CN105865433B - Single chip integrated depolarized type optical fibre gyro optical chip - Google Patents
Single chip integrated depolarized type optical fibre gyro optical chip Download PDFInfo
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- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/58—Turn-sensitive devices without moving masses
- G01C19/64—Gyrometers using the Sagnac effect, i.e. rotation-induced shifts between counter-rotating electromagnetic beams
- G01C19/72—Gyrometers using the Sagnac effect, i.e. rotation-induced shifts between counter-rotating electromagnetic beams with counter-rotating light beams in a passive ring, e.g. fibre laser gyrometers
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Abstract
The invention discloses a kind of single chip integrated depolarized type optical fibre gyro optical chips, overall structure is divided into chip base, chip under-clad layer and waveguide core layer, and the waveguide core layer is integrated with directional coupler, Y waveguide modulator, waveguide type polarization converter and waveguide type depolarizer.Light passes through directional coupler, realize 3dB light splitting, a part of light directly goes out to project chip, another part light becomes high TE light partially after entering Y waveguide modulator, high TE light partially becomes 45 ° of linearly polarized lights after waveguide type polarization converter, become complete depolarized light using depolarizer, enters single-mode fiber ring finally by pigtail coupling port.The optical chip integrated level of the present invention is high, directional coupler, Y waveguide modulator and waveguide type depolarizer share a substrate and under-clad layer, in addition to the core material of Y waveguide modulator is LiNbO_3 film, the core material of remaining waveguide device is all same material, manufacture craft is simple, has preferable reliability and environmental suitability.
Description
Technical field
The invention belongs to integrated optics and inertia sensing technical field, more particularly to a kind of single substrate, that is, single chip integrated
Depolarized type optical fibre gyro optical chip.
Background technology
With the development of inertial technology, application field is higher and higher to the volume of inertia system, weight demands, integrated,
The design of FOG of miniaturization, low cost and high stability becomes inevitable.
Compared to fiber-op-tic depolarized gyros, polarization maintaining optical fibre gyro has many advantages, fiber optic loop uses in structure design
High-birefringence polarisation-maintaining optical fiber avoids polarization in single mode optical fiber and develops caused signal decaying, reduces Faraday magnetic field effect
And polarization error, but since polarization maintaining optical fibre fiber optic loop cost is very high, concern is nevertheless suffered from using the depolarized scheme of single mode optical fiber.
The integrated optics chip being used widely in depolarized type optical fibre gyro system at present is to be based on LiNbO3Body material
Integrated chip, LiNbO3Electro-optic phase modulator has the characteristics that insertion loss is low, half-wave voltage is small, modulation bandwidth is big, is real
The ideal component of existing Closed loop operation, but LiNbO3Body material waveguide is not easy to realize single-chip integration with other materials waveguide, need to pass through
Fiber coupling is connect with other optical devices；Used Lyot depolarizer is that two Length Ratios are 1:2 high birefringence polarization-maintaining
The welding at 45 ° of optical fiber main shaft forms, and each optical device is discrete, complicated, and the poor reliability of Coupling point fusion point, cannot
Meets the needs of small-sized highly integrated technology of system is growing.
In recent years, with the development of micro-nano integreted phontonics and optical material, film-type LiNbO3Has there is commercial production in material
Product, the waveguide type depolarizer design performance applied to optical fibre gyro are gradually promoted so that optical fibre gyro optical transmission system is realized single
One integrated chip and discrete device performance is possibly realized before not losing.
Invention content
The purpose of the present invention is in view of the deficiencies of the prior art, be based on film-type LiNbO3The characteristics of material is easily integrated and
The mentality of designing of waveguide type depolarizer, provides that a kind of integrated level is high, meet reciprocity and preparation process is simple, is easy to the list of encapsulation
The integrated depolarized type optical fibre gyro optical chip of piece.
The technical solution adopted by the present invention is：
The single chip integrated depolarized type optical fibre gyro optical chip, including：Chip base, the chip in chip base
Under-clad layer and the waveguide core layer on chip under-clad layer；
The waveguide core layer is integrated with directional coupler, Y waveguide modulator, waveguide type polarization converter and waveguide type
Depolarizer；
The port a of directional coupler connects one end of the one 90 ° of circular arc waveguide, the one 90 ° of circular arc by the first straight wave guide
The other end of waveguide connects one end of the second straight wave guide, and the second straight wave guide other end is light source incidence port；Directional coupler
The other end of one end of port b connection third straight wave guides, third straight wave guide is signal detection port；The port c of directional coupler
One end of the 4th straight wave guide is connected, the other end of the 4th straight wave guide is power detection port；The port d of directional coupler passes through
Five straight wave guides connect one end of the 2nd 90 ° of circular arc waveguide, and the other end of the 2nd 90 ° of circular arc waveguide connects the one of the 6th straight wave guide
End, the other end of the 6th straight wave guide connect one end of the 3rd 90 ° of circular arc waveguide, and the other end of the 3rd 90 ° of circular arc waveguide connects Y waves
Lead the based waveguides of modulator, one end of the first branch connection polarization converter of Y waveguide modulator, the other end of polarization converter
Depolarizer entry port is connected, depolarizer exit ports are a pigtail coupling port, the second branch connection the of Y waveguide modulator
The other end of one end of seven straight wave guides, the 7th straight wave guide is another pigtail coupling port；
The both sides of each branch of Y waveguide modulator are equipped with metal electrode.
In above structure, the waveguiding structure of the waveguide type depolarizer includes four air grooves, specially：It is incident straight
One end of waveguide is entry port, and the other end is connected with the first air grooves；The normal of incident straight wave guide and the first air grooves
Angled θB, which is Brewster's angle θB, the normal and the second air grooves of the first reflection waveguide and the first air grooves
The all angled θ of normalB, all angled θ of normal of the normal and third air grooves of the second reflection waveguide and the second air groovesB,
Third reflects all angled θ of normal of the normal and the 4th air grooves of waveguide and third air groovesB；It is emitted the one of straight wave guide
End is connected with the 4th air grooves, and the other end is exit ports；It is parallel with incident straight wave guide and outgoing straight wave guide to reflect waveguide,
Refraction waveguide end is connected with the first air grooves, and the other end is connected with the 4th air grooves.
The waveguiding structure of the waveguide type polarization converter is using the asymmetric polarization for periodically filling ridge waveguide
(concrete structure refers to Y.Shani, Polarization rotation in asymmetric periodic to converter structure
Loaded rib waveguides, Appl.Phys.Lett.59 (11), 1991), include the straight wave on chip under-clad layer
It leads, one layer of lower caldding layer different from straight wave guide thickness of same size, the material and core of lower caldding layer is covered on straight wave guide
Piece under-clad layer is identical, and several intermediate cover layers are asymmetrically periodically filled on lower caldding layer, and the width of intermediate cover layer is
The half of lower caldding layer has the upper caldding layer with intermediate cover layer equivalent width in every piece of intermediate cover layer, upper caldding layer
Material is identical as chip under-clad layer.
Chip base material be semiconductor silicon material either polymer material chip under-clad layer material be silica or
Polymer material, waveguide core layer material are doping silicon dioxide either polymeric material or silicon materials；
Y waveguide modulator material is film-type lithium niobate, and the transparent zone of waveguide modulator is handed over for film-type lithium niobate proton
Change waveguide.
In addition, can be integrated with multiple waveguide type depolarizers in the waveguide core layer, waveguide type depolarizer can be arranged
In：In light path in light path between directional coupler and Y waveguide modulator, between Y waveguide modulator and waveguide type polarization converter,
In light path between light source and directional coupler or in the other positions of entire light path.
The invention has the beneficial effects that：
Fiber-op-tic depolarized gyros integrated optics chip proposed by the present invention is integrated with the light in addition to fiber optic loop on a substrate
Transmission system, including directional coupler, waveguide type depolarizer, waveguide type polarization converter and Y waveguide modulator, all devices are total
With a substrate and under-clad layer, in addition to Y waveguide modulator is using film-type niobic acid lithium material, remaining device uses identical sandwich layer
Material, it is simple in structure, compared to having simplified preparation process for discrete device；Using waveguide type depolarizer, waveguiding structure is simple, real
General single mode fiber may be used in existing depolarized type optical fibre gyro single-chip integration, fiber optic loop, very big compared to for polarization maintaining optical fibre gyro
Ground reduces cost.
Directional coupler side by side and is staggered a certain distance satisfaction mutually with Y waveguide modulator for whole chip structure
Easy property requirement；The chip uses full waveguide transmission optical signal, can adjust Waveguide mould field by changing sandwich layer waveguide dimensions,
The mould field between different components is set to match, to realize low-loss Butt-coupling.
The integrated optics chip improves the integrated level of optical fibre gyro optical system, and optical fibre gyro overall structure is made more to step up
It gathers, to improve the reliability and environmental suitability of optical fibre gyro.
Description of the drawings
Fig. 1 is the overall structure diagram of the depolarized type optical fibre gyro optical chip of the single-chip integration；
Fig. 2 is the structural schematic diagram of waveguide type depolarizer；
Fig. 3 is the structural schematic diagram of waveguide type polarization converter；
Fig. 4 is the A-A sectional views of the depolarized type optical fibre gyro optical chip of single-chip integration；
Fig. 5 is the schematic diagram that the chip is applied to depolarized type optical fibre gyro.
In the above figure：1, chip base, 2, chip under-clad layer, 3, waveguide core layer, 4, the 2nd 90 ° of circular arc waveguides, the 5, the 6th
Straight wave guide, 6, the 3rd 90 ° of circular arc waveguides, 7, Y waveguide modulator, 8, metal electrode, 9, polarization converter, 10, depolarizer, 11,
Pigtail coupling port, 12, signal detection port, 13, the 1st ° of circular arc waveguides, 14, light source incidence port, 15, directional couple
Device, the 16, first air grooves, 17, light source, 18, signal sensor, 19, tail optical fiber bearing, 20, fiber optic loop, 21, film-type niobic acid
Lithium, the 22, the 7th straight wave guide, 23, film-type lithium niobate proton-exchanged waveguide, 24, incident straight wave guide, the 25, first reflection waveguide,
26, the second air grooves, the 27, second reflection waveguide, 28, third air grooves, 29, third reflect waveguide, 30, the straight wave of outgoing
It leads, the 31, the 4th air grooves, 32, straight wave guide, 33, lower caldding layer, 34, intermediate cover layer, 35, upper caldding layer, 36, refracted wave
It leads.
Specific embodiment
The invention will be further described below in conjunction with the accompanying drawings.
1 material of this example chips substrate is Si, and 2 material of chip under-clad layer is SiO2, 3 material of waveguide core layer is Si；
As shown in Figure 1, waveguide core layer 3 is integrated with directional coupler 15, Y waveguide modulator 7, waveguide type polarization converter 9
And waveguide type depolarizer 10, wherein 7 material of Y waveguide modulator is film-type lithium niobate 21, as shown in figure 4, waveguide modulator 7
Transparent zone 23 is film-type lithium niobate proton-exchanged waveguide, remaining device core material is all Si waveguides, and waveguide shapes are Si ridges
Waveguide.
The port a of directional coupler 15 by the first straight wave guide connect the one 90 ° of circular arc waveguide 13 one end, the one 90 °
The other end of circular arc waveguide 13 connects one end of the second straight wave guide, and the second straight wave guide other end is light source incidence port 14；Orientation
The other end of one end of the port b connection third straight wave guides of coupler 15, third straight wave guide is signal detection port 12；Orient coupling
The other end of one end of the 4th straight wave guide of port c connections of clutch 15, the 4th straight wave guide is power detection port；Directional coupler
15 port d connects one end of the 2nd 90 ° of circular arc waveguide 4 by the 5th straight wave guide, and the other end of the 2nd 90 ° of circular arc waveguide 4 connects
One end of the 6th straight wave guide 5 is connect, the other end of the 6th straight wave guide 5 connects one end of the 3rd 90 ° of circular arc waveguide 6, the 3rd 90 ° of circular arc
The based waveguides of the other end connection Y waveguide modulator 7 of waveguide 6, the first branch connection polarization converter 9 of Y waveguide modulator 7
The other end of one end, polarization converter 9 connects 10 entry port of depolarizer, and 10 exit ports of depolarizer are a pigtail coupling end
Mouthful, the second branch of Y waveguide modulator 7 connects one end of the 7th straight wave guide 22, and the other end of the 7th straight wave guide 22 is another tail
Fine coupling port；Each branch both sides of Y waveguide modulator 7 are equipped with metal electrode 8.
The waveguiding structure of waveguide type depolarizer 10, as shown in Fig. 2, including four air grooves 16,26,28,31, specially
One end of incident straight wave guide 24 is entry port, and the other end is connected with the first air grooves 16；Incident straight wave guide 24 and the first sky
The angled θ of normal of gas groove 16B, which is Brewster's angle θB, when light is with Brewster's angle θBIt is incident to sandwich layer Si
When with Air Interface, transmitted light is all TE polarised lights, and reflected light is all TM polarised lights, and TE polarizations and TM polarised lights has been achieved
It is discrete；First reflection waveguide 25 and the normal of the first air grooves 16 and the normal of the second air grooves 26 are all angled
θB, the TM light to come at this time through first reflection is with Brewster's angle θBIt, can be all anti-when being incident to sandwich layer Si with Air Interface
It penetrates；Second reflection waveguide 27 and the normal of the second air grooves 26 and all angled θ of the normal of third air grooves 28B,
The TM light through reflecting back for the second time is same at this time comprehends whole reflections；Third reflects the normal of waveguide 29 and third air grooves 28
With all angled θ of normal of the 4th air grooves 31B, the TM light through reflecting back for the third time is all anti-with comprehending at this time
It penetrates；It is parallel with incident straight wave guide 24 and outgoing straight wave guide 30 to reflect waveguide 36, one end is connected with the first air grooves 16, another
End is connected with the 4th air grooves 31, the TE light of transmission by two air grooves and after reflecting waveguide 36 with four secondary reflections of process
TM photosynthesis, the path difference that TM light and TE light pass through has certain phase difference to form incoherent light, and last intensity is identical
Noncoherent TM with TE is photosynthetic is shaped as depolarized light；
The waveguiding structure of waveguide type polarization converter 9 is (as shown in Figure 3) for using asymmetric periodically filling ridge waveguide
Polarization converter structure, be covered on the straight wave guide 32 of polarization converter one layer it is different from 32 thickness of same size of straight wave guide
Lower caldding layer 33, the material of lower caldding layer 33 identical as under-clad layer 2 is all SiO2, sandwich layer waveguide 32 and lower caldding layer 33 are formed pair
Light beam laterally limits；Intermediate cover layer 34 and upper caldding layer 35 are periodically filled on lower caldding layer 33, period N is intermediate
The width of coating 34 and upper caldding layer 35 is the half of lower caldding layer 33, and the material of intermediate cover layer 34 is identical as straight wave guide 32
All it is Si, the material of upper caldding layer 35 identical as under-clad layer 2 is all SiO2.The intermediate cover layer 34 periodically filled and upper covering
The thickness of layer 35 forms periodic disturbance at nm grades.
The depolarized type optical fibre gyro optical chip of single-chip integration proposed by the present invention is applied to optical fibre gyro, using this chip
Optical fibre gyro is as shown in Figure 5.Its light path and each assembly function are as follows：Optical fibre gyro optical system Ordinary Light Sources Have superradiation light-emitting two
Pole pipe 17, optical signal enter directional coupler 15 and realize that 3dB light splitting, the light of half are directly emitted, the other half light enters Y waveguide
Modulator 7, the light from the outgoing of modulator 7 are high TE light partially, are 45 ° of linearly polarized lights subsequently into outgoing after polarization converter 9,
45 ° of linearly polarized lights of outgoing, which enter after depolarizer 10, to carry out depolarized becoming depolarized light.General single mode light can be used using depolarized technology
Fine ring replaces polarization-maintaining fiber coil, reduces cost.Depolarized light is passed to after single-mode fiber ring 20 in fiber optic loop clockwise and anticlockwise
Direction is propagated, and is then returned along respective light path, is merged again in Y waveguide modulator 7 and is generated interference, interference light signal is then by signal
12 arriving signal detector 18 of detection port.In addition, chip of the present invention can also integrate multiple waveguide type depolarizers, each waveguide type disappears
Inclined device can be respectively arranged in the light path between each device or in the other positions of entire light path.
Claims (6)
1. a kind of single chip integrated depolarized type optical fibre gyro optical chip, which is characterized in that including：Chip base (1) is set to core
Chip under-clad layer (2) in piece substrate and the waveguide core layer (3) on chip under-clad layer；
The waveguide core layer (3) is integrated with directional coupler (15), Y waveguide modulator (7), waveguide type polarization converter (9)
And waveguide type depolarizer (10)；
The port a of directional coupler (15) by the first straight wave guide connect the one 90 ° of circular arc waveguide (13) one end, the one 90 °
The other end of circular arc waveguide (13) connects one end of the second straight wave guide, and the second straight wave guide other end is light source incidence port (14)；
The other end of one end of the port b connection third straight wave guides of directional coupler (15), third straight wave guide is signal detection port
(12)；The other end of one end of the 4th straight wave guide of port c connections of directional coupler (15), the 4th straight wave guide is power detection end
Mouthful；The port d of directional coupler (15) connects one end of the 2nd 90 ° of circular arc waveguide (4), the 2nd 90 ° of circle by the 5th straight wave guide
The other end of arc waveguide (4) connects one end of the 6th straight wave guide (5), and the other end of the 6th straight wave guide (5) connects the 3rd 90 ° of circular arc
One end of waveguide (6), the based waveguides of the other end connection Y waveguide modulator (7) of the 3rd 90 ° of circular arc waveguide (6), Y waveguide modulation
The other end connection depolarizer (10) of one end of the first branch connection polarization converter (9) of device (7), polarization converter (9) enters
Port is penetrated, depolarizer (10) exit ports are a pigtail coupling port, and the second branch connection the 7th of Y waveguide modulator (7) is straight
The other end of one end of waveguide (22), the 7th straight wave guide (22) is another pigtail coupling port；
The both sides of each branch of Y waveguide modulator (7) are equipped with metal electrode (8).
2. single chip integrated depolarized type optical fibre gyro optical chip according to claim 1, which is characterized in that the wave
The waveguiding structure of conductivity type depolarizer (10) includes four air grooves (16,26,28,31), specially：Incident straight wave guide (24)
One end is entry port, and the other end is connected with the first air grooves (16)；Incident straight wave guide (24) and the first air grooves (16)
Normal be at an angle of θB, which is Brewster's angle θB, the first reflection waveguide (25) and the normals of the first air grooves (16) and
The all angled θ of the normal of second air grooves (26)B, the second reflection waveguide (27) and the normals of the second air grooves (26) and the
The all angled θ of the normal of three air grooves (28)B, the normal and the 4th of third reflection waveguide (29) and third air grooves (28)
The all angled θ of the normal of air grooves (31)B；One end of outgoing straight wave guide (30) is connected with the 4th air grooves (31), another
End is exit ports；It is parallel with incident straight wave guide (24) and outgoing straight wave guide (30) to reflect waveguide (36), refraction waveguide (36)
One end is connected with the first air grooves (16), and the other end is connected with the 4th air grooves (31).
3. single chip integrated depolarized type optical fibre gyro optical chip according to claim 1, which is characterized in that the wave
The waveguiding structure of conductivity type polarization converter (9) is using the asymmetric polarization converter structure for periodically filling ridge waveguide, packet
The straight wave guide (32) on chip under-clad layer (2) is included, one layer and straight wave guide (32) width phase are covered on straight wave guide (32)
The material of the different lower caldding layer of stack pile (33), lower caldding layer (33) is identical as chip under-clad layer (2), on lower caldding layer (33)
Several intermediate cover layers (34) are asymmetrically periodically filled with, the width of intermediate cover layer (34) is the one of lower caldding layer (33)
Half, there is the upper caldding layer (35) with intermediate cover layer (34) equivalent width, upper caldding layer on every piece of intermediate cover layer (34)
(35) material is identical as chip under-clad layer (2).
4. single chip integrated depolarized type optical fibre gyro optical chip according to claim 1, which is characterized in that the core
Piece substrate (1) material is that either polymer material under-clad layer (2) material is silica or polymeric material to semiconductor silicon material
Material, waveguide core layer (3) material are doping silicon dioxide either polymeric material or silicon materials；
5. single chip integrated depolarized type optical fibre gyro optical chip according to claim 1, which is characterized in that the Y
Waveguide modulator (7) material is film-type lithium niobate (21), and the transparent zone (23) of Y waveguide modulator (7) is film-type lithium niobate
Proton-exchanged waveguide.
6. single chip integrated depolarized type optical fibre gyro optical chip according to claim 1, which is characterized in that the wave
It leads and is integrated with multiple waveguide type depolarizers (10) on sandwich layer (3).
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| CN107764253A (en) * | 2017-09-22 | 2018-03-06 | 苏州光环科技有限公司 | Optical fibre gyro |
| CN109579818B (en) * | 2018-12-12 | 2020-06-19 | 天津津航技术物理研究所 | Preparation method of hybrid integrated fiber-optic gyroscope optical chip |
| CN109579817B (en) * | 2018-12-12 | 2020-04-28 | 天津津航技术物理研究所 | Preparation method of silicon-based-LN-based hybrid integrated optical chip |
| TWI719888B (en) | 2020-04-17 | 2021-02-21 | 極星光電股份有限公司 | Integrated double-wing photoelectric sensor core chip |
| JP2022083779A (en) * | 2020-11-25 | 2022-06-06 | 富士通オプティカルコンポーネンツ株式会社 | Optical device, optical communication apparatus, and method for manufacturing optical device |
| JP2022089531A (en) * | 2020-12-04 | 2022-06-16 | 富士通オプティカルコンポーネンツ株式会社 | Optical device and optical communication apparatus |
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