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NL8902471A - Tweetraps positioneerinrichting. - Google Patents

Tweetraps positioneerinrichting. Download PDF

Info

Publication number
NL8902471A
NL8902471A NL8902471A NL8902471A NL8902471A NL 8902471 A NL8902471 A NL 8902471A NL 8902471 A NL8902471 A NL 8902471A NL 8902471 A NL8902471 A NL 8902471A NL 8902471 A NL8902471 A NL 8902471A
Authority
NL
Netherlands
Prior art keywords
carriage
positioning device
coordinate direction
slide
coil
Prior art date
Application number
NL8902471A
Other languages
English (en)
Dutch (nl)
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Priority to NL8902471A priority Critical patent/NL8902471A/nl
Priority to KR1019900015469A priority patent/KR0154513B1/ko
Priority to DE69010610T priority patent/DE69010610T2/de
Priority to EP90202582A priority patent/EP0421527B1/fr
Priority to US07/594,520 priority patent/US5120034A/en
Priority to JP2266526A priority patent/JP3016088B2/ja
Publication of NL8902471A publication Critical patent/NL8902471A/nl

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D3/00—Control of position or direction
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
    • B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/19—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path
    • G05B19/39—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using a combination of the means covered by at least two of the preceding groups G05B19/21, G05B19/27 and G05B19/33
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37275—Laser, interferometer
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/49—Nc machine tool, till multiple
    • G05B2219/49271—Air bearing slide, hydraulic, electromagnetic bearing
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/49—Nc machine tool, till multiple
    • G05B2219/49276—Floating, air, magnetic suspension xy table, sawyer motor, xenetics
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/49—Nc machine tool, till multiple
    • G05B2219/49284—Two cascaded slides, large range sits on small range, piggyback

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Human Computer Interaction (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Control Of Position Or Direction (AREA)
  • Machine Tool Units (AREA)
  • Machine Tool Positioning Apparatuses (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
NL8902471A 1989-10-05 1989-10-05 Tweetraps positioneerinrichting. NL8902471A (nl)

Priority Applications (6)

Application Number Priority Date Filing Date Title
NL8902471A NL8902471A (nl) 1989-10-05 1989-10-05 Tweetraps positioneerinrichting.
KR1019900015469A KR0154513B1 (ko) 1989-10-05 1990-09-28 위치결정 장치
DE69010610T DE69010610T2 (de) 1989-10-05 1990-10-01 Zweistufen- Positioniervorrichtung.
EP90202582A EP0421527B1 (fr) 1989-10-05 1990-10-01 Dispositif de positionnement à deux étages
US07/594,520 US5120034A (en) 1989-10-05 1990-10-04 Two-step positioning device using lorentz forces and a static gas bearing
JP2266526A JP3016088B2 (ja) 1989-10-05 1990-10-05 位置決め装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL8902471A NL8902471A (nl) 1989-10-05 1989-10-05 Tweetraps positioneerinrichting.
NL8902471 1989-10-05

Publications (1)

Publication Number Publication Date
NL8902471A true NL8902471A (nl) 1991-05-01

Family

ID=19855399

Family Applications (1)

Application Number Title Priority Date Filing Date
NL8902471A NL8902471A (nl) 1989-10-05 1989-10-05 Tweetraps positioneerinrichting.

Country Status (6)

Country Link
US (1) US5120034A (fr)
EP (1) EP0421527B1 (fr)
JP (1) JP3016088B2 (fr)
KR (1) KR0154513B1 (fr)
DE (1) DE69010610T2 (fr)
NL (1) NL8902471A (fr)

Families Citing this family (53)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL9100421A (nl) * 1991-03-08 1992-10-01 Asm Lithography Bv Ondersteuningsinrichting met een kantelbare objecttafel alsmede optisch lithografische inrichting voorzien van een dergelijke ondersteuningsinrichting.
JP2714502B2 (ja) * 1991-09-18 1998-02-16 キヤノン株式会社 移動ステージ装置
EP0583035B1 (fr) * 1992-08-12 1996-11-27 Koninklijke Philips Electronics N.V. Mécanisme de transmission, dispositif de positionnement avec un tel mécanisme de transmission et dispositif de lithographie avec un tel dispositif de positionnement
KR950003660A (ko) * 1992-08-12 1995-02-17 제이지에이롤프스 변속 기구, 변속 기구를 구비한 위치 설정 장치 및, 위치 설정 장치를 구비한 리도그래픽 장치
GB9223716D0 (en) * 1992-11-12 1992-12-23 British Aerospace An aircraft landing gear trolley
DE4307482A1 (de) * 1993-03-10 1994-09-22 Max Rhodius Gmbh Werkzeugmaschine
US5874820A (en) * 1995-04-04 1999-02-23 Nikon Corporation Window frame-guided stage mechanism
US6989647B1 (en) 1994-04-01 2006-01-24 Nikon Corporation Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device
US7365513B1 (en) 1994-04-01 2008-04-29 Nikon Corporation Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device
US5528118A (en) * 1994-04-01 1996-06-18 Nikon Precision, Inc. Guideless stage with isolated reaction stage
US6721034B1 (en) 1994-06-16 2004-04-13 Nikon Corporation Stage unit, drive table, and scanning exposure apparatus using the same
JP3484684B2 (ja) * 1994-11-01 2004-01-06 株式会社ニコン ステージ装置及び走査型露光装置
US5850280A (en) 1994-06-16 1998-12-15 Nikon Corporation Stage unit, drive table, and scanning exposure and apparatus using same
US6246204B1 (en) * 1994-06-27 2001-06-12 Nikon Corporation Electromagnetic alignment and scanning apparatus
US5623853A (en) * 1994-10-19 1997-04-29 Nikon Precision Inc. Precision motion stage with single guide beam and follower stage
US6008500A (en) * 1995-04-04 1999-12-28 Nikon Corporation Exposure apparatus having dynamically isolated reaction frame
TW318255B (fr) * 1995-05-30 1997-10-21 Philips Electronics Nv
EP0772800B1 (fr) * 1995-05-30 2000-05-10 Asm Lithography B.V. Dispositif a graver equipe d'un porte-masque a positionnement tridimensionnel
TW316874B (fr) * 1995-05-30 1997-10-01 Philips Electronics Nv
US5760564A (en) * 1995-06-27 1998-06-02 Nikon Precision Inc. Dual guide beam stage mechanism with yaw control
DE69601763T2 (de) * 1995-09-04 1999-09-09 Canon K.K. Einrichtung zur Antriebsregelung
JP3002142B2 (ja) * 1996-10-07 2000-01-24 キヤノン株式会社 移動ステージ装置および半導体焼付け装置
US5815246A (en) * 1996-12-24 1998-09-29 U.S. Philips Corporation Two-dimensionally balanced positioning device, and lithographic device provided with such a positioning device
JP3155936B2 (ja) * 1997-06-26 2001-04-16 キヤノン株式会社 リニアモータとステージ装置及びこれを用いた走査型露光装置やデバイス製造方法
US6003230A (en) * 1997-10-03 1999-12-21 Massachusetts Institute Of Technology Magnetic positioner having a single moving part
US6054784A (en) * 1997-12-29 2000-04-25 Asm Lithography B.V. Positioning device having three coil systems mutually enclosing angles of 120° and lithographic device comprising such a positioning device
TWI242113B (en) * 1998-07-17 2005-10-21 Asml Netherlands Bv Positioning device and lithographic projection apparatus comprising such a device
US6144118A (en) 1998-09-18 2000-11-07 General Scanning, Inc. High-speed precision positioning apparatus
TW526630B (en) * 1998-11-10 2003-04-01 Asml Netherlands Bv Actuator and transducer
US6693708B1 (en) 1999-09-07 2004-02-17 Applied Materials, Inc. Method and apparatus for substrate surface inspection using spectral profiling techniques
US6630995B1 (en) 1999-09-07 2003-10-07 Applied Materials, Inc. Method and apparatus for embedded substrate and system status monitoring
US7012684B1 (en) 1999-09-07 2006-03-14 Applied Materials, Inc. Method and apparatus to provide for automated process verification and hierarchical substrate examination
US6721045B1 (en) 1999-09-07 2004-04-13 Applied Materials, Inc. Method and apparatus to provide embedded substrate process monitoring through consolidation of multiple process inspection techniques
US6707544B1 (en) 1999-09-07 2004-03-16 Applied Materials, Inc. Particle detection and embedded vision system to enhance substrate yield and throughput
US6707545B1 (en) 1999-09-07 2004-03-16 Applied Materials, Inc. Optical signal routing method and apparatus providing multiple inspection collection points on semiconductor manufacturing systems
US6813032B1 (en) 1999-09-07 2004-11-02 Applied Materials, Inc. Method and apparatus for enhanced embedded substrate inspection through process data collection and substrate imaging techniques
TW546551B (en) 1999-12-21 2003-08-11 Asml Netherlands Bv Balanced positioning system for use in lithographic apparatus
US20020196336A1 (en) * 2001-06-19 2002-12-26 Applied Materials, Inc. Method and apparatus for substrate imaging
US6903346B2 (en) * 2001-07-11 2005-06-07 Nikon Corporation Stage assembly having a follower assembly
US6888289B2 (en) * 2002-07-16 2005-05-03 Baldor Electric Company Multi-axes, sub-micron positioner
US7869000B2 (en) * 2004-11-02 2011-01-11 Nikon Corporation Stage assembly with lightweight fine stage and low transmissibility
US7417714B2 (en) * 2004-11-02 2008-08-26 Nikon Corporation Stage assembly with measurement system initialization, vibration compensation, low transmissibility, and lightweight fine stage
US7468589B2 (en) * 2006-01-13 2008-12-23 Asml Netherlands B.V. Lithographic apparatus having a controlled motor, and motor control system and method
US9752615B2 (en) * 2007-06-27 2017-09-05 Brooks Automation, Inc. Reduced-complexity self-bearing brushless DC motor
US8823294B2 (en) 2007-06-27 2014-09-02 Brooks Automation, Inc. Commutation of an electromagnetic propulsion and guidance system
US7834618B2 (en) * 2007-06-27 2010-11-16 Brooks Automation, Inc. Position sensor system
US8283813B2 (en) 2007-06-27 2012-10-09 Brooks Automation, Inc. Robot drive with magnetic spindle bearings
JP5663304B2 (ja) 2007-06-27 2015-02-04 ブルックス オートメーション インコーポレイテッド 多次元位置センサ
CN101855811B (zh) * 2007-06-27 2013-11-20 布鲁克斯自动化公司 具有提升能力和减少的齿槽特性的电机定子
KR20100056468A (ko) 2007-07-17 2010-05-27 브룩스 오토메이션 인코퍼레이티드 챔버 벽들에 일체화된 모터들을 갖는 기판 처리 장치
DE102012000664B4 (de) * 2012-01-17 2014-07-10 Mirjana Jovanovic Vorrichtung zur Erzeugung von dreidimmensionalen Objekten
RU2633302C2 (ru) 2012-10-09 2017-10-11 Конинклейке Филипс Н.В. Позиционирующее устройство, управляющее устройство и способ управления
CN102940509A (zh) * 2012-12-10 2013-02-27 深圳市海曼医疗设备有限公司 一种超声诊断仪操作台

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DE1477579C3 (de) * 1960-09-13 1974-01-03 Hellmut Dipl.-Ing. 7300 Esslingen-Liebersbronn Mueller Vorrichtung zum Bearbeiten von Werkstücken
CH436751A (de) * 1966-05-31 1967-05-31 Contraves Ag Koordinatograph
JPS5313272A (en) * 1976-07-23 1978-02-06 Hitachi Ltd Precision planar moving plate
US4492356A (en) * 1982-02-26 1985-01-08 Hitachi, Ltd. Precision parallel translation system
JPS5961132A (ja) * 1982-09-30 1984-04-07 Fujitsu Ltd 電子ビ−ム露光装置
JPS60150950A (ja) * 1984-01-20 1985-08-08 Hitachi Ltd 案内装置
JPH0727042B2 (ja) * 1986-12-02 1995-03-29 キヤノン株式会社 ステ−ジ装置

Also Published As

Publication number Publication date
JPH03142136A (ja) 1991-06-17
DE69010610D1 (de) 1994-08-18
EP0421527A1 (fr) 1991-04-10
EP0421527B1 (fr) 1994-07-13
KR0154513B1 (ko) 1998-12-15
DE69010610T2 (de) 1995-02-23
JP3016088B2 (ja) 2000-03-06
KR910008528A (ko) 1991-05-31
US5120034A (en) 1992-06-09

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BV The patent application has lapsed