CN104457613B - A kind of three-dimensional micro-nano contacts trigger probe - Google Patents
A kind of three-dimensional micro-nano contacts trigger probe Download PDFInfo
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- CN104457613B CN104457613B CN201410834005.4A CN201410834005A CN104457613B CN 104457613 B CN104457613 B CN 104457613B CN 201410834005 A CN201410834005 A CN 201410834005A CN 104457613 B CN104457613 B CN 104457613B
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Abstract
The invention discloses a kind of three-dimensional micro-nano contact trigger probe, it is characterized in that setting cross suspension piece in the center of a clamping rings, cantilever reed is connected with the arm end of each cantilever of cross suspension piece, the other end of each cantilever reed is connected with clamping rings, forms suspension structure of the cross suspension piece in clamping rings；Central position in cross suspension piece side sets measurement central plane speculum, and opposite side installs the probe that ball is surveyed with ruby；The collimated light that laser is launched is incident upon on measurement central plane speculum, and form reflected light through measuring after central plane speculum reflects, reflected light on 4 quadrant detector, displacement and the two dimension angular of central plane speculum is measured with 4 quadrant detector by lens focus.The present invention is obtained in that the Effect on Detecting of high accuracy, high sensitivity and small dynamometry, while having high stability, low cost and debuging convenient advantage.
Description
Technical field
The present invention relates to micro-nano testing field, be in particular it is a kind of apply in Nano Coordinate Measuring Machine connect
Trigger-type three-dimensional probe is touched, the three-dimensional appearance of body surface can be sensed.
Background technology
In recent years, the fast development of microelectric technique has triggered a revolution for microminaturization, especially MEMS
The development of the process technology of MEMS, occurs in that the micro devices of various micro/nano levels, such as micro-cell electron capture detector, micro-hole, miniature spray
The MEMS products such as mouth, miniature step.The machining accuracy of these micro elements is in micro-nano magnitude, to carry out essence to these micro elements
Close measurement is it is necessary to develop special high-precision detecting method and technological means.For this various countries' associated mechanisms is devoted to research tool
There is the three coordinate measuring machine of nano-precision.
The probe segment of three coordinate measuring machine is one of important core part of three coordinate measuring machine, the certainty of measurement of probe
Directly determine the overall measurement accuracy of three coordinate measuring machine.Probe has contact and contactless a point, and contact probe can be with
For measure non-contact optical probe the immeasurable workpiece with features such as inclined-plane, step, deep hole, circular arcs.
The contact probe announced in the world at present mainly includes：The atom of National Institute of Standards and Technology
Power probe, the capacitance probe of United Kingdom National physics laboratory, the fibre-optical probe of Tokyo University, the DVD probes of Taiwan Univ., day
The micro-touch of Tianjin university feels the confocal probe of probe, HeFei University of Technology.Existing probe is required to integrated 2-4 high-precision sensing
Device, and there is a problem of that complex structure, resetting difficulty be big, high cost.If the exploitation of Eindhoven universities of Holland is based on strain
The three-dimensional micro-contact sensing probe of meter, is together by precipitation, plate-making, etching etc. by strain gauge, circuit and flexible member
Being made after technique turns into an entirety, and the power of gauge head all directions and the change of displacement are entered by the strain gauge on sensitive fine strain of millet
The detection sensitivity and precision of row detection, its small volume, but foil gauge are all than relatively low, and its gauge head uses triangle topology
Structure, decoupling is complicated.Measurement verification office of Swiss Confederation METAS develops a kind of electromagnetic type micro tactile probe, and gauge head has three
The free degree in individual direction, the detection in each direction realizes that the dynamometry in three directions is identical, and structure is mainly by aluminium using inductance
It is made, the measurement range of electromagnetic type gauge head is larger, it is higher and contact force is smaller laterally to pick up survey sensitivity, but its structure is very multiple
It is miscellaneous, debug difficulty, and use triangle suspended structure, decoupling is bothered very much.
The content of the invention
The present invention is to avoid the weak point existing for above-mentioned prior art, there is provided a kind of three-dimensional micro-nano contact triggering
Formula is popped one's head in, to obtain high accuracy, high sensitivity and the Effect on Detecting of small dynamometry, while having high stability, low cost and dress
Adjust convenient advantage.
The present invention is adopted the following technical scheme that to solve technical problem：
Three-dimensional micro-nano of the present invention contact trigger probe is structurally characterized in that it includes：
One head unit, is to set cross suspension piece in the center of a clamping rings, in each outstanding of the cross suspension piece
The arm end of arm is connected with cantilever reed, and the other end of each cantilever reed is connected with clamping rings, forms cross suspension piece
Suspension structure in clamping rings；Central position in the cross suspension piece side sets measurement central plane reflection
Mirror, opposite side installs the probe that ball is surveyed with ruby；
One measuring unit, the light channel structure for setting the measuring unit is：The collimated light projected by laser is incident upon institute
State on measurement central plane speculum, and reflected light, the reflected light are formed after the measurement central plane speculum reflection
By lens focus on 4 quadrant detector, with the displacement of 4 quadrant detector measurement central plane speculum and two dimension
Angle.
The design feature of three-dimensional micro-nano contact trigger probe of the present invention lies also in：Setting deflects and angle and front and rear bows
The laser emitting angle-adjusting mechanism that elevation angle degree can be adjusted, the laser is fixedly installed on laser emitting angle-adjusting mechanism
In, by adjusting the laser emitting angle-adjusting mechanism, so that the laser energy quilt after the reflection of measured central plane speculum
Lens focus are at the detection center of the 4 quadrant detector.
The design feature of three-dimensional micro-nano contact trigger probe of the present invention lies also in：One cylinder is set, in the circle
Each middle cavity is distributed in cylinder, each middle cavity includes the first chamber and the second chamber；First chamber is used to that lens to be fixedly installed
And 4 quadrant detector；Second cavity is used for fixed laser shooting angle adjustment mechanism, and the head unit is fixed with it
Annulus is arranged on the bottom of the cylinder.
The design feature of three-dimensional micro-nano contact trigger probe of the present invention lies also in：The laser emitting angle adjustment machine
Structure includes the rectangular sleeve for being set with laser, and the lateral wall of the rectangular sleeve is set to lozenges, with rectangular sleeve
Used as confined planes, two lateral walls beyond confined planes are the scope of freedom to two adjacent lateral walls, the confined planes with it is described
Wedge is provided between the cavity wall in the second chamber, the wedge is made up of non-magnet material, by adjust the wedge with
Relative altitude between the confined planes realizes the adjustment at the angle of inclination of the rectangular sleeve.
The design feature of three-dimensional micro-nano contact trigger probe of the present invention lies also in：One is set on the wedge to lead to
Hole, and there is cam to be placed in the through hole, it is, as drive shaft, to be driven by rotation cam axle convex with the camshaft that cam is connected firmly
Wheel rotation in through-holes drives wedge to be moved along the lozenges on the lateral wall of the rectangular sleeve.
The design feature of three-dimensional micro-nano contact trigger probe of the present invention lies also in：Set in the through hole of the wedge
Magnet is equipped with, wedge is made up of non-magnet material, rectangular sleeve, cylinder and cam are permeability magnetic material and are made, utilized
The magnet makes the rectangular sleeve be positioned with cylinder.
Compared with the prior art, the present invention has the beneficial effect that：
1st, the present invention is sensed using optical pickocff, can be obtained than strain-type, pressure resistance type and inductance type transducer
The sensitivity of get Geng Gao and precision.
2nd, the present invention only can simultaneously be sensed with an optical pickocff and survey ball displacement in the horizontal and vertical directions,
With simple structure, debug conveniently, the distinguishing feature such as cost is relatively low and time stability is good.
3rd, the present invention uses high-precision optical pickocff, coordinates the suspension structure with highly sensitive and high stability, can
Scope is touched to reach 1 nanometer of resolving power, 8.2 nanometers of repeatability, allowing more than positive and negative 10 microns；Less than 0.4 milli ox/
The dynamometry of micron.
4th, the present invention realizes the adjustment of laser attitude by the way of mobile wedge, with displacement diminution effect, makes
Obtain Adjustment precision higher, adjustment is more convenient；Laser is supported with lozenges, more common micromatic setting is with preferably stabilization
Property.
Brief description of the drawings
Fig. 1 is general structure schematic diagram of the present invention；
Fig. 2 is general structure decomposing schematic representation of the present invention；
Fig. 3 is micro- autocollimator schematic diagram of the invention；
Fig. 4 for the present invention in for install laser adjustment structural representation；
Fig. 5 in the present invention detecting head towards cylinder inside structure schematic diagram；
Fig. 6 in the present invention detecting head towards cylinder outboard structure schematic diagram；
Fig. 7 and Fig. 8 is principle of the invention schematic diagram；
Label in figure：1a cylinders；1b circuit board cavities；1c threading holes；The chambers of 1d first；The chambers of 1e second；2 top cover of cylinder bodies；3 four
Quadrant detector；4 lens；5 lasers, 6 laser emitting angle-adjusting mechanisms；6a rectangular sleeves；6b wedges；6c camshafts；
6d cams；6e magnet；6f screwed holes；7 head units；7a clamping rings；7b cross suspensions piece, 7c cantilever reeds；In 7d measurements
Centre plane mirror；7e surveys ball；7f probes.
Specific embodiment
Three-dimensional micro-nano contact trigger probe includes in the present embodiment：
One head unit 7, is to set cross suspension piece 7b in the center of a clamping rings 7a, in each of cross suspension piece 7b
The arm end of cantilever is connected with cantilever reed 7c, and the other end of each cantilever reed 7c is connected with clamping rings 7a, forms cross and hangs
Floating suspension structures of the piece 7b in clamping rings 7a；Central position in cross suspension piece 7b sides sets measurement central plane
Speculum 7d, opposite side installs the probe 7f that ball 7e is surveyed with ruby；
One measuring unit, set measuring unit light channel structure be：The collimated light projected by laser 5 is projected in the measurements
Entreat on plane mirror 7d, and reflected light is formed through measuring after central plane speculum 7d reflects, reflected light is focused on by lens 4
On QPD 4 quadrant detectors 3, with the displacement of the measurement central plane speculum of QPD 4 quadrant detectors 3 7d and two dimension angular.
When probe 7f is touched in vertical direction, QPD 4 quadrant detectors 3 measure measurement central plane speculum 7d's
Shift value, when probe 7f is touched in the horizontal direction, the reflected light of measurement central plane speculum 7d is focused on by lens 4
On QPD 4 quadrant detectors 3, for sensing two-dimensional angular angle value of the measurement central plane speculum 7d along XY directions, when in measurement
When centre plane mirror 7d has small angle variation, focusing on the luminous point on 4 quadrant detector 3 can occur corresponding skew, so that
Sense two low-angles rotated along X-axis and Y-axis.
In specific implementation, corresponding structure setting also includes：
The laser emitting angle-adjusting mechanism 6 that deflect angle and pitch angle can be adjusted is set, and laser 5 is consolidated
Surely it is arranged in laser emitting angle-adjusting mechanism 6, by adjusting laser emitting angle-adjusting mechanism 6, so that measured center
Laser after plane mirror 7d reflections can be focused on the detection center of 4 quadrant detector 3 by lens 4, to ensure displacement and two
Tie up the zero of angular transducer XY values.
One cylinder 1a is set, each middle cavity is distributed in cylinder 1a, each middle cavity includes the first chamber 1d and the second chamber
1e；First chamber 1d is used to that lens 4 and 4 quadrant detector 3 to be fixedly installed；Second cavity 1e is adjusted for fixed laser shooting angle
Whole mechanism 6, head unit 7 is arranged on the bottom of cylinder 1a with its clamping rings 7a, and cylinder is set on the top of cylinder 1a
Top cover 2.Set for the ease of circuit, as shown in figure 1, setting one on the top of cylinder 1a is used for the circuit board of wiring harness plate
Chamber 1b, and threading hole 1c is set for threading.
In the present embodiment, laser emitting angle-adjusting mechanism 6 is two-dimentional micro-adjusting mechanism, and it is included for being set with laser 5
Rectangular sleeve 6a, the lateral wall of rectangular sleeve 6a is set to lozenges, is made with two lateral walls adjacent in rectangular sleeve 6a
It is confined planes, two beyond confined planes lateral wall is the scope of freedom, and wedge is provided between the cavity wall of confined planes and the second chamber 1e
Shape block 6b, by adjusting the adjustment that the relative altitude between wedge 6b and confined planes realizes the angle of inclination of rectangular sleeve 6a.
In the present embodiment, a rectangular through holes are provided with wedge 6b, the depth direction of through hole is perpendicular to wedge shape
The lozenges of block, and there is cam 6d to be placed in through hole, the camshaft 6c connected firmly with cam 6d be as drive shaft, it is convex by rotating
Rotations of the wheel shaft 6c with moving cam 6d in through-holes drives the lozenges movement on lateral walls of the wedge 6b along rectangular sleeve 6a.
In the present embodiment, for the ease of adjustment, wedge 6b is made up of non-magnet material, rectangular sleeve 6a, cylinder 1a
And cam is magnetic conductive material and is made, and magnet 6e is placed with the through hole of wedge 6b, and rectangular sleeve is made using magnet 6e
6a and cylinder 1a is positioned so that form patch using magnetic force between wedge 6b, rectangular sleeve 6a and cylinder 1a
Close.Adjustment process：Rotated by camshaft 6c bands moving cam 6d, wedge 6b is moved along the lozenges of rectangular sleeve 6a,
Rectangular sleeve 6a realizes the adjustment of deflection angle and the angle of pitch together with laser 5 so that measurement central plane speculum 7d
Reflected light focuses on the center position of 4 quadrant detector 3 through lens 4；Magnet 6e is used to aid in rectangular sleeve during adjustment
The positioning of 6a；So that clamped wedge 6b using magnetic force between rectangular sleeve 6a and cylinder 1a, and wedge 6b turns into
One entirety, causes the rectangular sleeve 6a and wedge 6b and cylinder 1a in the case of cam is non-rotary to keep geo-stationary.
Hole 6f is threaded in the sidepiece of rectangular sleeve 6a, for coordinating hexagonal socket screw laser 5 is obtained in rectangular sleeve 6a
Must be fixed；Hole is threaded in the sidepiece of cylinder 1a, for coordinating hexagonal socket screw, rectangular sleeve 6a and focusing is made respectively
Lens 4 are fixed in cylinder 1a.
Nanometer Three-Dimensional contact trigger-type measuring probe belongs to contact probe, in the same of sensing object surface three-dimensional morphology
When, it is ensured that body surface can not be destroyed, it is therefore desirable to highly sensitive mechanics mechanism.As flexible member in the present embodiment
Cantilever reed 7c uses beryllium-bronze reed, measurement central plane speculum 7d to be pasted onto the cross suspension piece 7b of suspension, and cross hangs
It is floating to be attached with three beryllium-bronze reeds between piece 7b and clamping rings 7a.When the front end ruby of probe 7f surveys ball 7e because connecing
Touch object and during stress, four beryllium-bronze elastic springs can deform, and cause cross suspension piece 7b and measurement central plane anti-
Penetrating mirror 7d can be subjected to displacement change with two dimension angular, and this change can be felt by the displacement on top and two dimension angular sensor
Survey.
The operation principle of the measuring unit in the present embodiment is as shown in Figure 7 and Figure 8：
The light sent from laser 5 is through measuring after central plane speculum 7d reflects by converging in QPD after condenser lens 4
On 4 quadrant detector 3.The measurement central plane speculum 7d angles glazing of 4 quadrant detector 3 corresponding with the change of vertical displacement
Point shape and the change of position, and then cause the change of the current signal size of the output of 4 quadrant detector 3, by electric current/electricity
The current signal that four quadrants are exported is converted to voltage signal by voltage conversion circuit, and V is designated as respectivelyA、VB、VC、VD.According to formula (a)
With formula (b), the change of the shape and position of luminous point on 4 quadrant detector 3 can be changed into the output of two-way voltage signal, this
Angle of the two-way voltage signal respectively with measurement central plane speculum two-dimensional directional is corresponding and linear within the specific limits
Relation；And the angle change of measurement plane speculum two-dimensional directional respectively with survey ball two mutually perpendicular directions in the horizontal plane
Displacement correspondence so that realize to survey displacement of ball measurement.
X=K [(VA+VB)-(VC+VD)] (a)
Y=K [(VA+VD)-(VB+VC)] (b)
In formula (a) and formula (b), X and Y is respectively survey ball two displacements of mutually perpendicular direction, V in the horizontal planeA、VB、
VC、VDFour voltage signals that four road current signals of respectively four quadrant outputs of 4 quadrant detector (QPD) are converted into；K is
Proportionality coefficient, K can obtain specific numerical value by way of demarcating.
The performance of trigger probe is contacted for the three-dimensional micro-nano tested in the present embodiment, is given birth to a German PI Corp.
On the basis of the Three-dimensional Parallel micromotion platform of product, thirdly axle repeatability is 2nm, its horizontal four direction, including X forward directions, X are born
To, Y is positive and Y negative senses, and the triggering repeatability of Z-direction is tested, and test data is shown in Table 1, and the result of table 1 shows, the probe
Triggering repeatability be 8.2nm.
The one direction of table 1 is repeated several times touching result
Claims (4)
1. a kind of three-dimensional micro-nano contacts trigger probe, it is characterized in that including：
One head unit (7), is to set cross suspension piece (7b) in the center of a clamping rings (7a), in the cross suspension piece
The arm end of each cantilever of (7b) is connected with cantilever reed (7c), the other end and the clamping rings (7a) of each cantilever reed (7c)
It is connected, forms suspension structure of cross suspension piece (7b) in clamping rings (7a)；In cross suspension piece (7b) side
Central position set measurement central plane speculum (7d), opposite side install with ruby survey ball (7e) probe
(7f)；
One measuring unit, the light channel structure for setting the measuring unit is：The collimated light projected by laser (5) is incident upon described
In measurement central plane speculum (7d), and reflected light is formed after measurement central plane speculum (7d) reflection, it is described
Reflected light is focused on 4 quadrant detector (3) by lens (4), anti-with the 4 quadrant detector (3) measurement central plane
Penetrate displacement and the two dimension angular of mirror (7d)；
When probe (7f) is touched in vertical direction, QPD 4 quadrant detectors (3) measure measurement central plane speculum (7d)
Shift value, when probe (7f) is touched in the horizontal direction, measurement central plane speculum (7d) reflected light by lens
(4) focus on QPD 4 quadrant detectors (3), for sensing two-dimensional angular of measurement central plane speculum (7d) along XY directions
Angle value, when measurement central plane speculum (7d) has small angle variation, the luminous point focused on 4 quadrant detector (3) can be sent out
Raw corresponding skew, so as to sense two low-angles rotated along X-axis and Y-axis；
The laser emitting angle-adjusting mechanism (6) that deflect angle and pitch angle can be adjusted, the laser are set
(5) it is fixedly installed in laser emitting angle-adjusting mechanism (6), by adjusting the laser emitting angle-adjusting mechanism (6), with
Laser after enabling measured central plane speculum (7d) to reflect focuses on the 4 quadrant detector (3) by lens (4)
Detection center；
One cylinder (1a) is set, and each middle cavity of distribution in the cylinder (1a), each middle cavity includes the first chamber
(1d) and the second chamber (1e)；First chamber (1d) is used to that lens (4) and 4 quadrant detector (3) to be fixedly installed；Described second
Cavity (1e) is used for fixed laser shooting angle adjustment mechanism (6), and the head unit (7) is arranged on its clamping rings (7a)
The bottom of the cylinder (1a).
2. three-dimensional micro-nano according to claim 1 contacts trigger probe, it is characterized in that：The laser emitting angle is adjusted
Whole mechanism (6) includes the rectangular sleeve (6a) for being set with laser (5), and the lateral wall of the rectangular sleeve (6a) is set to wedge
Shape face, used as confined planes, two lateral walls beyond confined planes are for freely for two adjacent lateral walls using in rectangular sleeve (6a)
Face, is provided with wedge (6b), by adjusting the wedge between cavity wall of the confined planes with second chamber (1e)
Relative altitude between (6b) and the confined planes realizes the adjustment at the angle of inclination of the rectangular sleeve (6a).
3. three-dimensional micro-nano according to claim 2 contacts trigger probe, it is characterized in that：On the wedge (6b)
One through hole is set, and there is cam (6d) to be placed in the through hole, the camshaft (6c) connected firmly with cam (6d) be as drive shaft,
Rotation by rotation cam axle (6c) with moving cam (6d) in through-holes drives wedge (6b) along the rectangular sleeve (6a)
Lateral wall on lozenges movement.
4. three-dimensional micro-nano according to claim 3 contacts trigger probe, it is characterized in that：At the wedge (6b)
Through hole in be provided with magnet (6e), wedge (6b) is made up of non-magnet material, rectangular sleeve (6a), cylinder (1a) and
Cam (6d) is permeability magnetic material and is made, and the rectangular sleeve (6a) is determined with cylinder (1a) using the magnet (6e)
Position.
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| CN201410834005.4A CN104457613B (en) | 2014-12-26 | 2014-12-26 | A kind of three-dimensional micro-nano contacts trigger probe |
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