CN104221128B

CN104221128B - Mobile body device, exposure device, the manufacture method of flat-panel screens and manufacturing method

Info

Publication number: CN104221128B
Application number: CN201380018913.XA
Authority: CN
Inventors: 青木保夫
Original assignee: Nikon Corp
Current assignee: Nikon Corp
Priority date: 2012-04-04
Filing date: 2013-04-03
Publication date: 2017-10-10
Anticipated expiration: 2033-04-03
Also published as: CN107577116B; WO2013150788A1; TWI691796B; JP2013214691A; HK1249777A1; KR20150003250A; CN107577116A; JP5910992B2; CN104221128A; TWI731628B; KR102163139B1; KR20200118217A; TW201400991A; TW202028888A; KR102228708B1

Abstract

The baseplate carrier device (20A) of the present invention, possess and extend scanning direction (X-direction), the 1st stepping guiding element (50) of the position for scanning crisscross (Y direction) can be displaced into, supported from below by the 1st stepping guiding element (50), it can move above in the position along scanning direction and be displaced into together with the 1st stepping guiding element (50) along the fine motion microscope carrier (30) for scanning crisscross position along the 1st stepping guiding element (50), and on the basis of above the 2nd stepping guiding element (54) face and using located at fine motion microscope carrier (30) Z sensors (38z) obtain fine motion microscope carrier (30) Z obliquity information position measurement system.

Description

Mobile body device, exposure device, the manufacture method of flat-panel screens and element manufacture Method

Technical field

The present invention be on mobile body device, exposure device, the manufacture method of flat-panel screens and manufacturing method, In detail, it is exposure on making mobile body device that moving body moves along set two dimensional surface, possessing foregoing mobile body device The manufacture method of the flat-panel screens of device and the foregoing exposure device of use and the element manufacture using foregoing exposure device Method.

Background technology

All the time, it is to use to incite somebody to action in the photoetching process of the electronic components such as manufacture liquid crystal display cells, semiconductor element It is formed at the exposure device that the pattern of mask (or graticule) is transferred to energy beam on glass substrate (or wafer).

As such a exposure device, it is a kind of have keep substrate fine motion microscope carrier supported from below by weight canceller, And the weight canceller is guided toward the guiding element of the movement in scanning intersection (cross scan) direction, can be with weight canceller one Rise and be displaced into the baseplate carrier device person of scanning direction and be widely known by the people (for example, referring to patent document 1).

With the maximization of substrate in recent years, baseplate carrier device also has a maximization and the increased tendency of weight.

Look-ahead technique document Prior Art

Patent document

Patent document 1：No. 2010/0266961 specification of U.S. Patent Application Publication No.

The content of the invention

To the means to solve the problem

The present invention is, a kind of mobile body device of the 1st viewpoint to possess in view of the above-mentioned facts：Guiding element, is extended set The 1st direction in two dimensional surface, can be displaced into the position along 2nd direction orthogonal with the 1st direction in the two dimensional surface；Move Kinetoplast, is supported from below by the guiding element, can along with the 1st face as defined in the guiding element be displaced into along the 1st direction position and can be with The guiding element is displaced into the position along the 2nd direction together；And position measurement system, by with another component institute different with the guiding element Positional information of the moving body in the direction intersected with the two dimensional surface is obtained as reference plane in defined 2nd face.

According to this invention, because the 2nd face is reference plane, thus guiding element the 1st face without precision prescribed.Accordingly, it is capable to make to lead The composition of part is simple, and can make mobile body device miniaturization, lightweight.

The mobile body device of 2nd viewpoint of the invention, possesses：Guiding element, extends the 1st direction in set two dimensional surface, energy The position along 2nd direction orthogonal with the 1st direction is displaced into the two dimensional surface；Moving body, is propped up from below by the guiding element Hold, can be somebody's turn to do along being displaced into the position along the 1st direction with guiding face as defined in the guiding element and edge can be displaced into together with the guiding element The position in the 2nd direction；And drive device, located at the guiding element, the moving body is driven in the direction intersected with the two dimensional surface.

According to this invention, set because guiding element is to drive moving body in the direction intersected with two dimensional surface, therefore with another Moving body is driven the situation in the direction intersected with two dimensional surface to compare by drive device, and composition can be made simple, and can make movement Body device miniaturization, lightweight.

The mobile body device of 3rd viewpoint of the invention, possesses：1st mobile member, extends the 1st in set two dimensional surface Direction, can be displaced into the position along 2nd direction orthogonal with the 1st direction in the two dimensional surface；2nd mobile member, is located at 1st mobile member, can be displaced into along the 1st mobile member along the 1st direction position and can be with the 1st mobile member one Rise and be displaced into the 2nd direction；And moving body, supported from below by the 1st mobile member, by the induction of the 2nd mobile member Moved along the two dimensional surface.

, can be along supporting moving body from below due to inducing the 2nd mobile member of moving body along two dimensional surface according to this invention The 1st mobile member be displaced into the 1st direction and can be moved together with the 1st mobile member along the 2nd direction, therefore device constitutes letter It is single.

The exposure device of 4th viewpoint of the invention, possesses：The present invention the 1st~the 3rd of set object is kept in foregoing moving body Any mobile body device and the aforesaid object kept in foregoing moving body use energy beam formation predetermined pattern in viewpoint Patterning device.

The manufacture method of the flat-panel screens of 5th viewpoint of the invention, comprising：Use the exposure device of the 4th viewpoint of the invention The action for exposing aforesaid object, and the action for making the aforesaid object after exposure develop.

The manufacturing method of 6th viewpoint of the invention, comprising：Exposure device using the 4th viewpoint of the invention makes preceding The action of body exposure, and the action for making the aforesaid object after exposure develop.

Brief description of the drawings

Fig. 1 is the figure of the composition for the liquid crystal exposure apparatus that outline shows the 1st embodiment.

The side view for the baseplate carrier device that Fig. 2 is had by Fig. 1 liquid crystal exposure apparatus.

The top view for the baseplate carrier device that Fig. 3 is had by Fig. 1 liquid crystal exposure apparatus.

Part B is the part A from Fig. 4 in the line B-B profile for the baseplate carrier device that part A is Fig. 3, Fig. 4 in Fig. 4 Baseplate carrier device take away the figure of partial element.

Fig. 5 for the baseplate carrier device of the variation (1) of the 1st embodiment top view.

In part A is Fig. 5 in Fig. 6 line C-C profile, Fig. 6 part B for the part A from Fig. 6 baseplate carrier device Take away the figure of partial element.

Fig. 7 for the baseplate carrier device of the variation (2) of the 1st embodiment of display figure.

Fig. 8 is the line D-D profile of Fig. 7 baseplate carrier device.

Fig. 9 for the baseplate carrier device of the variation (3) of the 1st embodiment of display figure.

The figure of the action of baseplate carrier devices of the Figure 10 to illustrate Fig. 9.

Figure 11 for the baseplate carrier device of the variation (4) of the 1st embodiment of display figure.

Figure 12 for the baseplate carrier device of the variation (5) of the 1st embodiment of display figure.

Figure 13 is the figure of the baseplate carrier device of the 2nd embodiment of display.

Figure 14 is the E-E line profiles of Figure 13 baseplate carrier device.

Figure 15 is the top view of Figure 13 baseplate carrier device.

Figure 16 is the F-F line profiles of Figure 15 baseplate carrier device.

The figure of the configuration of Z sensors in baseplate carrier devices of the Figure 17 to show Figure 13.

Figure 18 for the baseplate carrier device of the variation (1) of the 2nd embodiment of display figure.

Figure 19 is Figure 18 G-G line profiles.

Figure 20 for the baseplate carrier device of the variation (2) of the 2nd embodiment of display figure.

Figure 21 for the baseplate carrier device of the variation (3) of the 2nd embodiment of display figure.

Figure 22 is Figure 21 H-H line profiles.

Figure 23 for the baseplate carrier device of the variation (4) of the 2nd embodiment of display figure.

Figure 24 is Figure 23 I-I line profiles.

Embodiment

《1st embodiment》

Hereinafter, the 1st embodiment is illustrated according to part B in Fig. 1~Fig. 4.

The composition of the liquid crystal exposure apparatus 10 of the 1st embodiment of outline in Fig. 1.Liquid crystal exposure apparatus 10 for example with In liquid crystal display device (flat-panel screens) etc. rectangle (square) glass substrate P (hereinafter referred to as substrate P) be exposure object thing Step-scan (step＆scan) mode projection aligner, so-called scanning machine.

Liquid crystal exposure apparatus 10, is the mask for the mask M that 12, holding is formed with circuit pattern (mask pattern) with illumination Microscope carrier 14, projection optics system 16, device body 18, holding surface (towards the face of+Z sides in Fig. 1) scribble photoresist (sensing agent) Substrate P baseplate carrier device 20A and these control system etc..Hereinafter, by the projections relative with substrate P of mask M during exposure The direction that optical system 16 is scanned respectively be set to X-direction, direction orthogonal to X-axis in horizontal plane for Y direction, with X-axis and Y The orthogonal direction of axle is Z-direction, and is said so that the direction rotated around X-axis, Y-axis and Z axis is respectively θ x, θ y and θ z directions It is bright.

Illumination is 12, with being identical with the illumination disclosed in such as 5,729, No. 331 specifications of U.S. Patent No. etc. Constitute.Illumination is 12 the illumination light IL of exposure to be irradiated in into mask M.It is to use such as i lines (wavelength as illumination light IL 365nm), the light (or synthesis light of above-mentioned i lines, g lines, h lines) of g lines (wavelength 436nm), h lines (wavelength 405nm) etc..

Mask bearing table device 14 has the mask microscope carrier 14a that the tabular component for being formed with opening portion by central portion is constituted.Cover Holding is adsorbed in the mask M inserted in above-mentioned opening portion periphery edge by film microscope carrier 14a to support hand 14b.Mask microscope carrier 14a, which is mounted in, to be fixed on a pair of microscope carrier guiding element 14c as the lens barrel platform 18a of the part of device body 18, by for example with Mask microscope carrier drivetrain (not shown) comprising linear motor is driven in scanning direction (X-direction) and quilt with set long stroke Suitably micro-move device is in Y direction and θ z directions.Positional information (the rotation in the directions of z containing θ in mask microscope carrier 14a X/Y plane Amount information) it is mask interferometer 14d by being fixed on lens barrel platform 18a, use the bar-shaped reflection for being fixed on mask microscope carrier 14a Mirror 14e is obtained.In mask interferometer 14d, respectively comprising multiple X masks interferometers and Y mask interferometers, in bar-shaped reflection Mirror 14e includes the bar-shaped speculums of X corresponding with X mask interferometers and the bar-shaped speculums of Y corresponding with Y mask interferometers respectively, But only representational display Y masks interferometer and the bar-shaped speculums of Y in Fig. 1.

The configuration of projection optics system 16 below mask microscope carrier 14a, be supported in lens barrel platform 18a.Projection optics system 16 with Projection optics system for example disclosed in No. 6,552,775 specifications of U.S. Patent No. equally constitutes.That is, the bag of projection optics system 16 The view field of the pattern image of the M containing mask is configured to multiple projection optics systems (poly-lens projection optics system) of dentation, with The projection optics system of the single image field of oblong-shaped using Y direction as long side direction has equal function.In this embodiment, as Multiple projection optics systems each, be equimultiple system using such as both sides telecentricity and form upright erect image person.

Therefore, when to be that 12 illumination light IL illuminates the illumination region on mask M from illumination, i.e., by passing through mask M illumination light, by projection optics system 16, by the projection image of the circuit pattern of the mask M in the illumination region, (part is upright Picture), form the irradiation area (exposure area) for the illumination light being conjugated in substrate P with illumination region.Then, mask microscope carrier is passed through The driving synchronous with baseplate carrier device 20A's of device 14, makes mask M be displaced into scanning side with respect to illumination region (illumination light IL) To, and by making substrate P relative exposure region (illumination light IL) be displaced into scanning direction, 1 irradiation in substrate P is carried out according to this (shot) scan exposure in region, the pattern that will be formed in mask M is transferred to the irradiation area.That is, in liquid crystal exposure apparatus 10, be by illumination be 12 and projection optics system 16 in the pattern that mask M is generated in substrate P, made with illumination light IL in substrate P Inductive layer (resist layer) exposure forms the pattern in substrate P according to this.

Device body 18 possesses lens barrel platform 18a, a pair of lateral column 18b and baseplate carrier pallet 18c.Lens barrel platform 18a by The tabular component parallel with X/Y plane is constituted, and supports above-mentioned mask bearing table device 14 and projection optics system 16.A pair of lateral column 18b, A wherein side supports near lens barrel platform 18a+Y side ends from below, the opposing party then from below supporting lens barrel platform 18a- Near Y side ends.Lateral column 18b is made up of the parallel planar component with XZ planes, and dust free room is arranged on by antihunting device 18d On ground 11.Accordingly, device body 18 (and mask bearing table device 14, projection optics system 16) divides with respect to ground 11 in vibration From.

Baseplate carrier pallet 18c is made up of the tabular component parallel with X/Y plane, is erected at a pair of lateral column 18b bottom Between nearby.As shown in Fig. 2 baseplate carrier pallet 18c in Y direction with predetermined distance provided with it is multiple (in this 1st embodiment, Such as 2).Above baseplate carrier pallet 18c, as shown in figure 3, extending the Y linear guides 19a of Y direction in X-axis side It is fixed with branched (such as 2) to predetermined distance.

Substrate Zai Tai Installed put 20A, with multiple (such as 3) bases 22, a Right X Beam 24, coarse motion microscope carrier 28, fine motion microscope carrier The non-Fig. of the Zhong of 30 (Fig. 3 show.Reference picture 1), weight canceller 40, the 1st stepping guiding element 50, a pair of the 2nd stepping guiding elements 54 and target Thing microscope carrier 60.

Such as 3 bases 22, are made up of the tabular component parallel with YZ planes for extending Y direction, in X-axis side respectively To with predetermined distance configuration parallel to each other.Also, line A-A profiles of the Fig. 1 equivalent to Fig. 2, but to avoid the crisscross multiple of drawing It is miscellaneous, eliminate the diagram of base 22.For example in 3 bases 22, the 1st base 22 in the baseplate carrier pallet 18c of+X sides+X sides, 2nd base 22 is in the baseplate carrier pallet 18c of-X sides-X sides, the 3rd base 22 then in such as 2 baseplate carrier pallet 18c Between, opposing substrate microscope carrier pallet 18c is arranged in the state of by given clearance on ground 11 (reference picture 2) respectively.In Each upper surface (+Z side ends) of multiple bases 22 is fixed with the Y linear guides 23a for extending Y direction.

A pair of X beams 24 are made up of the component for the YZ section rectangles for extending X-direction respectively, in Y direction with set Every parallel to each other.A pair of X beams 24 are propped up near the both ends of long side direction and central portion from below by base 22 respectively Hold.A pair of X beams 24, as shown in Fig. 2 respectively by extending the plate of Y direction near long side direction both ends below Shape component constitute connecting elements 24a and be connected to each other.In addition, the long side direction central portion below X beams 24, is provided with interval Part 24b.The Y sliding freely engaged with above-mentioned Y linear guides 23a is fixed with below connecting elements 24a and distance piece 24b Saddle 23b.Accordingly, a pair of X beams 24 are guided in Y direction on multiple bases 22 by straight.Also, a pair of X beams 24 are with not The Y actuators (such as linear motor, feed screw device) of diagram are driven in Y-axis side on multiple bases 22 with predetermined stroke To.Herein, the Z location below a pair of X beams 24 is compared with the Y linear guides 19a's being fixed on above aforesaid substrate microscope carrier pallet 18c The Z location of upper end is more located at+Z sides, a pair of opposing substrate microscope carrier pallet 18c of X beams 24 (that is, device body 18) in vibration Separation.

In a pair of X beams 24 above each, as shown in figure 3, being fixed with the x-ray guiding element 25 for extending X-direction.Also, In a pair of each two sides of X beams 24, it is fixed with and is contained in the X of multiple permanet magnets that X-direction is arranged with predetermined distance and consolidates Stator 26a.

Coarse motion microscope carrier 28 is constituted by overlooking the tabular component of rectangle (from +Z direction), is mounted in above-mentioned a pair of X beams 24 On.Opening portion 28a is formed with the central portion of coarse motion microscope carrier 28.Below coarse motion microscope carrier 28, as shown in part A in Fig. 4, Gu Surely have it is multiple sliding freely engage with above-mentioned x-ray guiding element 25a, constituted together with the x-ray guiding element 25a x-ray guiding element dress Put 25 X saddles 25b (for x-ray guiding element 25a, for example, having 4).Accordingly, coarse motion microscope carrier 28 is i.e. on a pair of X beams 24 X-direction is guided in by straight.

Also, above-mentioned opening portion 28a+Y sides below coarse motion microscope carrier 28 region and-Y side regions each, by solid Fixed board 27 and above-mentioned X stators 26a to a pair of X are installed can mover 26b.X can mover 26b there is coil unit, it is and corresponding X stators 26a constitute together coarse motion microscope carrier 28 to be driven to the x-ray motor 26 in X-direction on a pair of X beams 24. In addition, effect of the coarse motion microscope carrier 28 by above-mentioned x-ray guiding element device 25, makes its opposed pair X beams 24 toward the movement of Y direction It is restricted, and is moved with the past Y direction of a pair of one of X beams 24.That is, it is so-called that a pair of X beams 24 are constituted with coarse motion microscope carrier 28 Gantry (gantry) formula twin shaft bearing table device.

Fig. 1 is returned to, fine motion microscope carrier 30 is made up of the rectangular-shape component of low clearance, configuration is in the top of coarse motion microscope carrier 28.In Above fine motion microscope carrier 30, substrate holding 32 is fixed with.Substrate holding 32 will load the substrate P in face thereon, with for example Vacuum suction mode is adsorbed holding.Also, in Fig. 3, to avoid the intricate of drawing, eliminating fine motion microscope carrier 30 and substrate Keep the diagram of tool 32.In-Y sides the side of fine motion microscope carrier 30, it is fixed with by microscope base 33 with reflecting surface orthogonal to Y-axis The bar-shaped speculum 34y of Y.In addition, in the-X sides side of fine motion microscope carrier 30, as shown in Fig. 2 being fixed with by microscope base 33 has The bar-shaped speculum 34x of X of reflecting surface orthogonal to X-axis.

Fine motion microscope carrier 30 by the fine motion microscope carrier driving comprising multiple voice coil motors lie on coarse motion microscope carrier 28 micro-move device in 3 from By spending direction (X-axis, Y-axis, θ z directions), multiple voice coil motors are carried by being fixed on the stator of coarse motion microscope carrier 28 and being fixed on fine motion Platform 30 can mover constitute.In multiple voice coil motors, comprising such as 2 X voice coil motors 36x (in Fig. 1 not shown) and for example 2 Y voice coil motors 36y are (not shown in Fig. 2.Reference picture 1).Also, in Fig. 2, such as 2 X voice coil motors 36x are in paper depth Direction is overlapping.In addition, in Fig. 1, such as 2 Y voice coil motors 36y are overlapping in paper depth direction.

The thrust (electromagnetic force) that fine motion microscope carrier 30 is produced by above-mentioned multiple voice coil motors, is carried by coarse motion in a non contact fashion Platform 28 is induced, accordingly, and X-direction and/or Y direction are displaced into predetermined stroke together with the coarse motion microscope carrier 28.Also, fine motion Microscope carrier 30 is also by the appropriate micro-move device of the relatively crude dynamic load platform 28 of multiple voice coil motors in above-mentioned 3DOF direction.

Also, fine motion microscope carrier drivetrain, as shown in figure 1, with to by the micro-move device of fine motion microscope carrier 30 in θ x, θ y and Z axis side To 3DOF direction multiple Z voice coil motors 36z.Multiple Z voice coil motors 36z, are disposed on and for example correspond to fine motion microscope carrier 30 Four corners position (in Fig. 1, only showing 2 in 4 Z voice coil motors 36z, another 2 are hidden on the inside of paper).Comprising many The composition of individual voice coil motor, fine motion microscope carrier drivetrain, to be exposed in such as No. 2010/0018950 explanation of U.S. Patent Publication Book.

The X position information of fine motion microscope carrier 30, as shown in Fig. 2 being to be fixed on dress by being referred to as interferometer post 18e component The X laser interferometer 38x of body 18 are put, are obtained using the bar-shaped speculum 34x of X.Also, the Y location information of fine motion microscope carrier 30, As shown in figure 1, being then the Y laser interferometer 38y by being fixed on device body 18, asked using the bar-shaped speculum 34y of Y Go out.X laser interferometer 38x and Y laser interferometer 38y is respectively equipped with multiple (respectively at paper depth direction weight in Fig. 1 and Fig. 2 It is folded), and the θ z location information of fine motion microscope carrier 30 can be obtained.

The Z axis of fine motion microscope carrier 30, position (following, the to claim Z obliquities) information in θ x and θ y directions, such as part A institute in Fig. 4 Show, be, with multiple (for example, 4) Z sensor 38z below fine motion microscope carrier 30, to use aftermentioned subject matter microscope carrier 60 Obtained.Such as 4 Z sensors 38z are configured with predetermined distance about the z axis.It is according to above-mentioned many in baseplate carrier device 20A The average value of individual Z sensors 38z output obtains the Z location information of fine motion microscope carrier 30, according to above-mentioned multiple Z sensors 38z's Output difference obtains the rotation amount information in the θ x and θ y directions of fine motion microscope carrier 30.Z sensors 38z species is not particularly limited, can Using such as laser extensometer, laser interferometer.

Weight canceller 40, is to support fine motion load from below by aftermentioned levelling device 46 as shown in part A in Fig. 4 Platform 30.In the opening portion 28a of the insertion coarse motion of weight canceller 40 microscope carrier 28, supported from below by aftermentioned 1st stepping guiding element 50. Weight canceller 40, has air bearing 42 in its bottom, by from the upper of 42 pair of the 1st stepping guiding element 50 of the air bearing Face spray gas-pressurized (such as air) static pressure, on the 1st stepping guiding element 50 across given clearance suspend.Also, A in Fig. 4 Though line B-B profile of the part equivalent to Fig. 3, to avoid the intricate of drawing, eliminates the diagram of base 22.

The weight canceller 40 of this embodiment, with such as U.S. Patent Application Publication No. 2010/0018950 Weight canceller identical disclosed in specification is constituted and function.That is, weight canceller 40, with for example not shown Air spring, the power of the gravity direction produced by the air spring (+Z direction) upward offsets and includes fine motion microscope carrier 30, base Plate keeps the weight (power of (-Z direction) down that is produced by weight acceleration) of 32 grade systems of tool, accordingly, is carrying out fine motion load During the Z obliquities control of platform, above-mentioned multiple Z voice coil motors 36z load is reduced.

Weight Di Xiao Installed put 40, in Z location (height of C.G.) roughly the same with the Z location of its center of gravity, by multiple, for example (flexure) Installed put 44 and mechanical are connected to coarse motion microscope carrier 28 for 4 flexures.The bending device 44 of this embodiment, with Bending device identical for example disclosed in No. 2010/0018950 specification of U.S. Patent Application Publication No. is constituted and function.Also That is, bending device 44 is comprising the banding steel plate for example with the minimal thickness of X/Y plane configured in parallel, with being located at the steel plate both ends Articulated mounting (such as spherojoint), above-mentioned steel plate by articulated mounting be erected at weight canceller 40 and coarse motion microscope carrier 28 it Between.

Bending device 44, as shown in figure 3, in the+X sides of weight canceller 40 ,-X sides ,+Y sides and-Y sides everywhere, Weight canceller 40 [is linked with coarse motion microscope carrier 28.Accordingly, when coarse motion microscope carrier 28 is toward X-direction and/or Y direction When mobile, weight canceller 40 is to be drawn by least one of multiple bending devices 44 by coarse motion microscope carrier 28, according to this and should Coarse motion microscope carrier 28 one is displaced into X-direction and/or Y direction.

Part A in Fig. 4 is returned to, levelling device 46 includes pedestal 46a and bulb 46b spherical bearing arrangement, from below will The supporting of fine motion microscope carrier 30 is to swing (tilting action) freely in θ x and θ y directions, and moved with the one of fine motion microscope carrier 30 along X/Y plane It is dynamic.Levelling device 46, by being installed on the air bearing (not shown) of weight canceller 40 by weight canceller 40 under Side is supported in a non contact fashion, and can allow the movement in the direction along the horizontal plane of relative weight canceller 40.If also, can be from below Fine motion microscope carrier 30 is supported as tilting action freely, as levelling device, such as U.S. Patent Application Publication also can be used Imitative spherical bearing arrangement disclosed in No. 2010/0018950 specification.

1st stepping guiding element 50, as shown in figure 3, being constituted by extending the X-direction tabular component parallel with X/Y plane, example Such as disposed on 2 baseplate carrier pallet 18c.The long side direction size of 1st stepping guiding element 50, is set to compared with fine motion microscope carrier 30 It is slightly longer in the shift motion of X-direction.Also, the width (Y direction) of the 1st stepping guiding element 50 is sized to compared with weight The setting area of canceller 40 is slightly wide.Above 1st stepping guiding element 50, its flatness is made into very high and and X/Y plane (horizontal plane) is parallel, the work(of guiding face when being moved with the past X-direction of above-mentioned weight canceller 40 (and fine motion microscope carrier 30) Energy.Though the material of the 1st stepping guiding element 50 is not particularly limited, with using such as stone material (the isopyknic stone material of such as gabbro), Or ceramics, cast iron etc. are formed preferably.

Below the 1st stepping guiding element 50, as shown in part B in Fig. 4, it is fixed with multiple (for a Y linear guide 19a, such as 2) sliding freely it is sticked in above-mentioned Y linear guides 19a Y saddles 19b.Accordingly, the 1st stepping guiding element 50 is edge Multiple Y linear guides 19a and be guided in Y direction by straight.

In+X the side ends of the 1st stepping guiding element 50, as shown in figure 3, being fixed with a pair of connections in Y direction with predetermined distance Component 50a.1st stepping guiding element 50, the connecting elements 50a of its+Y side is connected to the X beams 24 of+Y sides ,-Y by bending device 52 The connecting elements 50a of side is then connected to the X beams 24 of-Y sides by bending device 52.In-X the side ends of the 1st stepping guiding element 50 Also same to be fixed with a pair of connecting elements 50a, by a pair of connecting elements 50a, the 1st stepping guiding element 50 passes through bending device 52 are connected to each of a pair of X beams 24.Bending device 52, as shown in part A in Fig. 4, with the center of gravity of the 1st stepping guiding element 50 The roughly the same Z location of Z location (height of C.G.), the 1st stepping guiding element 50 is connected with X beams 24.

The composition of bending device 52, with the bending device for being connected above-mentioned weight canceller 40 with coarse motion microscope carrier 28 44 is roughly the same.That is, bending device 52, comprising extend the Y direction minimal thickness steel plate parallel with X/Y plane, be located at this The articulated mounting (such as spherojoint) at steel plate both ends, above-mentioned steel plate is erected at the 1st stepping guiding element 50 and X beams by articulated mounting Between 24.Therefore, the 1st stepping guiding element 50 and X beams 24, in Y direction be link into an integrated entity (high rigidity), in contrast, in it He then separates in 5DOF direction (X, Z, θ x, θ y, θ z) in vibration.

In baseplate carrier device 20A, in order to which substrate P is driven toward X-direction with predetermined stroke, when coarse motion microscope carrier 28 When being driven in X-direction, weight canceller 40 i.e. by coarse motion microscope carrier 28 draw and on the 1st stepping guiding element 50 toward X-axis side To movement.Also, in order to which substrate P is driven toward Y direction with predetermined stroke, when a pair of X beams 24 are driven in Y direction When, weight canceller 40 is drawn by coarse motion microscope carrier 28 and moved toward Y direction.Now, due to a pair of steps of X beams 24 and the 1st Entering the Y direction that is displaced into of the one of guiding element 50, (weight canceller 40 and the 1st stepping guiding element 50 be not in the relative shifting of Y direction It is dynamic), therefore the situation that weight canceller 40 comes off from the 1st stepping guiding element 50 will not be produced.Therefore, the 1st stepping guiding element 50 Width (Y direction) size, as long as weight canceller 40 can be guided toward the minimum chi of the mobile degree of X-direction It is very little, it is formed as light weight.

A pair of the 2nd stepping guiding elements 54 are made up of the tabular component for the YZ section rectangles for extending X-direction respectively, for example with Put on 2 baseplate carrier pallet 18c.A pair of the 2nd stepping guiding elements 54, a side therein in the+Y sides of the 1st stepping guiding element 50, The opposing party is parallel to each other across given clearance with respect to the 1st stepping guiding element 50 respectively in the-Y sides of the 1st stepping guiding element 50.

The long side direction size of 2nd stepping guiding element 54, though as shown in figure 3, it is set to and the 1st stepping guiding element 50 substantially phase Together, but width (Y direction) size be then set to it is narrow compared with the 1st stepping guiding element 50.Also, as shown in part B in Fig. 4, the 2nd The thickness direction size of stepping guiding element 54, is set to roughly the same with the 1st stepping guiding element 50.In under the 2nd stepping guiding element 54 Face is fixed with the Y saddles 19c for being sliding freely sticked in above-mentioned Y linear guides 19a.Accordingly, the 2nd stepping guiding element 54 is i.e. along more Individual Y linear guides 19a is guided in Y direction by straight.

Be processed to above 2nd stepping guiding element 54 it is parallel with X/Y plane (horizontal plane) with very high flatness, With aftermentioned subject matter with microscope carrier 60 toward X-direction move when guiding face function.Though the material of the 2nd stepping guiding element 54 is without spy Do not limit, but using preferable to be formed such as stone material (such as the isopyknic stone material of gabbro) or ceramics, cast iron, aluminium alloy.

A pair of the 2nd stepping guiding elements 54, as shown in part A in Fig. 4, the coupling member being made up of YZ section U-shaped component 56 one link.1st stepping guiding element 50 inserts a pair of couple of coupling member 56 between face by given clearance.Coupling member 56, As shown in Fig. 2 in X-direction with predetermined distance provided with multiple (in this 1st embodiment, for example, 4).

In long side direction (+X sides and-X sides) both ends of the 2nd stepping guiding element 54, as shown in figure 3, being respectively fixed with connection Component 54a.2nd stepping guiding element 54 of+Y sides, its above-mentioned connecting elements 54a is connected to the X beams of+Y sides by bending device 58 2nd stepping guiding element 54 of 24 ,-Y side, its above-mentioned connecting elements 54a is connected to the X beams 24 of-Y sides by bending device 58.Scratch The composition of bent device 58, it is roughly the same with the bending device 52 of X beams 24 with connecting above-mentioned 1st stepping guiding element 50.Accordingly, when a pair X beams 24 toward Y direction move when, the 1st stepping guiding element 50 and a pair the 2nd stepping guiding elements 54 are the past Y-axis with a pair of one of X beams 24 Move in direction.

Subject matter microscope carrier 60 is configured between a pair of X beams 24, is mounted on a pair of the 2nd stepping guiding elements 54.Subject matter is used Microscope carrier 60, as shown in part B in Fig. 4, with top loop 61, lower loop 62, connecting elements 63, multiple subject matters 64 and multiple skies Gas bearing 65.

Top loop 61, as shown in figure 3, the discoideus component for forming opening portion by center is constituted.Lower loop 62 by with it is above-mentioned The roughly the same outside dimension of top loop 61 and the discoideus component of internal diameter size formation (only thickness is thin compared with top loop 61) are constituted, and are such as schemed In 4 shown in part B, configure in the lower section (being that opposite upper parts ring 61 is hidden on the inside of paper in Fig. 3) of top loop 61.It is above-mentioned heavy Measure in the insertion top loop 61 of canceller 40 and each the opening portion of lower loop 62.Below the insertion top loop 61 of connecting elements 63 Between above lower loop 62, top loop 61 is linked into an integrated entity with lower loop 62.Also, lower loop 62, its diameter can relatively on Portion's ring 61 is small, and top loop 61 is located at+Z sides compared with coarse motion microscope carrier 28, and its diameter can be big compared with the opening portion of coarse motion microscope carrier 28.

In this 1st embodiment, the above-mentioned multiple Z sensors 38z of correspondence, such as 4 subject matters 64, as shown in figure 3, in θ z Direction (about the z axis) is fixed on the upper of top loop 61 in the way of predetermined distance and immediately below corresponding Z sensors 38z Face.The species of subject matter 64, to select preferable according to Z sensors 38z species.As Z sensor 38z, for example, using three It is preferable using whiteware in subject matter 64 when the reflection-type laser of angular measurement mode conjugates the situation of sensor, sensed as Z Device 38z, such as when conjugating the situation of sensor using the reflection-type laser of vertical reflection mode, subject matter 64 is then using reflection Mirror is preferably (can omit subject matter 64 to imposing mirror finish above top loop 61).Subject matter 64, it is considered to fine motion microscope carrier 30 Amount of movement (measuring beam is without departing from subject matter) during relatively crude 28 micro-move device of dynamic load platform sets area.

Multiple (in this 1st embodiment, for example, 4) air bearing 65, are with predetermined distance in θ z directions (about the z axis) It is fixed on below lower loop 62.For example in 4 air bearing 65, the gas discharging surfaces (bearing surface) of 2 air bearing 65 it is right Above 2nd stepping guiding element 54 of Xiang Yuyi side (+Y sides), the gas discharging surface of 2 air bearing 65 is then to in another in addition Above 2nd stepping guiding element 54 of side (- Y sides).Subject matter microscope carrier 60, is by from above-mentioned many as shown in part B in Fig. 4 The static pressure for the gas-pressurized (such as air) that individual air bearing 65 sprays to corresponding 2nd stepping guiding element 54, passes through given clearance It is suspended on a pair of the 2nd stepping guiding elements 54.

Subject matter microscope carrier 60, as shown in figure 3, being to be linked to coarse motion microscope carrier 28 by multiple bending devices 66.Flexure dress Put 66 composition, it is roughly the same (but, relatively with connecting above-mentioned weight canceller 40 and the bending device 44 of coarse motion microscope carrier 28 Configuration abreast (is overlooked in+shape) in multiple bending devices 44 and X-axis or Y-axis, and multiple bending devices 66 are then extended and X-axis Or Y-axis, the direction of angle for example at 45 °).

Baseplate carrier device 20A, in order to which substrate P is driven in X-direction with predetermined stroke, when coarse motion microscope carrier 28 is driven When X-direction, subject matter microscope carrier 60 is drawn by coarse motion microscope carrier 28 and is displaced into X-axis on a pair of the 2nd stepping guiding elements 54 Direction.Also, in order to which substrate P predetermined stroke is driven in Y direction, when a pair of X beams 24 are driven in Y direction, subject matter Drawn with microscope carrier 60 by coarse motion microscope carrier 28 and be displaced into Y direction.Now, due to a pair of X beams 24 and a pair of the 2nd stepping guiding elements 54 one be displaced into Y direction (subject matter is not relatively moved in Y direction with microscope carrier 60 and a pair of the 2nd stepping guiding elements 54), Therefore the situation that subject matter microscope carrier 60 comes off from a pair of the 2nd stepping guiding elements 54 will not be produced.

Also, because fine motion microscope carrier 30 is to be induced by coarse motion microscope carrier 28 and be displaced into X-axis and/or Y direction, therefore target What thing microscope carrier 60 and fine motion microscope carrier 30 were integrated is displaced into X-axis and/or Y direction.Therefore, Z sensors 38z can be with fine motion Position is unrelated in the X/Y plane of microscope carrier 30, and the Z location information of fine motion microscope carrier 30 is obtained using corresponding subject matter 64.

The liquid crystal exposure apparatus 10 (reference picture 1) constituted in the above described manner, under the management of main control unit (not shown), Line mask M is entered toward the loading on mask microscope carrier 14 with mask loader (not shown) and entered by substrate loader (not shown) Row substrate P is toward moving into (loading) on substrate holding 32.Afterwards, it is real using alignment detection system (not shown) by main control unit Apply to locating tab assembly, after this pair of locating tab assembly terminates, step-scan is gradually carried out to the multiple irradiation areas being set in substrate P (step＆scan) exposure actions of mode.Because this exposure actions is identical with the exposure actions of existing step-scan mode, because Description is omitted for this.

When above-mentioned exposure actions, alignment actions, in baseplate carrier device 20A, by below lens barrel platform 18a, Multiple sensors 15 (focusing on sensor automatically) near projection optics system 16 are fixed on, the Z location letter on substrate P surface is obtained Breath, according to the output of the plurality of sensor 15, the Z obliquity controls of fine motion microscope carrier 30 are carried out using multiple Z voice coil motors 36z System, so that the Z location position of the exposure area in substrate P is in the depth of focus of projection optics system 16.

The baseplate carrier device 20A of this embodiment from the description above, because the Z location for obtaining fine motion microscope carrier 30 is believed Used subject matter 64 during breath, is mounted in the subject matter microscope carrier for different another components from weight canceller 40 60, therefore compared with situation that subject matter 64 is installed on to weight canceller 40, weight canceller 40 can be made to minimize, gently Quantify.Moreover, it is assumed that when subject matter 64 is installed on into weight canceller 40, the flatness above the 1st stepping guiding element 50 is low Occasion, the measurement accuracy of the Z obliquity information of fine motion microscope carrier 30 is possible to will be low, in contrast, in baseplate carrier device 20A, due to being using the mark being mounted on a pair of the 2nd stepping guiding elements 54 when obtaining the Z obliquity information of fine motion microscope carrier 30 Thing microscope carrier 60, even if therefore flatness above the 1st stepping guiding element 50 is low, but due to having above the 2nd stepping guiding element 54 There is the function of measurement datum, therefore the measurement accuracy of the Z obliquity information of fine motion microscope carrier 30 does not have any problem.

Also, because the Z obliquities of fine motion microscope carrier 30 can be accurately controlled by with multiple Z voice coil motors 36z, therefore Even if the flatness reduction above the 1st stepping guiding element 50, as long as can ensure that the measurement essence of the Z obliquity information of fine motion microscope carrier 30 If degree, the Z obliquities control of fine motion microscope carrier 30 can be carried out with high-precision.It is therefore not necessary in order to ensure the 1st stepping guiding element Flatness above 50, and implement to improve the measure of the rigidity of the 1st stepping guiding element 50 etc..Accordingly, it is capable to make the 1st stepping guiding element 50 small Type (slimming), lightweight.

Also, the baseplate carrier device 20A of above-mentioned 1st embodiment composition can be deformed suitably.Hereinafter, in explanation State the variation of the 1st embodiment.Also, in the variation of the 1st embodiment illustrated below, for with it is the above-mentioned 1st real The composition of homomorphosis and the important document of function are applied, same-sign is assigned and suitably description is omitted.

《The variation (1) of 1st embodiment》

In Fig. 5~Fig. 6 in part B, it is shown that the baseplate carrier device 20B of the variation of above-mentioned 1st embodiment (1) (in Fig. 5, fine motion microscope carrier 30 (part A in reference picture 6) is not shown).

In the baseplate carrier device 20A (part B in reference picture 4) of above-mentioned 1st embodiment, the Z of fine motion microscope carrier 30 is tilted Positional information, is obtained with multiple Z sensors 38z, using the subject matter 64 for being installed on subject matter microscope carrier 60, relative to This, the difference of the baseplate carrier device 20B in Fig. 6 shown in part B is, by multiple Z sensors 38z, uses a pair the 2nd Stepping guiding element 54 is obtained above each.Also, for other important documents of the type of drive comprising a pair of the 2nd stepping guiding elements 54, such as It is identical with above-mentioned 1st embodiment in Fig. 5 and Fig. 6 shown in part A.

In Z sensor 38z, for example, sensor Qing Xing Time are conjugated using the reflection-type laser of triangulation mode, will be with As subject matter, (the reference plane) An Installed of Z obliquity information measurements are led the ribbon-shaped members of whiteware formation in the 2nd stepping Preferably (also can be in order that the 2nd stepping guiding element 54 itself has the function of subject matter, and by the 2nd stepping guiding element 54 above part 54 The thermal jets such as ceramics also can be applied to metal surface to be formed by itself with ceramics formation).In addition, in Z sensors 38z using for example When the reflection-type laser of vertical reflection mode conjugates the situation of sensor, the 2nd stepping guiding element 54 can be covered all generally above Strip mirror be installed on the 2nd stepping guiding element 54 preferable (or mirror finish is imposed to the substantially entirety above the 2nd stepping guiding element 54).

According to baseplate carrier device 20B, compared with the baseplate carrier device 20A of above-mentioned 1st embodiment, due to without Subject matter is constituted simple with microscope carrier 60 (reference picture 3).Also, because inertia mass is small, therefore coarse motion microscope carrier 28 can be lifted The position controlling of (that is, substrate P).In addition, can also use to drive the linear motor of coarse motion microscope carrier 28 to minimize.Furthermore, by In the carrying subject matter microscope carrier 60 not on the 2nd stepping guiding element 54, therefore the rigidity of the 2nd stepping guiding element 54 of raising need not be imposed etc. Handle.Therefore the 2nd stepping guiding element 54 can be made to minimize (slimming), lightweight.

《The variation (2) of 1st embodiment》

The baseplate carrier device 20C of the variation (2) of above-mentioned 1st embodiment is shown in Fig. 7 and Fig. 8.Above-mentioned 1st The baseplate carrier device 20A of embodiment, is by weight canceller on the 1st stepping guiding element 50 as shown in part A in Fig. 4 40 support the composition of fine motion microscope carrier 30 by levelling device 46 from below, in contrast, as shown in figure 8, baseplate carrier device 20C Dissimilarity be that on the 1st stepping guiding element 70A directly carry levelling device 78.In addition, although not shown, the 1st stepping guiding element 70A is with above-mentioned 1st embodiment likewise, mechanical to be linked to a pair of X beams 24 (not shown in Fig. 7 and Fig. 8.Reference picture 1 Deng), it is displaced into Y direction with a pair of X beams 24 one.Also, coarse motion microscope carrier 28 is equipped on a pair of X beams 24, in a pair of X beams X-direction is driven on 24 and Y direction is displaced into together with a pair of X beams 24.

1st stepping guiding element 70A, as shown in fig. 7, with guiding element body 71, air spring 72 and a pair of Z voice coil motors 73, Also there is the function of weight canceller and Z actuators.Guiding element body 71, as shown in figure 8, with lower board unit 71a, upper plate portion 71b and a pair of guide plate 71c.Lower board unit 71a and upper plate portion 71b respectively by extending X-direction, the rectangular slab parallel with X/Y plane Shape component is constituted, parallel to each other with predetermined distance in Z-direction.Upper plate portion 71b be fixed in lower board unit 71a a pair are led Plate 71c (or linear guide device (not shown)) is guided and the relative lower board unit 71a of energy is displaced into Z-direction.

Air spring 72 is inserted between lower board unit 71a and upper plate portion 71b, and upper plate portion 71b central portion is supported from below. Be supplied with air spring 72 from outside gas-pressurized, can with comprising fine motion microscope carrier 30 (including levelling device 78) it The upward power of gravity direction that the weight of system contends with acts on upper plate portion 71b.Also, air spring 72 also can in X-direction with Predetermined distance configuration is multiple.

A pair of Z voice coil motors 73, wherein side configuration is near the 1st stepping guiding element 70A+X side ends, the opposing party then matches somebody with somebody Put near the 1st stepping guiding element 70A-X side ends.Voice coil motor 73 include be fixed on lower board unit 71a stator 73a, with Be fixed on upper plate portion 71b can mover 73b, carry out fine motion microscope carrier 30 Z location control when, upper plate portion 71b is driven in Z axis (the position control in the θ x and θ y directions of fine motion microscope carrier 30, is same with above-mentioned embodiment to be driven by fine motion microscope carrier in direction System is carried out).

Spherical bearing arrangement of the levelling device 78 comprising pedestal 78a and bulb 78b, fine motion microscope carrier 30 supports be from below In θ x and θ y directions swing (tilt (tilt) action) freely, and moved with the one of fine motion microscope carrier 30 along X/Y plane.Pedestal 78a With insertion coarse motion microscope carrier 28 opening portion 28a in, gas discharging surface (bearing surface) towards-Z sides (downside) sky (not shown) Gas bearing.Levelling device 78, by from pedestal 78a to the quiet of the gas-pressurized (such as air) that is sprayed above upper plate portion 71b Pressure, is suspended on the 1st stepping guiding element 70A by given clearance.

The Z obliquity information of fine motion microscope carrier 30, as shown in figure 8, with aforesaid substrate bearing table device 20B (reference pictures 5~figure Part B in 6) likewise, be with multiple Z sensors 38z using being obtained above the 2nd stepping guiding element 54 (also can with it is above-mentioned The use subject matter of 1st embodiment equally is with microscope carrier 60 (reference picture 3)).

In baseplate carrier device 20C, due to interval of the coarse motion microscope carrier 28 above and below fine motion microscope carrier 30 can be shortened, therefore Short transverse size step-down overall baseplate carrier device 20C.Also, because inertia mass diminishes, therefore coarse motion microscope carrier can be lifted The position controlling of 28 (that is, substrate Ps).In addition, can also use to drive the linear motor of coarse motion microscope carrier 28 to minimize.

《The variation (3) of 1st embodiment》

The baseplate carrier device 20D of the variation (3) of above-mentioned 1st embodiment is shown in Fig. 9.Baseplate carrier device 20D and aforesaid substrate bearing table device 20C (reference picture 7 and Fig. 8) is compared, and the 1st stepping guiding element 70B composition is different.Hereinafter, for Dissimilarity is illustrated.

1st stepping guiding element 70B includes the guiding element being made up of hollow rectangular-shape (box-shaped) component for extending X-direction Body 74, multiple Z actuators 75 with being housed in guiding element body 74.Guiding element body 74, such as, will by the way that thickness is made into thin The lower portion of the rigidity setting of upper surface portion is low.Multiple Z actuators 75 are arranged in X-direction with predetermined distance, by guiding element body Pushed above 74 to+Z sides.Also, though the species of Z actuators 75 is not particularly limited, because the drive volume of upper surface portion is small, Therefore it can be used such as cylinder, piezoelectric element.

In baseplate carrier device 20D, such as Figure 10 signal is (in Figure 10 not shown by multiple Z actuators 75.Reference Fig. 9) fine motion microscope carrier 30 is driven in Z-direction.Herein, due to being pushed by multiple Z actuators 75 above guiding element body 74 And deform, relative level is tilted, but because fine motion microscope carrier 30 is supported by by levelling device 78, therefore to fine motion microscope carrier 30 Z inclination controls and accessible.Also, being it can be readily appreciated that the deformation (flexure) above guiding element body 74 is shown in Figure 10 Relatively actual exaggeration.Baseplate carrier device 20D, can also be obtained and aforesaid substrate bearing table device 20C identical effects.

《The variation (4) of 1st embodiment》

The baseplate carrier device 20E of the variation (4) of above-mentioned 1st embodiment is shown in Figure 11.Baseplate carrier is filled 20E is put, is compared with aforesaid substrate bearing table device 20D (reference picture 9), its 1st stepping guiding element 70C composition is different.Hereinafter, only pin Dissimilarity is illustrated.

The 1st stepping guiding element 70B (reference picture 9) relative to aforesaid substrate bearing table device 20D is to use to be arranged in X-direction Multiple Z actuators 75 fine motion microscope carrier 30 is driven in Z-direction, as shown in figure 11, the 1st stepping guiding element 70C dissimilarity exists In being to be driven fine motion microscope carrier 30 in Z-direction by a pair of cams device 76.

A wherein side for a pair of cams device 76 is near the 1st stepping guiding element 70C+X side ends, the opposing party is then the 1st Near stepping guiding element 70C-X side ends, insert respectively between lower board unit 71a and upper plate portion 71b.Cam gear 76, comprising logical X-ray guiding element device 76b is crossed to be mounted in the way of it can be displaced into X-direction on the base plate 76a for being fixed on lower board unit 71a Lower wedge portion 76c, be fixed on upper plate portion 71b and the oppositely disposed upper wedge portion 76d of lower wedge portion 76c and will under Portion wedge-shaped part 76c drives the actuator 76e in X-direction.Baseplate carrier device 20E, can also obtain and be filled with aforesaid substrate microscope carrier Put 20D identical effects.

《The variation (5) of 1st embodiment》

The baseplate carrier device 20F of the variation (5) of above-mentioned 1st embodiment is shown in Figure 12.Baseplate carrier is filled 20F is put, is compared with aforesaid substrate bearing table device 20C (reference picture 7 and Fig. 8), its dissimilarity is, without levelling device 78 (reference picture 7 and Fig. 8) and multiple Z voice coil motors 36z (reference picture 7) and the 1st stepping guiding element 70D composition are different.Hereinafter, It is illustrated only for dissimilarity.

1st stepping guiding element 70D, with above-mentioned 1st stepping guiding element 70A (reference picture 7 and Fig. 8) likewise, air spring 72 is inserted Enter between lower board unit 71a and upper plate portion 71b, with multiple Z voice coil motors 73 driving upper plate portion 71b.Also, the 1st stepping guiding element 70D Without the guide plate 71c (reference picture 8) as the 1st stepping guiding element 70A as described above.In addition, multiple Z voice coil motors 73, be, for example, in 2 are configured with predetermined distance, for example (in Figure 12 in Y direction near 1st stepping guiding element 70D+X sides (or-X sides) end It is overlapping in paper depth direction).That is, multiple Z voice coil motors 73 be disposed on not on the same line 3 at.

Central portion below fine motion microscope carrier 30 is provided with bearing surface towards the air bearing 79 of-Z sides.Fine motion microscope carrier 30 By the static pressure of the gas-pressurized (such as air) sprayed above 79 couple of the 1st stepping guiding element 70D of air bearing, by set Gap (with contactless state) is suspended on the 1st stepping guiding element 70D.

It is suitably to be driven upper plate portion 71b in relative Z axis side by multiple Z voice coil motors 73 in baseplate carrier device 20F To and/or horizontal plane direction of fascinating (θ x and θ y directions), the Z inclination controls of fine motion microscope carrier 30 are carried out according to this.Carried according to substrate Table apparatus 20F, is compared with aforesaid substrate bearing table device 20C (reference picture 7 and Fig. 8), and its composition can more simplify.Also, with it is above-mentioned Baseplate carrier device 20D (reference picture 9) is likewise, also can be used multiple Z actuators 75 (but, also need to be in Y direction with set Interval configuration is multiple) upper plate portion 71b is fascinated, or with aforesaid substrate bearing table device 20E (reference picture 11) likewise, using multiple Cam gear 76 (but, need to configure not on the same line 3 at) upper plate portion 71b is fascinated.

《2nd embodiment》

Secondly, it is illustrated for the 2nd embodiment using Figure 13~Figure 17.The liquid crystal exposure apparatus of 2nd embodiment Composition, it is identical with above-mentioned 1st embodiment in addition to baseplate carrier device 20G composition, thus for have and the above-mentioned 1st The important document of embodiment identical composition and function, assigns same-sign and suitably description is omitted.

As shown in part B in Fig. 4, compared to the baseplate carrier device 20A of above-mentioned 1st embodiment, its 1st stepping guiding element 50 be to be mounted in by mechanical linear guide device (Y linear guide 19a, Y saddle 19b) on baseplate carrier pallet 18c, such as Shown in Figure 13, the baseplate carrier device 20G of this 2nd embodiment difference is that the 1st stepping guiding element 55 is mounted in a pair of bottoms On seat 80.Also, above-mentioned 1st embodiment, as shown in Fig. 2 baseplate carrier pallet 18c is for example provided with 2, in contrast, sheet the 2nd The baseplate carrier pallet 18f of embodiment, as shown in figure 13, is made up of a tabular component.Therefore, baseplate carrier device 20G The base 22 (reference picture 2) of long side direction central portion without supporting X beams 24.

A side in a pair of bases 80 baseplate carrier pallet 18f+X sides, baseplate carrier pallet 18f and base 22 it Between, the opposing party is then between baseplate carrier pallet 18f-X sides, baseplate carrier pallet 18f and base 22, respectively by set Gap configuration is in baseplate carrier pallet 18f and base 22.Also, Figure 14 and Figure 16, to avoid the intricate of drawing, eliminates bottom The diagram of seat 22 (diagram of X beams 24 is also omitted in Figure 16).

Base 80 constitutes (reference picture 15) by extending Y direction, the tabular component parallel with XZ planes, passes through support plate 81 and antihunting device 82 be arranged on ground 11.1st stepping guiding element 55, by by be fixed on the Y linear guides 84 of base 80 with The Y linear guide devices that the Y saddles 19b being fixed on below the 1st stepping guiding element 55 is constituted are mounted on a pair of bases 80, can be in Y Direction of principal axis is moved with predetermined stroke.Therefore, the opposite sets body 18 of the 1st stepping guiding element 55 and a pair of bases 22 are divided in vibration From.1st stepping guiding element 55, as shown in figure 15, with above-mentioned 1st embodiment likewise, passing through multiple mechanicalnesses of bending device 52 Be linked to a pair of X beams 24, be displaced into Y direction with a pair of X beams 24 one.Also, the 1st stepping guiding element 55, to suppress because certainly The flexure remake, with above-mentioned 1st embodiment compare that its thickness direction size is set it is bigger.

2nd stepping guiding element 54, as shown in figure 14, with above-mentioned 1st embodiment likewise, by by being fixed on baseplate carrier The pallet 18f Y linear guides 19a and Y saddles 19c being fixed on below the 2nd stepping guiding element 54 Y linear guide devices constituted are taken It is loaded on baseplate carrier pallet 18f, can be moved in Y direction with predetermined stroke.Also, a pair of the 2nd stepping guiding elements 54, such as Figure 15 institutes Show, the both ends of long side direction are concatenated component 54b and linked integrally.A pair of the 2nd stepping guiding elements 54, shape is implemented with the above-mentioned 1st State is same, a pair of X beams 24 is linked to by the way that multiple bending devices 58 (Figure 13 and Figure 14 in not shown) are mechanical, with a pair X beams 24 one is displaced into Y direction.

This 2nd embodiment, as shown in FIG. 16 and 17, also with above-mentioned 1st embodiment likewise, be by installed in Multiple Z sensors 38z of fine motion microscope carrier 30, the Z obliquity information of fine motion microscope carrier 30 is obtained using the 2nd stepping guiding element 54.

According to the baseplate carrier device 20G of this 2nd embodiment, because the 1st stepping of taking the weight of canceller 40 is led Part 55 is supported by base 80, therefore is compared with above-mentioned 1st embodiment, the weight without requiring baseplate carrier pallet 18f The rigidity of force direction.Therefore, baseplate carrier pallet 18f slimmings, lightweight can be made.

Although also, regarding the position of fine motion microscope carrier 30 (and weight canceller 40), and acting on inclined in baseplate carrier pallet 18f In loading, but this 2nd embodiment, the component being mounted on baseplate carrier pallet 18f only has a pair of the 2nd stepping guiding elements 54, because This is compared with above-mentioned 1st embodiment, and the influence of above-mentioned inclined loading is few.In addition, the Z obliquity information of fine motion microscope carrier 30, can With (the A portions in reference picture 4 of microscope carrier 60 of the use subject matter same with above-mentioned 1st embodiment without using the 2nd stepping guiding element 54 Point) obtained.

Also, the baseplate carrier device 20G of above-mentioned 2nd embodiment composition can be deformed suitably.Hereinafter, in explanation State the baseplate carrier device 20G of the 2nd embodiment variation.Also, know in following explanation in the variation of the 2nd embodiment, For having the important document of identical composition and function with above-mentioned 2nd embodiment, assign same-sign and suitably omit it specifically It is bright.

《The variation (1) of 2nd embodiment》

The baseplate carrier device 20H of the variation (1) of above-mentioned 2nd embodiment is shown in Figure 18 and Figure 19.Fine motion The Z obliquity information of microscope carrier 30, in above-mentioned 2nd embodiment, as shown in figure 17, by multiple Z sensors 38z, is used 2nd stepping guiding element 54 is to obtain, in contrast, the difference of the baseplate carrier device 20H shown in Figure 18 and Figure 19 is, It is by multiple Z sensors 38z, using being obtained above baseplate carrier pallet 18g.

As Z sensors 38z become using the reflection-type laser of such as triangulation mode in baseplate carrier device 20H Position sensing device, fine motion microscope carrier 30 can be covered in the turnover zone in X/Y plane by being mounted with to have above baseplate carrier pallet 18g The tabular component for example formed by whiteware of the area of the degree in domain into subject matter 69.In addition, being used as Z sensors 38z When conjugating the situation of sensor using the reflection-type laser of for example vertical reflection mode, it will be given above baseplate carrier pallet 18g With mirror finish (or installing speculum above baseplate carrier pallet 18g).

According to baseplate carrier device 20H, due to being not provided with baseplate carrier pallet 18g the 1st stepping guiding element 55 to be drawn The Y linear guides in Y direction are led, therefore will can directly be used as subject matter above baseplate carrier pallet 18g.Such as It is preceding described, in baseplate carrier device 20H, compared with the baseplate carrier device 20G of above-mentioned 2nd embodiment shown in Figure 13 etc., Due to being not provided with the 2nd stepping guiding element 54, therefore, compared with aforesaid substrate bearing table device 20G, baseplate carrier pallet 18g can be made more For slimming, lightweight.Further, since without the 2nd stepping guiding element 54, therefore inclined load effect is not also had in baseplate carrier Pallet 18g situation.

《The variation (2) of 2nd embodiment》

The baseplate carrier device 20I of the variation (2) of above-mentioned 2nd embodiment is shown in Figure 20.Baseplate carrier is filled 20I is put, with by the baseplate carrier device 20G (13~Figure 17 of reference picture) of above-mentioned 2nd embodiment and above-mentioned 1st embodiment Variation (2) the compositions that are combined of baseplate carrier device 20C (reference picture 7 and Fig. 8).

That is, as shown in figure 20, baseplate carrier device 20I and aforesaid substrate bearing table device 20C is likewise, the 1st stepping is led Part 70A has the function of Z actuators and weight canceller.Also, the 1st stepping guiding element 70A, with aforesaid substrate bearing table device 20G Likewise, being mounted on a pair of bases 80, opposing substrate microscope carrier pallet 18f and X beam 24, separated in vibration.According to substrate Bearing table device 20I, can also obtain the effect of the variation (2) of above-mentioned 1st embodiment in addition to the effect of above-mentioned 2nd embodiment Really.That is, baseplate carrier device 20I, baseplate carrier pallet 18f lightweight can be sought and can be lifted coarse motion microscope carrier 28 (that is, Substrate P) position controlling.

《The variation (3) of 2nd embodiment》

The baseplate carrier device 20J of the variation (3) of above-mentioned 2nd embodiment is shown in Figure 21 and Figure 22.Relatively In the baseplate carrier device 20A (reference picture 1 etc.) and the baseplate carrier device of above-mentioned 2nd embodiment of above-mentioned 1st embodiment It is that so-called gantry type double-shaft bearing table device, substrate are constituted by a pair of X beams 24 and coarse motion microscope carrier 28 in 20G (reference picture 13 etc.) Bearing table device 20J difference is, is the 1st stepping guiding element 57 and coarse motion microscope carrier 28 by taking the weight of canceller 40, Constitute so-called gantry type double-shaft bearing table device.

1st stepping guiding element 57 is made up of the tabular component for extending the YZ section rectangles of X-direction, is implemented with the above-mentioned 2nd The baseplate carrier device 20G (reference picture 13 etc.) of form is likewise, the both ends of long side direction are located on ground 11 respectively Base 80 is supported from below, and opposite sets body 18 is separated in vibration.1st stepping guiding element 57, though in Figure 21 and Figure 22 not Diagram, but for example, by the actuator of linear motor (or feed screw device) etc., driven in Y direction with predetermined stroke It is dynamic.1st stepping guiding element 57, the 1st stepping having with the baseplate carrier device 20G (reference picture 14) of above-mentioned 2nd embodiment Guiding element 50 is compared, and is formed as that width is larger (it is larger that the size of Y direction is set), with the supporting coarse motion microscope carrier that can stabilize 28。

Below coarse motion microscope carrier 28, multiple (examples oppositely disposed above bearing surface and the 1st stepping guiding element 57 are installed Such as 4) air bearing 53.Also, below coarse motion microscope carrier 28, as shown in figure 22, being provided with a pair of installing plates 29, the above-mentioned 1st Stepping guiding element 57 is inserted between a pair of installing plates 29.In the side of a pair of stepping guiding elements 57 of installing plate 29 and the 1st to face, It is separately installed with multiple (such as 2) air bearing 53.Accordingly, coarse motion microscope carrier 28 can along the 1st stepping guiding element 57 with low friction in X Direction of principal axis is moved with predetermined stroke, and is restricted relative to the Y direction movement of the 1st stepping guiding element 57.Coarse motion microscope carrier 28, passes through By the X stators (not shown) that are fixed on the 1st stepping guiding element 57 be fixed on coarse motion microscope carrier 28 X can mover (not shown) constitute X-ray motor, in being driven in X-direction on the 1st stepping guiding element 57 with predetermined stroke.

The Z obliquity information of fine motion microscope carrier 30, with aforesaid substrate bearing table device 20B (part B in 5~Fig. 6 of reference picture) Likewise, being using being obtained above a pair of the 2nd stepping guiding elements 54 by multiple Z sensors 38z.A pair of the 2nd steppings are led Part 54, the 1st stepping guiding element 57 is linked to by bending device (not shown), by drawn by the 1st stepping guiding element 57 and with the 1st step Enter guiding element 57 and be integrally displaced into Y direction.Also, due to the baseplate carrier device of more above-mentioned 2nd embodiment of the 1st stepping guiding element 57 The 1st stepping guiding element 50 that 20G (reference picture 14) has is wide, thus a pair of the 2nd stepping guiding elements 54 interval also compared with baseplate carrier Device 20G is wide.

According to baseplate carrier device 20J, baseplate carrier device 20G (reference picture 13 etc.) phase with above-mentioned 2nd embodiment Compared with, due to without a pair of X beams 24 (13~Figure 17 of reference picture), therefore its constitute it is simple.Also, due to the phase of the 1st stepping guiding element 57 Device body 18 is separated in vibration, therefore reaction force during driving coarse motion microscope carrier 28 will not act on device body 18. In addition, asking for the subject matter used during the Z obliquity information of fine motion microscope carrier 30, weight canceller 40 is mountable to.

《The variation (4) of 2nd embodiment》

The baseplate carrier device 20K of the variation (4) of above-mentioned 2nd embodiment is shown in Figure 23 and Figure 24.Substrate Bearing table device 20K, with by baseplate carrier device 20J (reference picture 21 and the figure of the variation of above-mentioned 2nd embodiment (3) 22) structure being combined with the baseplate carrier device 20C (reference picture 7 and Fig. 8) of the variation of above-mentioned 1st embodiment (2) Into.

That is, as shown in figure 23, baseplate carrier device 20K the 1st stepping guiding element 70E, under composition body 77 Between plate portion 77a and upper plate portion 77b, for example, 2 Z voice coil motors 73 and air spring 72 are inserted, with aforesaid substrate bearing table device The function with Z actuators and weight canceller same 20C the 1st stepping guiding element 70A (reference picture 7).As shown in figure 24, 1st stepping guiding element 70E lower board unit 77a and upper plate portion 77b, is respectively formed as the 1st stepping compared with aforesaid substrate bearing table device 20C Guiding element 70A (reference picture 8) is slightly wide.

Also, below coarse motion microscope carrier 28, being provided with bearing surface and multiple (examples oppositely disposed above upper plate portion 77b Such as 4) air bearing 53.In addition, below coarse motion microscope carrier 28, as shown in figure 24, being provided with a pair of installing plates 29, above-mentioned 1 stepping guiding element 70E is inserted between a pair of installing plates 29.In a pair of installing plates 29 and upper plate portion 77b sides to face, point Multiple (such as 2) air bearing 53 are not installed.Accordingly, coarse motion microscope carrier 28 can along the 1st stepping guiding element 70E with low friction in X Direction of principal axis is moved with predetermined stroke, and the movement of the Y direction relative to the 1st stepping guiding element 70E is restricted.Coarse motion microscope carrier 28, By the X stators 88a by being fixed on above the upper plate portion 77b and X that is fixed on below coarse motion microscope carrier 28 can mover 88b constitute X-ray motor, is driven along the 1st stepping guiding element 70E in X-direction with predetermined stroke.Also, upper plate portion 77b. in Figure 24 although not shown With respect to lower board unit 77a, it is restricted in the movement of X-direction and Y direction.In addition, installed in foregoing a pair of installing plates 29 Air bearing 53 can with lower board unit 77a side to.

Also, the central portion above coarse motion microscope carrier 28, is provided with bearing surface towards the air bearing 48 of+Z sides, leveling is filled 46 are put to be supported in a non contact fashion from below.The Z obliquity information of fine motion microscope carrier 30, with aforesaid substrate bearing table device 20B (part B in 5~Fig. 6 of reference picture) is likewise, be to be added by multiple Z sensors 38z using above the 2nd stepping guiding element 54 To obtain.In the 1st stepping guiding element 70E, it can be offset by air spring 72 and be comprising coarse motion microscope carrier 28 and fine motion microscope carrier 30 Weight, is reduced to coarse motion microscope carrier 28 and fine motion microscope carrier 30 are driven in the load of the Z voice coil motors 73 of Z-direction.Also, the 1 stepping guiding element 70E, though being driven coarse motion microscope carrier 28 and fine motion microscope carrier 30 in Z-direction with Z voice coil motors 73, also can use For this, multiple Z actuators 75, or the 1st stepping guiding element as shown in figure 11 are used as the 1st stepping guiding element 70B as shown in Figure 9 A pair of cams device 76 is used as 70C.

Also, the 1st and the 2nd embodiment described above (includes its variation.It is as follows) composition can suitably be subject to Change.For example in above-mentioned 1st and the 2nd embodiment, though the 1st stepping guiding element 50 and a pair of the 2nd stepping guiding elements 54 are respectively by a pair of X Beam 24 draws and is displaced into the composition of Y direction, but also can for example, by linear motor etc. actuator, and with a pair of X beams 24 Independent control X position.

Also, illumination light can be ArF PRKs (wavelength 193nm), KrF PRKs (wavelength 248nm) etc. Ultraviolet light or F₂The vacuum-ultraviolet light of laser (wavelength 157nm) etc..In addition, as illumination light, also can be used for example will be from DFB The infrared bands or the single wavelength laser of visible band that semiconductor laser or optical-fiber laser are sent are with for example doped with erbium (or erbium And both ytterbiums) fiber amplifier be subject to amplification, be subject to the harmonic wave that wavelength convert is ultraviolet light using nonlinear optical crystal.Again Person, also can be used Solid State Laser (wavelength：355nm, 266nm) etc..

Also, though projection optics system 16 possesses the projection optics system of the poly-lens mode of many projecting optical units, project The quantity not limited to this of optical unit, as long as more than 1.In addition, the projection optics system of poly-lens mode is also not limited to, Can also use such as the projection optics system of the large-scale speculum of Ou Funa (Ofner) type.Again, though in above-mentioned embodiment It is to be directed to be described for the situation of equimultiple person using projection multiplying power as projection optics system 16, but not limited to this, projection optics System can be diminution system and expand any of system.

Though it is formed with set light-shielding pattern (or phase pattern, dim light figure also, being used in transmitance mask substrate Case) light transmission type mask, but also can be used such as 6,778, No. 257 publications of U.S. Patent No. disclosed in, according to be exposed The electronic data formation transmission pattern or reflection graphic patterns of pattern or the electronics mask (variable shaping mask) for forming luminous pattern, A kind of DMD (Digital using non-luminescent type image display element (being also known as spatial light modulator) can for example be used Micro-mirror Device) variable shaping mask.

Also, the mobile body device (bearing table device) for making object be moved along set two dimensional surface, limit, which is not used in, exposes dress Put, also can be used in such as the object check device for the inspection of object, at the object that object carries out set processing Manage device.In addition, as exposure device, being also applicable to the exposure device of stepping repetition (step＆repeat) mode, stepping and connecing The exposure device of (step＆stitch) mode of conjunction.

Also, as exposure device, being especially adapted for use in and (including at least 1 in external diameter, catercorner length, one side to size Kind) for more than 500mm substrate, the exposure device of the large substrate exposure of the flat-panel screens such as making liquid crystal display cells When, especially effectively.

Also, the purposes of exposure device, however it is not limited to which the liquid crystal that liquid crystal display cells pattern is transferred into square glass plate is used Exposure device, be also widely portable to such as semiconductor manufacturing exposure device, to manufacture film magnetic head, micro-machine and The exposure device of DNA chips etc..In addition, being not only the microcomponent of semiconductor element etc., the present invention also can be suitably used for using for manufacture In the mask or graticule of light exposure device, EUV exposure devices, X-ray exposure device and electric wire exposure device etc., and by circuit Pattern is transferred to the exposure device of glass basis plate or Silicon Wafer etc..Also, possessing the device for the object holding apparatus for keeping object, not It is limited to exposure device, can also is other substrate board treatments, such as glass substrate (or wafer) check device.Also, exposing The object of light object is not limited to glass plate, can also be such as wafer, ceramic substrate, film member or mask substrate (mask Other objects such as blank).Also, when exposure object thing is the situation of flat-panel monitor substrate, the thickness of the substrate has no especially Limit, such as also comprising film-form (flat member of tool pliability) person.

The electronic component of liquid crystal display cells (or semiconductor element) etc., is designed via the functional performance for entering units Step, according to this design procedure make mask (or graticule) the step of, make glass substrate (or wafer) the step of, with above-mentioned Mask (graticule) pattern is transferred to the lithography step of glass substrate, made by the exposure device and its exposure method of each embodiment The development step of exposed glass substrate development, the part of remaining resist is subject to the component that exposes of outer portion with etching The etching step of removal, remove complete etching without resist resist removal step, element number of assembling steps, inspection Check steps It is rapid etc. to be manufactured.This occasion, due to being to implement foregoing exposure side using the exposure device of above-mentioned embodiment in lithography step Method, in forming element pattern on glass substrate, therefore can manufacture the element of high integration with good productivity.

In addition, quoting all publications, International Publication publication, United States Patent (USP) on exposure device cited in described above The part that the announcement of ublic specification of application and US Patent specification is recorded as this specification.

INDUSTRIAL APPLICABILITY

As described above, mobile body device of the invention is suitable to make moving body move along set two dimensional surface.Also, this hair Bright exposure device is suitable to the object formation predetermined pattern kept in moving body.In addition, the system of the flat-panel screens of the present invention Make the manufacture that method is suitable to flat-panel screens.Furthermore, manufacturing method of the invention is suitable to the production of microcomponent.

Claims

1. a kind of mobile body device, possesses：

Guiding element, extends the 1st direction in set two dimensional surface, and edge and the 1st side can be displaced into the two dimensional surface To the position in the 2nd orthogonal direction；

Moving body, is supported from below by the guiding element, and energy edge is displaced into along the 1st direction with the 1st face as defined in the guiding element Position and the position along the 2nd direction can be displaced into together with the guiding element；

Apparatus for deivation, is configured in the 2nd direction and guiding element separation, by the moving body relative to the guiding element toward institute The 1st direction induction is stated, by the guiding element and the moving body toward the 2nd direction induction；

Movable link, separates and configures respectively in the 2nd direction and the guiding element and the apparatus for deivation, extends described The guiding element, by the apparatus for deivation, can be displaced into along institute by 1 direction together with the moving body supported by the guiding element State the position in the 2nd direction；And

Position measurement system, will using above the movable link as defined in the 2nd face as reference plane, obtain the moving body with The positional information in the direction that the two dimensional surface intersects.

2. mobile body device as claimed in claim 1, wherein, the movable link in the 2nd direction, be respectively provided at it is described The side of guiding element and opposite side.

3. mobile body device as claimed in claim 1, position measurement system of institute possesses to be supported from below by the movable link, Can with moved as defined in the movable link on the 2nd face along the 1st direction together with the moving body and with it is described The measurement mobile member that movable link is moved along the 2nd direction together；

Position measurement system of institute is that the positional information is obtained with mobile member using the measurement.

4. mobile body device as claimed in claim 3, wherein, the measurement is supported in a non contact fashion with mobile member The movable link.

5. mobile body device as claimed in claim 3, it is further equipped with inducing the moving body along the two dimensional surface Apparatus for deivation；

The guiding element, the movable link and the measurement are with mobile member by being induced by the apparatus for deivation and the shifting of one Move in the position along the 2nd direction.

6. mobile body device as claimed in claim 5, wherein, the measurement mobile member is with the apparatus for deivation described in 1st direction drives.

7. the mobile body device as described in claim 5 or 6, wherein, the apparatus for deivation is on the 1st base component；

The guiding element is located on the 2nd base component different from the 1st base component.

8. mobile body device as claimed in claim 7, wherein, the movable link is located on the 2nd base component.

9. mobile body device as claimed in claim 7, wherein, the movable link is located at different from the 2nd base component The 3rd base component on.

10. mobile body device as claimed in claim 1, wherein, the movable link is located at below the guiding element, to cover The size that moving body is stated in mobile range in the two dimensional surface is formed.

11. mobile body device as claimed in claim 10, wherein, the guiding element is located at the pedestals different from the movable link On component.

12. the mobile body device as any one of claim 1 to 6, wherein, the guiding element is supporting the moving body In being moved on the 1st face together with the moving body along the 1st direction in the state of deadweight, and by with the guiding element one Play the supporting arrangement moved along the 2nd direction and support the moving body from below.

13. mobile body device as claimed in claim 12, wherein, the supporting arrangement is supported in described in a non contact fashion Guiding element.

14. mobile body device as claimed in claim 12, wherein, the supporting arrangement by by moving body supporting for can What relatively described two dimensional surface fascinated fascinate, and supporting arrangement supports the moving body.

15. the mobile body device as any one of claim 1 to 6, wherein, the guiding element includes and drives the moving body Move in the drive device in the direction intersected with the two dimensional surface.

16. mobile body device as claimed in claim 15, wherein, the guiding element includes oneself for the deadweight for supporting the moving body Weight supporting arrangement.

17. mobile body device as claimed in claim 15, wherein, the guiding element by by moving body supporting for can be relative What the two dimensional surface fascinated fascinate, and supporting arrangement supports the moving body.

18. mobile body device as claimed in claim 17, wherein, the supporting arrangement that fascinates is supported in a non contact fashion The guiding element.

19. mobile body device as claimed in claim 15, the guiding element, which has, makes the relatively described two dimensional surface in the 1st face incline Dynamic drive device of fascinating.

20. mobile body device as claimed in claim 19, wherein, the moving body is supported in described lead in a non contact fashion Part.

21. the mobile body device as any one of claim 1 to 6, wherein, position measurement system of institute is used located at described The measurement component of moving body, obtains positional information of the moving body in the direction intersected with the two dimensional surface.

22. a kind of exposure device, possesses：

The mobile body device of any one of the claim 1 to 21 of set object is kept in moving body；And

The object kept in the moving body forms the patterning device of predetermined pattern using energy beam.

23. exposure device as claimed in claim 22, wherein, the object is the substrate for type flat panel display apparatus.

24. exposure device as claimed in claim 23, wherein, the length on the substrate at least one side or diagonal a length of 500mm More than.

25. a kind of manufacture method of flat-panel screens, comprising：

The exposure device of usage right requirement 23 or 24 makes the action of the object exposure；And

The action for making the object after exposure develop.

26. a kind of manufacturing method, comprising：

The exposure device of usage right requirement 22 makes the action of the object exposure；And

The action for making the object after exposure develop.