CN107709260A - The manufacture method and its manufacture device of glass plate - Google Patents
The manufacture method and its manufacture device of glass plate Download PDFInfo
- Publication number
- CN107709260A CN107709260A CN201680038286.XA CN201680038286A CN107709260A CN 107709260 A CN107709260 A CN 107709260A CN 201680038286 A CN201680038286 A CN 201680038286A CN 107709260 A CN107709260 A CN 107709260A
- Authority
- CN
- China
- Prior art keywords
- glass plate
- exhaust outlet
- air supply
- supply opening
- processing gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Surface Treatment Of Glass (AREA)
- Drying Of Semiconductors (AREA)
Abstract
The opposed upper surface and this two sides (13 of the lower surface are formed at making to have the upper surface (14) of the lower structures (11) of air supply opening (26) and exhaust outlet (30) arranged opposite with the lower surface (13) of upper structure (10), 14) in the processing space (15) between, implement etching process using the processing gas (5) for spraying from air supply opening (16) and being sucked by exhaust outlet (30) come the lower surface (3a) to the glass plate carried along horizontal direction (3), and, air supply opening (26) is set to be carried with exhaust outlet (30) in glass plate (3) on direction positioned at the position separated.And, in the upper surface of lower structures (11) (14), make the upper surface part (18ab) higher than the highest order in the region in the processing gas flow direction downstream of exhaust outlet (30) from the upper surface part (22a) of the highest order in region of the exhaust outlet (30) untill air supply opening (26).
Description
Technical field
The present invention relates to the glass for implementing the process of etching process to glass plate using processing gas such as hydrogen fluoride
The manufacture method and its manufacture device of plate.
Background technology
It is well known that in the mobile devices such as flat-panel monitor (FPD), smart mobile phone, plate PC, other various electronics
Various thicknesss of slab, the glass plate of size are assembled with device etc., wherein, flat-panel monitor with liquid crystal display, plasma display,
Organic el display, Field Emission Display etc. are representative.
, can in the manufacturing process for the basic glass plate to being made as the glass plate of this final products
The problem because of caused by static electrification can be produced.For example, when being handled as defined in implementing in mounting glass plate on operation post, may production
The raw situation for causing glass plate to be attached at the scope of operation because of static electrification.Therefore, in the glass plate for making to handle as defined in completion from work
When industry platform is peeled off, the breakage of the glass plate may be caused.
As the countermeasure of above mentioned problem, following trial is being promoted：The processing gas such as hydrogen fluoride are sprayed at glass plate
And implement etching process, make the surface roughening of the glass plate, thus solve the above-mentioned problem because of caused by static electrification.
As the concrete example, according to patent document 1, following scheme is disclosed：Carried along certain transport path
Glass plate by handling space when, using the processing gas for spraying from the ejiction opening of nozzle and being sucked by the suction inlet of suction nozzle come
Etching process is implemented to the lower surface of the glass plate.
In detail, in Etaching device disclosed in the document, in the lower surface of upper structure (structural portion of upside)
Upper surface with lower structures (structural portion of downside) is each other formed with for the lower surface to the glass plate in carrying
Implement the processing space of etching process.In this case, upper structure is only formed by top plate.On the other hand, lower structures
Pass through the carrying side that will be configured at the nozzle of (upstream side of transport path) on rear side of the carrying direction of glass plate, be configured at glass plate
Suction nozzle to front side (downstream of transport path) and the bottom plate integration that is located between two nozzles and formed.Moreover,
Each upper surface as the nozzle of lower structures, bottom plate and suction nozzle turns into co-planar.Therefore, in lower structures not
Upper surface with difference of height forms oriented processing space and sprays the ejiction opening of processing gas and handle gas from the suction of processing space
The suction inlet of body.
Citation
Patent document
Patent document 1：International Publication No. 2011/105331
The content of the invention
The invention problem to be solved
However, in Etaching device disclosed in patent document 1, the upper surface whole region of lower structures is without height
Low poor plane, therefore, when implementing etching process to glass plate in the process space, produce the problem of as shown below.
That is, when processing gas flows along the lower surface of glass plate in the process space, stream of the air from processing gas
The upstream side and downstream in dynamic direction flow into towards the exhaust outlet on the upper surface of lower structures.Moreover, from upstream side
The flow direction of air is identical with the flow direction of processing gas, therefore, air from upstream side and processing gas converge and
Flowed along the lower surface of glass plate.On the other hand, the flow direction of the air from downstream and the flowing side of processing gas
To on the contrary, processing gas in the process space flow direction downstream near inhaled to exhaust outlet together with processing gas
Enter.
In this case, when the upper surface whole region of lower structures be without difference of height plane when, to from
The circulating resistance (passage resistance) that the flowing of the air of upstream side applies is very small.Therefore, substantial amounts of air from upstream laterally from
Manage space to flow into, make the processing gas desaturation along the lower surface flowing of glass plate.As a result, processing gas is to glass plate
The roughening scarce capacity of lower surface, it is difficult to realize the roughening of the lower surface of satisfactory glass plate, may cause coarse
Change processing and the problems such as uneven occurs.
It should be noted that for it is such the problem of, the flow of increase processing gas is considered, but in this simple method
In, the flow around the processing gas of the upper surface side of glass plate undeservedly increases, it may occur however that the upper surface of glass plate produces
The fatal problems such as etching defect.
Viewpoint more than, problem of the invention is, does not make the processing gas of upper surface side around glass plate
Flow undeservedly increases, it becomes possible to improves roughening ability of the processing gas to the lower surface of glass plate.
For solving the scheme of problem
The method of the invention created to solve above-mentioned problem is a kind of manufacture method of glass plate, and it makes to have
The upper surface of the lower structures of air supply opening and exhaust outlet is arranged opposite with the lower surface of upper structure and is formed at opposed
The upper surface and this two sides of the lower surface between processing space in, using being sprayed from air supply opening and to exhaust outlet
The processing gas of suction come to the lower surface for the glass plate carried along horizontal direction implement etching process, and make air supply opening with
Exhaust outlet is carried positioned at the position separated on direction in glass plate, and the manufacture method of the glass plate is characterised by, in bottom
In the upper surface of structure, make the upper surface part from the highest order in region of the exhaust outlet untill air supply opening higher than exhaust outlet
The upper surface part of highest order in the region in processing gas flow direction downstream.Here, " the glass carried along horizontal direction
Plate " is not only the situation of horizontal direction carrying along non-inclined direction including glass plate, in addition to glass plate is along relative to water
The situation (same as below) that plane is carried with the direction of upper and lower less than 30 ° of angle tilt.In addition, the glass plate in the case of these
Posture not only include glass plate relative to carry direction two sides turn into non-tilt state posture, in addition to glass plate from
Carry a side in direction turns into the posture (same as below) of heeling condition relative to another side with less than 30 ° of angle.Separately
Outside, " upper surface part of highest order " refers to the upper surface part (same as below) for being present in highest position in corresponding region.
According to such structure, the air sucked from the processing gas flow direction upstream side of air supply opening to exhaust outlet
(referred to as the air from upstream side) from the upper surface part of the highest order in region of the air supply opening untill exhaust outlet by applying
Relatively large circulating resistance (passage resistance).On the other hand, from the processing gas flow direction downstream of exhaust outlet by exhaust
The air (the referred to as air from downstream) of mouth suction is simply applied in relatively small circulating resistance.In this case, come
Sprayed upward from the air of upstream side from air supply opening and along glass plate lower surface circulation and with being sucked to exhaust outlet
The flowing of processing gas converge.The flow of the air from upstream side and the upper surface whole region of lower structures are flat
The situation in face is compared and reduced, also, far fewer than the flow of the air from downstream.Therefore, along the lower surface of glass plate
The processing gas of flowing is not easy the air desaturation from upstream side converged with it.As a result, processing gas is to glass
The roughening ability of the lower surface of plate improves, and realizes the roughening of the lower surface of satisfactory glass plate, avoids coarse
The problems such as uneven is produced in change processing.Moreover, without increasing the flow of processing gas to improve roughening ability, because
This, the processing gas around the upper surface side of glass plate will not also increase flow.Therefore, it is possible to avoid the upper surface of glass plate from producing
The situation of raw etching defect, and improve the roughening ability of the lower surface for glass plate.
Can also be in the methods described above, in the upper surface of lower structures, the processing gas flowing side of air supply opening
In region of the upper surface part of the highest order in region to the upstream side higher than the processing gas flow direction downstream of exhaust outlet
Highest order upper surface part.
So, the air from upstream side is by the area from region of the air supply opening untill exhaust outlet and the upstream side of air supply opening
The upper surface part of highest order in the two regions of domain applies relatively large circulating resistance (passage resistance).Moreover, this can be made
Gap between the upper surface part of highest order in two regions turns into substantial air supply opening, the substantial air supply opening
Close to the lower surface of glass plate.Thus, without the flow of increase processing gas, it becomes possible to be improved processing gas to glass
Effect as the roughening ability of the lower surface of plate, therefore, the effect times is made by the effect being superimposed with already described effect
Increase.
Can also be in the upper surface of lower structures, to make from exhaust outlet to air supply opening in method in this case
Untill region in highest order upper surface part and air supply opening processing gas flow direction upstream side region in highest
The upper surface part of position is sustained height.
So, the upper surface part of the highest order in two above-mentioned regions is sustained height, therefore, the upper surface of both
Gap between portion is substantial air supply opening effectively close to the lower surface of glass plate.Therefore, it is possible to effectively obtain
Already described Overlay.
On the other hand, can also be in the upper surface of lower structures, to make from exhaust outlet to confession in the methods described above
In region of the upper surface part of the highest order in region untill gas port higher than the processing gas flow direction upstream side of air supply opening
Highest order upper surface part.
So, the upper surface part of the highest order in the region converged by the flowing of the air from upstream side and processing gas
Do not apply relatively large circulating resistance (passage resistance) to the air from upstream side lavishly.Therefore, it is possible to not obtain lavishly
To with above-mentioned method caused by effect substantially equal effect.
Can also be in the upper surface of lower structures, to make the processing gas of exhaust outlet in method in this case
The upper surface part of highest order in the region in flow direction downstream and the area of the processing gas flow direction upstream side of air supply opening
The upper surface part of highest order in domain is sustained height.
So, even if making the region of the upstream side of the air supply opening in the upper surface of lower structures and the downstream of exhaust outlet
Region similarly keep in the past such relatively low face, can also enjoy already described effect.Thereby, it is possible to cut down to lower junction
The improvement position that structure body applies, can realize the cheaper of cost of manufacture.
It is preferably in the above methods, from the upper surface part of the highest order in region of the exhaust outlet untill air supply opening
Above-below direction size of separation between the lower surface for the glass plate for being just carried out etching process be less than the upper surface of glass plate with
Above-below direction size of separation between the lower surface of upper structure.
So, by more reliably applying phase from the upper surface part of the highest order in region of the exhaust outlet untill air supply opening
To big circulating resistance (passage resistance).Therefore, it more reliably ensure that already described effect.
The device of the invention created to solve above-mentioned problem is a kind of manufacture device of glass plate, and it makes to have
The upper surface of the lower structures of air supply opening and exhaust outlet is arranged opposite with the lower surface of upper structure and is formed at opposed
The upper surface and this two sides of the lower surface between processing space in, using being sprayed from air supply opening and to exhaust outlet
The processing gas of suction come to the lower surface for the glass plate carried along horizontal direction implement etching process, and make air supply opening with
Exhaust outlet is carried positioned at the position separated on direction in glass plate, and the manufacture device of the glass plate is characterised by, in bottom
In the upper surface of structure, it is higher than from the upper surface part of the highest order in region of the exhaust outlet untill air supply opening at exhaust outlet
The upper surface part of highest order in the region in process gases flow direction downstream.
The manufacture device of the glass plate possesses the constitutive requirements substantially the same with foregoing method.Therefore, for the dress
The explanation item put is also substantially the same with the explanation item for foregoing method, and therefore, the description thereof will be omitted herein.
Invention effect
According to the present invention, do not make the flow of the processing gas of the upper surface side around glass plate undeservedly increase, it becomes possible to
Improve roughening ability of the processing gas to the lower surface of glass plate.
Brief description of the drawings
Fig. 1 is the vertical profile master of the overall Sketch of the manufacture device for the glass plate for showing the first embodiment of the present invention
View.
Fig. 2 is that the amplification of the major part structure of the manufacture device for the glass plate for showing the first embodiment of the present invention is indulged
Cut open front view.
Fig. 3 is that the amplification of the major part structure of the manufacture device for the glass plate for showing the first embodiment of the present invention is indulged
Cut open side view.
Fig. 4 is the air supply opening of the inscape of the manufacture device for the glass plate for being shown as the first embodiment of the present invention
Peripheral construction major part amplification vertical profile front view.
Fig. 5 is that the amplification of the major part structure of the manufacture device for the glass plate for showing the first embodiment of the present invention is indulged
Cut open front view.
Fig. 6 is that the amplification of the major part structure of the manufacture device for the glass plate for showing second embodiment of the present invention is indulged
Cut open front view.
Fig. 7 is the partial enlargement vertical profile front view for a part of structure for showing Fig. 1.
Fig. 8 be show in the structure by Fig. 1 a part deformation after example integrally-built vertical profile front view.
Fig. 9 is the partial enlargement front view for a part of structure for showing Fig. 8.
Embodiment
Hereinafter, the manufacture method and its manufacture device of the glass plate of embodiments of the present invention are explained with reference to.
<First embodiment>
First, the overall Sketch of the manufacture device of the glass plate of the first embodiment of the present invention is illustrated.Fig. 1 is to show
Go out the vertical profile front view of its overall Sketch.It should be noted that in the following description, will be orthogonal with paper in Fig. 1
Direction be referred to as width.As shown in the drawing, the manufacture device 1 of glass plate is configured to, and will be moved to chamber from a mouthful 2a is moved into
Glass plate 3 in room 2 along horizontal direction carry while, the place being arranged in the transport path of glass plate 3 in chamber 2
Manage in region 4, implement etching process by the use of the hydrogen fluoride as processing gas 5.Then, the glass plate 3 after etching process from
Mouthful 2b is taken out of to take out of to outside chamber 2.
The profile of chamber 2 is formed as preventing the place from its inner space in the direction of the width for the rectangular-shape of strip
The outflow of process gases 5.Moreover, move into mouthful 2a formed with already described in the side of sidewall portion 2c of the chamber 2 and take out of a mouthful 2b.Need to illustrate
, the material of chamber 2 is the polyvinyl chloride to the excellent corrosion resistance of processing gas 5 (hydrogen fluoride).
Etaching device 6 is configured with processing region 4, the Etaching device 6 is used for the glass plate 3 to being carried along horizontal direction
Spray treatment gas 5 and implement etching process.In a manner of the Etaching device 6 forms gap 7 between the ceiling wall 2d of chamber 2
It is arranged at the bottom 2e of chamber 2.
In addition, the manufacture device 1 of the glass plate possesses multiple transport rollers 8, the plurality of transport roller 8 is configured inside and outside chamber 2
And linearly glass plate 3 is carried along one in the horizontal direction.These transport rollers 8 are not only in the side along transport path
It is configured with multiple, is also configured with the direction of the width multiple (reference pictures 3) upwards.
Fig. 2 is the amplification vertical profile front view for describing the structure of Etaching device 6 in detail.It should be noted that following
Explanation in, the direction orthogonal with paper in Fig. 2 is referred to as width.In addition, the arrow A directions shown in Fig. 2 are glass
The carrying direction of plate 3, arrow A directions are only called and carry direction.In addition, in the present embodiment, the carrying side of glass plate 3
To with it is described later processing space 15 in processing gas 5 flow direction it is identical, by the upstream of the flow direction of the processing gas 5
Side is only called upstream side, and the downstream of the flow direction is only called into downstream, and therefore, the right side in Fig. 2 (is carried for upstream side
On rear side of direction), left side is downstream (carrying on front side of direction).
As shown in Fig. 2 Etaching device 6 has the upper structure 10 for being configured at upside and is configured at the substructure of downside
Body 11, two structures 10,11 are concatenated wall 12 at the both ends of width and link and formed and be integrated.Moreover, on top
Between the lower surface 13 of structure 10 and the upper surface 14 of lower structures 11, formed with for the glass plate to being carried
Implement the processing space 15 of the etching process based on processing gas 5 in 3 lower surface.It should be noted that upper structure 10 with
And the material of lower structures 11 is polyvinyl chloride.In addition, it is built-in with upper structure 10 and lower structures 11 for preventing
The only heater 16 (such as heater etc.) caused by condensed caused by processing gas 5.
Upper structure 10 is formed by one in flat top plate 17, and the lower surface of the top plate 17 is upper structure 10
Lower surface 13 be single plane.Therefore, the lower surface 13 of top plate 17 is without bumps.That is, the only width of top plate 17
The both ends of (length direction) are fixed on by bolt etc. links wall 12, therefore, is not formed because of spiral shell in the lower surface 13 of top plate 17
The presence of bolt or bolt hole etc. and caused bumps.Moreover, the following table of the lower surface 13 of the top plate 17 and the glass plate 3 being handled upside down
Face 3a and upper surface 3b are parallel.
Lower structures 11 have in flat bottom plate 18 with the bottom for being fixed on bottom plate 18 for exhaust structure 19.
The ratio upstream and downstream direction central portion of bottom plate 18 leans on the position of upstream side, forms the air vent 20 for leading to processing space 15.In addition,
The position of upstream side is leaned on formed with the supply road 21 for leading to air vent 20 for the ratio upstream and downstream direction central portion of exhaust structure 19.
In this case, although it is not shown, but air vent 20 can also have shrink top and reduce the small hole portion of supply of the area of passage.
Moreover, the upper surface 18a of bottom plate 18 is parallel with the lower surface 13 of top plate 17.
On the top of bottom plate 18, the central portion near zone mounting in upstream and downstream direction is fixed with flat main plate body
22.The medial surface of the end face of the upstream side of main plate body 22 and the downstream of air vent 20 turns into substantially co-planar.Therefore, exist
Step is not formed between the end face of the upstream side of main plate body 22 and air vent 20.In addition, on the top of bottom plate 18, than upper and lower
Roam all around the would to central portion by upstream side region mounting be fixed with it is flat auxiliary plate body 23.Aid in the downstream of plate body 23
The medial surface of the end face of side and the upstream side of air vent 20 turns into substantially co-planar.Therefore, in the downstream of auxiliary plate body 23
Step is not also formed between the end face of side and air vent 20.In the present embodiment, the upper surface part 22a of main plate body 22 with it is auxiliary
The upper surface part 23a of plate body 23 is helped to be present in sustained height position.Moreover, end face and the auxiliary of the upstream side of main plate body 22
The air vent 20 of bottom plate 18 is led in gap 24 between the end face in the downstream of plate body 23.Therefore, for by processing gas 5 to
Top guides and it is included into above-mentioned gap 24, air vent 20 and supply with path 25 to the supply that processing space 15 sprays
Road 21.Moreover, the supply is turned into the upper end that the upper end of path 25 is above-mentioned gap 24 is formed at lower structures 11
Upper surface 14 air supply opening 26.
Bottom plate 18 ratio upstream and downstream direction central portion downstream position formed with lead to processing space 15 exhaust
Hole 27.In addition, in the position of the ratio upstream and downstream direction central portion downstream for exhaust structure 19 formed with leading to steam vent 27
Exhaust line 28.Therefore, the recovery path 29 for sucking and being reclaimed downwards processing gas 5 from processing space 15
Including steam vent 27 and exhaust line 28.Moreover, the upper end opening portion of the recovery path 29 turns into the upper table for being formed at bottom plate 18
Face 18a is the exhaust outlet 30 of the upper surface 14 of lower structures 11.Here, strict above say, processing space 15 is upper structure
Being formed between air supply opening 26 and exhaust outlet 30 between 10 lower surface 13 and the upper surface 14 of lower structures 11
Space in separating ranges.It should be noted that under the lower end for supplying road 21 in exhaust structure 19 and exhaust line 28
The pipeline (omitting diagram) held the through hole 31,32 of the bottom wall 2f through being formed from chamber 2 respectively and led to outside chamber 2.
In this case, the end face in the downstream of main plate body 22 is located at what is be slightly separated out from exhaust outlet 30 towards upstream side
Position.Therefore, the end face in the downstream formed with main plate body 22 between main plate body 22 and exhaust outlet 30 is step (step
Forming face) 22b.Here, from the upper surface part of the highest order in region of the air supply opening 26 untill exhaust outlet 30 be main plate body
22 upper surface part 22a, i.e. whole region are the upper surface part 22a of plane.In addition, in the region in the downstream of exhaust outlet 30
The upper surface part of highest order is the portion of upper surface 18ab in the downstream of the exhaust outlet 30 in bottom plate 18, i.e. the whole region is flat
The portion of upper surface 18ab in face.Moreover, upper surface part 22a and portion of upper surface 18ab and the lower surface 13 of upper structure 10
It is parallel.Upper surface part 22a is higher than portion of upper surface 18ab.In this case height difference size H is preferably portion of upper surface 18ab
With 10~90%, more preferably the 30~70% of the lower surface 3a of glass plate 3 above-below direction size of separation S1.
On the other hand, the end face of the upstream side of plate body 23 is aided in be located at from the end face of the upstream side of bottom plate 18 towards downstream
The position separated.Therefore, between the end face of auxiliary plate body 23 and the upstream side of bottom plate 18, formed with auxiliary plate body 23
The end face of upstream side be step (step forming face) 23b.Here, highest order in the region of the upstream side of air supply opening 26 is upper
Surface element is the upper surface part 23a for aiding in plate body 23, i.e., whole region is the upper surface part 23a of plane.Upper surface part 23a
Also above the portion of upper surface 18ab of the highest order in the region in the downstream of exhaust outlet 30, upper surface part 23a and part upper table
Face 18ab height difference size is identical with the situation of above-mentioned main plate body 22.
In the present embodiment, the upper surface 14 of lower structures 11 is formed as described below.That is, from air supply opening 26 to row
Upper surface part 22a that the upper surface part in region untill gas port 30 includes being made up of the plane of main plate body 22, step 22b,
And the portion of upper surface 18ac being made up of the plane of bottom plate 18.In addition, the upper surface in the region of the upstream side of air supply opening 26
Portion includes the upper surface part 23a, the step 23b that are made up of the plane of auxiliary plate body 23 and is made up of the plane of bottom plate 18
Portion of upper surface 18ad.In addition, the upper surface part in the region in the downstream of exhaust outlet 30 only includes the plane structure by bottom plate 18
Into portion of upper surface 18ab.
Fig. 3 be by comprising supply path 25 flowing central axis in a manner of cutting bottom plate 18 and its top periphery and
Obtained amplification longitudinal cross-sectional side view.As shown in the drawing, it is formed at the air vent 20 of bottom plate 18 and in main plate body 22 and accessory plate
The air supply opening 26 that shape body 23 is formed each other is all formed as in the direction of the width as the slot-shaped of strip.These air vents 20 with
And the width size of air supply opening 26 is all higher than the width size of glass plate 3.In addition, though it is not shown, but be formed at
The steam vent 27 and exhaust outlet 30 of bottom plate 18 are also all formed as in the direction of the width as the slot-shaped of strip.Moreover, these are arranged
The width size of stomata 27 and exhaust outlet 30 is also all higher than the width size of glass plate 3.
Fig. 4 is to show to be formed at the major part amplification vertical profile main view of the peripheral construction on the top of the air vent 20 of bottom plate 18
Figure.As shown in the drawing, the upstream and downstream direction size L of air vent 20 is by among the above-below direction positioned at the air vent 20 and in width
Multiple distance pieces 33 is provided with direction and is adjusted to fixed dimension (also referring to Fig. 3).I.e., in the present embodiment, air vent
20 be the gap being split the obtained opposed end face of each segmentation bottom plate bottom plate 18 in upstream side, the gap it is big
It is small to be adjusted by distance piece 33.
Here, the depth dimensions B from the upper end opening portion of air vent 20 untill distance piece 33 is preferably 10~100mm's
In the range of.When depth dimensions B is too short, the flowing hair of the processing gas 5 in air vent 20 is made because of the presence of distance piece 33
It is raw disorderly, it is possible to which that the lower surface 3a for the glass plate 3 for making to realize based on etching process roughening produces uneven.With this phase
It is right, when depth dimensions B is long, it is difficult to be finely adjusted section to the upstream and downstream direction size L of air supply opening 26.Therefore, from air supply opening
26 to processing space 15 supply processing gas 5 quantity delivered be possible to it is excessive or very few and can not be by the lower surface of glass plate 3
Surface roughness desired by the coarse chemical conversions of 3a.Therefore, the depth from the upper end opening portion of air vent 20 untill distance piece 33
Size B is preferably in above-mentioned number range.
Then, the manufacture method for possessing the i.e. glass plate of effect of the manufacture device 1 of the glass plate of above structure is said
It is bright.
Fig. 5 is the amplification vertical profile front view of the structure on the especially top for being shown specifically Etaching device 6.In the figure by with
The path that the solid line of arrow represents is the general circulation path of processing gas 5, is represented in the figure by the dotted line with arrow
Path is the general circulation path of air.With reference to these circulation paths, processing gas 5 sprayed upward from air supply opening 26 and
After being flowed along the lower surface 3a of glass plate 3 towards downstream, sucked to exhaust outlet 30.It is accompanied by this, from Etaching device 6
The air (the hereinafter referred to as air from upstream side) 34 that the upstream side in outside is flowed towards processing space 15 converges with processing gas 5
Close and along glass plate 3 lower surface 3a flowing after, sucked to exhaust outlet 30.In addition, from the downstream in the outside of Etaching device 6
Air (the hereinafter referred to as air from downstream) 35 that side direction processing space 15 is flowed is in the downstream of the flowing of processing gas 5
End periphery is contacted or collided with processing gas 5 and sucked to exhaust outlet 30.Pass through processing gas 5 and air as progress
34th, 35 circulation, and appropriate etching process is implemented to the lower surface 3a of glass plate 3.
In this case, for the air 34 from upstream side, because auxiliary plate body 23 and main plate body 22 turn into harm
Hinder portion, thus the air 34 from upstream side in the state of relatively large circulating resistance (passage resistance) has been applied in processing
Gas 5 converges and flowed along the lower surface 3a of glass plate 3.On the other hand, for the air 35 from downstream, due to not depositing
In obstruction portion as described above, therefore simply it is applied in relatively small circulating resistance.Therefore, the stream of the air 34 from upstream side
Amount reduced compared with the whole region of upper surface 14 of lower structures 11 is the situation of plane, also, with from downstream
The flow of air 35 is compared and is greatly reduced.Therefore, along glass plate 3 lower surface 3a flow processing gas 5 be not easy by
The desaturation of air 34 from upstream side converged with it.Further, since the upper surface part 23a and main plate body of auxiliary plate body 23
22 upper surface part 22a is present in sustained height position, therefore, lower surface 3a of the air supply opening 26 close to glass plate 3.
According to these Overlays, processing gas 5 improves to the lower surface 3a of glass plate 3 roughening ability, realizes
The lower surface 3a of satisfactory glass plate 3 roughening, and avoid and produce the problems such as uneven in roughening processing.
Moreover, without increasing the flow of processing gas 5 to improve roughening ability, therefore, around the upper surface 3b sides of glass plate 3
Processing gas 5 will not also increase flow.Therefore, it is possible to avoid the upper surface 3b in glass plate 3 from producing the situation of etching defect,
And improve the roughening ability of the lower surface 3a for glass plate 3.
<Second embodiment>
Then, the manufacture device (its manufacture method) of the glass plate of second embodiment of the present invention is illustrated.Need
It is noted that in the explanation of the second embodiment, for the composition being had been described above in above-mentioned first embodiment
Key element, referring to the drawings it is middle mark identical label and the repetitive description thereof will be omitted, here, only for first embodiment not
Illustrated with putting.
As shown in fig. 6, the glass of the manufacture device 1 of the glass plate of the second embodiment and above-mentioned first embodiment
The difference of the manufacture device 1 of plate is, is not provided with aiding in plate body on the top of lower structures 11, only mounting is fixed with
Main plate body 22.Therefore, the upper surface 14 of lower structures 11 includes the upper surface part 22a of main plate body 22, is present in than this
The portion of upper surface 18ad of the upstream side of the bottom plate 18 of position low upper surface part 22a and the part upper table in the downstream of bottom plate 18
Face 18ab, 18ac and step 22b.Three portion of upper surface 18ab, 18ac, 18ad of the bottom plate 18 are present in sustained height
Position.In addition, include shape with path 25 for the supply for guiding processing gas 5 upward and spraying it to processing space 15
Into in bottom plate 18 air vent 20 and be formed at the supply road 21 for exhaust structure 19.Moreover, upper end of the supply with path 25
Opening portion is that the upper end opening portion of air vent 20 turns into the air supply opening 26 for the upper surface 14 for being formed at lower structures 11.
According to the manufacture device 1 of the glass plate of the second embodiment, for the air 34 from upstream side, due to mainboard
Shape body 22 turns into obstruction portion, therefore the air 34 from upstream side is being applied in relatively large circulating resistance (passage resistance)
Under state, converge with processing gas 5 and flowed along the lower surface 3a of glass plate 3.On the other hand, for the sky from downstream
Gas 35, due in the absence of obstruction portion as described above, therefore, being simply applied in relatively small circulating resistance.Therefore, from upstream
The flow of the air 34 of side is reduced compared with the whole region of upper surface 14 of lower structures 11 is the situation of plane, also,
It is greatly reduced compared with the flow of the air 35 from downstream.Therefore, the processing flowed along the lower surface 3a of glass plate 3
Gas 5 is not easy the desaturation of air 34 from upstream side converged with it.As a result, although air supply opening 26 is not close to glass
The lower surface 3a of glass plate 3, but can obtain and the generally homogenous equal effect of the situation of above-mentioned first embodiment.
It should be noted that in first embodiment, second embodiment more than, exemplified with lower structures 11
Top mounting be fixed with main plate body 22 and upper level and the main identical of plate body 22 auxiliary plate body 23 or only carry
Put the situation for being fixed with main plate body 22.The present invention is not limited to this, can also be in the fixed main plate body 22 of mounting and accessory plate
On the basis of this both sides of shape body 23, make the upper surface part 22a of main plate body 22 height and position upper higher than auxiliary plate body 23
Surface element 23a height and position.
In addition, in first embodiment, second embodiment more than, main plate body 22 is with being set in downstream and row
Gas port 30 separates and air supply opening 26 is reached in upstream side, but can also match somebody with somebody be set to separate in upstream side and air supply opening 26 and
Downstream reaches exhaust outlet 30, or can also match somebody with somebody and be set in upstream side and this both sides of downstream and air supply opening 26 and exhaust
Mouth 30 separates, or reaches air supply opening 26 and exhaust outlet 30 in upstream side and this both sides of downstream.In addition, auxiliary tabular
Position relationship between body 23 and the end face of the upstream side of air supply opening 26 and bottom plate 18, it can equally apply above-mentioned mainboard shape
Position relationship between body 22 and air supply opening 26 and exhaust outlet 30.
In addition, in first embodiment, second embodiment more than, the upper surface part 22a of main plate body 22 and auxiliary
The upper surface part 23a for helping plate body 23 is plane, but the upper surface of either one or both can also be to protrude upward or
The curved surface that the mode being recessed upward bends or bent.In this case, the highest position of curved surface turns into main plate body 22, auxiliary
Help the upper surface part of the highest order of plate body 23.Bottom can be similarly applied to by being somebody's turn to do the explanation item of " upper surface part of highest order "
Portion of upper surface 18ab, 18ac, 18ad of plate 18.
In addition, in first embodiment, second embodiment more than, carrying direction and the processing space of glass plate 3
The flow direction of 15 processing gas 5 is identical, but the carrying direction of glass plate 3 can also be opposite to that direction.
In addition, in first embodiment, second embodiment more than, on the top of bottom plate 18, mounting is fixed with mainboard
Shape body 22 (auxiliary plate body 23), but can not also make bottom plate 18 and main plate body 22 (auxiliary plate body 23) split settings and incite somebody to action
They form and are integrated.
In addition, in first embodiment, second embodiment more than, one will be set to for exhaust structure 19 and at this
For exhaust structure 19 formed with supply road 21 and exhaust line 28, but can also be by gas-supplying structure and shape formed with supply road 21
Into the exhaust structure split settings for having exhaust line 28, and as needed by the gas-supplying structure and exhaust structure on upstream and downstream direction
Separate arranging of turning up the soil.
Explanation above is mainly the explanation of Etaching device 6, but in addition, the manufacture device 1 of glass plate of the invention
It is also equipped with structure as shown below.
As shown in figure 1, it is formed at moving into mouthful 2a and take out of mouthful 2b and being configured to regulation along upper and lower for chamber 2
To A/F.That is, move into mouthful 2a and take out of mouthful 2b rising wood 2aa, 2ba periphery and lower edge 2ab, 2bb
Periphery, a pair of openings width adjusting structure that can be moved in the vertical direction along the side of sidewall portion 2c of chamber 2 is equipped respectively
Part 36,37.In addition, barometer (omitting diagram) is respectively arranged with chamber 2 and outside chamber 2.Therefore, based on A/F
The regulation for the A/F moved into mouthful 2a and take out of mouthful 2b that adjustment means 36,37 are realized is according to by two above-mentioned barometers
The draught head inside and outside chamber 2 that determines is carried out.Thus, control because of the draught head inside and outside chamber 2 and caused by air-flow 38
Flow velocity or flow.Specifically, based on the draught head inside and outside chamber 2, to control by moving into a mouthful 2a, taking out of mouthful 2b to chamber 2
The flow velocity (flow) of the air-flow 38 of interior inflow or the air-flow 38 flowed out to outside chamber 2.It should be noted that a pair of openings width
The material of adjustment means 36,37 is polyvinyl chloride.
A/F adjustment means 36 (37) are made up of the tabular component in the direction of the width for the rectangle of strip, the tabular
The width size of component, which is more than, to be moved into mouthful 2a and takes out of mouthful 2b width size.In addition, A/F adjusts structure
Part 36 (37) can move in the vertical direction along the guide rail 39 for the side of sidewall portion 2c for being fixedly installed on chamber 2.In addition, opening is wide
Degree adjustment means 36 (37) as the ball screw framework 40 for the drive mechanism for being responsible for its movement with linking.
Ball screw framework 40 has：The nut member 40a directly linked with A/F adjustment means 36 (37)；Pass through
From the ball-screw 40b for transferring to move up and down A/F adjustment means 36 (37) via nut member 40a；And through chamber
Room 2 it is inside and outside and with the rotary shaft 40c of ball-screw 40b synchronous rotaries.In addition, the outer end assembling of the rotary shaft 40c outside chamber 2
Having can be by handle 40d that operator operates.Therefore, operator in the outer operation handle 40d of chamber 2 by that can make ball wire
Thick stick 40b rotates, so that A/F adjustment means 36 (37) move up and down.
In this case, as shown in fig. 7, moving into mouthful 2a and taking out of opening for a mouthful 2b (only being illustrated in Fig. 7 and move into a mouthful 2a)
Mouth width is adjusted to following state：On the basis of by the glass plate 3 among them, rising wood 2aa periphery is configured at
Periphery of the A/F adjustment means 36 than being configured at lower edge 2ab A/F adjustment means 37 further from glass plate 3.
That is, A/F is adjusted to：It is configured at the A/F adjustment means 36 on rising wood 2aa periphery and the upper table of glass plate 3
Distance A1 is more than the A/F adjustment means 37 and glass on the periphery for being configured at lower edge 2ab to each other for upside between the 3b of face
Downside between the lower surface 3a of plate 3 distance A2 to each other.As upside to each other distance A1 length and downside to each other away from
The ratio of length from A2, preferably upside distance A1 to each other length are more than 2 times of downside distance A2 length to each other.
Here, it is configured in legend, by making side of a pair of openings width adjusting component 36,37 respectively along chamber 2
Wall portion 2c is moved up and down, so as to adjust the A/F along above-below direction moved into mouthful 2a and take out of mouthful 2b, but can also
For structure in addition.For example, the moving direction of a pair of openings width adjusting component 36,37 can also be removed from front
Entrance 2a and tilted relative to above-below direction when taking out of mouthful 2b.In addition, it can also such as be configured to, a pair of openings width adjusting
Component 36,37 is being built in moving into mouthful 2a and taking out of mouthful 2b rising wood 2aa (2ba) and lower edge 2ab (2bb) phase respectively
In the state of side of sidewall portion 2c even subregion, A/F is adjusted by prominent mobile and retrogressing movement.
In addition, being configured in legend, rotate ball-screw 40b by operation of the operator to handle 40d, so as to
Make A/F adjustment means 36 (37) mobile, but ball wire can not also be made using power sources such as motors by operator
Thick stick 40b rotates.In addition, being configured in legend, make A/F adjustment means 36 (37) mobile using ball screw framework 40,
But such as it can also be configured to make A/F adjustment means 36 (37) mobile using rack and pinion mechanism etc..
As described above, according to moving into mouthful 2a and taking out of the structure that mouthful 2b A/F is adjusted, then can
Enough enjoy action effect as shown below.
That is, generated because of the draught head inside and outside chamber 2 by moving into a mouthful 2a, taking out of what mouthful 2b flowed into chamber 2
In the case of air-flow 38 or the air-flow 38 flowed out to outside chamber 2, the flowing of processing gas 5 can be avoided as much as because of air-flow
38 and situation about getting muddled.Specifically, by moving into mouthful 2a to adjust based on the draught head inside and outside chamber 2 and taking out of mouth
The respective A/Fs along above-below direction of 2b, it can flow out the air-flow 38 flowed into chamber 2 or to outside chamber 2
The size that flow velocity (flow) control of air-flow 38 impacts for the flowing not to processing gas 5.As a result, can more it fit
Locality performs the etching process to glass plate 3 based on processing gas 5.
The manufacture device 1 of the glass plate of the present invention is adjusted except the structure and a pair of openings width of chamber 2 described above
Outside the structure for saving component 36,37, additionally it is possible to using structure as shown below.It should be noted that in the following description, pin
Pair constitutive requirements shared with the constitutive requirements that have been described above, in middle mark identical label, and the description thereof will be omitted referring to the drawings.
As shown in figure 8, in chamber 2 formed with three ceiling hole 2g, and be attached to for being carried out to each ceiling hole 2g
The lid 2h of the tabular of closure.Lid 2h can integrally block to ceiling hole 2g opening, and can be installed to chamber 2
And unloaded from chamber 2.It should be noted that lid 2h material is polyvinyl chloride.
As shown in figure 9, a pair of openings width adjusting component 36,37 is made up of tabular component respectively, also, with for making
What bolt 36a (37a) ran through is a pair of elongated hole 36b (37b) of strip in the vertical direction.It should be noted that a pair of openings
Width adjusting component 36,37 and bolt 36a (37a) material are polyvinyl chloride.Moreover, bolt 36a (37a) is movably inserted
To elongated hole 36b (37b), and it is fixed on the screwed hole (omitting diagram) in the side of sidewall portion 2c formation of chamber 2.Therefore, regulation is passed through
The relative position relation of bolt 36a (37a) and elongated hole 36b (37b) above-below direction, and using bolt 36a (37a) to a pair
A/F adjustment means 36,37 are fixed on the positioning, thus, it is possible to adjust move into mouthful 2a and take out of mouthful 2b along upper and lower
The A/F in direction.Move into mouthful 2a based on what a pair of openings width adjusting component 36,37 was realized and take out of opening for mouthful 2b
The regulation of mouth width can be by unloading lower cover 2h to be carried out via ceiling hole 2g by operator from chamber 2.
The A/F adjustment means 36 of upside in a pair of openings width adjusting component 36,37 are adjusted to：Even if should
When A/F adjustment means 36 are fallen downwards because of bolt 36a loosenings by deadweight, glass plate 3 is not hindered to move into mouth yet
2a, take out of in mouthful 2b and pass through.Specifically, in the case where A/F adjustment means 36 are located at bottom, i.e. such as Fig. 9 institutes
Show in the case where bolt 36a is located at elongated hole 36b upper end, be also at like that the lower end parts of A/F adjustment means 36 in
Than the relation of the transport path position by the top of glass plate 3.To bolt 36a fixation in a manner of as this position relationship
Position (forming position for being formed at the side of sidewall portion 2c of chamber 2 screwed hole) and elongated hole 36b above-below direction size are adjusted.
Structure more than, after chamber 2 unloads lower cover 2h, operator can be passed through based on the draught head determined
36, the 37 respective positioning relative to above-below direction of a pair of openings width adjusting component is carried out by ceiling hole 2g.Therefore, in the feelings
Under condition, the A/F along above-below direction moved into mouthful 2a and take out of mouthful 2b can be also adjusted.
Description of reference numerals：
The manufacture device of 1 glass plate
3 glass plates
The lower surface of 3a glass plates
The upper surface of 3b glass plates
5 processing gas
6 Etaching devices
10 upper structures
11 lower structures
The lower surface of 13 upper structures
The upper surface of 14 lower structures
15 processing spaces
17 top plates
18 bottom plates
22 main plate bodys
23 auxiliary plate bodys
26 air supply openings
30 exhaust outlets
34 air
35 air.
Claims (7)
1. a kind of manufacture method of glass plate, its make to have the upper surfaces of the lower structures of air supply opening and exhaust outlet with it is upper
The lower surface of structures is arranged opposite and is formed between the opposed upper surface and this two sides of the lower surface
Handle space in, using from the air supply opening spray and to the exhaust outlet suck processing gas come to being removed along horizontal direction
Etching process is implemented in the lower surface of the glass plate of fortune, and the air supply opening is carried with the exhaust outlet in glass plate on direction
Positioned at the position separated,
The manufacture method of the glass plate is characterised by,
In the upper surface of the lower structures, make from the highest order in region of the exhaust outlet untill the air supply opening
Upper surface part higher than the exhaust outlet processing gas flow direction downstream region in highest order upper surface part.
2. the manufacture method of glass plate according to claim 1, it is characterised in that
In the upper surface of the lower structures, make in the region of processing gas flow direction upstream side of the air supply opening
Upper table of the upper surface part of highest order higher than the highest order in the region in the processing gas flow direction downstream of the exhaust outlet
Face.
3. the manufacture method of glass plate according to claim 1 or 2, it is characterised in that
In the upper surface of the lower structures, make from the highest order in region of the exhaust outlet untill the air supply opening
Upper surface part and the air supply opening processing gas flow direction upstream side region in the upper surface part of highest order be same
One height.
4. the manufacture method of glass plate according to claim 1, it is characterised in that
In the upper surface of the lower structures, make from the highest order in region of the exhaust outlet untill the air supply opening
Upper surface part higher than the air supply opening processing gas flow direction upstream side region in highest order upper surface part.
5. the manufacture method of the glass plate according to claim 1 or 4, it is characterised in that
In the upper surface of the lower structures, make in the region in processing gas flow direction downstream of the exhaust outlet
The upper surface of the upper surface part of highest order and the highest order in the region of the processing gas flow direction upstream side of the air supply opening
Portion is sustained height.
6. the manufacture method of glass plate according to any one of claim 1 to 5, it is characterised in that
It is carried out from the upper surface part of the highest order in region of the exhaust outlet untill the air supply opening and just etching process
Glass plate lower surface between above-below direction size of separation be less than upper surface and the upper structure of the glass plate
Above-below direction size of separation between lower surface.
7. a kind of manufacture device of glass plate, its make to have the upper surfaces of the lower structures of air supply opening and exhaust outlet with it is upper
The lower surface of structures is arranged opposite and is formed between the opposed upper surface and this two sides of the lower surface
Handle space in, using from the air supply opening spray and to the exhaust outlet suck processing gas come to being removed along horizontal direction
Etching process is implemented in the lower surface of the glass plate of fortune, and the air supply opening is carried with the exhaust outlet in glass plate on direction
Positioned at the position separated,
The manufacture device of the glass plate is characterised by,
In the upper surface of the lower structures, from the highest order in region of the exhaust outlet untill the air supply opening
Upper surface part of the upper surface part higher than the highest order in the region in the processing gas flow direction downstream of the exhaust outlet.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015-179733 | 2015-09-11 | ||
| JP2015179733A JP6562208B2 (en) | 2015-09-11 | 2015-09-11 | Glass plate manufacturing method and manufacturing apparatus thereof |
| PCT/JP2016/074548 WO2017043307A1 (en) | 2015-09-11 | 2016-08-23 | Method for producing glass plate and device for producing same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107709260A true CN107709260A (en) | 2018-02-16 |
| CN107709260B CN107709260B (en) | 2020-07-31 |
Family
ID=58239606
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201680038286.XA Active CN107709260B (en) | 2015-09-11 | 2016-08-23 | Method and apparatus for manufacturing glass plate |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP6562208B2 (en) |
| KR (1) | KR102497947B1 (en) |
| CN (1) | CN107709260B (en) |
| WO (1) | WO2017043307A1 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6894340B2 (en) * | 2017-09-29 | 2021-06-30 | 積水化学工業株式会社 | Etching device |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101164945A (en) * | 2006-10-17 | 2008-04-23 | 三福化工股份有限公司 | Glass substrate uniform thinning device |
| JP2009129997A (en) * | 2007-11-20 | 2009-06-11 | Sekisui Chem Co Ltd | Surface treatment apparatus |
| JP2009194014A (en) * | 2008-02-12 | 2009-08-27 | Sharp Corp | Process treatment apparatus |
| WO2011105331A1 (en) * | 2010-02-25 | 2011-09-01 | 積水化学工業株式会社 | Etching method and etching apparatus |
| JP2014125414A (en) * | 2012-12-27 | 2014-07-07 | Nippon Electric Glass Co Ltd | Surface treatment apparatus and surface treatment method of tabular glass |
| CN104379526A (en) * | 2012-06-06 | 2015-02-25 | 株式会社Ｎｓｃ | Chemical polishing device |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5181175B2 (en) * | 2007-07-03 | 2013-04-10 | Ｊｆｅフェライト株式会社 | Mn-Zn-Co ferrite |
| JP5436156B2 (en) | 2009-11-16 | 2014-03-05 | 中国電力株式会社 | envelope |
| JP2014012544A (en) * | 2012-07-04 | 2014-01-23 | Kao Corp | Refill pouch |
-
2015
- 2015-09-11 JP JP2015179733A patent/JP6562208B2/en active Active
-
2016
- 2016-08-23 CN CN201680038286.XA patent/CN107709260B/en active Active
- 2016-08-23 WO PCT/JP2016/074548 patent/WO2017043307A1/en active Application Filing
- 2016-08-23 KR KR1020177033053A patent/KR102497947B1/en active IP Right Grant
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101164945A (en) * | 2006-10-17 | 2008-04-23 | 三福化工股份有限公司 | Glass substrate uniform thinning device |
| JP2009129997A (en) * | 2007-11-20 | 2009-06-11 | Sekisui Chem Co Ltd | Surface treatment apparatus |
| JP2009194014A (en) * | 2008-02-12 | 2009-08-27 | Sharp Corp | Process treatment apparatus |
| WO2011105331A1 (en) * | 2010-02-25 | 2011-09-01 | 積水化学工業株式会社 | Etching method and etching apparatus |
| CN104379526A (en) * | 2012-06-06 | 2015-02-25 | 株式会社Ｎｓｃ | Chemical polishing device |
| JP2014125414A (en) * | 2012-12-27 | 2014-07-07 | Nippon Electric Glass Co Ltd | Surface treatment apparatus and surface treatment method of tabular glass |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20180051439A (en) | 2018-05-16 |
| CN107709260B (en) | 2020-07-31 |
| WO2017043307A1 (en) | 2017-03-16 |
| JP2017052680A (en) | 2017-03-16 |
| JP6562208B2 (en) | 2019-08-21 |
| KR102497947B1 (en) | 2023-02-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2008270332A (en) | Part supply device | |
| KR20180128967A (en) | Production method of glass ribbon | |
| CN107709260A (en) | The manufacture method and its manufacture device of glass plate | |
| JP4525514B2 (en) | Bulk feeder and electronic component mounting equipment | |
| CN107683265A (en) | The manufacture method and its manufacture device of glass plate | |
| CN100512980C (en) | Powder coating cabin or substructure therefor | |
| KR102007803B1 (en) | EFEM, Equipment Front End Module | |
| CN107709261A (en) | The manufacture method and its manufacture device of glass plate | |
| BRPI0712295A2 (en) | tank assembly for production of fiber stock products | |
| KR102018271B1 (en) | Etching apparatus for uniform etch condition | |
| KR20150025173A (en) | Exhaust system and substrate processing apparatus having the same | |
| CN207827293U (en) | A kind of arranging-in-row device having a workpiece | |
| CN108190442A (en) | A kind of arranging-in-row device for having a workpiece | |
| JP2008515233A5 (en) | ||
| KR101830082B1 (en) | Rom writer of socket free type and method for assembling the rom writer and apparatus for the rom writher | |
| KR101543574B1 (en) | screw feeding machine using cam-type slide | |
| CN107635941A (en) | The manufacture method of glass substrate | |
| JP3183651U (en) | Full flat circuit board processing and transportation equipment | |
| KR101592192B1 (en) | Device for air curtain | |
| CN110553496A (en) | Air knife module assembly and substrate drying device using same | |
| JP4488965B2 (en) | Substrate processing equipment | |
| JP2012199487A (en) | Surface processing nozzle device | |
| TWI557051B (en) | Feeding device | |
| KR100511171B1 (en) | Apparatus for Treating Flat Pannel Display | |
| TWI258813B (en) | Adjustable air knife and process apparatus |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |