Preetham et al., 2017 - Google Patents
A curved electrode electrostatic actuator designed for large displacement and force in an underwater environmentPreetham et al., 2017
- Document ID
- 13230187443250852165
- Author
- Preetham B
- Lake M
- Hoelzle D
- Publication year
- Publication venue
- Journal of Micromechanics and Microengineering
External Links
Snippet
There is a need for the development of large displacement (O (10− 6) m) and force (O (10− 6) N) electrostatic actuators with low actuation voltages (<±8 V) for underwater bio-MEMS applications. In this paper, we present the design, fabrication, and characterization of a …
- 238000006073 displacement reaction 0 title abstract description 45
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