CN106568521A - Vacuum-packaged ceramic-armored high temperature thermocouple and manufacturing method thereof - Google Patents
Vacuum-packaged ceramic-armored high temperature thermocouple and manufacturing method thereof Download PDFInfo
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- CN106568521A CN106568521A CN201610971657.1A CN201610971657A CN106568521A CN 106568521 A CN106568521 A CN 106568521A CN 201610971657 A CN201610971657 A CN 201610971657A CN 106568521 A CN106568521 A CN 106568521A
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- thermocouple
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- sleeve pipe
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/02—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples
- G01K7/04—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples the object to be measured not forming one of the thermoelectric materials
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
- G01K1/08—Protective devices, e.g. casings
- G01K1/12—Protective devices, e.g. casings for preventing damage due to heat overloading
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Abstract
The invention discloses a vacuum-packaged ceramic-armored high temperature thermocouple and a manufacturing method thereof. The thermocouple is composed of a conjunction box, a cover casing, terminals, a protection sleeve tube, a sealing strip, an insulation layer, a lead, a thermocouple wire and insulators. The protection sleeve tube is made of alumina based high temperature ceramic, the ceramic body is internally provided with a carbon fiber basket, and one surface, facing the internal of the protection sleeve tube, of the carbon fiber basket extends out of the insulation layer on the inner surface of the protection sleeve tube. The thermocouple is also provided with heat conducting block which is made of a silicon carbide based ceramic material, the working end of the heat conducting block is connected with the extending end of the carbon fiber basket, and the center of the opening end is connected with the lead. The sealing strip is made of a high temperature adhesive HN-767A. An enclosed space formed by the protection sleeve tube, the high temperature adhesive and the conjunction box is a vacuum environment of 1 Pa-10 Pa. The thermocouple wire is a nickel-chromium-silicon-nickel-silicon thermocouple wire. The thermocouple can replace the expensive platinum rhodium thermocouple, and is good in economy, high in reliability and long in service life.
Description
Technical field
The present invention relates to temperature sensor field, more particularly to a kind of Vacuum Package ceramic armor pyrometer couple and its system
Make method.
Background technology
For the Thermal-resistance tool Heat-Treatment of Steel such as heat resisting steel and high-speed steel (treatment temperature typically 1100 DEG C -1350 DEG C it
Between) when, it is only capable of at present using platinum rhodium thermocouple (B idols, S occasionally R idols) as heat treatment thermometric idol, according to American army mark AMS
The requirement of 2750 E, needs altogether three thermocouples even as normalization, it is well known that platinum rhodium thermocouple price during high-temperature heat treatment
Expensive (armouring platinum rhodium single of wholesale price of idol is minimum 1500 yuan, also only the S idols of rhodium-containing 10%), therefore be further increased
Financial cost.More it is to be noted that in fact domestic platinum rhodium thermocouple routine is typically only capable of reaching 1200 DEG C using temperature, length
Shi Chaowen will be substantially reduced using its service life and performance；And it is typically used as the even nickel chromium triangle silicon-nisiloys of N, although cheap,
Durable, reliability is high, and theory is high using temperature, but its at high temperature the characteristic of oxidizable failure be allowed to cannot be in conventional high temperature heat
Used in process, less than 1100 DEG C thermometrics are typically only used for.
In the Patents applied at home, also not by nickel chromium triangle silicon-nisiloy thermo wires for pyrometric patent money
Material, in close patent document, patent《A kind of pyrometer couple》(application number：201610136518.7, publication date：2016-07-
20) a kind of structure of the pyrometer couple for being all ceramic protective sleeve pipe, is disclosed, but wherein there are 2 problems：1. platinum is still adopted
Rhodium thermocouple, economy is bad；2. its protection outer tube adopts silicon carbide ceramics, although silicon carbide ceramics thermal conductivity very well, only its
Fragility is high, the characteristic that the difficult porosity of shaping is big makes its fragile, poor reliability when as protection sleeve pipe, while tending to have small
Grain is invaded, damages its internal platinum rhodium precious metal structure, and service life is short.
The content of the invention
To solve drawbacks described above present in prior art, the present invention is intended to provide a kind of alternative expensive platinum rhodium thermocouple
Good economy performance, reliability high, the Vacuum Package ceramic armor pyrometer couple of long service life and its manufacture method.
To achieve these goals, the present invention is employed the following technical solutions：A kind of Vacuum Package ceramic armor high temperature thermoelectric
It is even, by terminal box, the case that is fixed on terminal box edge, the binding post being fixed in terminal box, protection sleeve pipe, it is arranged on protection
Band between sleeve pipe and terminal box, the insulating barrier for being fixed on protection internal surface of casing, lead, respectively with lead and binding post
The thermocouple thermo wires of connection, insulator that is interspersed and being fixed on thermocouple thermo wires are constituted, wherein：The protection sleeve pipe adopts oxygen
Change aluminium base refractory ceramics to make, its ceramics is integrated with vivo carbon fiber basket, one side of the carbon fiber basket to protection inside pipe casing
Beyond the insulating barrier of protection internal surface of casing；Heat-conducting block is additionally provided with protection sleeve pipe inner termination, the heat-conducting block adopts carborundum
Base ceramic material makes, and its working end is connected with carbon fiber basket beyond end, and the center of openend is connected with lead；The sealing
Band is manufactured using high-temp glue HN-767A, and the high-temp glue is filled up completely with the gap between terminal box and protection sleeve pipe；Protective case
The confined space that pipe, high-temp glue and terminal box are constituted is the vacuum environment of 1Pa～10Pa；Thermocouple thermo wires is that routine N is occasionally adopted
Nicrosil nisil thermocouple thermo wires.
The manufacture method of above-mentioned Vacuum Package ceramic armor pyrometer couple, comprises the following steps：
1) preparation of raw material, equipment and frock
1. raw material：Prepare it is enough containing mass fraction for 8%-10%PVA adhesives alumina-based ceramic powder, enough
The nickel chromium triangle silicon that carbon fiber, routinely technology are interted and are fixed with insulator and connected both positive and negative polarity thermo wires by intermediate connection point-
Nickel-Silicom thermocouple thermo wires, it is enough containing mass fraction for 8%-10%PVA adhesives types of silicon carbide-based ceramics powder, be mounted with case
And terminal box, high-temp glue HN-767A of binding post；
2. equipment and frock：Prepare vacuum ceramic sintering furnace；Ceramic post sintering mould；Vacuum packaging equipment；Baking oven；
2) including the thermometric end shaping structures of protection sleeve pipe, carbon fiber basket and heat-conducting block
1. ready alumina-based ceramic powder is fitted in ceramic post sintering mould, until by ceramic post sintering mold bottom
Filling is full；
2. carbon fiber is woven into into basket, and the embedment of basket bottom is loaded with into the ceramic post sintering of alumina-based ceramic powder
In mold bottom, length of embedment is the 2/3-3/4 of alumina-based ceramic powder thickness, then employing will by alumina-based ceramic powder
The filling of ceramic post sintering mould is full and is compacted；
3. it is sintered in vacuum ceramic sintering furnace, 1700 DEG C -1750 DEG C of sintering temperature, heating rate room temperature -1000
DEG C stage heating rate is 10 DEG C/min-30 DEG C/min, 1000 DEG C of -1300 DEG C of stage heating rates are 8 DEG C/min-15 DEG C/
Min, 1300 DEG C to thermophase heating rate be 3 DEG C/min-5 DEG C/min, temperature retention time 4-6h to after temperature, insulation terminate after with
The speed of not higher than 25 DEG C/min is come out of the stove after being cooled to not higher than 200 DEG C, and stand-by porcelain bushing integrated morphology is obtained after the demoulding；
4. ready types of silicon carbide-based ceramics powder is loaded in the stand-by porcelain bushing integrated morphology that 3. step obtains, directly
To stand-by porcelain bushing integrated morphology underfill is expired, then it is sintered in vacuum ceramic sintering furnace, sintering temperature
1500 DEG C -1550 DEG C, -1000 DEG C of stage heating rates of heating rate room temperature be 10 DEG C/min-30 DEG C/min, 1000 DEG C -1300
DEG C stage heating rate is 8 DEG C/min-15 DEG C/min, and 1300 DEG C, to being 3 DEG C/min-5 DEG C/min to thermophase heating rate, are arrived
Temperature retention time 4-6h after temperature, insulation is come out of the stove after terminating with being not higher than after the speed of 25 DEG C/min is cooled to not higher than 200 DEG C, after the demoulding
The thermometric end structure of shaping needed for obtaining；
3) encapsulate
1. it is packaged in vacuum packaging equipment, keeps vacuum 1Pa～10Pa, brushes in protection sleeve pipe first exhausted
Edge layer；Then lead is connected with heat-conducting block openend center successively, by lead and both positive and negative polarity that is interspersed and being fixed with insulator
Thermocouple thermo wires tie point connects, is connected both positive and negative polarity thermocouple thermo wires with two binding posts being fixed in terminal box respectively；
Again protection sleeve pipe is fixed together using high-temp glue HN-767A with terminal box and is sealed, that is, the thermocouple after being encapsulated；
4) stabilization processes
1. by step 3) thermocouple after the encapsulation that obtains is placed in baking oven, is heated to 200 DEG C -250 DEG C, insulation
30min-50min, i.e., final required acquisition Vacuum Package ceramic armor pyrometer couple.
Compared with prior art, the present invention has advantages below：Using nicrosil nisil thermocouple thermo wires, drop significantly
Low manufacturing cost；Using alumina-based ceramic manufacture protection sleeve pipe, compactness is good, shock resistance, high temperature resistant, be integrated with it
Carbon fiber basket, carbon fiber can fundamentally overcome alumina-based ceramic to lead as the best material of existing known thermal conductivity
Hot poor defect, the temperature sensitivity for making the present invention is greatly improved；Using nicrosil nisil thermocouple thermo wires completely true
Work under Altitude, due to vacuum ranges 1Pa-10Pa, the vacuum both can ensure that thermo wires was not aoxidized at high temperature, and not
Because vacuum is too high composition can be caused to volatilize at high temperature, its invalid temperature (i.e. maximum operation (service) temperature) can be promoted to 1380
DEG C, and not having other factorses causes it to fail, reliability is high, overcomes nicrosil nisil thermocouple thermo wires and cannot be used for
The technology prejudice that 1300 DEG C of high temperature above are measured when long；Using silicon carbide ceramics as heat-conducting block, both by carbon fiber and thermocouple
Thermo wires completely cuts off, and forms insulation system, again can tip carbon fiber temperature and (silicon carbide ceramics is by temperature conduction to thermo wires
Plant the high ceramics of thermal conductivity), the insulating properties between thermo wires is on the one hand strengthened, on the other hand also substantially strengthen thermocouple entirety
Sensitiveness to temperature, is allowed to reaction more rapidly, accurately, and performance is more preferable；Sealed using high-temp glue HN-767A, one
On the other hand Volume Changes are minimum, air-tightness is good, adhesion is strong after the aspect high temperature gum forming, and the high-temp glue uses temperature reachable
1700 DEG C, will not be because using and aging or oxidation deactivation under high temperature；Heat-resisting, the durable, anti-seismic structure adopted due to the present invention with
Material, the service life for making the present invention is greatly improved.
Description of the drawings
Fig. 1 is the structural representation of the present invention；
In figure：Case 1, binding post 2, terminal box 3, band 4, insulating barrier 5, insulator 6, thermocouple thermo wires 7, lead 8,
Heat-conducting block 9, carbon fiber basket 10, protection sleeve pipe 11.
Specific embodiment
Embodiment 1：
A kind of Vacuum Package ceramic armor pyrometer couple, by terminal box 3, is fixed on the case 1 at the edge of terminal box 3, consolidates
Binding post 2, protection sleeve pipe 11, the band 4 being arranged between protection sleeve pipe 11 and terminal box 3, the fixation being scheduled in terminal box 3
In the protection insulating barrier 5 of the inner surface of sleeve pipe 11, lead 8, the thermocouple thermo wires 7 be connected with lead 8 and binding post 2 respectively, intert
And the insulator 6 being fixed on thermocouple thermo wires 7 is constituted, wherein：The protection sleeve pipe 11 adopts alumina base refractory ceramics system
Into its ceramics is integrated with vivo carbon fiber basket 10, and carbon fiber basket 10 to the one side inside protection sleeve pipe 11 exceeds protective case
The insulating barrier 5 of the inner surface of pipe 11；Heat-conducting block 9 is additionally provided with the protection inner termination of sleeve pipe 11, the heat-conducting block 9 adopts silicon carbide-based pottery
Ceramic material makes, and its working end is connected with carbon fiber basket 10 beyond end, and the center of openend is connected with lead 8；The sealing
Band 4 is manufactured using high-temp glue HN-767A, and the high-temp glue is filled up completely with the gap between terminal box 3 and protection sleeve pipe 11；Protection
The confined space that sleeve pipe 11, high-temp glue and terminal box 3 are constituted is the vacuum environment of 1Pa；Thermocouple thermo wires 7 is that routine N is occasionally adopted
Nicrosil nisil thermocouple thermo wires 7.
The manufacture method of above-mentioned Vacuum Package ceramic armor pyrometer couple, comprises the following steps：
1) preparation of raw material, equipment and frock
1. raw material；Prepare the alumina-based ceramic powder of enough adhesives of 8%PVA containing mass fraction, enough carbon fibers,
The nickel chromium triangle silicon that routinely technology is interted and is fixed with insulator 6 and connected both positive and negative polarity thermo wires by intermediate connection point-nisiloy heat
Galvanic couple thermo wires 7, the types of silicon carbide-based ceramics powder of enough 8%PVA containing mass fraction adhesives, it is mounted with case 1 and binding post 2
Terminal box 3, high-temp glue HN-767A；
2. equipment and frock：Prepare vacuum ceramic sintering furnace；Ceramic post sintering mould；Vacuum packaging equipment；Baking oven；
2) including the thermometric end shaping structures of protection sleeve pipe 11, carbon fiber basket 10 and heat-conducting block 9
1. ready alumina-based ceramic powder is fitted in ceramic post sintering mould, until by ceramic post sintering mold bottom
Filling is full；
2. carbon fiber is woven into into basket, and the embedment of basket bottom is loaded with into the ceramic post sintering of alumina-based ceramic powder
In mold bottom, length of embedment is the 2/3-3/4 of alumina-based ceramic powder thickness, then employing will by alumina-based ceramic powder
The filling of ceramic post sintering mould is full and is compacted；
3. it is sintered in vacuum ceramic sintering furnace, 1700 DEG C of sintering temperature, -1000 DEG C of stage liters of heating rate room temperature
Warm speed is 10 DEG C/min, and 1000 DEG C of -1300 DEG C of stage heating rates are 8 DEG C/min, and 1300 DEG C to thermophase heating rate
For 3 DEG C/min, temperature retention time 4h to after temperature, it is incubated after being cooled to 200 DEG C with the speed of 25 DEG C/min after terminating and comes out of the stove, after the demoulding i.e.
Obtain stand-by porcelain bushing integrated morphology；
4. ready types of silicon carbide-based ceramics powder is loaded in the stand-by porcelain bushing integrated morphology that 3. step obtains, directly
To stand-by porcelain bushing integrated morphology underfill is expired, then it is sintered in vacuum ceramic sintering furnace, sintering temperature
1500 DEG C, -1000 DEG C of stage heating rates of heating rate room temperature are 10 DEG C/min, and 1000 DEG C of -1300 DEG C of stage heating rates are 8
DEG C/min, 1300 DEG C to thermophase heating rate be 3 DEG C/min, temperature retention time 4h to after temperature, insulation terminate after with 25 DEG C/
The speed of min is come out of the stove after being cooled to 200 DEG C, the thermometric end structure of shaping needed for obtaining after the demoulding；
3) encapsulate
1. it is packaged in vacuum packaging equipment, keeps vacuum 1Pa, brushes insulating barrier in protection sleeve pipe 11 first
5；Then lead 8 is connected with the openend center of heat-conducting block 9 successively, by lead 8 and both positive and negative polarity that is interspersed and being fixed with insulator 6
The tie point of thermocouple thermo wires 7 connects, connects both positive and negative polarity thermocouple thermo wires 7 with two binding posts 2 being fixed in terminal box 3 respectively
Connect；Again protection sleeve pipe 11 is fixed together using high-temp glue HN-767A and is sealed with terminal box 3, that is, the heat after being encapsulated
Galvanic couple；
4) stabilization processes
1. by step 3) thermocouple after the encapsulation that obtains is placed in baking oven, is heated to 200 DEG C, is incubated 30min, i.e., most
Vacuum Package ceramic armor pyrometer couple is obtained needed for eventually.
Use temperature up to 1380 DEG C when the thermocouple produced by the present embodiment is most greatly enhanced, intensity is high, fragility is low, shock resistance
By force, reliability height, long service life.
Embodiment 2：
Most of structure is same as Example 1 with method and step, as follows at difference：
High-temp glue and the vacuum environment that the confined space that terminal box 3 is constituted is 10Pa；
1) preparation of raw material, equipment and frock
1. raw material：Alumina-based ceramic powder, the enough carbon for preparing enough adhesives of 10%PVA containing mass fraction is fine
Dimension, nickel chromium triangle silicon-nisiloy that routinely technology is interted and is fixed with insulator 6 and connected both positive and negative polarity thermo wires by intermediate connection point
Thermocouple thermo wires 7, the types of silicon carbide-based ceramics powder of enough 10%PVA containing mass fraction adhesives, it is mounted with case 1 and binding post
2 terminal box 3, high-temp glue HN-767A；
2) including the thermometric end shaping structures of protection sleeve pipe 11, carbon fiber basket 10 and heat-conducting block 9
3. it is sintered in vacuum ceramic sintering furnace, 1750 DEG C of sintering temperature, -1000 DEG C of stage liters of heating rate room temperature
Warm speed is 30 DEG C/min, and 1000 DEG C of -1300 DEG C of stage heating rates are 10 DEG C/min, and 1300 DEG C to thermophase heating rate
For 5 DEG C/min, temperature retention time 6h to after temperature, it is incubated after being cooled to 180 DEG C with the speed of 20 DEG C/min after terminating and comes out of the stove, after the demoulding i.e.
Obtain stand-by porcelain bushing integrated morphology；
4. ready types of silicon carbide-based ceramics powder is loaded in the stand-by porcelain bushing integrated morphology that 3. step obtains, directly
To stand-by porcelain bushing integrated morphology underfill is expired, then it is sintered in vacuum ceramic sintering furnace, sintering temperature
1550 DEG C, -1000 DEG C of stage heating rates of heating rate room temperature are 30 DEG C/min, and 1000 DEG C of -1300 DEG C of stage heating rates are
10 DEG C/min, 1300 DEG C to thermophase heating rate be 5 DEG C/min, temperature retention time 6h to after temperature, insulation terminate after with 20 DEG C/
The speed of min is come out of the stove after being cooled to 180 DEG C, the thermometric end structure of shaping needed for obtaining after the demoulding；
3) encapsulate
1. it is packaged in vacuum packaging equipment, keeps vacuum 1Pa, brushes insulating barrier in protection sleeve pipe 11 first
5；Then lead 8 is connected with the openend center of heat-conducting block 9 successively, by lead 8 and both positive and negative polarity that is interspersed and being fixed with insulator 6
The tie point of thermocouple thermo wires 7 connects, connects both positive and negative polarity thermocouple thermo wires 7 with two binding posts 2 being fixed in terminal box 3 respectively
Connect；Again protection sleeve pipe 11 is fixed together using high-temp glue HN-767A and is sealed with terminal box 3, that is, the heat after being encapsulated
Galvanic couple；
4) stabilization processes
1. by step 3) thermocouple after the encapsulation that obtains is placed in baking oven, is heated to 250 DEG C, is incubated 50min, i.e., most
Vacuum Package ceramic armor pyrometer couple is obtained needed for eventually.
By the present embodiment 2 produce thermocouple compared to embodiment 1 for, its maximum use high 30 DEG C or so of temperature, by force
Du Genggao, but brittlement phase is to increase.
The foregoing description of the disclosed embodiments, only for enabling professional and technical personnel in the field to realize or using this
Invention.Various modifications to these embodiments will be apparent for those skilled in the art, institute herein
The General Principle of definition can be realized in other embodiments without departing from the spirit or scope of the present invention.Therefore,
The present invention is not intended to be limited to the embodiments shown herein, and is to fit to special with principles disclosed herein and novelty
The consistent most wide scope of point.
Claims (2)
1. a kind of Vacuum Package ceramic armor pyrometer couple, by terminal box (3), is fixed on the case at terminal box (3) edge
(1) binding post (2) that, is fixed in terminal box (3), protection sleeve pipe (11), be arranged on protection sleeve pipe (11) and terminal box (3) it
Between band (4), be fixed on the protection insulating barrier (5) of sleeve pipe (11) inner surface, lead (8), respectively with lead (8) and wiring
The thermocouple thermo wires (7) of post (2) connection, insulator (6) that is interspersed and being fixed on thermocouple thermo wires (7) are constituted, and its feature exists
In：Protection sleeve pipe (11) is made using alumina base refractory ceramics, and its ceramics is integrated with vivo carbon fiber basket (10), carbon
Fiber basket (10) is to the internal one side of protection sleeve pipe (11) beyond the insulating barrier (5) for protecting sleeve pipe (11) inner surface；Protective case
Heat-conducting block (9) is additionally provided with pipe (11) inner termination, the heat-conducting block (9) is made using carborundum-based ceramic material, its working end
It is connected beyond end with carbon fiber basket (10), the center of openend is connected with lead (8)；The band (4) adopts high-temp glue
HN-767A is manufactured, and the high-temp glue is filled up completely with the gap between terminal box (3) and protection sleeve pipe (11)；Protection sleeve pipe (11),
High-temp glue and the vacuum environment that the confined space that terminal box (3) is constituted is 1Pa～10Pa；Thermocouple thermo wires (7) is occasionally adopted for conventional N
Nicrosil nisil thermocouple thermo wires (7).
2. the manufacture method of Vacuum Package ceramic armor pyrometer couple according to claim 1, it is characterised in that include with
Lower step：
1) preparation of raw material, equipment and frock
1. raw material：Prepare enough alumina-based ceramic powder, enough carbon fibres containing mass fraction for 8%-10%PVA adhesives
Dimension, nickel chromium triangle silicon-nickel that routinely technology is interted and is fixed with insulator (6) and connected both positive and negative polarity thermo wires by intermediate connection point
Silicon thermocouple thermo wires (7), it is enough containing mass fraction for 8%-10%PVA adhesives types of silicon carbide-based ceramics powder, be mounted with cover
Terminal box (3), high-temp glue HN-767A of shell (1) and binding post (2)；
2. equipment and frock：Prepare vacuum ceramic sintering furnace；Ceramic post sintering mould；Vacuum packaging equipment；Baking oven；
2) including the thermometric end shaping structures of protection sleeve pipe (11), carbon fiber basket (10) and heat-conducting block (9)
1. ready alumina-based ceramic powder is fitted in ceramic post sintering mould, until ceramic post sintering mold bottom is filled
It is full；
2. carbon fiber is woven into into basket, and the embedment of basket bottom is loaded with into the ceramic post sintering mould of alumina-based ceramic powder
In bottom, length of embedment for alumina-based ceramic powder thickness 2/3-3/4, then using by alumina-based ceramic powder by ceramics
Sintering mold filling is full and is compacted；
3. it is sintered in vacuum ceramic sintering furnace, 1700 DEG C -1750 DEG C of sintering temperature, -1000 DEG C of ranks of heating rate room temperature
Section heating rate is 10 DEG C/min-30 DEG C/min, and 100O DEG C of -1300 DEG C of stage heating rates are 8 DEG C/min-15 DEG C/min,
1300 DEG C is 3 DEG C/min-5 DEG C/min to thermophase heating rate is arrived, and temperature retention time 4-6h to after temperature is incubated after terminating with not high
Come out of the stove after the speed of 25 DEG C/min is cooled to not higher than 200 DEG C, stand-by porcelain bushing integrated morphology is obtained after the demoulding；
4. ready types of silicon carbide-based ceramics powder is loaded in the stand-by porcelain bushing integrated morphology that 3. step obtains, until will
Stand-by porcelain bushing integrated morphology underfill expires, and is then sintered in vacuum ceramic sintering furnace, and 1500 DEG C of sintering temperature-
1550 DEG C, -1000 DEG C of stage heating rates of heating rate room temperature be 10 DEG C/min-30 DEG C/min, 1000 DEG C of -1300 DEG C of stage liters
Warm speed is 8 DEG C/min-15 DEG C/min, and 1300 DEG C, to being 3 DEG C/min-5 DEG C/min to thermophase heating rate, are incubated to after temperature
Time 4-6h, insulation is come out of the stove after terminating with being not higher than after the speed of 25 DEG C/min is cooled to not higher than 200 DEG C, and institute is obtained after the demoulding
The thermometric end structure that need to be molded；
3) encapsulate
1. it is packaged in vacuum packaging equipment, keeps vacuum 1Pa～10Pa, brushes in protection sleeve pipe (11) first exhausted
Edge layer (5)；Then lead (8) is connected with heat-conducting block (9) openend center successively, by lead (8) with it is interspersed and be fixed with absolutely
Edge (6) both positive and negative polarity thermocouple thermo wires (7) tie point connection, by both positive and negative polarity thermocouple thermo wires (7) respectively be fixed on wiring
Two binding posts (2) connection on box (3)；Protection sleeve pipe (11) is fixed on terminal box (3) using high-temp glue HN-767A again
Together and seal, that is, the thermocouple after being encapsulated；
4) stabilization processes
1. by step 3) thermocouple after the encapsulation that obtains is placed in baking oven, is heated to 200 DEG C -250 DEG C, is incubated 30min-
50min, i.e., final required acquisition Vacuum Package ceramic armor pyrometer couple.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610971657.1A CN106568521A (en) | 2016-11-07 | 2016-11-07 | Vacuum-packaged ceramic-armored high temperature thermocouple and manufacturing method thereof |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610971657.1A CN106568521A (en) | 2016-11-07 | 2016-11-07 | Vacuum-packaged ceramic-armored high temperature thermocouple and manufacturing method thereof |
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| CN106568521A true CN106568521A (en) | 2017-04-19 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN115266856A (en) * | 2022-06-15 | 2022-11-01 | 常州联德电子有限公司 | High-temperature multi-component flue gas sensor and preparation method thereof |
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2016
- 2016-11-07 CN CN201610971657.1A patent/CN106568521A/en active Pending
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|---|---|---|---|---|
| CN115266856A (en) * | 2022-06-15 | 2022-11-01 | 常州联德电子有限公司 | High-temperature multi-component flue gas sensor and preparation method thereof |
| CN115266856B (en) * | 2022-06-15 | 2024-02-27 | 常州联德电子有限公司 | High-temperature multi-component smoke sensor and preparation method thereof |
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