CN106685263B - Bandwidth adjustable n×3 lattice vibration energy harvester based on mode separation technology - Google Patents
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Abstract
本发明涉及一种微能源技术领域的环境能量采集器件,具体是一种基于模态分离技术的带宽可调n×3点阵式振动能量采集器。一种基于模态分离技术的带宽可调n×3点阵式振动能量采集器,包括柔性框架主梁结构、压电悬臂梁和质量块;柔性框架主梁结构为矩形,矩形上面沿该轴线方向顺次开有n‑1个大小相等间距相同的中空矩形孔,共形成n排柔性主梁,其中n≥2;每个柔性主梁上均粘贴固定有数量相同的多个压电悬臂梁;在每个压电悬臂梁的悬浮端均粘附有一个质量块。本发明通过增加或者减少压电悬臂梁的排数n,同时改变压电悬臂梁和质量块尺寸大小,可适时调节系统的有效频带宽度,提高能量采集器输出的连续性和稳定性,增强振动能量采集器的环境适应能力。
The invention relates to an environmental energy collection device in the technical field of micro-energy, in particular to a bandwidth-adjustable n×3 lattice vibration energy collector based on modal separation technology. A bandwidth-adjustable n×3 lattice vibration energy harvester based on modal separation technology, including a flexible frame main beam structure, a piezoelectric cantilever beam and a mass block; the flexible frame main beam structure is a rectangle, and the upper surface of the rectangle is along the axis There are n-1 hollow rectangular holes of equal size and the same spacing in sequence in the direction, forming n rows of flexible main beams, where n≥2; each flexible main beam is pasted and fixed with the same number of piezoelectric cantilever beams; A mass is attached to the floating end of each piezoelectric cantilever beam. By increasing or decreasing the row number n of the piezoelectric cantilever beam, and simultaneously changing the size of the piezoelectric cantilever beam and the mass block, the invention can timely adjust the effective frequency bandwidth of the system, improve the continuity and stability of the output of the energy harvester, and enhance the vibration. Environmental adaptability of energy harvesters.
Description
技术领域technical field
本发明涉及一种微能源技术领域的环境能量采集器件,具体是一种基于模态分离技术的带宽可调n×3点阵式振动能量采集器。The invention relates to an environmental energy collection device in the technical field of micro-energy, in particular to an n×3 lattice vibration energy collector with adjustable bandwidth based on modal separation technology.
背景技术Background technique
随着无线移动传感技术在野外环境、工况监测和随身医疗电子系统等方面的广泛应用与迅猛发展,如何为这些应用于特殊领域中的电子器件供电成为进一步推进其应用的关键问题。摆脱化学电池体积大、寿命短,有线电源架接困难等传统能量供给方法的束缚,采集传感器周边环境中的能量直接为系统供电已成为无线移动传感技术应用领域的研究热点。With the wide application and rapid development of wireless mobile sensing technology in field environment, working condition monitoring and portable medical electronic systems, how to supply power to these electronic devices used in special fields has become a key issue to further promote their applications. To get rid of the constraints of traditional energy supply methods such as large size, short lifespan of chemical batteries, and difficulty in connecting wired power sources, collecting energy from the surrounding environment of the sensor to directly supply power to the system has become a research hotspot in the application field of wireless mobile sensing technology.
振动能广泛存在于交通运输(汽车、飞机等运输工具和轨道),工矿设备(大型煤机、数控机床),工程建筑(桥梁、楼宇)以及生物体活动等应用环境。与太阳能、风能等环境能量形式相比,振动能对上述应用环境中的可移动便携式无线传感器具有明显的供电优势。然而,传统振动能量采集器频带窄、能量转化效率低、输出功率小,目前尚不能满足无线移动传感器件的供电需求。如何提高能量采集器的输出功率,拓宽采集频带并使之与环境振动频率相匹配是振动能量采集领域亟待解决的关键问题。Vibration can widely exist in transportation (cars, aircraft and other means of transport and rails), industrial and mining equipment (large coal machines, CNC machine tools), engineering construction (bridges, buildings) and biological activities and other application environments. Compared with environmental energy forms such as solar energy and wind energy, vibration energy has obvious power supply advantages for mobile portable wireless sensors in the above application environments. However, the traditional vibration energy harvester has narrow frequency band, low energy conversion efficiency and low output power, and currently cannot meet the power supply requirements of wireless mobile sensor devices. How to improve the output power of the energy harvester, widen the collection frequency band and make it match the vibration frequency of the environment is the key problem to be solved urgently in the field of vibration energy harvesting.
公告号为CN 103346696 A的中国专利设计了一种阵列式压电与电磁复合的能量采集器,通过阵列式结构拓宽能量采集频率宽度,提高能量转化效率,但是压电与电磁结合的方式使得拾振结构复杂,不易于调试和加工。公告号为CN 103023378 A的中国专利提出了一种宽频带多方向振动能量采集器,通过6个T型结构悬臂梁在多个方向的能量采集来拓宽频带,但是此装置体积较大,结构复杂,不易实现。公告号为CN 102931340 A的中国专利设计了一种宽频带微型压电振动能量收集器,利用多组不同的悬臂梁阵列来实现较宽的频带输出,但其微加工工艺复杂,制作成本较高。Xue 等人于2008年提出了多个双压电晶片串联和并联的能量采集结构,利用每个双压电晶片的不同厚度而得到不同的一阶共振频率,从而使得所有一阶共振频率非常靠近来增加采集器的频带宽度。这种方法明显拓宽了工作频带,但是其工作频率范围(90-110 Hz)仍然高于一些环境中振动源的频率(桥梁:7-10Hz,楼宇:15-20 Hz,旋转机械:43-50 Hz,动物活动:1-45 Hz)。基于此,一种低频、宽频带,高能量转化效率,高功率稳定输出,易于加工的振动能量采集器设计显得尤为重要。The Chinese patent with Announcement No. CN 103346696 A designs an array-type piezoelectric and electromagnetic composite energy harvester. The array structure widens the energy harvesting frequency width and improves the energy conversion efficiency, but the combination of piezoelectric and electromagnetic makes the The vibration structure is complex, and it is not easy to debug and process. The Chinese patent with the announcement number of CN 103023378 A proposes a broadband multi-directional vibration energy harvester, which broadens the frequency band through energy harvesting of 6 T-shaped cantilever beams in multiple directions, but this device is relatively bulky and complex in structure. , is not easy to achieve. The Chinese patent with Announcement No. CN 102931340 A designs a broadband miniature piezoelectric vibration energy harvester, which utilizes multiple sets of different cantilever beam arrays to achieve a wider frequency band output, but the micromachining process is complicated and the manufacturing cost is high . In 2008, Xue et al. proposed an energy harvesting structure with multiple piezoelectric bimorphs in series and in parallel, using different thicknesses of each bimorph to obtain different first-order resonance frequencies, so that all first-order resonance frequencies are very close to each other. to increase the bandwidth of the collector. This method significantly broadens the operating frequency band, but its operating frequency range (90-110 Hz) is still higher than the frequency of vibration sources in some environments (bridges: 7-10 Hz, buildings: 15-20 Hz, rotating machinery: 43-50 Hz) Hz, animal activity: 1-45 Hz). Based on this, the design of a vibration energy harvester with low frequency, wide frequency band, high energy conversion efficiency, high power and stable output, and easy processing is particularly important.
发明内容SUMMARY OF THE INVENTION
为解决现有能量采集器工作频带窄,能量转化效率低,输出功率小等问题,本发明提出一种基于模态分离技术的带宽可调n×3点阵式振动能量采集器拾振结构,该结构不仅能调节和拓宽采集器的频带范围,而且采用点阵式结构设计,可有效提高能量转换效率和输出功率。In order to solve the problems of narrow working frequency band, low energy conversion efficiency and low output power of the existing energy harvester, the present invention proposes a bandwidth-adjustable n×3 lattice vibration energy harvester vibration pickup structure based on modal separation technology, The structure can not only adjust and widen the frequency band range of the collector, but also adopts a lattice structure design, which can effectively improve the energy conversion efficiency and output power.
本发明所采用的技术方案是:一种基于模态分离技术的带宽可调n×3点阵式振动能量采集器,包括柔性框架主梁结构、压电悬臂梁和质量块;柔性框架主梁结构为矩形,选定矩形的一条中心线作为轴线,矩形上面沿该轴线方向顺次开有n-1个大小相等间距相同的中空矩形孔,所有中空矩形孔沿轴线方向两侧的实体部分作为柔性主梁,共形成n排柔性主梁,其中n≥2;每个柔性主梁上均粘贴固定有数量相同的多个压电悬臂梁;所有压电悬臂梁的朝向相同且均与轴线方向平行;所有压电悬臂梁的一端粘贴固定在柔性主梁的上表面,位于一个最边缘柔性主梁上的压电悬臂梁的另一端悬浮在该最边缘柔性主梁的外侧,其余压电悬臂梁的另一端均悬浮在邻近的矩形孔之上;同一个柔性主梁上的多个压电悬臂梁等间距排列;在每个压电悬臂梁的悬浮端均粘附有一个质量块。(图1)。The technical scheme adopted in the present invention is: a bandwidth-adjustable n×3 lattice vibration energy harvester based on modal separation technology, comprising a flexible frame main beam structure, a piezoelectric cantilever beam and a mass block; the flexible frame main beam The structure is a rectangle, a center line of the rectangle is selected as the axis, and n-1 hollow rectangular holes of equal size and the same spacing are opened on the rectangle in sequence along the axis direction, and the solid parts of all hollow rectangular holes along the axis direction are used as Flexible main beams, forming n rows of flexible main beams, where n≥2; multiple piezoelectric cantilever beams of the same number are pasted and fixed on each flexible main beam; all piezoelectric cantilever beams have the same orientation and are parallel to the axis direction; One end of all piezoelectric cantilever beams is pasted and fixed on the upper surface of the flexible main beam, the other end of the piezoelectric cantilever beam located on the most edge flexible main beam is suspended on the outside of the most edge flexible main beam, and the rest of the piezoelectric cantilever beams are The other ends are suspended on the adjacent rectangular holes; a plurality of piezoelectric cantilever beams on the same flexible main beam are arranged at equal intervals; a mass block is adhered to the suspended end of each piezoelectric cantilever beam. (figure 1).
所述的n×3点阵式振动能量采集器拾振结构,包括柔性框架主梁结构,压电悬臂梁和质量块。所述柔性框架主梁结构采用低杨氏模量的高弹性分子材料,本发明优选聚二甲基硅氧烷(PDMS)。所述的压电悬臂梁包括基板和压电层,其中压电层为压电陶瓷薄膜,与基板一端之间通过导电银胶粘合,质量块粘附在基板的悬浮端。基板选用弹性模量小且强度大,能承受较大形变的材料,本发明优选铜片基板。压电层选用压电性强,压电常数高的压电材料,本发明优选PZT。质量块选用密度大,廉价,易加工的金属材料,本发明优选铁块。The vibration pickup structure of the n×3 lattice vibration energy harvester includes a flexible frame main beam structure, a piezoelectric cantilever beam and a mass block. The main beam structure of the flexible frame adopts a high elastic molecular material with low Young's modulus, preferably polydimethylsiloxane (PDMS) in the present invention. The piezoelectric cantilever beam includes a substrate and a piezoelectric layer, wherein the piezoelectric layer is a piezoelectric ceramic film, which is bonded with one end of the substrate by conductive silver glue, and the mass block is adhered to the floating end of the substrate. The substrate is selected from a material with a small elastic modulus and high strength, which can withstand large deformation, and a copper sheet substrate is preferred in the present invention. The piezoelectric layer is made of piezoelectric material with strong piezoelectricity and high piezoelectric constant, and PZT is preferred in the present invention. The mass block is made of metal material with high density, low cost and easy processing, and iron block is preferred in the present invention.
本发明的工作原理为:柔性框架主梁结构两端固定(沿轴线方向的两端固定),当把本发明放置于实际环境振动体系中时,在外界的激励下,柔性框架主梁结构的固定端振动并带动整个柔性框架主梁结构振动,从而使粘贴在柔性框架主梁结构表面上的压电悬臂梁一起振动,压电悬臂梁通过在振动中发生形变将机械振动能转化为电能。通过n排柔性主梁的设计,调节每排柔性主梁上压电悬臂梁和质量块尺寸来改变柔性主梁的有效质量,实现不同柔性主梁间的振动模态分离,进而达到拓宽低频频带的效果。所有压电悬臂梁采用串联结构实现连接。The working principle of the present invention is as follows: both ends of the main beam structure of the flexible frame are fixed (both ends along the axis direction are fixed). When the present invention is placed in an actual environmental vibration system, under the excitation of the outside world, the main beam structure of the flexible frame is The fixed end vibrates and drives the entire main beam structure of the flexible frame to vibrate, so that the piezoelectric cantilever beam pasted on the surface of the main beam structure of the flexible frame vibrates together, and the piezoelectric cantilever beam transforms the mechanical vibration energy into electrical energy by deforming in the vibration. Through the design of n rows of flexible main beams, the size of the piezoelectric cantilever beam and the mass block on each row of flexible main beams is adjusted to change the effective mass of the flexible main beams, to realize the separation of vibration modes between different flexible main beams, and to widen the low frequency frequency band. Effect. All piezoelectric cantilevers are connected in series.
与现有技术相比,本发明具有以下有益效果:Compared with the prior art, the present invention has the following beneficial effects:
采用柔性框架结构作为主梁。柔性材料的杨氏模量小、结构弹性高。采用柔性框架结构更容易感受外界环境的振动,并将振动能传递给压电悬臂梁,从而降低每排压电悬臂梁的振动模态,可以在50 Hz以下的低频范围内实现宽频带振动能量采集。A flexible frame structure is used as the main beam. Flexible materials have small Young's modulus and high structural elasticity. The flexible frame structure is easier to feel the vibration of the external environment, and the vibration energy is transmitted to the piezoelectric cantilever beam, thereby reducing the vibration mode of each row of piezoelectric cantilever beams, and can realize broadband vibration energy in the low frequency range below 50 Hz collection.
采用n×3点阵式压电悬臂梁结构。通过调节每排柔性主梁上的压电悬臂梁和质量块尺寸,改变不同柔性主梁的有效质量,实现不同柔性主梁间的振动模态分离,进而达到拓宽低频频带的效果。Adopt n×3 lattice piezoelectric cantilever beam structure. By adjusting the size of the piezoelectric cantilever beam and the mass block on each row of flexible main beams, the effective mass of different flexible main beams is changed, the vibration mode separation between different flexible main beams is realized, and the effect of broadening the low frequency frequency band is achieved.
随着n×3点阵式压电悬臂梁结构中排数n的增大,能量采集器的振动模态增加,可利用的有效频带得到拓宽。随着排数n增大,能量采集器中压电悬臂梁的数量增加,输出电压增大,同时提高了系统的输出功率。With the increase of the number of rows n in the n×3 lattice piezoelectric cantilever beam structure, the vibration mode of the energy harvester increases, and the available effective frequency band is broadened. As the number of rows n increases, the number of piezoelectric cantilevers in the energy harvester increases, the output voltage increases, and the output power of the system increases.
通过增加或者减少压电悬臂梁的排数n,同时改变压电悬臂梁和质量块尺寸大小,可适时调节系统的有效频带宽度,提高能量采集器输出的连续性和稳定性,进而增强振动能量采集器的环境适应能力。By increasing or decreasing the row number n of the piezoelectric cantilever beam, and changing the size of the piezoelectric cantilever beam and the mass block at the same time, the effective frequency bandwidth of the system can be adjusted in time, the continuity and stability of the output of the energy harvester can be improved, and the vibration energy can be enhanced. The environmental adaptability of the collector.
附图说明Description of drawings
图1为本发明的整体结构示意图(a-柔性框架主梁结构,b-压电悬臂梁,c-质量块)。Figure 1 is a schematic diagram of the overall structure of the present invention (a- flexible frame main beam structure, b- piezoelectric cantilever beam, c-mass block).
图2为压电悬臂梁的结构示意图(c-质量块,d-基板,e-压电层)。Figure 2 is a schematic structural diagram of a piezoelectric cantilever (c-mass, d-substrate, e-piezoelectric layer).
图3为实施例1所发明的2×3点阵拾振结构的输出频率响应特性曲线。FIG. 3 is an output frequency response characteristic curve of the 2×3 lattice vibration pickup structure invented in Embodiment 1. FIG.
图4为实施例2所发明的3×3点阵拾振结构的输出频率响应特性曲线。FIG. 4 is an output frequency response characteristic curve of the 3×3 lattice vibration pickup structure invented in the second embodiment.
图5为实施例3所发明的5×3点阵拾振结构的输出频率响应特性曲线。FIG. 5 is an output frequency response characteristic curve of the 5×3 lattice vibration pickup structure invented in Embodiment 3. FIG.
具体实施方式Detailed ways
以下结合具体实施例子对本发明作进一步清楚、完整的说明。The present invention will be further clearly and completely described below with reference to specific embodiments.
实施例1Example 1
本发明包括柔性框架主梁结构a,压电悬臂梁b和质量块c,柔性框架主梁结构a为矩形框状结构,中心开有一个中空的矩形孔;压电悬臂梁b的一端粘贴固定在柔性框架主梁结构a的上表面,另一端悬空,压电悬臂梁b悬空的长度小于矩形孔的宽度,质量块c粘附在压电悬臂梁b的悬浮端;六个压电悬臂梁b(n=2)分别在矩形孔两侧沿同一方向等间距排列。The present invention includes a flexible frame main beam structure a, a piezoelectric cantilever beam b and a mass c. The flexible frame main beam structure a is a rectangular frame-like structure with a hollow rectangular hole in the center; one end of the piezoelectric cantilever beam b is pasted and fixed On the upper surface of the main beam structure a of the flexible frame, the other end is suspended, the suspended length of the piezoelectric cantilever beam b is less than the width of the rectangular hole, and the mass c is attached to the suspended end of the piezoelectric cantilever beam b; six piezoelectric cantilever beams b (n=2) are arranged at equal intervals along the same direction on both sides of the rectangular hole.
柔性框架主梁结构a选用PDMS材料,与压电悬臂梁b平行的框体两边的外侧面固定。The main beam structure a of the flexible frame is made of PDMS material, and the outer sides of the two sides of the frame parallel to the piezoelectric cantilever beam b are fixed.
压电悬臂梁b包括基板d和压电层e,压电层e使用导电银胶粘贴在基板d的后端表面,质量块c用AB胶粘贴在基板d的前端。其中:基板d采用铜片材料,压电层e采用PZT-5H材料。如图3所示,基板d的宽度和压电层e的宽度相等,但基板d的长度大于压电层e的长度,在实施过程中,让压电层e与基板d一端对齐后,用导电银胶粘贴固定。本实施实例中所示的六个压电悬臂梁尺寸和质量块尺寸完全相同,在矩形孔两侧朝右呈两排分布,并沿中空矩形的长边方向等间距平行排列;第1排的3个基板d一侧与柔性框架主梁结构a的左端对齐排列,第2排的3个基板d一侧与柔性框架主梁结构a上中空矩形的右侧长边对齐排列,然后用AB胶将压电悬臂梁b的基板d粘贴固定在柔性框架主梁结构a的上表面,另一端悬空;六个压电悬臂梁b的连接方式为串联连接。The piezoelectric cantilever beam b includes a substrate d and a piezoelectric layer e. The piezoelectric layer e is pasted on the rear surface of the substrate d with conductive silver glue, and the mass c is pasted on the front end of the substrate d with AB glue. Among them: the substrate d is made of copper sheet material, and the piezoelectric layer e is made of PZT-5H material. As shown in Figure 3, the width of the substrate d is equal to the width of the piezoelectric layer e, but the length of the substrate d is greater than the length of the piezoelectric layer e. The conductive silver glue is pasted and fixed. The size of the six piezoelectric cantilever beams shown in this example is exactly the same as that of the mass block. They are distributed in two rows to the right on both sides of the rectangular hole, and are arranged in parallel at equal intervals along the long side of the hollow rectangle; One side of the 3 substrates d is aligned with the left end of the main beam structure a of the flexible frame, and the side of the three substrates d in the second row is aligned with the long side of the right side of the hollow rectangle on the main beam structure a of the flexible frame, and then use AB glue The substrate d of the piezoelectric cantilever beam b is pasted and fixed on the upper surface of the main beam structure a of the flexible frame, and the other end is suspended; the connection mode of the six piezoelectric cantilever beams b is series connection.
质量块c采用铁质材料。质量块c用AB胶粘贴固定在基板d的前端,与基板d前端边界对齐,且与压电层e不接触;质量块c与压电悬臂梁b的宽度相同。其输出的频率响应特性曲线如图3所示。The mass c is made of iron. The mass block c is pasted and fixed on the front end of the substrate d with AB glue, aligned with the front end of the substrate d, and not in contact with the piezoelectric layer e; the mass block c has the same width as the piezoelectric cantilever beam b. The frequency response characteristic curve of its output is shown in Fig. 3.
实施例2Example 2
本发明包括柔性框架主梁结构a,压电悬臂梁b和质量块c,柔性框架主梁结构a为矩形框状结构,矩形结构上开有两个中空的矩形孔;压电悬臂梁b的一端粘贴固定在柔性框架主梁结构a的上表面,另一端悬空,压电悬臂梁b悬空的长度小于矩形孔的宽度,质量块c粘附在压电悬臂梁b的悬浮端;九个压电悬臂梁b(n=3)分别在两个矩形孔两侧沿同一方向等间距排列。The invention includes a flexible frame main beam structure a, a piezoelectric cantilever beam b and a mass block c. The flexible frame main beam structure a is a rectangular frame-like structure, and the rectangular structure is provided with two hollow rectangular holes; One end is pasted and fixed on the upper surface of the main beam structure a of the flexible frame, the other end is suspended, the suspended length of the piezoelectric cantilever beam b is less than the width of the rectangular hole, and the mass c is adhered to the suspended end of the piezoelectric cantilever beam b; The electric cantilever beams b (n=3) are arranged at equal intervals along the same direction on both sides of the two rectangular holes.
柔性框架主梁结构a选用PDMS材料,与压电悬臂梁b平行的框体两边的外侧面固定。The main beam structure a of the flexible frame is made of PDMS material, and the outer sides of the two sides of the frame parallel to the piezoelectric cantilever beam b are fixed.
压电悬臂梁b包括基板d和压电层e,压电层e使用导电银胶粘贴在基板d的后端表面,质量块c用AB胶粘贴在基板d的前端表面。其中:基板d采用铜片材料,压电层e采用PZT-5H材料。基板d的宽度和与其粘贴的压电层e的宽度相等,但基板d的长度大于压电层e的长度,在实施过程中,让压电层e与基板d一端对齐后,用导电银胶粘贴固定。本实施实例中的九个压电悬臂梁尺寸和质量块尺寸不完全相同(第1排和第3排压电悬臂梁b的尺寸和质量块尺寸完全相同,与第2排的尺寸不同),分别在两个中空矩形孔两侧沿同一个方向呈三排分布,并沿中空矩形的长边方向等间距平行排列;第1排的3个基板d一侧与柔性框架主梁结构a的左端对齐排列,第2排的3个基板d和第3排的3个基板d的一侧分别与柔性框架主梁结构a上两个中空矩形的右侧长边对齐排列,然后用AB胶将压电悬臂梁b的基板d粘贴固定在柔性框架主梁结构a的上表面,另一端悬空;九个压电悬臂梁b的连接方式为串联连接。The piezoelectric cantilever beam b includes a substrate d and a piezoelectric layer e. The piezoelectric layer e is pasted on the rear end surface of the substrate d with conductive silver glue, and the mass c is pasted on the front end surface of the substrate d with AB glue. Among them: the substrate d is made of copper sheet material, and the piezoelectric layer e is made of PZT-5H material. The width of the substrate d is equal to the width of the piezoelectric layer e attached to it, but the length of the substrate d is greater than the length of the piezoelectric layer e. Paste fixed. The dimensions of the nine piezoelectric cantilever beams and the size of the mass block in this embodiment are not exactly the same (the size of the piezoelectric cantilever beam b in the first row and the third row and the size of the mass block are exactly the same, and they are different from the size of the second row), They are distributed in three rows along the same direction on both sides of the two hollow rectangular holes, and are arranged in parallel at equal intervals along the longitudinal direction of the hollow rectangle; the three substrates d side of the first row and the left end of the flexible frame main beam structure a Aligned, one side of the 3 substrates d in the second row and the 3 substrates d in the third row are aligned with the right long sides of the two hollow rectangles on the main beam structure of the flexible frame The substrate d of the electric cantilever beam b is pasted and fixed on the upper surface of the main beam structure a of the flexible frame, and the other end is suspended; the connection mode of the nine piezoelectric cantilever beams b is series connection.
质量块c采用铁质材料。质量块c用AB胶粘贴固定在基板d的前端,与基板d前端边界对齐,且与压电层e不接触;质量块c的宽度和与其粘贴的压电悬臂梁b的宽度相同。其输出的频率响应特性曲线如图4所示。The mass c is made of iron. The mass block c is pasted and fixed on the front end of the substrate d with AB glue, which is aligned with the front end of the substrate d and does not contact the piezoelectric layer e; the width of the mass block c is the same as the width of the piezoelectric cantilever beam b attached to it. The frequency response characteristic curve of its output is shown in Fig. 4.
实施例3Example 3
本发明包括柔性框架主梁结构a,压电悬臂梁b和质量块c,柔性框架主梁结构a为矩形框状结构,矩形结构上开有四个中空的矩形孔;压电悬臂梁b的一端粘贴固定在柔性框架主梁结构a的上表面,另一端悬空,压电悬臂梁b悬空的长度小于矩形孔的宽度,质量块c粘附在压电悬臂梁b的悬浮端;十五个压电悬臂梁b(n=5)分别在四个矩形孔两侧沿同一方向等间距排列。The present invention includes a flexible frame main beam structure a, a piezoelectric cantilever beam b and a mass block c, the flexible frame main beam structure a is a rectangular frame-like structure, and the rectangular structure is provided with four hollow rectangular holes; One end is pasted and fixed on the upper surface of the main beam structure a of the flexible frame, the other end is suspended, the suspended length of the piezoelectric cantilever beam b is less than the width of the rectangular hole, and the mass c is adhered to the suspended end of the piezoelectric cantilever beam b; fifteen Piezoelectric cantilever beams b (n=5) are arranged at equal intervals along the same direction on both sides of the four rectangular holes.
柔性框架主梁结构a选用PDMS材料,与压电悬臂梁b平行的框体两边的外侧面固定。The main beam structure a of the flexible frame is made of PDMS material, and the outer sides of the two sides of the frame parallel to the piezoelectric cantilever beam b are fixed.
压电悬臂梁b包括基板d和压电层e,压电层e使用导电银胶粘贴在基板d的后端表面,质量块c用AB胶粘贴在基板d的前端表面。其中:基板d采用铜片材料,压电层e采用PZT-5H材料。基板d的宽度和与其粘贴的压电层e的宽度相等,但基板d的长度大于压电层e的长度,在实施过程中,让压电层e与基板d一端对齐后,用导电银胶粘贴固定。本实施实例中的十五个压电悬臂梁尺寸和质量块尺寸不完全相同(其中不同排压电悬臂梁的尺寸和质量块尺寸不完全相同,每一排的3个压电悬臂梁的尺寸和质量块尺寸完全相同),分别在四个中空矩形孔两侧朝右呈五排分布,并沿中空矩形的长边方向等间距平行排列;第1排的3个基板d一侧与柔性框架主梁结构a的左端对齐排列,其余每排(第2、3、4和5排)的3个基板d一侧分别与柔性框架主梁结构a上四个中空矩形的右侧长边对齐排列,然后用AB胶将压电悬臂梁b的基板d粘贴固定在柔性框架主梁结构a的上表面,另一端悬空;十五个压电悬臂梁b的连接方式为串联连接。The piezoelectric cantilever beam b includes a substrate d and a piezoelectric layer e. The piezoelectric layer e is pasted on the rear end surface of the substrate d with conductive silver glue, and the mass c is pasted on the front end surface of the substrate d with AB glue. Among them: the substrate d is made of copper sheet material, and the piezoelectric layer e is made of PZT-5H material. The width of the substrate d is equal to the width of the piezoelectric layer e attached to it, but the length of the substrate d is greater than the length of the piezoelectric layer e. Paste fixed. The dimensions of the fifteen piezoelectric cantilever beams and the mass blocks in this embodiment are not exactly the same (wherein the dimensions of the piezoelectric cantilever beams in different rows and the dimensions of the mass blocks are not exactly the same, and the dimensions of the three piezoelectric cantilever beams in each row are not exactly the same. The same size as the mass block), distributed in five rows to the right on both sides of the four hollow rectangular holes, and arranged in parallel at equal intervals along the long side of the hollow rectangle; the three substrates d side of the first row are connected to the flexible frame The left ends of the main beam structure a are aligned, and the sides of the three substrates d in each of the remaining rows (the 2nd, 3rd, 4th and 5th rows) are respectively aligned with the right long sides of the four hollow rectangles on the main beam structure a of the flexible frame. , and then use AB glue to stick and fix the substrate d of the piezoelectric cantilever beam b on the upper surface of the main beam structure a of the flexible frame, and the other end is suspended; the connection mode of the fifteen piezoelectric cantilever beams b is series connection.
质量块c采用铁质材料。质量块c用AB胶粘贴固定在基板d的前端,与基板d前端边界对齐,且与压电层e不接触;质量块c的宽度和与其粘贴的压电悬臂梁b的宽度相同。其输出的频率响应特性曲线如图5所示。The mass c is made of iron. The mass block c is pasted and fixed on the front end of the substrate d with AB glue, which is aligned with the front end of the substrate d and does not contact the piezoelectric layer e; the width of the mass block c is the same as the width of the piezoelectric cantilever beam b attached to it. The frequency response characteristic curve of its output is shown in Fig. 5.
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