Kim et al., 2013 - Google Patents
An ultra-low voltage MEMS switch using stiction-recovery actuationKim et al., 2013
- Document ID
- 3596609090770960249
- Author
- Kim M
- Song Y
- Yang H
- Yoon J
- Publication year
- Publication venue
- Journal of Micromechanics and Microengineering
External Links
Snippet
In this paper, an ultra-low voltage microelectromechanical system (MEMS) switch is proposed, modeled and demonstrated. Through the introduction of torsional hinges, stiction- recovery actuation was possible, and thus irreversible stiction could be overcome. Owing to …
- 238000011084 recovery 0 title abstract description 14
Classifications
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
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