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AU2001257439A1 - Gas cabinet assembly comprising sorbent-based gas storage and delivery system - Google Patents

Gas cabinet assembly comprising sorbent-based gas storage and delivery system

Info

Publication number
AU2001257439A1
AU2001257439A1 AU2001257439A AU5743901A AU2001257439A1 AU 2001257439 A1 AU2001257439 A1 AU 2001257439A1 AU 2001257439 A AU2001257439 A AU 2001257439A AU 5743901 A AU5743901 A AU 5743901A AU 2001257439 A1 AU2001257439 A1 AU 2001257439A1
Authority
AU
Australia
Prior art keywords
sorbent
delivery system
cabinet assembly
gas storage
based gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001257439A
Inventor
James V Mcmanus
Glenn M Tom
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advanced Technology Materials Inc
Original Assignee
Advanced Technology Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/564,323 external-priority patent/US6406519B1/en
Application filed by Advanced Technology Materials Inc filed Critical Advanced Technology Materials Inc
Publication of AU2001257439A1 publication Critical patent/AU2001257439A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C7/00—Methods or apparatus for discharging liquefied, solidified, or compressed gases from pressure vessels, not covered by another subclass
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C11/00—Use of gas-solvents or gas-sorbents in vessels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/04—Arrangement or mounting of valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/04—Arrangement or mounting of valves
    • F17C13/045—Automatic change-over switching assembly for bottled gas systems with two (or more) gas containers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0338—Pressure regulators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0388—Arrangement of valves, regulators, filters
    • F17C2205/0391—Arrangement of valves, regulators, filters inside the pressure vessel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
    • F17C2223/0107—Single phase
    • F17C2223/0123—Single phase gaseous, e.g. CNG, GNC
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/03—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the pressure level
    • F17C2223/038—Subatmospheric pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00—Applications
    • F17C2270/05—Applications for industrial use
    • F17C2270/0518—Semiconductors

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Drying Of Semiconductors (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Chemical Vapour Deposition (AREA)
AU2001257439A 2000-05-03 2001-04-27 Gas cabinet assembly comprising sorbent-based gas storage and delivery system Abandoned AU2001257439A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/564,323 US6406519B1 (en) 1998-03-27 2000-05-03 Gas cabinet assembly comprising sorbent-based gas storage and delivery system
US09564323 2000-05-03
PCT/US2001/013922 WO2001083084A1 (en) 2000-05-03 2001-04-27 Gas cabinet assembly comprising sorbent-based gas storage and delivery system

Publications (1)

Publication Number Publication Date
AU2001257439A1 true AU2001257439A1 (en) 2001-11-12

Family

ID=24254011

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001257439A Abandoned AU2001257439A1 (en) 2000-05-03 2001-04-27 Gas cabinet assembly comprising sorbent-based gas storage and delivery system

Country Status (6)

Country Link
EP (1) EP1284806A4 (en)
JP (1) JP2003532034A (en)
KR (1) KR100858077B1 (en)
CN (1) CN1204954C (en)
AU (1) AU2001257439A1 (en)
WO (1) WO2001083084A1 (en)

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US6921062B2 (en) 2002-07-23 2005-07-26 Advanced Technology Materials, Inc. Vaporizer delivery ampoule
US7300038B2 (en) * 2002-07-23 2007-11-27 Advanced Technology Materials, Inc. Method and apparatus to help promote contact of gas with vaporized material
US6991671B2 (en) * 2002-12-09 2006-01-31 Advanced Technology Materials, Inc. Rectangular parallelepiped fluid storage and dispensing vessel
JP4652785B2 (en) * 2004-11-29 2011-03-16 株式会社日立国際電気 Substrate processing equipment
KR100675063B1 (en) * 2005-06-27 2007-01-29 울산화학주식회사 Filling method of Liquified gas
KR100820377B1 (en) * 2006-07-07 2008-04-10 김재윤 A equipment packing nitrogen gas
GB2441056A (en) * 2006-08-18 2008-02-20 Nomenca Ltd Gas canister security retention cabinet
US20080241805A1 (en) 2006-08-31 2008-10-02 Q-Track Corporation System and method for simulated dosimetry using a real time locating system
US8499789B2 (en) * 2008-05-29 2013-08-06 Tescom Corporation Mobile gas supply system
CN105387340B (en) * 2010-01-14 2018-09-18 恩特格里斯公司 Suitable for accommodating the case of fluid supply container and flow path coupled thereto
US8858819B2 (en) 2010-02-15 2014-10-14 Air Products And Chemicals, Inc. Method for chemical mechanical planarization of a tungsten-containing substrate
TWI525042B (en) * 2010-09-16 2016-03-11 首威公司 Hydrogen fluoride supply unit
US9032990B2 (en) * 2011-04-25 2015-05-19 Applied Materials, Inc. Chemical delivery system
JP2015519478A (en) 2012-05-31 2015-07-09 アドバンスド テクノロジー マテリアルズ，インコーポレイテッド Fluid delivery based on source reagent with high material flux for batch deposition
JP2014207200A (en) * 2013-04-16 2014-10-30 東京電力株式会社 Fire-extinguishing method in sodium-sulfur battery
CN103638890B (en) * 2013-11-19 2016-01-06 全椒南大光电材料有限公司 The preparation method of high-purity substitute body source
SG11201702730QA (en) * 2014-10-03 2017-04-27 Entegris Inc Pressure-regulated gas supply vessel
WO2016130866A1 (en) 2015-02-12 2016-08-18 Entegris, Inc. Smart package
US10052623B2 (en) 2015-06-29 2018-08-21 Industrial Technology Research Institute Inorganic material for removing harmful substance from wastewater and method of preparing the same, and method for wastewater treatment
FR3039622B1 (en) * 2015-07-31 2018-03-02 Air Liquide Electronics Systems INSTALLATION FOR DISTRIBUTION OF WORKING GAS.
CN107364659B (en) * 2017-07-31 2023-06-27 浙江巨化装备制造有限公司 Safety storage equipment for anhydrous hydrogen fluoride and manufacturing method thereof
CN107883184B (en) * 2017-10-27 2020-02-11 北京空间技术研制试验中心 High-pressure gas cylinder bearing device for spacecraft
CN108421365A (en) * 2018-03-19 2018-08-21 杭州正大重工机械有限公司 A kind of organic exhaust gas is collected and processing system
KR102040716B1 (en) * 2018-07-10 2019-11-06 에이엠티 주식회사 Method for automatically replacing a gas barrel
KR102132173B1 (en) * 2019-01-22 2020-07-10 주식회사 원익홀딩스 cabinet for gas supply apparatus of gas cylinder
WO2020196491A1 (en) * 2019-03-27 2020-10-01 Ｊｘｔｇエネルギー株式会社 Hydrogen gas supplier and hydrogen gas supply method
US11527380B2 (en) 2020-04-01 2022-12-13 Taiwan Semiconductor Manufacturing Co., Ltd. Ion implanter toxic gas delivery system
KR102229474B1 (en) * 2020-08-31 2021-03-17 서갑수 Gas supply control box
US11493909B1 (en) * 2021-04-16 2022-11-08 Taiwan Semiconductor Manufacturing Company Ltd. Method for detecting environmental parameter in semiconductor fabrication facility
US11629821B1 (en) 2022-01-19 2023-04-18 Praxair Technology, Inc. Gas dosing apparatus with directional control valve
US12018800B2 (en) 2022-03-29 2024-06-25 Praxair Technology, Inc. Method and system for optimized gas delivery with automated redundant pressure regulation safety feature
CN115957717A (en) * 2022-12-20 2023-04-14 张家港安储科技有限公司 Monolithic porous inorganic material adsorbent and application thereof
CN116371142B (en) * 2023-06-01 2023-10-03 中国华能集团清洁能源技术研究院有限公司 Flue gas low-temperature adsorption regeneration system and adsorbent heating and conveying device
CN116624753B (en) * 2023-06-16 2023-11-07 福建德尔科技股份有限公司 Chlorine trifluoride filling method and system
KR102716664B1 (en) * 2024-07-08 2024-10-11 김형호 Storage Vessel for Chemical for Semiconductor Manufacturing Process

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Also Published As

Publication number Publication date
KR100858077B1 (en) 2008-09-11
JP2003532034A (en) 2003-10-28
CN1452507A (en) 2003-10-29
WO2001083084A1 (en) 2001-11-08
KR20030034065A (en) 2003-05-01
EP1284806A1 (en) 2003-02-26
CN1204954C (en) 2005-06-08
EP1284806A4 (en) 2006-03-15

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