Nothing Special   »   [go: up one dir, main page]

AU9396098A - Method and apparatus for data hierarchy maintenance in a system for mask description - Google Patents

Method and apparatus for data hierarchy maintenance in a system for mask description

Info

Publication number
AU9396098A
AU9396098A AU93960/98A AU9396098A AU9396098A AU 9396098 A AU9396098 A AU 9396098A AU 93960/98 A AU93960/98 A AU 93960/98A AU 9396098 A AU9396098 A AU 9396098A AU 9396098 A AU9396098 A AU 9396098A
Authority
AU
Australia
Prior art keywords
data hierarchy
mask description
hierarchy maintenance
maintenance
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU93960/98A
Inventor
Fang-Cheng Chang
Yagyensh C. Pati
Yao-Ting Wang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Numerical Technologies Inc
Original Assignee
Numerical Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/931,921 external-priority patent/US5858580A/en
Priority claimed from US09/130,996 external-priority patent/US6757645B2/en
Priority claimed from US09/154,397 external-priority patent/US6453452B1/en
Priority claimed from US09/153,783 external-priority patent/US6470489B1/en
Application filed by Numerical Technologies Inc filed Critical Numerical Technologies Inc
Priority claimed from PCT/US1998/019438 external-priority patent/WO1999014636A1/en
Publication of AU9396098A publication Critical patent/AU9396098A/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/36—Masks having proximity correction features; Preparation thereof, e.g. optical proximity correction [OPC] design processes
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G03F1/70—Adapting basic layout or design of masks to lithographic process requirements, e.g., second iteration correction of mask patterns for imaging
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70091—Illumination settings, i.e. intensity distribution in the pupil plane or angular distribution in the field plane; On-axis or off-axis settings, e.g. annular, dipole or quadrupole settings; Partial coherence control, i.e. sigma or numerical aperture [NA]
    • G03F7/70116—Off-axis setting using a programmable means, e.g. liquid crystal display [LCD], digital micromirror device [DMD] or pupil facets
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70605—Workpiece metrology
    • G03F7/70681—Metrology strategies
    • G03F7/70683—Mark designs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D89/00—Aspects of integrated devices not covered by groups H10D84/00 - H10D88/00
    • H10D89/10—Integrated device layouts

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)
AU93960/98A 1997-09-17 1998-09-17 Method and apparatus for data hierarchy maintenance in a system for mask description Abandoned AU9396098A (en)

Applications Claiming Priority (11)

Application Number Priority Date Filing Date Title
US5930697P 1997-09-17 1997-09-17
US08/931,921 US5858580A (en) 1997-09-17 1997-09-17 Phase shifting circuit manufacture method and apparatus
US60059306 1997-09-17
US08931921 1997-09-17
US6954997P 1997-12-12 1997-12-12
US60069549 1997-12-12
US09/130,996 US6757645B2 (en) 1997-09-17 1998-08-07 Visual inspection and verification system
US09130996 1998-08-07
US09/154,397 US6453452B1 (en) 1997-12-12 1998-09-16 Method and apparatus for data hierarchy maintenance in a system for mask description
US09/153,783 US6470489B1 (en) 1997-09-17 1998-09-16 Design rule checking system and method
PCT/US1998/019438 WO1999014636A1 (en) 1997-09-17 1998-09-17 Method and apparatus for data hierarchy maintenance in a system for mask description

Publications (1)

Publication Number Publication Date
AU9396098A true AU9396098A (en) 1999-04-05

Family

ID=27556793

Family Applications (3)

Application Number Title Priority Date Filing Date
AU97751/98A Abandoned AU9775198A (en) 1997-09-17 1998-09-17 Design rule checking system and method
AU93961/98A Abandoned AU9396198A (en) 1997-09-17 1998-09-17 Data hierarchy layout correction and verification method and apparatus
AU93960/98A Abandoned AU9396098A (en) 1997-09-17 1998-09-17 Method and apparatus for data hierarchy maintenance in a system for mask description

Family Applications Before (2)

Application Number Title Priority Date Filing Date
AU97751/98A Abandoned AU9775198A (en) 1997-09-17 1998-09-17 Design rule checking system and method
AU93961/98A Abandoned AU9396198A (en) 1997-09-17 1998-09-17 Data hierarchy layout correction and verification method and apparatus

Country Status (5)

Country Link
EP (2) EP1023641A4 (en)
JP (2) JP4624550B2 (en)
KR (2) KR20010024113A (en)
AU (3) AU9775198A (en)
WO (1) WO1999014638A1 (en)

Families Citing this family (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6453452B1 (en) 1997-12-12 2002-09-17 Numerical Technologies, Inc. Method and apparatus for data hierarchy maintenance in a system for mask description
JP2004503879A (en) * 2000-06-13 2004-02-05 メンター　グラフィックス　コーポレイション Integrated verification and manufacturing adaptation tools
US6425113B1 (en) 2000-06-13 2002-07-23 Leigh C. Anderson Integrated verification and manufacturability tool
US7412676B2 (en) 2000-06-13 2008-08-12 Nicolas B Cobb Integrated OPC verification tool
US6978436B2 (en) 2000-07-05 2005-12-20 Synopsys, Inc. Design data format and hierarchy management for phase processing
US6430737B1 (en) * 2000-07-10 2002-08-06 Mentor Graphics Corp. Convergence technique for model-based optical and process correction
JP2002122977A (en) * 2000-10-17 2002-04-26 Sony Corp Method for producing photomask, photomask and exposure method
KR100649969B1 (en) * 2000-12-26 2006-11-27 주식회사 하이닉스반도체 How to make a mask
US6395438B1 (en) 2001-01-08 2002-05-28 International Business Machines Corporation Method of etch bias proximity correction
US6505327B2 (en) 2001-04-13 2003-01-07 Numerical Technologies, Inc. Generating an instance-based representation of a design hierarchy
JP3572053B2 (en) * 2001-05-31 2004-09-29 株式会社東芝 Method of manufacturing exposure mask, method of generating mask substrate information, method of manufacturing semiconductor device, and server
US6560766B2 (en) 2001-07-26 2003-05-06 Numerical Technologies, Inc. Method and apparatus for analyzing a layout using an instance-based representation
US6721928B2 (en) 2001-07-26 2004-04-13 Numerical Technologies, Inc. Verification utilizing instance-based hierarchy management
US6738958B2 (en) 2001-09-10 2004-05-18 Numerical Technologies, Inc. Modifying a hierarchical representation of a circuit to process composite gates
US6735752B2 (en) 2001-09-10 2004-05-11 Numerical Technologies, Inc. Modifying a hierarchical representation of a circuit to process features created by interactions between cells
US6880135B2 (en) 2001-11-07 2005-04-12 Synopsys, Inc. Method of incorporating lens aberration information into various process flows
US7085698B2 (en) 2001-12-18 2006-08-01 Synopsys, Inc. Method for providing flexible and dynamic reporting capability using simulation tools
US7159197B2 (en) 2001-12-31 2007-01-02 Synopsys, Inc. Shape-based geometry engine to perform smoothing and other layout beautification operations
JP4138318B2 (en) * 2002-01-08 2008-08-27 株式会社ルネサステクノロジ Lithography process margin evaluation apparatus, lithography process margin evaluation method, and lithography process margin evaluation program
US7293249B2 (en) 2002-01-31 2007-11-06 Juan Andres Torres Robles Contrast based resolution enhancement for photolithographic processing
US7386433B2 (en) 2002-03-15 2008-06-10 Synopsys, Inc. Using a suggested solution to speed up a process for simulating and correcting an integrated circuit layout
US6944844B2 (en) 2002-04-03 2005-09-13 Synopsys, Inc. System and method to determine impact of line end shortening
US6931613B2 (en) 2002-06-24 2005-08-16 Thomas H. Kauth Hierarchical feature extraction for electrical interaction calculations
US6687895B2 (en) 2002-07-03 2004-02-03 Numerical Technologies Inc. Method and apparatus for reducing optical proximity correction output file size
US7069534B2 (en) 2003-12-17 2006-06-27 Sahouria Emile Y Mask creation with hierarchy management using cover cells
US7861207B2 (en) 2004-02-25 2010-12-28 Mentor Graphics Corporation Fragmentation point and simulation site adjustment for resolution enhancement techniques
US7448012B1 (en) 2004-04-21 2008-11-04 Qi-De Qian Methods and system for improving integrated circuit layout
US8799830B2 (en) 2004-05-07 2014-08-05 Mentor Graphics Corporation Integrated circuit layout design methodology with process variation bands
US7240305B2 (en) 2004-06-02 2007-07-03 Lippincott George P OPC conflict identification and edge priority system
JP4266189B2 (en) 2004-07-09 2009-05-20 株式会社東芝 Semiconductor integrated circuit pattern verification method, photomask creation method, semiconductor integrated circuit device manufacturing method, and program for realizing semiconductor integrated circuit pattern verification method
JP4904034B2 (en) * 2004-09-14 2012-03-28 ケーエルエー−テンカー コーポレイション Method, system and carrier medium for evaluating reticle layout data
US7617473B2 (en) * 2005-01-21 2009-11-10 International Business Machines Corporation Differential alternating phase shift mask optimization
US7506285B2 (en) 2006-02-17 2009-03-17 Mohamed Al-Imam Multi-dimensional analysis for predicting RET model accuracy
US7739650B2 (en) 2007-02-09 2010-06-15 Juan Andres Torres Robles Pre-bias optical proximity correction
EP2153376B1 (en) 2007-05-23 2011-10-19 Nxp B.V. Process-window aware detection and correction of lithographic printing issues at mask level
US7805699B2 (en) 2007-10-11 2010-09-28 Mentor Graphics Corporation Shape-based photolithographic model calibration
JP5100405B2 (en) * 2008-01-16 2012-12-19 株式会社東芝 Database creation method and database apparatus
US7975244B2 (en) 2008-01-24 2011-07-05 International Business Machines Corporation Methodology and system for determining numerical errors in pixel-based imaging simulation in designing lithographic masks
US10008422B2 (en) * 2015-08-17 2018-06-26 Qoniac Gmbh Method for assessing the usability of an exposed and developed semiconductor wafer

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0608657A1 (en) * 1993-01-29 1994-08-03 International Business Machines Corporation Apparatus and method for preparing shape data for proximity correction
KR0163471B1 (en) * 1994-07-05 1998-12-15 가네꼬 히사시 Photo-mask manufacturing method used for modified illumination, projection aligner using photo-mask and method of transferring pattern image from photo-mask to photosensitive layer
JPH08297692A (en) * 1994-09-16 1996-11-12 Mitsubishi Electric Corp Device and method for correcting optical proximity, and pattern forming method
US5682323A (en) * 1995-03-06 1997-10-28 Lsi Logic Corporation System and method for performing optical proximity correction on macrocell libraries
JP3409493B2 (en) 1995-03-13 2003-05-26 ソニー株式会社 Mask pattern correction method and correction device
US5553273A (en) * 1995-04-17 1996-09-03 International Business Machines Corporation Vertex minimization in a smart optical proximity correction system
JP2917879B2 (en) * 1995-10-31 1999-07-12 日本電気株式会社 Photomask and manufacturing method thereof
US5705301A (en) * 1996-02-27 1998-01-06 Lsi Logic Corporation Performing optical proximity correction with the aid of design rule checkers
US5801954A (en) * 1996-04-24 1998-09-01 Micron Technology, Inc. Process for designing and checking a mask layout
US5707765A (en) * 1996-05-28 1998-01-13 Microunity Systems Engineering, Inc. Photolithography mask using serifs and method thereof
DE19818440C2 (en) * 1998-04-24 2002-10-24 Pdf Solutions Gmbh Method for generating data for the production of a structure defined by design data

Also Published As

Publication number Publication date
EP1023639A1 (en) 2000-08-02
AU9396198A (en) 1999-04-05
EP1023639A4 (en) 2009-04-29
WO1999014638A1 (en) 1999-03-25
EP1023641A1 (en) 2000-08-02
JP2003526110A (en) 2003-09-02
JP4624550B2 (en) 2011-02-02
KR20010024117A (en) 2001-03-26
KR20010024113A (en) 2001-03-26
JP2003523545A (en) 2003-08-05
EP1023641A4 (en) 2009-04-22
AU9775198A (en) 1999-04-05

Similar Documents

Publication Publication Date Title
AU9396098A (en) Method and apparatus for data hierarchy maintenance in a system for mask description
IL143573A0 (en) A method and apparatus for providing network and computer system security
AU2511995A (en) Method and apparatus for thermal management in a computer system
EP0868696A4 (en) Method and apparatus for managing a computer network
GB2333619B (en) A method and apparatus for document management utilizing a messaging system
IL123769A0 (en) A system method and apparatus for data compression
AU2668197A (en) Method and apparatus for rationalizing different data formats in a data management system
IL122516A0 (en) Apparatus system and method for a communications system architecture
HK1003731A1 (en) Method and system for archiving information on a communication network
IL132060A0 (en) Method and system for providing a presentation on a network
GB9604987D0 (en) Data management system and method for replicated data
AU3186595A (en) A configuration method for a data management system
AU5584299A (en) Method and apparatus for rasterizing in a hierarchical order
AU5791198A (en) Method and apparatus for embedding auxiliary data in a primary data signal
AU5679896A (en) Method and apparatus for automatically constructing a data f low architecture
AU2295595A (en) Method and apparatus for configuring multiple agents in a computer system
AU2036800A (en) Method and apparatus for alerting a communication unit in a communication system
HUP9702413A3 (en) Computer system for data management and method for operating said system
AU1987897A (en) Method and apparatus for validating data packets in a paging system
AU3820297A (en) Method and apparatus for changing data transfer widths in a computer system
ZA965651B (en) Method and system for correlating usage data in a disributed architecture
AU2703995A (en) Method and apparatus for a simplified system simulation description
GB9715760D0 (en) Method and apparatus for managing a distributed data processing system
EP0883943A4 (en) Method and apparatus for switching between redundant hardware in a wireless data communication system
AU2680399A (en) Apparatus and method for dynamically verifying information in a distributed system

Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase