Huang, 2004 - Google Patents
Combining Ar ion milling with FIB lift‐out techniques to prepare high quality site‐specific TEM samplesHuang, 2004
- Document ID
- 2855344334579244436
- Author
- Huang Z
- Publication year
- Publication venue
- Journal of Microscopy
External Links
Snippet
Focused ion beam (FIB) techniques can prepare site‐specific transmission electron microscopy (TEM) cross‐section samples very quickly but they suffer from beam damage by the high energy Ga+ ion beam. An amorphous layer about 20–30 nm thick on each side of …
- 238000000034 method 0 title abstract description 16
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