Ramesham et al., 2009 - Google Patents
Review of vacuum packaging and maintenance of MEMS and the use of getters thereinRamesham et al., 2009
- Document ID
- 3847374549905324901
- Author
- Ramesham R
- Kullberg R
- Publication year
- Publication venue
- Journal of Micro/Nanolithography, MEMS and MOEMS
External Links
Snippet
Key types of microelectromechanical systems (MEMS) sensors need vacuum or other controlled ambients in order to operate properly. Examples include MEMS infrared sensors and sensitive MEMS gyros. Steps to attain and maintain the vacuum ambient include:(i) …
- 238000009461 vacuum packaging 0 title description 6
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