CN105136038B - A kind of direct incident-type light arm scale-up version 3-D scanning gauge head - Google Patents
A kind of direct incident-type light arm scale-up version 3-D scanning gauge head Download PDFInfo
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- CN105136038B CN105136038B CN201510639541.3A CN201510639541A CN105136038B CN 105136038 B CN105136038 B CN 105136038B CN 201510639541 A CN201510639541 A CN 201510639541A CN 105136038 B CN105136038 B CN 105136038B
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- photodetector
- gauge head
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
- G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
- G01B11/007—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines feeler heads therefor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/004—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
- G01B5/008—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines
- G01B5/012—Contact-making feeler heads therefor
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- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a kind of direct incident-type light arm scale-up version 3-D scanning gauge heads, comprising: for emitting three laser sources of three laser beams；For fixing measuring staff and surveying the gauge head pedestal of ball, gauge head pedestal is equipped with laser source or photodetector；For receiving three photodetectors of three incoming laser beams；Member of translational for moving in a straight line gauge head pedestal；For gauge head pedestal to be returned back to the reply component of initial position；The processing system for surveying the three-D displacement changing value of ball is calculated.The novel three-dimensional scanning feeler can obtain the gauge head displacement in three different rectilinear directions by three photodetectors, and then obtain the more accurate measurement coordinate of measured workpiece.The novel three-dimensional scanning feeler improves measurement accuracy, simplifies structure, reduces production cost, is easy to batch machining manufacture.
Description
Technical field
The present invention relates to a kind of Technology of Precision Measurement field, in particular to a kind of direct incident-type light arm scale-up version three-dimensional is swept
Retouch gauge head.
Background technique
Gauge head is one of critical component of precision measurement instrument, provides the geometric position information of measured workpiece as sensor, surveys
The development level of head directly affects the measurement accuracy and measurement efficiency of precision measurement instrument.Precision feeler is generally divided into contact measuring head
First two is surveyed with contactless, wherein contact measuring head is divided into mechanical gauge head, touch trigger probe and scanning probe again；It is non-to connect
Touch gauge head is divided into laser feeler and optical video gauge head.
Mechanical gauge head is that precision measurement instrument uses a kind of gauge head earlier.The gauge head surveys end by gauge head and measured workpiece is straight
Contact carries out position measurement, is mainly used for manual measurement.Such measuring head structure is simple and convenient to operate, its shortcoming is that precision
Not high, measurement efficiency is low, is currently rarely used for field of industrial measurement.The widely used precision feeler in current industrial field is triggering
Formula gauge head.The measuring principle of touch trigger probe is that precision measurement instrument issues sampling pulse letter when gauge head surveys end and measured workpiece contacts
Number, and the coordinate value for surveying the end centre of sphere at this time is latched by the processing system of instrument, determine that survey end contacts with measured workpiece with this
The coordinate of point.Such gauge head has many advantages, such as that structure is simple, easy to use and higher triggering precision, is applied in three dimensional probe, 3-D probe
Widest gauge head.But the shortcomings that such gauge head is: there are anisotropy (triangle effect) or contact measuring head to contact
Micro-displacement is generated because of resistance when measured workpiece so as to cause the offset deviation of gauge head, limit its measurement accuracy into one
Step improves, and full accuracy can only reach several microns of zero point.On the other hand, since touch trigger probe measuring principle determines that it was measured
Journey is spot measurement, and measurement efficiency is low, limits its popularization and use.
The most wide gauge head type of current application is scanning probe, such gauge head output quantity is directly proportional to gauge head offset,
It is high as a kind of precision, function is strong, wide adaptability gauge head, be provided simultaneously with the function of workpiece spot measurement and continuous scanning measurement
Energy.The measuring principle of such gauge head be gauge head survey end after contacting measured workpiece, gauge head since the effect of contact force is subjected to displacement,
The respective coordinate value of the conversion equipment output of the gauge head signal directly proportional to the minor shifts of measuring staff, the signal and precision measurement instrument is folded
Add the accurate coordinates that can obtain putting on measured workpiece.If not considering the deformation of measuring staff, scanning probe is isotropic, therefore
Its precision is significantly larger than touch trigger probe.But the shortcomings that such gauge head is that structure is complicated, manufacturing cost is high, at present in the world only
There are fewer companies that can produce.
Summary of the invention
It is an object of the invention to overcome mechanical gauge head in the presence of the prior art and touch trigger probe precision not high,
And structure is complicated, the above-mentioned deficiency of higher cost for scanning probe, provides that a kind of structure is simple, measurement accuracy is higher novel
3-D scanning gauge head, the 3-D scanning gauge head can measure gauge head in the displacement in three directions, by displacement superposed, can compensate for
Measured workpiece position measured deviation caused by being displaced when surveying ball contact measured workpiece obtains the more accurate measurement of measured workpiece and sits
Mark.
In order to achieve the above-mentioned object of the invention, the present invention provides following technical schemes:
Technical solution one:
A kind of direct incident-type light arm scale-up version 3-D scanning gauge head, comprising:
Three laser sources, for emitting three laser beams, i.e. laser source one emits laser beam one, and laser source two emits laser
Beam two, laser source three emit laser beam three；
Gauge head pedestal is equipped with the laser source one, laser source two and laser source three, and measuring staff and survey for detection
Ball；
Three photodetectors, i.e. photodetector one, photodetector two and photodetector three, are respectively used to receive
Laser beam one, laser beam two and laser beam three；
Member of translational, for moving in a straight line the gauge head pedestal；
Component is replied, for the gauge head pedestal to be returned back to initial position；
Processing system, according to what is obtained respectively on the photodetector one, photodetector two and photodetector three
The three-D displacement changing value for surveying ball is calculated in laser beam one, three incoming position changing value of laser beam two and laser beam.
Technical solution two:
A kind of direct incident-type light arm scale-up version 3-D scanning gauge head, comprising:
Three laser sources, for emitting three laser beams, i.e. laser source one emits laser beam one, and laser source two emits laser
Beam two, laser source three emit laser beam three；
Three photodetectors, i.e. photodetector one, photodetector two and photodetector three, are respectively used to receive
Laser beam one, laser beam two and laser beam three；
Gauge head pedestal, the gauge head pedestal are equipped with photodetector one, photodetector two and photodetector three, with
And measuring staff and survey ball for detection；
Member of translational, for moving in a straight line the gauge head pedestal；
Component is replied, for the gauge head pedestal to be returned back to initial position；
Processing system, according to what is obtained respectively on the photodetector one, photodetector two and photodetector three
The three-D displacement changing value for surveying ball is calculated in laser beam one, three incoming position changing value of laser beam two and laser beam.
The novel smooth arm amplifying type 3-D scanning gauge head, emits three laser beams, every Shu Ji using three laser sources respectively
Light beam is collimated laser beam, is incident on three photodetectors, each photodetector can incude corresponding laser beam
Incoming position.When member of translational drives gauge head pedestal to move in a straight line, i.e., member of translational can translate gauge head base along different directions
Seat, then laser source changes with corresponding photodetector distance, i.e., three beams of laser beam is incident on corresponding photodetector respectively
On position also accordingly change, according to geometrical relationship, processing system, which is incident on corresponding photoelectricity to each laser beam respectively, to be visited
The incoming position changing value surveyed on device is calculated and is analyzed, and can obtain gauge head pedestal in the position for being located at its straight-line displacement direction
Changing value is moved, and then can be realized the gauge head pedestal in the three-D displacement measurement of three direction compositions, gauge head pedestal is subjected to displacement
Initial position can be returned back to by replying component afterwards, convenient for measurement next time.
In use, the 3-D scanning gauge head is mounted on precision measurement instrument, due to connecting measuring staff on gauge head pedestal and surveying ball,
It surveys ball to be used to directly contact progress position measurement with measured workpiece, when surveying ball and measured workpiece directly contacts, by resistance
Generate displacement, survey spherical zone move gauge head pedestal displacement is generated on member of translational, by three laser sources, three photodetectors,
Processing system cooperation, can be calculated the displacement for surveying ball, survey caused by displacement of ball when surveying ball contact measured workpiece with compensation
Measured workpiece position measured deviation passes through three since each photodetector can obtain the displacement of a rectilinear direction
Photodetector can access the shift offset in three different rectilinear directions, to obtain the more accurate position of measured workpiece
Coordinate is set, full accuracy can reach Nano grade, improve the measurement accuracy of 3-D scanning gauge head.Gauge head simplification finishes
Structure reduces production cost, is easy to batch machining manufacture.
Preferably, the plane of incidence of three photodetectors is mutually perpendicular in the technical solution one or technical solution two
Setting, the member of translational are used for the gauge head pedestal respectively along the relatively described photodetector one, photodetector two, light
Three mutually orthogonal directions of electric explorer three are mobile, realize that laser beam is incident on the generation of the position on corresponding photodetector
Variation, to realize measurement.
It is further preferred that the member of translational includes at least one guide groove one positioned at horizontal direction, it is all described
Vertically horizontal slide is equipped at least one guide groove two between guide groove one, along Vertical Square on all guide grooves two
To at least one guide groove three is equipped with, is slided up and down on all guide grooves three along perpendicular and connect the gauge head pedestal.
The member of translational respectively includes guide groove one, guide groove two and guide groove three, and wherein guide groove two can be oppositely oriented
Slot one slide, guide groove three can respective guide slot two slide, the glide direction and the glide direction phase of guide groove two of guide groove one
Mutually vertical, the glide direction of guide groove two and the glide direction of guide groove three are mutually perpendicular to, and guide groove three is connected by sliding block 84
Gauge head pedestal, gauge head pedestal can be slided on guide groove three, thus can realize respectively gauge head pedestal three-dimensional i.e.
Three mutually orthogonal directions are displaced.
Preferably, the reply component in the technical solution one or technical solution two includes spring leaf one, spring leaf two, bullet
Reed three, wherein the reed one is set at least one described guide groove one and for returning back to initially the guide groove two
Position, the reed two are set at least one described guide groove two and for the guide groove three to be returned back to initial position,
The reed three is set on the guide groove three and for the gauge head pedestal to be returned back to initial position.
The reply component includes being respectively arranged on guide groove one, guide groove two, the spring leaf one on guide groove three, spring leaf
Two, guide groove two, guide groove three and gauge head pedestal can be returned back to initial position respectively by spring leaf three, i.e., by three laser
Beam is incident to three upper set of photodetector and returns back to original position, convenient for the measurement next time of gauge head system.
It is further preferred that gauge head pedestal described in the technical solution one is cuboid, three laser sources are set to this
Three sides, the photodetector one, photodetector two and photodetector three are arranged in a mutually vertical manner two-by-two.
It is further preferred that photodetector is rotatably mounted on the shell in the technical solution one, laser source
It is mounted on the gauge head pedestal, rotatable photodetector can change photodetector position opposite with corresponding laser source
It sets and angle, to change the amplification factor of photodetector measurement gauge head displacement, three photodetectors can change survey
Pedestal is measured in the displacement measurement amplification factor for being located at different directions, to meet actual needs.
Preferably, gauge head pedestal described in the technical solution two be cuboid, by three photodetectors be set to this three
A side, the photodetector one, photodetector two and photodetector three are arranged in a mutually vertical manner two-by-two.
It is further preferred that laser source is rotatably mounted on the shell in the technical solution two, photodetector
Be mounted on the gauge head pedestal, rotatable laser source can change laser source and the relative position of corresponding photodetector and
Angle, to change the amplification factor of photodetector measurement gauge head displacement, three photodetectors can change measurement base
Seat is in the displacement measurement amplification factor for being located at different directions, to meet actual needs.
Preferably, the 3-D scanning gauge head in the technical solution one further includes shell, three photodetector connections
On the housing, the reply component be spring, wherein one end connection on the housing, the other end be connected to the gauge head
On pedestal.
Preferably, the 3-D scanning gauge head in the technical solution two further includes shell, and three laser sources are connected to institute
State on shell, the reply component be spring, wherein one end connection on the housing, the other end be connected to the gauge head pedestal
On.
Preferably, which includes the shell for being fixed on precision measurement instrument, includes three laser sources, three in the shell
A photodetector, gauge head pedestal, member of translational and reply component, are easily installed and dismantle.
Preferably, the technical solution one and photodetector one, photodetector two and photoelectricity in technical solution two
Detector three is Position-Sensitive Detector.
The Position-Sensitive Detector (English is Position Sensitive Detector, abbreviation PSD), belongs to and partly leads
Body device, is generally made into PN structure, its working principle is that being based on lateral photo effect, can be used in the accurate survey of position coordinates
Amount, has many advantages, such as that high sensitivity, high-resolution, fast response time and configuration circuit are simple.
It is further preferred that the photodetector one, photodetector two and photodetector three are one-dimensional position
Sensing detector.
One Dimensional Position Sensitive Detectors (abbreviation one-dimensional PSD) can detect a bright spot in its a unique direction
The movement of upper surface.
Compared with prior art, beneficial effects of the present invention:
1, a kind of direct incident-type light arm scale-up version 3-D scanning gauge head of the present invention, two kinds of technical solutions utilize three
A laser source emits three beams of laser beam respectively, is incident on three photodetectors, each photodetector can incude correspondence
The incoming position of laser beam；When member of translational drives gauge head pedestal to move in a straight line, three beams of laser beam is incident on corresponding light respectively
Position on electric explorer also accordingly changes；According to geometrical relationship, processing system is respectively incident on pair each laser beam
It answers incoming position changing value on photodetector to be calculated and analyzed, gauge head pedestal can be obtained and be located at its straight-line displacement side
To change in displacement value, and then the gauge head pedestal can be obtained in the three-D displacement amount of three direction compositions；Gauge head pedestal occurs
By replying part reverts to initial position, convenient for measurement next time after displacement；The three dimensional probe, 3-D probe is mounted on precision measurement instrument,
By three laser sources, three photodetectors, processing system cooperation, the displacement for surveying ball can be calculated, surveyed with compensating
Measured workpiece deviations caused by ball is displaced when contacting measured workpiece, since each photodetector can obtain a straight line
The displacement in direction can access the displacement in three different rectilinear directions by three photodetectors, can be obtained
For measured workpiece in the more accurate measurement coordinate in gauge head pedestal three-D displacement direction, full accuracy can reach Nano grade,
The measurement accuracy of 3-D scanning gauge head is improved, which simplifies structure, reduces production cost, is easy to batch machining system
It makes；
2, member of translational of the present invention includes guide groove one, guide groove two and guide groove three, and wherein guide groove two can
Respective guide slot one slides, and guide groove three can the sliding of respective guide slot two, the glide direction of guide groove one and the cunning of guide groove two
Dynamic direction is mutually perpendicular to, and the glide direction of guide groove two and the glide direction of guide groove three are mutually perpendicular to, and guide groove three passes through cunning
Block vertical sliding connects gauge head pedestal, and gauge head pedestal can be slided on guide groove three, therefore can realize gauge head base respectively
Seat is displaced in three-dimensional i.e. three mutually orthogonal direction, and the member of translational structure is simple, easy for installation, measurement accuracy
It is high；
3, component of the present invention of replying includes being respectively arranged on guide groove one, guide groove two, the spring on guide groove three
Guide groove two, guide groove three and gauge head pedestal can be returned back to initial position respectively, i.e., by piece one, spring leaf two, spring leaf three
The position of three laser beams being incident on three photodetectors is returned back into original position, convenient for the survey of gauge head next time
Amount；
4, three laser sources, three photodetectors and member of translational are integrated on shell by the present invention, convenient in essence
It is mounted and dismounted on close measuring instrument, stability is more preferable in measurement process；
5, gauge head of the invention replys component and member of translational uses and parallel spring structure is laminated, easy to process and installation,
Make measuring head structure more compact using Z-shaped reed structure simultaneously.
Detailed description of the invention:
Fig. 1 is a kind of structural schematic diagram of direct incident-type light arm scale-up version 3-D scanning gauge head of the present invention；
Fig. 2 is the index path of three laser sources in Fig. 1, three laser beams, three photodetectors and the cooperation of gauge head pedestal；
Fig. 3 is the top view that member of translational and reply component and gauge head pedestal are used cooperatively in Fig. 1；
Fig. 4 is the front view of Fig. 3；
Fig. 5 is that 3-D scanning gauge head is subjected to displacement what rear laser source one, laser beam one and photodetector one cooperated in Fig. 1
Optical path comparison diagram；
Fig. 6 changes the schematic diagram of displacement equations multiple after rotating by a certain angle for photodetector one in Fig. 5.
Fig. 7 is the structural schematic diagram of second of direct incident-type light arm scale-up version 3-D scanning gauge head；
Fig. 8 is the 3-D scanning gauge head agent structure schematic diagram that parallel spring structure is used in embodiment 3；
Fig. 9 is gauge head pedestal mounting base positive structure diagram in Fig. 8；
It is marked in Fig. 1-7:
11, laser source one, 12, laser source two, 13, laser source three, 21, laser beam one, 22, laser beam two, 23, laser beam
Three, 31, photodetector one, 32, photodetector two, 33, photodetector three, 4, gauge head pedestal, 51, spring leaf one, 52,
Spring leaf two, 53, spring leaf three, 6, measuring staff, 7, survey ball, 8, member of translational, 81, guide groove one, 82, guide groove two, 83, guiding
Slot three, 84, sliding block, 9, shell；
It is marked in Fig. 8-9:
11, laser source one, 12, laser source two, 13, laser source three, 21, laser beam one, 22, laser beam two, 23, laser beam
Three, 31, photodetector one, 32, photodetector two, 33, photodetector three, 4, gauge head pedestal, 51, spring leaf one, 52,
Spring leaf two, 53, spring leaf three, 6, measuring staff, 7, survey ball, 85, hollow reed, 86, reed, 87, Z-shaped reed, 9, shell, 91,
Gauge head pedestal mounting base, 92, reed mounting base, 93, fixed installation panel.
Specific embodiment
Below with reference to test example and specific embodiment, the present invention is described in further detail.But this should not be understood
It is all that this is belonged to based on the technology that the content of present invention is realized for the scope of the above subject matter of the present invention is limited to the following embodiments
The range of invention.
Embodiment 1
As shown in Figure 1, 2, a kind of direct incident-type light arm scale-up version 3-D scanning gauge head, comprising:
Three laser sources, i.e. laser source 1, laser source 2 12 and laser source 3 13 generate three laser beams, i.e., respectively
Laser beam 1, laser beam 2 22 and laser beam 3 23；
Gauge head pedestal 4, the gauge head pedestal 4 are equipped with laser source 1, laser source 2 12 and laser source 3 13, Yi Jiyong
In the measuring staff 6 and survey ball 7 of detection；
Three photodetectors, i.e. photodetector 1, photodetector 2 32 and photodetector 3 33, are used respectively
In reception laser beam 1, laser beam 2 22 and laser beam 3 23；
Member of translational, for moving in a straight line gauge head pedestal 4；
Component is replied, for gauge head pedestal 4 to be returned back to initial position；
Processing system receives respectively according on photodetector 1, photodetector 2 32 and photodetector 3 33
The three-D displacement change for surveying ball 7 is calculated in the 3 23 incoming position changing value of laser beam 1, laser beam 2 22 and laser beam arrived
Change value.
Wherein, three above-mentioned photodetectors are arranged in a mutually vertical manner, and member of translational is for translating gauge head pedestal 4, with reality
The position that existing laser beam is incident on corresponding photodetector changes, to realize the measurement of gauge head displacement.
As shown in Figure 3,4, which includes two guide grooves 1 positioned at horizontal direction, two guide grooves 1 it
Between vertically horizontal sliding be equipped with a guide groove 2 82, guide groove 2 82 is equipped with a guide groove 3 83, guide groove
Perpendicular slides up and down the connection gauge head pedestal 4 on 3 83.Since the member of translational respectively includes guide groove 1, guiding
Slot 2 82 and guide groove 3 83, wherein guide groove 2 82 can the horizontal sliding of respective guide slot 1, guide groove 3 83 opposite can lead
To the horizontal sliding of slot 2 82, the glide direction of guide groove 1 and the glide direction of guide groove 2 82 are mutually perpendicular to, guide groove two
82 glide direction and the glide direction of guide groove 3 83 are mutually perpendicular to, and guide groove 3 83 is surveyed by the connection of 84 vertical sliding of sliding block
Head pedestal 4, gauge head pedestal 4 can slide up and down on guide groove 3 83, therefore can realize gauge head pedestal 4 in three-dimensional respectively
Direction i.e. three mutually orthogonal direction is displaced.As four-headed arrow is direction of displacement in Fig. 3.
As shown in Figure 3,4, above-mentioned reply component includes spring leaf one, spring leaf two, spring leaf three, and wherein reed one is set to
On at least one guide groove 1 and for guide groove 2 82 to be returned back to initial position, reed two is set at least one guide groove
On 2 82 and for the guide groove 3 83 to be returned back to initial position, reed three is set on guide groove 3 83 and is used for gauge head
Pedestal 4 returns back to initial position.The spring leaf one, spring leaf two, spring leaf three can be respectively by guide grooves 2 82, guide groove three
83 and gauge head pedestal 4 return back to initial position, i.e., the position of three laser beams being incident on three photodetectors is replied
To original position, convenient for the measurement next time of gauge head system.
Above-mentioned gauge head pedestal 4 is cuboid, photodetector 1, photodetector 2 32 and 3 33 liang of photodetector
Two are arranged in a mutually vertical manner.
The 3-D scanning gauge head further includes shell 9, and three laser sources are arranged on gauge head pedestal 4, three photodetectors
It is connected in shell 9, which is spring, wherein the one end for replying component 5 is connected on shell 9, the other end is connected to
On gauge head pedestal 4.It include three laser sources, three photodetectors, gauge head pedestal, member of translational and reply portion in the shell
Part is easily installed and dismantles.
The novel three-dimensional scanning feeler emits three laser beams using three laser sources respectively, and every beam laser beam is flat
Row laser beam is incident on three photodetectors, and each photodetector can incude the incoming position of corresponding laser beam.When
Member of translational drives gauge head pedestal to move in a straight line, i.e., member of translational can translate gauge head pedestal along different directions, then laser source
It changes with corresponding photodetector distance, i.e., three beams of laser beam is incident on the also phase of the position on corresponding photodetector respectively
It should change, according to geometrical relationship, processing system is incident on the incidence on corresponding photodetector to each laser beam respectively
Change in location value is calculated and is analyzed, can obtain gauge head pedestal be located at its straight-line displacement direction change in displacement value, into
And can be realized the gauge head pedestal in the three-D displacement measurement of three direction compositions, gauge head pedestal passes through reply portion after being subjected to displacement
Part can return back to initial position, convenient for measurement next time.
Above-mentioned photodetector 1, photodetector 2 32 and photodetector 3 33 are all made of one-dimensional position sensitive spy
Survey device.The Position-Sensitive Detector (English is Position Sensitive Detector, abbreviation PSD), belongs to semiconductor device
Part is generally made into PN structure, its working principle is that being based on lateral photo effect, can be used in the precise measurement of position coordinates, has
Have the advantages that high sensitivity, high-resolution, fast response time and configuration circuit are simple.
One Dimensional Position Sensitive Detectors (abbreviation one-dimensional PSD) can detect a bright spot in its a unique direction
The movement of upper surface.
One-dimensional PSD is mounted on to X-axis, Y-axis or Z axis or other directions of shell 9 respectively, to obtain it in the direction
Shift value, and compensated on the measured value of measured workpiece, to obtain the more accurate measured value of the one-dimensional square.
At least one in photodetector 1, photodetector 2 32 and photodetector 3 33 can be rotation connection
On shell 9.Because rotatable photodetector can change photodetector and the relative position of corresponding laser source and folder
Angle, so as to change the amplification factor that photodetector measurement gauge head pedestal 4 is displaced, three photodetectors can change
Pedestal 4 is measured in the displacement equations multiple for being located at different directions, to meet actual needs.
As shown in figure 5, to realize three-dimensional measurement, the corresponding position of gauge head pedestal 4 construct respectively according to Fig. 1 X-axis, Y-axis,
Z axis three-D displacement optical path realizes the measurement of X-direction displacement, Y-direction displacement and Z-direction displacement respectively.4 water of gauge head pedestal
During translation is dynamic, the incidence point that laser beam is incident on corresponding photodetector changes, it is assumed that laser beam 1 is incident on
On photodetector 1 and the angle of its incident light and photodetector 1 is α degree, when gauge head translate in the horizontal direction away from
When from for x, the measurement distance of photodetector 1 is y, then, the gauge head pedestal 4 obtained measured by photodetector 1
Displacement equations multiple is
As shown in fig. 6, rotating and being tilted a certain angle photodetector 1, after rotating θ, it can adjust and put again
Big multiple, obviously it can be seen that one-dimensional position sensitive detection when gauge head pedestal 4 translates identical distance x, after inclination in figure
The incoming position of laser beam is changed on device, and the spacing of the two becomes larger, and the spacing of the two is xtan α cos θ+x
Tan α sin θ cot (α-θ), at this point, 4 displacement equations of gauge head pedestal obtained measured by the One Dimensional Position Sensitive Detectors 31
Multiple is tan α cos θ+tan α sin θ cot (α-θ).It can be adjusted according to different needs.
In use, the 3-D scanning gauge head is mounted on precision measurement instrument, due to connecting measuring staff 6 on gauge head pedestal 4 and surveying
Ball 7 surveys ball 7 and is used to directly contact progress position measurement with measured workpiece, when surveying ball 7 and measured workpiece directly contacts, by
Resistance and generate displacement, survey ball 7 drive gauge head pedestal 4 displacement is generated on member of translational, pass through three laser sources, three photoelectricity
Detector, processing system cooperation, can be calculated the displacement for surveying ball 7, survey displacement when ball 7 contacts measured workpiece with compensation and lead
The measured workpiece position measured deviation of cause passes through since each photodetector can obtain the displacement of a rectilinear direction
Three photodetectors can access the displacement in three different rectilinear directions, to obtain measured workpiece in gauge head pedestal 4
Three-dimensional on more accurate measurement coordinate, full accuracy can reach Nano grade, improve 3-D scanning gauge head
Measurement accuracy.The gauge head simplifies structure, reduces production cost, is easy to batch machining manufacture.
Embodiment 2
As shown in fig. 7, a kind of direct incident-type light arm scale-up version 3-D scanning gauge head, comprising:
Three laser sources, i.e. laser source 1, laser source 2 12 and laser source 3 13 generate three laser beams, i.e., respectively
Laser beam 1, laser beam 2 22 and laser beam 3 23；
Three photodetectors, i.e. photodetector 1, photodetector 2 32 and photodetector 3 33, are used respectively
In reception laser beam 1, laser beam 2 22 and laser beam 3 23；
Gauge head pedestal 4, the gauge head pedestal 4 are equipped with photodetector 1, photodetector 2 32 and photodetection
Device 3 33, and measuring staff 6 and survey ball 7 for detection；
Member of translational, for moving in a straight line gauge head pedestal 4；
Component is replied, for gauge head pedestal 4 to be returned back to initial position；
Processing system receives respectively according on photodetector 1, photodetector 2 32 and photodetector 3 33
The three-D displacement change for surveying ball 7 is calculated in the laser beam 1 arrived, 3 23 incoming position changing value of laser beam 2 22 and laser beam
Change value.
Wherein, three above-mentioned photodetectors are arranged in a mutually vertical manner, and member of translational is for translating gauge head pedestal 4, with reality
The position that existing laser beam is incident on corresponding photodetector changes, to realize the measurement of gauge head displacement.
As shown in Figure 3,4, which includes two guide grooves 1 positioned at horizontal direction, two guide grooves 1 it
Between vertically horizontal sliding be equipped with a guide groove 2 82, guide groove 2 82 is equipped with a guide groove 3 83, guide groove
Perpendicular slides up and down the connection gauge head pedestal 4 on 3 83.Since the member of translational respectively includes guide groove 1, guiding
Slot 2 82 and guide groove 3 83, wherein guide groove 2 82 can the horizontal sliding of respective guide slot 1, guide groove 3 83 opposite can lead
To the horizontal sliding of slot 2 82, the glide direction of guide groove 1 and the glide direction of guide groove 2 82 are mutually perpendicular to, guide groove two
82 glide direction and the glide direction of guide groove 3 83 are mutually perpendicular to, and guide groove 3 83 is surveyed by the connection of 84 vertical sliding of sliding block
Head pedestal 4, gauge head pedestal 4 can slide up and down on guide groove 3 83, therefore can realize gauge head pedestal 4 in three-dimensional respectively
Direction i.e. three mutually orthogonal direction is displaced.As four-headed arrow is direction of displacement in Fig. 3.
As shown in Figure 3,4, above-mentioned reply component includes spring leaf one, spring leaf two, spring leaf three, and wherein spring leaf one is set
In at least one guide groove 1 and for guide groove 2 82 to be returned back to initial position, spring leaf two is led set at least one
To on slot 2 82 and for the guide groove 3 83 to be returned back to initial position, spring leaf three is set on guide groove 3 83 and is used for
Gauge head pedestal 4 is returned back into initial position.The spring leaf one, spring leaf two, spring leaf three, can respectively by guide groove 2 82,
Guide groove 3 83 and gauge head pedestal 4 return back to initial position, i.e. being incident to three laser beams on three photodetectors
Position returns back to original position, convenient for the measurement next time of gauge head system.
Above-mentioned gauge head pedestal 4 is cuboid, photodetector 1, photodetector 2 32 and 3 33 liang of photodetector
Two are arranged in a mutually vertical manner.
The 3-D scanning gauge head further includes shell 9, and three photodetectors are arranged on gauge head pedestal 4, three laser sources
It is connected in shell 9, which is spring, wherein the one end for replying component 5 is connected on shell 9, the other end is connected to
On gauge head pedestal 4.It include three laser sources, three photodetectors, gauge head pedestal, member of translational and reply portion in the shell
Part is easily installed and dismantles.
The novel three-dimensional scanning feeler emits three laser beams using three laser sources respectively, and every beam laser beam is flat
Row laser beam is incident on three photodetectors, and each photodetector can incude the incoming position of corresponding laser beam.When
Member of translational drives gauge head pedestal to move in a straight line, i.e., member of translational can translate gauge head pedestal along different directions, then laser source
It changes with corresponding photodetector distance, i.e., three beams of laser beam is incident on the also phase of the position on corresponding photodetector respectively
It should change, according to geometrical relationship, processing system is incident on the incidence on corresponding photodetector to each laser beam respectively
Change in location value is calculated and is analyzed, can obtain gauge head pedestal be located at its straight-line displacement direction change in displacement value, into
And can be realized the gauge head pedestal in the three-D displacement measurement of three direction compositions, gauge head pedestal passes through reply portion after being subjected to displacement
Part can return back to initial position, convenient for measurement next time.
The present embodiment is consistent with 1 principle of embodiment, and only photodetector is mounted on gauge head pedestal 4, and laser source 1 is installed
On shell 9.
Embodiment 3
A kind of direct incident-type light arm scale-up version 3-D scanning gauge head, it is such as the same manner as in Example 1, comprising:
As shown in figs. 1-7, three laser sources, i.e. laser source 1, laser source 2 12 and laser source 3 13, generate three respectively
Laser beam, i.e. laser beam 1, laser beam 2 22 and laser beam 3 23；
Gauge head pedestal 4 including the measuring staff 6 for detection and surveys ball 7；
Three laser sources can be disposed thereon by gauge head pedestal 4, can also be disposed thereon three photodetectors；
Three photodetectors, i.e. photodetector 1, photodetector 2 32 and photodetector 3 33, are used respectively
In reception laser beam 1, laser beam 2 22 and laser beam 3 23；
Member of translational and reply component, for moving in a straight line gauge head pedestal 4, to change, photodetector is corresponding to swash
The incidence point position of light beam；
Component is replied, for gauge head pedestal 4 to be returned back to initial position；
Member of translational is realized using parallel spring structure in the present embodiment and replys the function of component.
Processing system receives respectively according on photodetector 1, photodetector 2 32 and photodetector 3 33
The three-D displacement change for surveying ball 7 is calculated in the laser beam 1 arrived, 3 23 incoming position changing value of laser beam 2 22 and laser beam
Change value.
Unlike embodiment 1, the member of translational and reply component of the scanning feeler are different, two of them position
Move direction member of translational and reply component pass through one parallel spring structure realize, the member of translational in another direction and
Component is replied to realize by a Z-shaped reed structure.
As shown in Figure 8,9, main structure is mainly made of two layers of parallel spring structure and a Z-shaped reed.Wherein
Gauge head pedestal 4 is mounted on 4 Z-shaped reeds 87, and specifically 4 Z-shaped reeds 87 are connected to gauge head pedestal mounting base 91 on one side
On, the another side of 4 Z-shaped reeds 87 is connected on gauge head pedestal 4, and gauge head pedestal 4 can be with respect to Fig. 9 perpendicular to the direction of paper
It moves back and forth.Gauge head pedestal mounting base 91 is connect with reed mounting base 92 by 2 hollow reeds 85 being parallel to each other, and gauge head is made
Mounting base 91 can be under the action of hollow reed 85, back and forth with respect to reed mounting base 92 along the direction perpendicular to hollow reed 85
It swings.Reed mounting base 92 is connected to by 2 parallel reeds 86 and is fixedly mounted on panel 93, reed 86 and hollow reed 85
It is arranged in a mutually vertical manner, reed mounting base 92 is allow to fix installation panel 93 relatively back and forth in the direction perpendicular to 86 plane of reed
It swings.To realize gauge head pedestal 4 the linear motion of mutually perpendicular two hollow reeds 85 and 86 in-plane of reed with
Return motion；In addition, realizing gauge head pedestal 4 in the linear motion in another direction by 4 Z-shaped reeds 87 and replying fortune
It is dynamic, to form gauge head pedestal 4 in the three different rectilinear direction i.e. direction XYZ straight-line displacements.
Photodetector 31, photodetector 32, photodetector 33 may be mounted on gauge head shell, or be mounted on survey
On head pedestal 4.Laser source 11, laser source 12, laser source 13, which are mounted on, to be fixedly mounted on panel 93, or is mounted on gauge head shell
On.
By above-mentioned main structure by cooperating with three laser beams, three photodetectors, gauge head pedestal 4 is conveniently obtained
Offset deviation in three different rectilinear direction, that is, directions XYZ, it is most high-precision to obtain the more accurate position coordinates of measured workpiece
Degree can reach Nano grade, improve the measurement accuracy of 3-D scanning gauge head；The gauge head simplifies structure, reduces and is produced into
This, is easy to batch machining manufacture.
Above embodiments are only to illustrate the present invention and not limit the technical scheme described by the invention, although this explanation
The present invention has been described in detail referring to above-mentioned each embodiment for book, but the present invention is not limited to above-mentioned specific implementation
Mode, therefore any couple of present invention modifies or equivalent replacement；And the technical side of all spirit and scope for not departing from invention
Case and its improvement, are intended to be within the scope of the claims of the invention.
Claims (12)
1. a kind of direct incident-type light arm scale-up version 3-D scanning gauge head characterized by comprising
Three laser sources, for emitting three laser beams, i.e. laser beam one (21), laser beam two (22) and laser beam three (23)；
Three photodetectors, i.e. photodetector one (31), photodetector two (32) and photodetector three (33), it is described
Photodetector one (31) is oppositely arranged with laser source one (11), and the photodetector one (31) is for receiving the laser
The directly incident laser beam one (21) in source one (11)；The photodetector two (32) is opposite with laser source two (12) to be set
It sets, and the photodetector two (32) is used to receive the directly incident laser beam two (22) of the laser source two (12)；
The photodetector three (33) is oppositely arranged with laser source three (13), and the photodetector three (33) is described for receiving
The directly incident laser beam three (23) of laser source three (13)；
Gauge head pedestal (4), the gauge head pedestal are equipped with the laser source one (11), laser source two (12) and laser source three
(13), and for detection measuring staff (6) and survey ball (7)；
Member of translational, for moving in a straight line the gauge head pedestal (4), wherein the photodetector one (31), photoelectricity are visited
Survey device two (32), the plane of incidence of photodetector three (33) is arranged in a mutually vertical manner, the member of translational is used for the gauge head base
Seat (4) is respectively along the relatively described photodetector one (31), three phases of photodetector two (32), photodetector three (33)
Mutually vertical direction is mobile；
Component is replied, for the gauge head pedestal (4) to be returned back to initial position；
Processing system, according on the photodetector one (31), photodetector two (32) and photodetector three (33) points
The laser beam one (21) not obtained, laser beam two (22) and laser beam three (23) incoming position changing value, are calculated the survey
The three-D displacement changing value of ball (7).
2. a kind of direct incident-type light arm scale-up version 3-D scanning gauge head according to claim 1, which is characterized in that described
Member of translational includes at least one guide groove one (81), is vertically equipped at least one on all guide grooves one (81)
Guide groove two (82) is vertically equipped at least one guide groove three (83), Suo Yousuo on all guide grooves two (82)
State the gauge head pedestal (4) that is slidably connected on guide groove three (83).
3. a kind of direct incident-type light arm scale-up version 3-D scanning gauge head according to claim 1, which is characterized in that also wrap
It includes shell (9), the photodetector one (31), photodetector two (32) and photodetector three (33) are connected to the shell
In vivo, the reply component (5) is spring, and wherein one end is connected on the shell (9), the other end is connected to the gauge head base
On seat (4).
4. a kind of direct incident-type light arm scale-up version 3-D scanning gauge head according to claim 3, which is characterized in that at least
One photodetector rotation is connected on the shell (9).
5. a kind of direct incident-type light arm scale-up version 3-D scanning gauge head according to claim 1 to 4, feature exist
In the photodetector one (31), photodetector two (32) and photodetector three (33) are Position-Sensitive Detector.
6. a kind of direct incident-type light arm scale-up version 3-D scanning gauge head according to claim 5, which is characterized in that described
Photodetector one (31), photodetector two (32) and photodetector three (33) are One Dimensional Position Sensitive Detectors.
7. a kind of direct incident-type light arm scale-up version 3-D scanning gauge head characterized by comprising
Three laser sources, for emitting three laser beams, i.e. laser source one (11) transmitting laser beam one (21), laser source two (12)
Emit laser beam two (22), laser source three (13) emits laser beam three (23)；
Three photodetectors, i.e. photodetector one (31), photodetector two (32) and photodetector three (33), it is described
Photodetector one (31) is oppositely arranged with laser source one (11), and the photodetector one (31) is for receiving the laser
The directly incident laser beam one (21) in source one (11)；The photodetector two (32) is opposite with laser source two (12) to be set
It sets, and the photodetector two (32) is used to receive the directly incident laser beam two (22) of the laser source two (12)；
The photodetector three (33) is oppositely arranged with laser source three (13), and the photodetector three (33) is described for receiving
The directly incident laser beam three (23) of laser source three (13)；
Gauge head pedestal (4), the gauge head pedestal are equipped with the photodetector one (31), photodetector two (32) and photoelectricity
Detector three (33), and measuring staff (6) and survey ball (7) for detection；
Member of translational, for moving in a straight line the gauge head pedestal (4), wherein the photodetector one (31), photoelectricity are visited
Survey device two (32), the plane of incidence of photodetector three (33) is arranged in a mutually vertical manner, the member of translational is used for the gauge head base
Seat (4) is respectively along the relatively described photodetector one (31), three phases of photodetector two (32), photodetector three (33)
Mutually vertical direction is mobile；
It replys component (5), for the gauge head pedestal (4) to be returned back to initial position；
Processing system, according on the photodetector one (31), photodetector two (32) and photodetector three (33) points
The laser beam one (21) not obtained, laser beam two (22) and laser beam three (23) incoming position changing value, are calculated the survey
The three-D displacement changing value of ball (7).
8. a kind of direct incident-type light arm scale-up version 3-D scanning gauge head according to claim 7, which is characterized in that described
Member of translational includes at least one guide groove one (81), is vertically equipped at least one on all guide grooves one (81)
Guide groove two (82) is vertically equipped at least one guide groove three (83), Suo Yousuo on all guide grooves two (82)
State the gauge head pedestal (4) that is slidably connected on guide groove three (83).
9. a kind of direct incident-type light arm scale-up version 3-D scanning gauge head according to claim 7, which is characterized in that also wrap
It includes shell (9), the laser source one (11), laser source two (12) and laser source three (13) are fixed in the shell (9), described
Replying component (5) is spring, and wherein one end is connected on the shell (9), the other end is connected on the gauge head pedestal (4).
10. a kind of direct incident-type light arm scale-up version 3-D scanning gauge head according to claim 9, which is characterized in that extremely
A few laser source rotation is connected on the shell (9).
11. according to a kind of any direct incident-type light arm scale-up version 3-D scanning gauge head of claim 7-10, feature
It is, the photodetector one (31), photodetector two (32) and photodetector three (33) are Position-Sensitive Detector.
12. a kind of direct incident-type light arm scale-up version 3-D scanning gauge head according to claim 11, which is characterized in that institute
Stating photodetector one (31), photodetector two (32) and photodetector three (33) is One Dimensional Position Sensitive Detectors.
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| US9803972B2 (en) * | 2015-12-17 | 2017-10-31 | Mitutoyo Corporation | Optical configuration for measurement device |
| CN105547157B (en) * | 2016-03-07 | 2018-04-06 | 安徽电气工程职业技术学院 | Three-dimensional micro-nano trigger probe |
| CN105627949B (en) * | 2016-03-07 | 2017-12-26 | 合肥工业大学 | Optical sensing formula three-dimensional high-precision contact scanning measuring probe |
| CN105783772B (en) * | 2016-03-07 | 2018-06-26 | 合肥工业大学 | Single-sensor formula three-dimensional micro-nano contact triggering measuring probe |
| CN106403835B (en) * | 2016-10-10 | 2018-11-30 | 北方民族大学 | One-dimensional laser scanning testing head |
| CN106441137B (en) * | 2016-10-10 | 2018-11-30 | 北方民族大学 | 3 D laser scanning testing head |
| CN106289063B (en) * | 2016-10-10 | 2018-10-30 | 北方民族大学 | The one-dimensional laser scanning testing head of single light source |
| CN106323171B (en) * | 2016-10-10 | 2018-10-30 | 北方民族大学 | Two dimensional laser scanning gauge head |
| RU2767590C2 (en) * | 2018-09-19 | 2022-03-17 | АРТЕК ЮРОП С.а.р.Л. | Three-dimensional scanner with data collection feedback |
| IT201900006536A1 (en) * | 2019-05-06 | 2020-11-06 | Marposs Spa | PROBE FOR CHECKING THE POSITION OR LINEAR DIMENSIONS OF A MECHANICAL PART |
| CN112781495B (en) * | 2020-12-31 | 2022-07-12 | 合肥工业大学 | Three-dimensional contact trigger type measuring probe based on suspension laser structure |
| CN116358415B (en) * | 2023-06-01 | 2023-08-15 | 通达电磁能股份有限公司 | Vibration isolator and space multidimensional information measurement method |
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