputer, the Single-chip Controlling motor stops, this moment, right push-and-pull right-angle prism passed to the CCD imaging with detection chip right side sensed light signal by object lens, treat after the software processes chip detection result to be shown on the screen, promptly finished the detection of a slice detection chip, this structure once comes and goes under the condition at linear electric motors, has successfully realized the detection of charging and both sides chip pin.
Advantage of the present invention is:
1, detection speed is fast, because CCD can only carry out imaging to the light signal of a side pin wherein in whole optical path at every turn, and the switching of two ways of optical signals is to be placed in push-and-pull prism table and the push-and-pull prism base plate the opposite and right-angle prisms that vertically put of two reflectings surface, therefore can finish the detection of an IC chip in 0～3 second;
2, qualification rate height, compared with prior art, the present invention is by the imaging of optical system in ccd video camera, judged the distance of IC chip pin and reference field in the imaging again by software, thereby judges whether this chip is qualified;
3, equipment cost is low, owing to judge that without object lens depth of field effect and imaging definition thereof whether the IC chip is qualified, reduced the object lens manufacturing cost;
4, novel structure of the present invention, floor area is little, easily installation, easy to operate.
Description of drawings
Fig. 1 is a structural representation of the present invention;
Fig. 2 is a Mechatronic control system structural representation of the present invention.
Among the figure: 1. fixing fixing press strip 4. chip positioning plates 5. positioning beads 6. lighting source casees 7. three-chip type condensers 8. smooth billows 9. half-reflecting half mirrors 10. main backstops 11. back-up blocks 12. slide track seats 13. guide rail bases 14. guide rail slide masses 15. push-and-pull prism base plates 16. right-angled edge microscope bases 17. right-angle prisms 18. push-and-pull prism tables 19. right push-and-pull right-angle prism 20. left push-and-pull right-angle prism 21. chip push rods 22. linear electric motors 23. fixing rack for sensor 24. sensors 25. left lateral process control bars 26. right lateral process control bars 27. detection chip 28. motor supporting bases of press strip sheet 3. right chips of chip bracing frame 2. left chips
Embodiment
The invention will be further described below in conjunction with the drawings and specific embodiments.
With reference to Fig. 1, Fig. 2, the present invention is made up of Mechatronic control system, optical imagery acquisition system and automatic recognition system, Mechatronic control system is connected with automatic recognition system with the optical imagery acquisition system respectively, and the optical imagery acquisition system is the double light path transferring structure of symmetry.
As shown in Figure 1, the optical imagery acquisition system comprises lighting source case 6, three condensers 7, light billows 8, half-reflecting half mirrors 9 and is arranged on two relative right-angle prisms 17 of main backstop 10 top inner faces and half-reflecting half mirror 9.During detection, the light that the tungsten lamp of lighting source case 6 sends is successively by three condensers 7 (condenser 7 is fixed on the main backstop 10), light billows 8, behind the half-reflecting half mirror 9, direct projection is on detection chip 27 pins and chip bracing frame 1, after this surface emitting, direct projection is on the surface of emission of half-reflecting half mirror 9, light reflexed on the right-angle prism 17 that is positioned at half-reflecting half mirror 9 vertical direction that (right-angle prism 17 is fixedly on the right-angle prism seat 16, right-angle prism seat 16 is fixed on the main backstop 10), this right-angle prism 17 reflexes to light with this prism and becomes horizontal direction then, and be placed in the push-and-pull prism table 18, reflecting surface right push-and-pull right-angle prism 19 on the other side reflexes to the CCD that is positioned at its vertical direction by this prism with light at last and carries out imaging.CCD can only carry out imaging to the light signal of a side pin wherein at every turn in whole optical path, and the switching of two ways of optical signals is to be placed in two right push-and-pull right-angle prism 19, left push-and-pull right-angle prisms 20 that reflecting surface is opposite and placed side by side in push-and-pull prism table 16 and the push-and-pull prism base plate 15, adds that reciprocal control by 22 pairs of push-and-pull prisms of motor base plate 15 realizes that two ways of optical signals switches.
As shown in Figure 2, Mechatronic control system of the present invention comprises chip charging detent mechanism, light path switching mechanism and motor control mechanism, and each several part structure division is as follows:
1, mainly to act on be that chip is positioned to chip charging detent mechanism.Chip charging detent mechanism places between the middle part and half-reflecting half mirror 9 of main backstop 10, by chip bracing frame 1, left chip fixedly press strip 2, right chip fixedly press strip 3, chip location-plate 4 and positioning bead 5 are formed, offering a through hole at the middle part of chip location-plate 4, positioning bead 5 is arranged in this through hole.During work, detection chip 27 pins lie in the detection position on the chip bracing frame 1 down, be fixed on the chip bracing frame 1 left chip fixedly press strip 2 and right chip fixedly press strip 3 detection chip 27 is clipped in the middle, detection chip 27 is slided before and after can pressing feedstock direction in the centre, be fixed on left chip fixedly press strip 2 and right chip fixedly on the press strip 3 top of square chip location-plate 4 positioning bead 5 is arranged, be used for positioning to detection chip.
2, mainly to act on be that light signal with detection chip 27 left and right sides two-way switches to the light path switching mechanism, precedence passes to object lens and CCD carries out optical imagery, its structure is: back-up block 11 is fixed on the main backstop 10, slide track seat 12 is fixed on the middle part of back-up block 11, about each guide rail base 13 be fixed on the slide track seat 12, two guide rail bases, 13 sandwich guide rail slide masses 14, and on the face of contact, fill up ball, can make guide rail slide mass 14 in the 13 middle to-and-fro movements freely back and forth of two guide rail bases.Be fixed on the guide rail slide mass 14 below push-and-pull prism base plate 15 right sides, top and the push-and-pull prism table 18 on right side is connected, right push-and-pull right-angle prism 19, left push-and-pull right-angle prism 20 be fixed on 18 of push-and-pull prism base plate 15 and push-and-pull prism tables round the space in (the reflecting surface direction of two prisms is opposite); Left lateral process control bar 25, right lateral process control bar 26 have been fixed in the elongated slot at push-and-pull prism base plate 15 middle parts respectively; Push-and-pull prism base plate 15 its right end face link to each other with linear electric motors 22 on being fixed on motor supporting seat 28, push-and-pull prism base plate links to each other with chip push rod 21 below 15 right sides, the left end of fixing rack for sensor 23 is fixed on the top of motor supporting seat 28, the top of the main backstop 10 about the two ends, right side of fixing rack for sensor 23 respectively are fixed on; Sensor 24 is fixed on the middle part of fixing rack for sensor 23.
Whole checkout equipment operational process is described below with reference to Fig. 1,2:
When linear electric motors 22 are pushed ahead, detection chip 27 and be installed in right push-and-pull right-angle prism 19 in push-and-pull prism base plate 15 and 18 circumjacent spaces of push-and-pull prism table, left side push-and-pull right-angle prism 20 travels forward together, touch the surveyed area of sensor 24 up to left lateral process control bar 25, sensor 24 sends a signal to single-chip microcomputer, the Single-chip Controlling motor stops, this moment, left push-and-pull right-angle prism 20 passed to the CCD imaging with detection chip 27 left side sensed light signal by object lens, after treating software processes, PC notice single-chip microcomputer left side is detected and is finished, Single-chip Controlling linear electric motors 22 move backward, be installed in this moment 18 of push-and-pull prism base plate 15 and push-and-pull prism tables round the space in right push-and-pull right-angle prism 19, left side push-and-pull right-angle prism 20 is motion (detection chip 27 rests on the detection position) backward together, after right lateral process control bar 24 touches the surveyed area of sensor 24, sensor 24 sends a signal to single-chip microcomputer, the Single-chip Controlling motor stops (Fig. 5 position), this moment, right push-and-pull right-angle prism 19 passed to the CCD imaging with detection chip 27 right side sensed light signal by object lens, treat after the software processes chip detection result to be shown on the screen, promptly finished the detection of a slice detection chip 27, this structure once comes and goes under the condition at linear electric motors 22, has successfully realized the detection of charging and both sides chip pin.
Claims (4)
1, a kind of IC chip pin coplanarity detecting instrument, comprise optical imagery acquisition system and automatic recognition software system, it is characterized in that: this instrument also is provided with the Mechatronic control system that comprises chip charging detent mechanism, light path switching mechanism and motor control mechanism, the optical imagery acquisition system is symmetrical double light path transferring structure, and Mechatronic control system is connected with automatic recognition software system with the optical imagery acquisition system respectively.
2, IC chip pin coplanarity detecting instrument according to claim 1, it is characterized in that: described chip charging detent mechanism places between the middle part and half-reflecting half mirror (9) of main backstop (10), by chip bracing frame (1), left side chip is press strip (2) fixedly, right chip is press strip (3) fixedly, chip location-plate (4) and positioning bead (5) are formed, offering a through hole at the middle part of chip location-plate (4), positioning bead (5) is arranged in this through hole, left side chip fixedly press strip (2) and right chip fixedly press strip (3) be fitted in the below of chip location-plate (4) and the left side of chip bracing frame (1) respectively corresponding to the size of detected chip (27), on the right side.
3, IC chip pin coplanarity detecting instrument according to claim 1, it is characterized in that: described light path switching mechanism comprises push-and-pull prism apparatus and carriage, the push-and-pull prism apparatus comprises linear electric motors (22), push-and-pull prism push rod, push-and-pull prism base plate (15), push-and-pull prism table (18), right-angle prism (17), chip push rod (21), sensor (24), left side push-and-pull prism (20) and right lateral process control bar (26), be fixed on the guide rail slide mass (14) below push-and-pull prism base plate (15) left side, the top of left side links with push-and-pull prism table (18), right push-and-pull right-angle prism (19), left side push-and-pull right-angle prism (20) be fixed on push-and-pull prism base plate (15) and push-and-pull prism table (18) round the space in, fixed left lateral process control bar (25) respectively in the elongated slot at push-and-pull prism base plate (15) middle part, right lateral process control bar (26), push-and-pull prism base plate (15) its right end face links to each other with linear electric motors (22) on being fixed on motor supporting seat (28), link to each other with chip push rod (21) below push-and-pull prism base plate (15) right side, the left end of fixing rack for sensor (23) is fixed on the top of motor supporting seat (28), the top of the main backstop (10) about the two ends, right side of fixing rack for sensor (23) respectively are fixed on, sensor (24) is fixed on the middle part of fixing rack for sensor (23); Carriage comprises back-up block (11), guide rail base (13), slide track seat (12) and guide rail slide mass (14), back-up block (11) is fixed on the main backstop (10), slide track seat (12) is fixed on the middle part of back-up block (11), about each guide rail base (13) be fixed on the slide track seat (12), two guide rail bases (13) sandwich guide rail slide masses (14), and on the face of contact, fill up ball, can make guide rail slide mass (14) in the middle to-and-fro movement freely back and forth of two guide rail bases (13).
4, IC chip pin coplanarity detecting instrument according to claim 1, it is characterized in that: described optical imagery acquisition system is the double light path imaging, the right and left at the chip detent mechanism is symmetrically arranged with lighting source case (6), three condensers (7), light billows (8) and half-reflecting half mirror (9), top inner face at main backstop (10) is provided with two right-angle prisms (17) relative with half-reflecting half mirror (9), right-angle prism (17) is arranged in the right-angle prism seat (16), left side push-and-pull prism (20) and right push-and-pull prism (19) also are two, and reflecting surface is opposite side by side, reflecting surface is relative with right-angle prism (17), and left push-and-pull prism (20) and right push-and-pull prism (19) are arranged in the push-and-pull prism table (18), push-and-pull prism table (18) is arranged on the push-and-pull slide mechanism, and the push-and-pull right-angle prism is reflected in imaging among the object lens of its vertical direction and the CCD with light signal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008100739874A CN101424511B (en) | 2008-12-16 | 2008-12-16 | Coplanarity detector for pins of IC chip |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008100739874A CN101424511B (en) | 2008-12-16 | 2008-12-16 | Coplanarity detector for pins of IC chip |
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| Publication Number | Publication Date |
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| CN101424511A true CN101424511A (en) | 2009-05-06 |
| CN101424511B CN101424511B (en) | 2010-09-08 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2008100739874A Expired - Fee Related CN101424511B (en) | 2008-12-16 | 2008-12-16 | Coplanarity detector for pins of IC chip |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102749033A (en) * | 2012-07-22 | 2012-10-24 | 湖北磁创电子科技有限公司 | Automatic surface-attached electronic-component pin detector |
| CN103134422A (en) * | 2011-11-30 | 2013-06-05 | 上海市电力公司 | Testing device with four coplanar feet |
| CN103308007A (en) * | 2013-05-24 | 2013-09-18 | 华南理工大学 | System and method for measuring coplanarity of integrated circuit (IC) pins through multistage reflection and raster imaging |
| CN106772987A (en) * | 2017-01-13 | 2017-05-31 | 宁波舜宇仪器有限公司 | Micro- scanner and its micro- scan method |
| CN107196757A (en) * | 2017-05-19 | 2017-09-22 | 广州瑞特租赁服务有限公司 | Server communication security encryption chip |
| CN107621280A (en) * | 2017-09-25 | 2018-01-23 | 深圳怡化电脑股份有限公司 | A kind of sensor detector |
| CN108702866A (en) * | 2016-02-18 | 2018-10-23 | 株式会社富士 | Component determination device and component determination method |
| CN109313231A (en) * | 2016-06-17 | 2019-02-05 | 统半导体公司 | For the positioning device of integrated circuit board and the detection device of the integrated circuit board for including this positioning device |
| CN114577135A (en) * | 2022-03-01 | 2022-06-03 | 合肥图迅电子科技有限公司 | 3D detection method and system for warpage of chip pin based on single lens |
| CN117781959A (en) * | 2023-12-26 | 2024-03-29 | 成都宏明双新科技股份有限公司 | Shielding cover Pin Pin flatness detection device and calibration method |
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- 2008-12-16 CN CN2008100739874A patent/CN101424511B/en not_active Expired - Fee Related
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103134422A (en) * | 2011-11-30 | 2013-06-05 | 上海市电力公司 | Testing device with four coplanar feet |
| CN102749033A (en) * | 2012-07-22 | 2012-10-24 | 湖北磁创电子科技有限公司 | Automatic surface-attached electronic-component pin detector |
| CN102749033B (en) * | 2012-07-22 | 2015-01-21 | 湖北磁创电子科技有限公司 | Automatic surface-attached electronic-component pin detector |
| CN103308007A (en) * | 2013-05-24 | 2013-09-18 | 华南理工大学 | System and method for measuring coplanarity of integrated circuit (IC) pins through multistage reflection and raster imaging |
| CN103308007B (en) * | 2013-05-24 | 2016-01-20 | 华南理工大学 | The IC pin coplanarity measuring system of higher order reflection and grating image and method |
| CN108702866A (en) * | 2016-02-18 | 2018-10-23 | 株式会社富士 | Component determination device and component determination method |
| CN109313231A (en) * | 2016-06-17 | 2019-02-05 | 统半导体公司 | For the positioning device of integrated circuit board and the detection device of the integrated circuit board for including this positioning device |
| CN109313231B (en) * | 2016-06-17 | 2021-07-09 | 统一半导体公司 | Positioning device for an integrated circuit board and inspection device for an integrated circuit board comprising such a positioning device |
| CN106772987A (en) * | 2017-01-13 | 2017-05-31 | 宁波舜宇仪器有限公司 | Micro- scanner and its micro- scan method |
| CN107196757A (en) * | 2017-05-19 | 2017-09-22 | 广州瑞特租赁服务有限公司 | Server communication security encryption chip |
| CN107196757B (en) * | 2017-05-19 | 2020-06-09 | 广州瑞特租赁服务有限公司 | Server communication security encryption chip |
| CN107621280A (en) * | 2017-09-25 | 2018-01-23 | 深圳怡化电脑股份有限公司 | A kind of sensor detector |
| CN107621280B (en) * | 2017-09-25 | 2024-03-29 | 深圳怡化电脑股份有限公司 | Sensor testing device |
| CN114577135A (en) * | 2022-03-01 | 2022-06-03 | 合肥图迅电子科技有限公司 | 3D detection method and system for warpage of chip pin based on single lens |
| CN114577135B (en) * | 2022-03-01 | 2024-01-19 | 合肥图迅电子科技有限公司 | 3D detection method and system for chip pin warpage based on single lens |
| CN117781959A (en) * | 2023-12-26 | 2024-03-29 | 成都宏明双新科技股份有限公司 | Shielding cover Pin Pin flatness detection device and calibration method |
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| CN101424511B (en) | 2010-09-08 |
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