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ATE299614T1 - Dünnschichtwiderstand mit tantalpentoxid feuchtigkeitsbarriere - Google Patents

Dünnschichtwiderstand mit tantalpentoxid feuchtigkeitsbarriere

Info

Publication number
ATE299614T1
ATE299614T1 AT01924989T AT01924989T ATE299614T1 AT E299614 T1 ATE299614 T1 AT E299614T1 AT 01924989 T AT01924989 T AT 01924989T AT 01924989 T AT01924989 T AT 01924989T AT E299614 T1 ATE299614 T1 AT E299614T1
Authority
AT
Austria
Prior art keywords
thin film
layer
tantalpen
moisture barrier
film resistance
Prior art date
Application number
AT01924989T
Other languages
English (en)
Inventor
Stephen C Vincent
Original Assignee
Vishay Dale Electronics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vishay Dale Electronics Inc filed Critical Vishay Dale Electronics Inc
Application granted granted Critical
Publication of ATE299614T1 publication Critical patent/ATE299614T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
    • H01C17/12—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/006—Thin film resistors

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Manufacturing & Machinery (AREA)
  • Non-Adjustable Resistors (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Details Of Resistors (AREA)
  • Thermistors And Varistors (AREA)
AT01924989T 2001-04-09 2001-04-12 Dünnschichtwiderstand mit tantalpentoxid feuchtigkeitsbarriere ATE299614T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/829,169 US7214295B2 (en) 2001-04-09 2001-04-09 Method for tantalum pentoxide moisture barrier in film resistors
PCT/US2001/012034 WO2002082474A1 (en) 2001-04-09 2001-04-12 Thin film resistor having tantalum pentoxide moisture barrier

Publications (1)

Publication Number Publication Date
ATE299614T1 true ATE299614T1 (de) 2005-07-15

Family

ID=25253729

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01924989T ATE299614T1 (de) 2001-04-09 2001-04-12 Dünnschichtwiderstand mit tantalpentoxid feuchtigkeitsbarriere

Country Status (6)

Country Link
US (2) US7214295B2 (de)
EP (1) EP1377990B1 (de)
JP (1) JP3863491B2 (de)
AT (1) ATE299614T1 (de)
DE (1) DE60111961T2 (de)
WO (1) WO2002082474A1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7271700B2 (en) * 2005-02-16 2007-09-18 International Business Machines Corporation Thin film resistor with current density enhancing layer (CDEL)
CN104797989B (zh) * 2012-11-16 2017-08-08 尼瓦洛克斯-法尔股份有限公司 对气候变化的敏感度降低的谐振器
FR3002386A1 (fr) * 2013-02-18 2014-08-22 Pierre Emile Jean Marie Pinsseau Amplificateur a distorsions residuelles
BR112016013353B1 (pt) * 2013-12-10 2020-11-24 Illumina, Inc Biossensor e metodo para produzir um biossensor
US9508474B2 (en) * 2015-01-15 2016-11-29 Shih-Long Wei Method for manufacturing anticorrosive thin film resistor and structure thereof
TW202136550A (zh) * 2020-03-25 2021-10-01 光頡科技股份有限公司 薄膜電阻層製備方法
DE102021121240A1 (de) * 2021-08-16 2023-02-16 Vishay Electronic Gmbh Elektrisches Widerstandsbauelement

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* Cited by examiner, † Cited by third party
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Also Published As

Publication number Publication date
EP1377990A1 (de) 2004-01-07
US20020145504A1 (en) 2002-10-10
EP1377990B1 (de) 2005-07-13
US7214295B2 (en) 2007-05-08
US7170389B2 (en) 2007-01-30
DE60111961D1 (de) 2005-08-18
JP2004535059A (ja) 2004-11-18
DE60111961T2 (de) 2006-03-30
US20020145503A1 (en) 2002-10-10
WO2002082474A1 (en) 2002-10-17
JP3863491B2 (ja) 2006-12-27

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties