CN101308099A - Optical inspection device - Google Patents
Optical inspection device Download PDFInfo
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- CN101308099A CN101308099A CNA2008100979401A CN200810097940A CN101308099A CN 101308099 A CN101308099 A CN 101308099A CN A2008100979401 A CNA2008100979401 A CN A2008100979401A CN 200810097940 A CN200810097940 A CN 200810097940A CN 101308099 A CN101308099 A CN 101308099A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 44
- 238000007689 inspection Methods 0.000 title claims description 141
- 238000005096 rolling process Methods 0.000 claims abstract description 67
- 238000003384 imaging method Methods 0.000 claims abstract description 48
- 238000005286 illumination Methods 0.000 claims description 45
- 230000005540 biological transmission Effects 0.000 claims description 7
- 238000005452 bending Methods 0.000 abstract description 8
- 238000010586 diagram Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 3
- 238000007665 sagging Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 2
- 229910052736 halogen Inorganic materials 0.000 description 2
- 150000002367 halogens Chemical class 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 229910001507 metal halide Inorganic materials 0.000 description 2
- 150000005309 metal halides Chemical class 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/0223—Sample holders for photometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
- G06T7/0008—Industrial image inspection checking presence/absence
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/08—Monitoring manufacture of assemblages
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- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Immunology (AREA)
- Health & Medical Sciences (AREA)
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- General Health & Medical Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Pathology (AREA)
- Analytical Chemistry (AREA)
- Operations Research (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Quality & Reliability (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Theoretical Computer Science (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
The invention provides an optical check device capable of preventing distortion caused by bending, nutation etc. of the checking objects. The optical check device of the invention comprises: an object state for placing the checking object; an imaging unit for imaging the checking object placed on the object state; a light unit for lightening the checking object; and a rolling component for supporting the edge of the area imaging by the imaging unit and keeping flatness of the imaging area.
Description
Technical Field
The present invention relates to an optical inspection apparatus for a printed circuit board, and more particularly, to an optical inspection apparatus for inspecting whether or not a pattern (pattern) formed on an inspection target (printed circuit board) has defects by photographing the pattern and processing the photographed image information.
Background
Various printed circuit boards are rapidly changing from existing rigid printed circuit boards to flexible printed circuit boards, and the line width of the circuit boards is further reduced in accordance with the recent demands for light, thin, and small electronic products so as to be applicable to various forms of products. Therefore, as the line width becomes smaller, inspection with the naked eye becomes increasingly difficult, leading to a reduction in productivity, and in order to solve this problem, it is necessary to introduce an optical automatic inspection system.
That is, when a product manufacturer inspects a product before shipment, appearance inspection is efficiently and rapidly performed on a product gold plating area, a solder resist area, an area where a semiconductor wafer or the like is actually mounted (inner lead), which becomes a core of productivity and quality control. Particularly, in the case of inspecting a large glass substrate (circuit board), it is important to maintain flatness for stable inspection.
Disclosure of Invention
In view of the above problems, an object of the present invention is to provide an optical inspection apparatus that can stably inspect a circuit board.
It is also an object of the present invention to provide an optical inspection apparatus that can perform inspection while maintaining the flatness of a circuit board.
It is also an object of the present invention to provide an optical inspection apparatus that can inspect a circuit board using transmitted light and reflected light.
In order to achieve the above object, the present invention provides an optical inspection apparatus comprising: an object stage on which an inspection object is placed; an imaging unit that images an inspection object placed on the stage; an illumination unit that irradiates light to the inspection object; and a rolling member supporting an edge of an area photographed by the photographing unit and maintaining flatness of the photographing area.
According to an embodiment of the present invention, the rolling member is a ball-type rolling wheel having a ball in rolling contact with the inspection object.
According to an embodiment of the present invention, the optical inspection apparatus further includes a linear moving unit that moves the stage in a front-rear direction so that the photographing unit continuously photographs the inspection object.
According to an embodiment of the present invention, the photographing unit includes a line scan camera performing photographing in a line scan (line scan) manner, and the rolling members support both ends of the photographing region photographed with the line scan camera.
According to an embodiment of the present invention, the photographing unit includes a surface scanning camera performing photographing in a surface scanning (area scan) manner, and the rolling member supports a corner of the photographing region photographed with the surface scanning camera.
According to an embodiment of the present invention, the illumination unit includes at least a transmissive illumination member that irradiates transmitted light to the inspection object or a reflective illumination member that irradiates reflected light to the inspection object.
According to an embodiment of the present invention, the stage supports left and right side edges of the inspection object with a space opened in a forward and backward moving direction such that the rolling member is positioned below the inspection object.
According to an embodiment of the invention, the stage comprises: a body having a space opened in a forward and backward moving direction such that the rolling member is positioned below the inspection object; and a support positioned on an upper layer of the body and supporting left and right side edges of the inspection object.
According to an embodiment of the present invention, the stage further includes a positioning member that positions the position of the inspection object placed on the support.
According to an embodiment of the present invention, the optical inspection apparatus further includes a horizontal support table horizontally disposed along a forward and backward moving direction of the stage and passing through a space opened by the stage, on which the rolling member is disposed.
In order to achieve the above object, the present invention also provides an optical inspection apparatus comprising: an object stage on which an inspection object is placed; an imaging unit that images an inspection object placed on the stage; an illumination unit that irradiates light to the inspection object; wherein the stage includes a rolling member which is in rolling contact with the inspection object, maintaining flatness of the inspection object.
According to an embodiment of the present invention, the rolling member includes a plurality of balls to support an edge of an imaging area of the inspection object imaged by the imaging unit at a predetermined interval.
According to an embodiment of the present invention, the optical inspection apparatus further includes a linear moving unit that moves the stage together with the rolling member in an imaging area of the imaging unit so that the imaging unit continuously images the inspection object.
According to an embodiment of the present invention, the illumination unit includes a transmission illumination member that irradiates transmitted light to the inspection object and a reflection illumination member that irradiates reflected light to the inspection object.
According to the present invention, it is possible to prevent the distortion phenomenon from occurring in the imaging region of the inspection object due to bending or bending (sagging).
According to the present invention, an image with a stable focus can be obtained.
According to the present invention, inspection can be performed while maintaining the flatness of an inspection object.
According to the present invention, inspection of an inspection object with higher quality can be performed.
Drawings
Fig. 1 is a front view for explaining the structure of an optical inspection apparatus according to a first embodiment of the present invention.
Fig. 2 is a side view for explaining the structure of the optical inspection apparatus according to the first embodiment of the present invention.
Fig. 3 is a diagram showing a state in which a pair of rolling members support both ends of an imaging region W according to the first embodiment of the present invention.
Fig. 4 is a diagram showing an example of providing a rolling member in the case of using the area scanning camera according to the first embodiment of the present invention.
Fig. 5 is a front view for explaining the structure of an optical inspection apparatus according to a second embodiment of the present invention.
Fig. 6 is a side view for explaining the structure of an optical inspection apparatus according to a second embodiment of the present invention.
Fig. 7 is a diagram showing the state of both ends of the 12 ball-supported imaging region W according to the second embodiment of the present invention.
Description of the reference numerals
100 stage
200 straight line moving unit
300 shooting unit
400 lighting unit
500 rolling element
Detailed Description
The embodiments of the present invention may be modified in various ways, and thus the scope of the present invention should not be construed as being limited to the embodiments described below. Embodiments of the present invention will be described more fully to those skilled in the art. Accordingly, some of the elements in the drawings have been exaggerated for clarity of illustration.
Preferred embodiments of the present invention will be described in detail below with reference to fig. 1 to 7. In the drawings, the same reference numerals are used for components having the same functions.
The inspection apparatus of the present invention is suitable for inspecting large-sized circuit boards. The method is particularly suitable for inspecting large circuit boards which are difficult to maintain flatness due to bending caused by self weight. The inspection object may be a circuit board whose bottom surface is lined with glass to increase strength, a glass substrate on which a circuit pattern is formed, or a circuit board having a large width.
First embodiment
Fig. 1 is a front view for explaining the structure of an optical inspection apparatus according to a first embodiment of the present invention, and fig. 2 is a side view for explaining the structure of the optical inspection apparatus according to the first embodiment of the present invention.
Referring to fig. 1 and 2, the optical inspection apparatus 10 of the present invention includes a stage 100, a linear movement unit 200, a photographing unit 300, an illumination unit 400, and a rolling member 500.
Object stage
The object table 100 includes a body 110 having a bottom surface 112, a first side surface 114, and a second side surface 116. The bracket 120 and the positioning member 130 are disposed on the upper layer of the body 110, i.e., on the first side 114 and the second side 116. The inspection object S is placed in a state where both side edges are supported on the support 120. The positioning member 130 is a cylindrical body for positioning both sides of the inspection object S placed on the stand 120, and corrects (positions) the left and right positions by applying pressure to both side surfaces of the inspection object S. A space is present between the first side 114 and the second side 116 of the body 110, and the space is open in the upper and front-rear directions.
The stage 100 is moved in the front and rear direction on the base plate 20 by the linear moving unit 200. The linear moving unit 200 includes an LM guide 210 and a linear motor 220. The stage 100 is guided by an LM guide 210 provided on the base plate 20, and is moved in the front-rear direction by driving of a linear motor 220. In the present embodiment, the linear moving unit 200 is illustrated and described as being composed of the LM guide 210 and the linear motor 220, but various mechanisms that linearly move by a chain, a belt, a ball screw, or the like by the rotational force of the motor may be used.
Shooting unit
The photographing unit 300 photographs the surface (pattern, etc.) of the inspection object S by a CCD camera having an image sensor of a CCD line sensor and a lens (not shown in the figure), and obtains image data of the inspection object S. The image data obtained as described above is supplied to an image processing section (not shown). Although not shown in the figure, the optical inspection apparatus 10 includes an image processing unit that receives an image captured by the imaging unit 300. The image processing unit is constituted by a typical computer system (generally referred to as a microcomputer), and controls and processes each operation accompanying the optical automatic inspection. For example, a line scan camera may be used as the imaging unit 300, and the line scan camera or the area scan camera may be additionally provided according to the examination condition of the examination object and the matter required by the user. The photographing unit 300 is provided on the vertical frame 30 to be movable in the left and right directions. A moving plate 34 is provided on a guide rail 32 provided on the vertical frame 30, and a line scan camera as the imaging unit 300 is provided on the moving plate 34. That is, the position of the photographing unit 300 may be adjusted left and right according to the region to be photographed.
Lighting unit
The illumination unit 400 includes a transmissive illumination member 410 that irradiates the inspection object S with transmitted light, and a reflective illumination member 420 that irradiates the inspection object S with reflected light. The reflective illumination member 420 is disposed above the inspection object S, and the transmissive illumination member 410 is disposed below the imaging region of the inspection object S. Both the transmissive illumination member 410 and the reflective illumination member 420 output light for obtaining image data of a photographing region of the inspection object S. The light sources of the transmissive illumination member 410 and the reflective illumination member 420 may use a plurality of light emitting diodes arranged in a line, a linear tube type fluorescent lamp, a halogen, a metal halide, or the like. On the upper portion of the light source, a diffusion plate or the like for improving the uniformity of light may be provided. The reflective lighting member 420 is disposed on the moving plate 34, and the transmissive lighting member 410 is fixedly disposed on the horizontal support table 600. The heights of the transmissive illumination member 410 and the reflective illumination member 420 may be adjusted.
Rolling member
The rolling member 500 is the most important component of the present invention, and is used to minimize distortion due to bending or bending (sagging) of the imaging region of the inspection object S, and includes a ball type rolling wheel having a ball 510 directly contacting the edge of the imaging region W of the inspection object S. The rolling member 500 is disposed on the horizontal support table 600 in such a manner as to be located under the photographing unit 300. When the stage 100 is positioned below the imaging unit 300 for inspection, the rolling member 500 is positioned above the pair of vertical stages 520 at a height allowing rolling contact with the bottom surface of the inspection object S. In order to adjust the height of the rolling member 500, the pair of tables 520 are preferably designed such that the height of the horizontal support table 600 can be adjusted. As shown in fig. 2, the transmissive illuminating member 410 is positioned between a pair of stages 520, and a horizontal support stage 600 is positioned under the transmissive illuminating member 410.
Horizontal support table
The horizontal support 600 is a fixed structure, and the rolling member 500 and the transmission illumination member 410 are located in an open space of the stage 100 that moves in the front-rear direction. The horizontal support table 600 is located at a position horizontally crossing the open space of the stage 100 in the forward and backward moving direction of the stage 100, and both ends thereof are provided on the fixed table 610, and the fixed table 610 is provided on the base plate 20. The rolling member 500 and the transmissive illumination member 410 are disposed on the horizontal support table 600.
Fig. 3 is a diagram showing a state in which the pair of rolling members 500 support both ends of the imaging region W. As shown in fig. 3, since the image pickup unit 300 is a camera that picks up images in a line scan manner, the pair of rolling members 500 support the bottom surfaces of the inspection objects S corresponding to both ends of the image pickup area W in a rolling contact manner, and the image pickup unit 300 continuously picks up images of the inspection objects S moving in the arrow direction (front-rear direction). In this case, the photographing of the photographing unit 300 is performed in a state where the flatness is maintained by the pair of rolling members 500. In the embodiment of the present invention, only one pair of rolling members is shown, but a plurality of rolling members may be provided as necessary.
Fig. 4 is a diagram showing an example in which the rolling member 500 is provided in the case of using the area scan camera.
As shown in fig. 4, in the case where the imaging unit 300 is a camera that performs imaging by the surface scanning method, four rolling members 500 are arranged at four corners of the square imaging area W, respectively, and support the bottom surface of the inspection object S in rolling contact. As described above, since the imaging is performed in a state where the flatness of the imaging area W is maintained, the reliable inspection can be performed.
In the present embodiment, the imaging is performed while the stage is moving and scanning, but as another example, the imaging unit, the illumination unit, and the rolling member may be moved and scanned while the stage on which the inspection object is placed is fixed, and the fixed inspection object may be imaged. For example, the photographing unit, the lighting unit, and the rolling member may be additionally provided according to the examination condition of the examination object and matters required by the user.
Second embodiment
Fig. 5 is a front view for explaining the structure of an optical inspection apparatus according to a second embodiment of the present invention, and fig. 6 is a side view for explaining the structure of an optical inspection apparatus according to a second embodiment of the present invention.
Unlike the first embodiment in which the imaging unit, the illumination unit, and the rolling member are fixed, and only the stage is moved while the inspection object is inspected, in the second embodiment, the rolling member and the stage are moved together while the imaging unit and the illumination unit are fixed, and the inspection object is inspected.
Referring to fig. 5 and 6, the optical inspection apparatus 10a of the present invention includes a stage 100a, a linear movement unit 200a, an imaging unit 300a, an illumination unit 400a, a rolling member 500a, and the like.
The object table 100a includes a body 110 having a bottom surface 112, a first side surface 114, and a second side surface 116. The bracket 120 and the positioning member 130 are disposed on the upper layer of the body 110, i.e., on the first side 114 and the second side 116. The inspection object S is placed in a state where both side edges are supported on the stand 120. The positioning member 130 is a cylindrical body for positioning both sides of the inspection object S placed on the stand 120, and corrects (positions) the left and right positions by applying pressure to both side surfaces of the inspection object S. A space is present between the first side 114 and the second side 116 of the body 110, and the space is open in the upper and front-rear directions.
On the other hand, the rolling member 500a is provided on the stage 100 a. The rolling member 500a is disposed directly below a line on which the inspection object S is positioned so as to support the bottom surface of the inspection object S placed on the stage 100a, and the rolling member 500a is provided on the bracket 190 formed to extend from the first side surface 114 and the second side surface 116.
The rolling member 500a is for minimizing a distortion phenomenon caused by bending, bending (sagging) of the photographing region of the inspection object S placed on the stage 100a, and includes a ball type rolling wheel having a ball 510 directly contacting an edge of the photographing region W of the inspection object S. The rolling member 500a is provided on the stage 100a, is positioned below the inspection object S, and moves together with the stage 100 a. Therefore, the balls 510 of the rolling member 500a are held in point contact with the inspection object S at predetermined intervals, and friction or the like due to relative movement between the balls 510 and the inspection object S as in the first embodiment can be prevented. When the inspection object S is placed on the stage 100a, the rolling member 500a is provided on the carriage 190 at a height that can be in rolling contact with the bottom surface of the inspection object S. Although not shown, the carriage 190 is preferably installed so that the height of the first side surface 114 and the second side surface 116 of the stage 100a can be adjusted in order to adjust the height of the rolling member 500 a.
As shown in fig. 7, the plurality of balls 510 of the rolling member 500a are provided at predetermined intervals, and support the inspection object S as a whole. For example, if the area in which the four balls 510 arranged on the four sides can maintain flatness is 100mm, if the area in which an image is taken (the length of the inspection target object) is 500mm, for example, the six balls 510 are arranged in two rows at intervals of 100mm, and therefore, all of the balls need 12 balls.
Referring to fig. 7, six balls 510, each divided into two rows on both sides, support the bottom surfaces of the inspection objects S corresponding to both ends of the imaging region W in a rolling contact manner, and the imaging unit 300a continuously images the inspection objects S moving in the arrow direction (front-rear direction). In this case, photographing of the photographing unit 300a is performed in a state of maintaining flatness with the 12 balls 510.
The rolling members 500a and the stage 100a are moved in the front-rear direction on the base plate 20 by the linear movement unit 200 a. The linear moving unit 200a includes an LM guide 210 and a linear motor 220. The stage 100a is guided by an LM guide 210 provided on the base plate 20, and is moved in the front-rear direction by driving a linear motor 220. In the present embodiment, the linear moving unit 200a is constituted by the LM guide 210 and the linear motor 220, but various mechanisms that linearly move by a chain, a belt, a ball screw, or the like by the rotational force of the motor may be used.
The imaging unit 300a is a CCD camera having an image sensor of a CCD line sensor and a lens (not shown in the figure), and images the surface (pattern, etc.) of the inspection object S to obtain image data of the inspection object S. The obtained image data is supplied to an image processing unit (not shown). Although not shown in the figure, the optical inspection apparatus 10 includes an image processing unit that receives an image captured by the imaging unit 300 a. The image processing unit is constituted by a typical computer system (generally referred to as a microcomputer), and controls and processes each operation accompanying the optical automatic inspection. For example, a line scan camera may be used as the imaging unit 300a, and the line scan camera or the area scan camera may be additionally provided according to the examination condition of the examination object S and the matter required by the user. The photographing unit 300a is provided on the vertical frame 30 to be movable in the left and right directions. A moving plate 34 is provided on a guide rail 32 provided on the vertical frame 30, and a line scan camera as an imaging unit 300a is provided on the moving plate 34. That is, the left and right positions of the photographing unit 300a may be adjusted according to the region to be photographed.
The illumination unit 400a includes a transmissive illumination member 410 that irradiates the inspection object S with transmitted light and a reflective illumination member 420 that irradiates the inspection object S with reflected light. The reflective illumination member 420 is disposed above the inspection object S, and the transmissive illumination member 410 is disposed below the imaging region of the inspection object S. Both the transmissive illumination member 410 and the reflective illumination member 420 output light for obtaining image data of a photographing region of the inspection object S. The light sources of the transmissive illumination member 410 and the reflective illumination member 420 may use a plurality of light emitting diodes arranged in a line, a linear tube type fluorescent lamp, a halogen, a metal halide, or the like. A diffusion plate or the like for improving the uniformity of light may be disposed on the upper portion of the light source. The reflective lighting member 420 is disposed on the moving plate 34, and the transmissive lighting member 410 is fixedly disposed on the horizontal support table 600 a. The heights of the transmissive illumination member 410 and the reflective illumination member 420 may be adjusted.
The horizontal support 600a is a fixed structure, and the transmission illumination member 410 is positioned in an open space of the stage 100a that moves in the front-rear direction. The horizontal support table 600a is located at a position horizontally crossing the open space of the stage 100a in the forward and backward moving direction of the stage 100a, and both ends thereof are provided on the fixed table 610, and the fixed table 610 is provided on the base plate 20. The transmissive illuminating member 410 is disposed on the horizontal support table 600 a.
The structure and operation of the optical inspection apparatus of the present invention are shown in the above description and the drawings, which are only exemplary. In addition, various changes and substitutions may be made without departing from the scope of the technical idea of the present invention.
Claims (14)
1. An optical inspection apparatus characterized by comprising:
an object stage on which an inspection object is placed;
an imaging unit that images an inspection object placed on the stage;
an illumination unit that irradiates light to the inspection object; and
and a rolling member supporting an edge of an area photographed by the photographing unit and maintaining flatness of the photographing area.
2. The optical inspection apparatus according to claim 1, wherein the rolling member is a ball-type rolling wheel having a ball in rolling contact with the inspection object.
3. The optical inspection apparatus of claim 1, further comprising a linear moving unit that moves the stage in a front-rear direction so that the photographing unit continuously photographs the inspection object.
4. Optical inspection apparatus according to claim 1,
the photographing unit includes a line scan camera photographing in a line scan manner,
the rolling members support both ends of the photographing region photographed with the line scanning camera.
5. Optical inspection apparatus according to claim 1,
the photographing unit includes an area scanning camera photographing in an area scanning manner,
the rolling member supports a corner portion of the imaging area imaged with the area scanning camera.
6. Optical inspection apparatus according to claim 1,
the lighting unit includes at least:
a transmission illumination member that irradiates transmission light to the inspection object; or
And a reflective illumination member that irradiates reflected light to the inspection object.
7. The optical inspection apparatus of claim 1, wherein the stage supports left and right side edges of the inspection object and has a space opened in a forward and backward moving direction so that the rolling member is located below the inspection object.
8. Optical inspection apparatus according to claim 1,
the stage includes:
a body having a space opened in a forward and backward moving direction such that the rolling member is positioned below the inspection object; and
and the bracket is positioned on the upper layer of the machine body and used for supporting the left side edge and the right side edge of the inspection object.
9. The optical inspection apparatus of claim 8, wherein the stage further comprises a positioning member that positions a position of the inspection object placed on the support.
10. The optical inspection apparatus according to claim 1, further comprising a horizontal support table horizontally disposed along a forward and backward movement direction of the stage and passing through a space opened by the stage, on which the rolling member is disposed.
11. An optical inspection apparatus characterized by comprising:
an object stage on which an inspection object is placed;
an imaging unit that images an inspection object placed on the stage;
an illumination unit that irradiates light to the inspection object; wherein,
the stage includes a rolling member which is in rolling contact with the inspection object, maintaining flatness of the inspection object.
12. The optical inspection apparatus according to claim 11, wherein the rolling member includes a plurality of balls to support an edge of an imaging area of the inspection object imaged by the imaging unit at a predetermined interval.
13. The optical inspection apparatus of claim 12, further comprising a linear moving unit that moves the stage together with the rolling member by Q in an imaging area of the imaging unit so that the imaging unit continuously images the inspection object.
14. The optical inspection apparatus of claim 12, wherein the illumination unit comprises:
a transmission illumination member that irradiates transmission light to the inspection object; and
and a reflective illumination member that irradiates reflected light to the inspection object.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR20070047851 | 2007-05-16 | ||
| KR2007-47851 | 2007-05-16 | ||
| KR2007-95868 | 2007-09-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101308099A true CN101308099A (en) | 2008-11-19 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2008100979401A Pending CN101308099A (en) | 2007-05-16 | 2008-05-16 | Optical inspection device |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR100969283B1 (en) |
| CN (1) | CN101308099A (en) |
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| CN102253044A (en) * | 2010-12-21 | 2011-11-23 | 吴江市博众精工科技有限公司 | Measurement machine |
| CN102901923A (en) * | 2011-07-26 | 2013-01-30 | 烽腾科技有限公司 | System and method for inspection of electrical circuits |
| CN104197841A (en) * | 2014-09-09 | 2014-12-10 | 深圳市斯尔顿科技有限公司 | Method for detecting boundaries of lithium battery winding layer |
| CN104422701A (en) * | 2013-09-09 | 2015-03-18 | 政美应用股份有限公司 | Linear scanning assembly |
| CN105136801A (en) * | 2015-08-28 | 2015-12-09 | 常石集团（舟山）造船有限公司 | Ship detecting device |
| CN109975208A (en) * | 2018-12-27 | 2019-07-05 | 无锡财量机械有限公司 | A kind of continuous check device of multiple spot |
| CN111929305A (en) * | 2020-09-22 | 2020-11-13 | 维嘉数控科技（苏州）有限公司 | Detection device |
| CN112540085A (en) * | 2019-09-20 | 2021-03-23 | 矢崎总业株式会社 | Appearance inspection device for crimp terminal |
| CN112648967A (en) * | 2020-12-03 | 2021-04-13 | 台嘉蚌埠玻璃纤维有限公司 | Fine fabric longitude and latitude density measuring device of glass |
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| KR20060097250A (en) * | 2005-03-04 | 2006-09-14 | 아주하이텍(주) | System and method for optical automated inspection |
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2007
- 2007-09-20 KR KR1020070095868A patent/KR100969283B1/en not_active IP Right Cessation
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2008
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| Publication number | Publication date |
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| KR20080101627A (en) | 2008-11-21 |
| KR100969283B1 (en) | 2010-07-09 |
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Application publication date: 20081119 |