ATE69094T1 - Antriebsvorrichtung mit andruckelement. - Google Patents
Antriebsvorrichtung mit andruckelement.Info
- Publication number
- ATE69094T1 ATE69094T1 AT88201174T AT88201174T ATE69094T1 AT E69094 T1 ATE69094 T1 AT E69094T1 AT 88201174 T AT88201174 T AT 88201174T AT 88201174 T AT88201174 T AT 88201174T AT E69094 T1 ATE69094 T1 AT E69094T1
- Authority
- AT
- Austria
- Prior art keywords
- drive device
- pressure element
- load
- axis
- driving mechanism
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/707—Chucks, e.g. chucking or un-chucking operations or structural details
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
- F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T74/00—Machine element or mechanism
- Y10T74/18—Mechanical movements
- Y10T74/18888—Reciprocating to or from oscillating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T74/00—Machine element or mechanism
- Y10T74/18—Mechanical movements
- Y10T74/18888—Reciprocating to or from oscillating
- Y10T74/1892—Lever and slide
- Y10T74/1896—Cam connections
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Transmission Devices (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Friction Gearing (AREA)
- Surgical Instruments (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL8701360 | 1987-06-11 | ||
EP88201174A EP0296659B1 (de) | 1987-06-11 | 1988-06-08 | Antriebsvorrichtung mit Andruckelement |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE69094T1 true ATE69094T1 (de) | 1991-11-15 |
Family
ID=19850129
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT88201174T ATE69094T1 (de) | 1987-06-11 | 1988-06-08 | Antriebsvorrichtung mit andruckelement. |
Country Status (5)
Country | Link |
---|---|
US (1) | US4872358A (de) |
EP (1) | EP0296659B1 (de) |
JP (1) | JP2851851B2 (de) |
AT (1) | ATE69094T1 (de) |
DE (1) | DE3865897D1 (de) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5602619A (en) * | 1993-09-22 | 1997-02-11 | Nikon Precision, Inc. | Scanner for step and scan lithography system |
US6001233A (en) * | 1998-04-13 | 1999-12-14 | Novex | Gel electrophoresis apparatus having CAM-activated clamp and methods of use |
US6199588B1 (en) | 1999-11-23 | 2001-03-13 | Delaware Capital Formation, Inc. | Servovalve having a trapezoidal drive |
JP3870066B2 (ja) * | 2000-12-27 | 2007-01-17 | サンエー技研株式会社 | 基板位置決め装置および露光装置 |
DE102015104712B3 (de) * | 2015-03-27 | 2016-04-07 | Blickle Sondermaschinen Gmbh & Co. Kg | Vorrichtung zum Durchführen einer phasenverriegelten Linearverschiebung zweier parallel angeordneter Wellen |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE454399C (de) * | 1924-06-05 | 1928-01-09 | George Stanley Walpole | Hubgetriebe zum Erzeugen einer Relativbewegung zwischen zwei Maschinenteilen mittels einer zwischen ihnen liegenden umlaufenden Welle |
CH244158A (de) * | 1945-02-09 | 1946-08-31 | Saurer Ag Adolph | Nockentrieb mit Tellerstössel. |
US2508557A (en) * | 1946-11-15 | 1950-05-23 | American Bosch Corp | Eccentric follower mechanism |
US2674904A (en) * | 1950-04-22 | 1954-04-13 | Gen Motors Corp | Camshaft |
US3199359A (en) * | 1962-05-01 | 1965-08-10 | Earl F Beezer | Motion transmitting device |
DE1600133A1 (de) * | 1966-06-27 | 1970-04-02 | Teves Gmbh Alfred | Scheibenbremse,insbesondere fuer Kraftfahrzeuge |
US3469660A (en) * | 1967-12-28 | 1969-09-30 | Fruehauf Corp | Double acting s-cam for wheel brakes |
US3997033A (en) * | 1975-01-02 | 1976-12-14 | Airheart Products, Inc. | Cam operated disc brake |
-
1988
- 1988-02-29 US US07/161,527 patent/US4872358A/en not_active Expired - Lifetime
- 1988-06-08 DE DE8888201174T patent/DE3865897D1/de not_active Expired - Lifetime
- 1988-06-08 AT AT88201174T patent/ATE69094T1/de active
- 1988-06-08 EP EP88201174A patent/EP0296659B1/de not_active Expired - Lifetime
- 1988-06-10 JP JP63141931A patent/JP2851851B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US4872358A (en) | 1989-10-10 |
JP2851851B2 (ja) | 1999-01-27 |
DE3865897D1 (de) | 1991-12-05 |
EP0296659A1 (de) | 1988-12-28 |
JPS6426058A (en) | 1989-01-27 |
EP0296659B1 (de) | 1991-10-30 |
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